Reaction chambers Selection of material therefor

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CPC
C30B31/10

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

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C30B31/10Reaction chambers Selection of material therefor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for depositing low temperature phosphorous-doped silicon
- Patent number 11,781,243
- Issue date Oct 10, 2023
- ASM IP Holding B.V.
- Rami Khazaka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for the manufacture of synthetic diamonds using different...
- Patent number 11,623,194
- Issue date Apr 11, 2023
- Gull Corporation Ltd
- Gary Gibson
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of decomposing quartz sample, method of analyzing metal cont...
- Patent number 11,421,342
- Issue date Aug 23, 2022
- Sumco Corporation
- Hirokazu Kato
- C30 - CRYSTAL GROWTH
Information Patent Grant
Device for doping, deposition or oxidation of semiconductor materia...
- Patent number 8,460,468
- Issue date Jun 11, 2013
- Centrotherm Photovoltaics AG
- Alexander Piechulla
- C30 - CRYSTAL GROWTH
Information Patent Grant
Diffusion tube, dopant source for a diffusion process and diffusion...
- Patent number 7,963,247
- Issue date Jun 21, 2011
- Samsung Electronics Co., Ltd.
- Gi-bum Kim
- C30 - CRYSTAL GROWTH
Information Patent Grant
Processing apparatus
- Patent number 7,674,336
- Issue date Mar 9, 2010
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid thermal processing apparatus and methods
- Patent number 7,618,830
- Issue date Nov 17, 2009
- Dongbu Electronics Co., Ltd.
- Jae-Won Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing
- Patent number 7,589,025
- Issue date Sep 15, 2009
- Rohm and Haas Electronic Materials LLC
- Jitendra S. Goela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffusion system
- Patent number 7,452,423
- Issue date Nov 18, 2008
- Samsung Electronics Co., Ltd.
- Jun-young Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor chamber
- Patent number 7,169,233
- Issue date Jan 30, 2007
- ASM America, Inc.
- Eric R. Wood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Staggered ribs on process chamber to reduce thermal effects
- Patent number 7,108,753
- Issue date Sep 19, 2006
- ASM America, Inc.
- Eric R. Wood
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of and auxiliary cleaner for use in cleaning a diffusion fur...
- Patent number 7,059,848
- Issue date Jun 13, 2006
- Samsung Electronics Co., Ltd.
- Jung-Nam Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment apparatus and method for processing substrates
- Patent number 6,737,613
- Issue date May 18, 2004
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for holding a quartz furnace
- Patent number 6,538,237
- Issue date Mar 25, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ming-Hsun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for high-temperature and high-pressure treatment
- Patent number 6,491,518
- Issue date Dec 10, 2002
- Kabushiki Kaisha Kobe Seiko Sho
- Takao Fujikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for the vacuum-tight connecting of two bodies of different m...
- Patent number 6,412,821
- Issue date Jul 2, 2002
- Unaxis Balzers Aktiengesellschaft
- Winfried Schulmann
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus, heat treatment process employing the same...
- Patent number 6,407,367
- Issue date Jun 18, 2002
- Canon Kabushiki Kaisha
- Masataka Ito
- C30 - CRYSTAL GROWTH
Information Patent Grant
Process for making opaque quartz glass and opaque component made ac...
- Patent number 6,381,987
- Issue date May 7, 2002
- Heraeus Quarzglas GmbH & Co. KG
- Waltraud Werdecker
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for reducing particle contamination on wafers
- Patent number 6,334,404
- Issue date Jan 1, 2002
- United Microelectronics Corp.
- Tien-Jui Liu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cooled window
- Patent number 6,284,051
- Issue date Sep 4, 2001
- AG Associates (Israel) Ltd.
- Igor Fidelman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Enveloping device and vertical heat-treating apparatus for semicond...
- Patent number 6,283,175
- Issue date Sep 4, 2001
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cleaning process for rapid thermal processing system
- Patent number 6,236,023
- Issue date May 22, 2001
- Mattson Technology, Inc.
- Stephen E. Savas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid heating and cooling vacuum oven
- Patent number 6,198,075
- Issue date Mar 6, 2001
- Yield Engineering Systems, Inc.
- William A. Moffat
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor furnace processing vessel base
- Patent number 6,164,963
- Issue date Dec 26, 2000
- Robert A. Weaver
- C30 - CRYSTAL GROWTH
Information Patent Grant
Light-impermeable, high purity silicon carbide material, a light sh...
- Patent number 6,147,020
- Issue date Nov 14, 2000
- NGK Insulators, Ltd.
- Masao Nishioka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Enveloping device and vertical heat-treating apparatus for semicond...
- Patent number 6,142,773
- Issue date Nov 7, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Water free furnace tube with self-heating quartz plug
- Patent number 6,134,385
- Issue date Oct 17, 2000
- United Microelectronics Corp.
- Chun-Huang Chen
- C30 - CRYSTAL GROWTH
Information Patent Grant
Dimpled thermal processing furnace and method for processing semico...
- Patent number 6,120,285
- Issue date Sep 19, 2000
- Micron Technology, Inc.
- Keith W. Smith
- C30 - CRYSTAL GROWTH
Information Patent Grant
Double wall reaction chamber glassware
- Patent number 6,101,844
- Issue date Aug 15, 2000
- Silcon Valley Group Thermal
- Jack D. Fowler
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus
- Patent number 6,042,372
- Issue date Mar 28, 2000
- Tokyo Electron Limited
- Kazunari Sakata
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHODS FOR THE MANUFACTURE OF SYNTHETIC DIAMONDS AND...
- Publication number 20230241568
- Publication date Aug 3, 2023
- GULL CORPORATION LTD
- Gary Gibson
- C30 - CRYSTAL GROWTH
Information Patent Application
WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...
- Publication number 20220148