Raster scan

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H01J2237/30488

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/30488Raster scan

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for raster scanning a surface of an object usin...
- Patent number 11,504,798
- Issue date Nov 22, 2022
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Image acquisition method and electron microscope
- Patent number 11,456,151
- Issue date Sep 27, 2022
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing data generation method, computer-readable recording medium...
- Patent number 10,971,331
- Issue date Apr 6, 2021
- NuFlare Technology, Inc.
- Shinji Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planarization, densification, and exfoliation of porous materials b...
- Patent number 10,896,804
- Issue date Jan 19, 2021
- Lawrence Livermore National Security, LLC
- Sergei Kucheyev
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Multiple charged particle beam writing apparatus, and multiple char...
- Patent number 10,607,812
- Issue date Mar 31, 2020
- NuFlare Technology, Inc.
- Hideo Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for raster scanning a surface of an object usin...
- Patent number 10,279,419
- Issue date May 7, 2019
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 10,217,607
- Issue date Feb 26, 2019
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing and/or for observing an object, and particle...
- Patent number 9,685,300
- Issue date Jun 20, 2017
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method and ion implantation apparatus
- Patent number 9,646,837
- Issue date May 9, 2017
- SEN CORPORATION
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for E-beam lithography with multi-exposure
- Patent number 9,305,799
- Issue date Apr 5, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Shiang Chen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for processing and/or for observing an object, and particle...
- Patent number 9,251,997
- Issue date Feb 2, 2016
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning a surface of an object using a pa...
- Patent number 9,136,090
- Issue date Sep 15, 2015
- Carl Zeiss Microscopy GmbH
- Ralph Pulwey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and ion implant method thereof
- Patent number 8,987,691
- Issue date Mar 24, 2015
- Advanced Ion Beam Technology, Inc.
- Zhimin Wan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sample preparation method and apparatus
- Patent number 8,916,839
- Issue date Dec 23, 2014
- Hitachi High-Tech Science Corporation
- Hidekazu Suzuki
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for E-beam lithography with multi-exposure
- Patent number 8,835,082
- Issue date Sep 16, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Shiang Chen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning charged particle beams
- Patent number 8,304,750
- Issue date Nov 6, 2012
- Carl Zeiss NTS GmbH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for multi-pass correction of substrate defects
- Patent number 8,293,126
- Issue date Oct 23, 2012
- TEL Epion Inc.
- Ruairidh MacCrimmon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter having combined hybrid and double mechanical scan arc...
- Patent number 8,124,947
- Issue date Feb 28, 2012
- Axcelis Technologies. Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for counting secondary particles
- Patent number 8,093,567
- Issue date Jan 10, 2012
- Fibics Incorporated
- Ken Guillaume Lagarec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam writing apparatus and charged-particle beam w...
- Patent number 7,893,411
- Issue date Feb 22, 2011
- Nuflare Technology, Inc.
- Rieko Nishimura
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion implantation method
- Patent number 7,683,350
- Issue date Mar 23, 2010
- Advanced Ion Beam Technology, Inc.
- Cheng-Hui Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for improving ion implantation throughput and dose unifor...
- Patent number 7,683,347
- Issue date Mar 23, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a MRAM with non-orthogonal wiring
- Patent number 7,614,027
- Issue date Nov 3, 2009
- Micron Technology, Inc.
- Paul A. Farrar
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of implanting a substrate and an ion implanter for performin...
- Patent number 7,611,975
- Issue date Nov 3, 2009
- Applied Materials, Inc.
- Adrian Murrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter having combined hybrid and double mechanical scan arc...
- Patent number 7,586,111
- Issue date Sep 8, 2009
- Axcelis Technologies, Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Throughput enhancement for scanned beam ion implanters
- Patent number 7,566,886
- Issue date Jul 28, 2009
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Non-uniform ion implantation
- Patent number 7,544,957
- Issue date Jun 9, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Walther
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus and sample section forming and thin-piec...
- Patent number 7,531,796
- Issue date May 12, 2009
- SII NanoTechnology Inc.
- Junichi Tashiro
- G01 - MEASURING TESTING
Information Patent Grant
Scan pattern for an ion implanter
- Patent number 7,498,590
- Issue date Mar 3, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Joseph P. Dzengeleski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam irradiation method and charged particle beam...
- Patent number 7,488,961
- Issue date Feb 10, 2009
- SII NanoTechnology Inc.
- Masashi Muramatsu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...
- Publication number 20250006459
- Publication date Jan 2, 2025
- Carl Zeiss MultiSEM GmbH
- Daniel Weiss
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPENSATION RASTER SCANNING
- Publication number 20240395492
- Publication date Nov 28, 2024
- Carl Zeiss SMT GMBH
- Daniel Rhinow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ANALYZING DISTURBING INFLUENCES IN A MULTI-BEAM PARTICLE...
- Publication number 20240203684
- Publication date Jun 20, 2024
- Carl Zeiss MultiSEM GmbH
- David Disterheft
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
- Publication number 20240055223
- Publication date Feb 15, 2024
- KIOXIA Corporation
- Chihiro IDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
- Publication number 20230260749
- Publication date Aug 17, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...
- Publication number 20230081844
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Thorsten Hofmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Acquisition Method and Electron Microscope
- Publication number 20220020561
- Publication date Jan 20, 2022
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM...
- Publication number 20200051782
- Publication date Feb 13, 2020
- NuFlare Technology, Inc.
- Shinji SAKAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR RASTER SCANNING A SURFACE OF AN OBJECT USIN...
- Publication number 20190270159
- Publication date Sep 5, 2019
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...
- Publication number 20190198290
- Publication date Jun 27, 2019
- NuFlare Technology, Inc.
- Hideo INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANARIZATION, DENSIFICATION, AND EXFOLIATION OF POROUS MATERIALS B...
- Publication number 20190035602
- Publication date Jan 31, 2019
- LAWRENCE LIVERMORE NATIONAL SECURITY, LLC
- Sergei KUCHEYEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20180068829
- Publication date Mar 8, 2018
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for E-Beam Lithography with Multi-Exposure
- Publication number 20140367588
- Publication date Dec 18, 2014
- Pei-Shiang Chen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and System for E-Beam Lithography with Multi-Exposure
- Publication number 20140038107
- Publication date Feb 6, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Shiang Chen
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method and Apparatus for Scanning a Surface of an Object Using a Pa...
- Publication number 20130320226
- Publication date Dec 5, 2013
- CARL ZEISS MICROSCOPY GMBH
- Ralph Pulwey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PREPARATION METHOD AND APPARATUS
- Publication number 20130214458
- Publication date Aug 22, 2013
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Hidekazu SUZUKI
- G01 - MEASURING TESTING
Information Patent Application
DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130199719
- Publication date Aug 8, 2013
- Canon Kabushiki Kaisha
- Go TSUCHIYA
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods and Systems for Raster Scanning a Surface of an Object Usin...
- Publication number 20130180962
- Publication date Jul 18, 2013
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS
- Publication number 20130157390
- Publication date Jun 20, 2013
- SEN Corporation
- Shiro NINOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANT METHOD THEREOF
- Publication number 20130130484
- Publication date May 23, 2013
- ADVANCED ION BEAM TECHNOLOGY, INC.
- ZHIMIN WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND IMPLANTER FOR IMPLANTING A WORKPIECE
- Publication number 20110278478
- Publication date Nov 17, 2011
- Causon Ko-Chuan JEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Throughput Enhancement for Scanned Beam Ion Implanters
- Publication number 20110272567
- Publication date Nov 10, 2011
- Axcelis Technologies, Inc.
- Edward C. Eisner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANT METHOD THEREOF
- Publication number 20110049383
- Publication date Mar 3, 2011
- ADVANCED ION BEAM TECHNOLOGY, INC.
- ZHIMIN WAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCANNING CHARGED PARTICLE BEAMS
- Publication number 20100294930
- Publication date Nov 25, 2010
- CARL ZEISS NTS GMBH
- Dirk Preikszas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR COUNTING SECONDARY PARTICLES
- Publication number 20100084568
- Publication date Apr 8, 2010
- FIBICS INCORPORATED
- Ken Guillaume Lagarec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implanter Having Combined Hybrid and Double Mechanical Scan Arc...
- Publication number 20090321625
- Publication date Dec 31, 2009
- Axcelis Technologies, Inc.
- Manny Sieradzki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD
- Publication number 20090230329
- Publication date Sep 17, 2009
- Advanced Ion Beam Technology, Inc.
- Cheng-Hui Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM WRITING APPARATUS AND CHARGED-PARTICLE BEAM W...
- Publication number 20090084990
- Publication date Apr 2, 2009
- NuFlare Technology, Inc.
- Rieko NISHIMURA
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR MULTI-PASS CORRECTION OF SUBSTRATE DEFECTS
- Publication number 20090084759
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Ruairidh MacCRIMMON
- H01 - BASIC ELECTRIC ELEMENTS

Raster scan

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and systems for raster scanning a surface of an object usin...

Image acquisition method and electron microscope

Writing data generation method, computer-readable recording medium...

Planarization, densification, and exfoliation of porous materials b...

Multiple charged particle beam writing apparatus, and multiple char...

Methods and systems for raster scanning a surface of an object usin...

Ion implantation apparatus and ion implantation method

Method for processing and/or for observing an object, and particle...

Ion implantation method and ion implantation apparatus

Method and system for E-beam lithography with multi-exposure

Method for processing and/or for observing an object, and particle...

Method and apparatus for scanning a surface of an object using a pa...

Ion implanter and ion implant method thereof

Sample preparation method and apparatus

Method and system for E-beam lithography with multi-exposure

Scanning charged particle beams

Method and system for multi-pass correction of substrate defects

Ion implanter having combined hybrid and double mechanical scan arc...

Method and system for counting secondary particles

Charged-particle beam writing apparatus and charged-particle beam w...

Ion implantation method

Technique for improving ion implantation throughput and dose unifor...

Methods for forming a MRAM with non-orthogonal wiring

Method of implanting a substrate and an ion implanter for performin...

Ion implanter having combined hybrid and double mechanical scan arc...

Throughput enhancement for scanned beam ion implanters

Non-uniform ion implantation

Focused ion beam apparatus and sample section forming and thin-piec...

Scan pattern for an ion implanter

Charged particle beam irradiation method and charged particle beam...

Patents Applicationslast 30 patents

METHOD FOR DETERMINING A DISTORTION-CORRECTED POSITION OF A FEATURE...

COMPENSATION RASTER SCANNING

METHOD FOR ANALYZING DISTURBING INFLUENCES IN A MULTI-BEAM PARTICLE...

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

INSPECTION DEVICE AND INSPECTION METHOD

OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...

METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROL...

Image Acquisition Method and Electron Microscope

WRITING DATA GENERATION METHOD, COMPUTER-READABLE RECORDING MEDIUM...

METHODS AND SYSTEMS FOR RASTER SCANNING A SURFACE OF AN OBJECT USIN...

MULTIPLE CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTIPLE CHAR...

PLANARIZATION, DENSIFICATION, AND EXFOLIATION OF POROUS MATERIALS B...

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Method and System for E-Beam Lithography with Multi-Exposure

Method and System for E-Beam Lithography with Multi-Exposure

Method and Apparatus for Scanning a Surface of an Object Using a Pa...

SAMPLE PREPARATION METHOD AND APPARATUS

DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

Methods and Systems for Raster Scanning a Surface of an Object Usin...

ION IMPLANTATION METHOD AND ION IMPLANTATION APPARATUS

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

METHOD AND IMPLANTER FOR IMPLANTING A WORKPIECE

Throughput Enhancement for Scanned Beam Ion Implanters

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

SCANNING CHARGED PARTICLE BEAMS

METHOD AND SYSTEM FOR COUNTING SECONDARY PARTICLES

Ion Implanter Having Combined Hybrid and Double Mechanical Scan Arc...

ION IMPLANTATION METHOD

CHARGED-PARTICLE BEAM WRITING APPARATUS AND CHARGED-PARTICLE BEAM W...

METHOD AND SYSTEM FOR MULTI-PASS CORRECTION OF SUBSTRATE DEFECTS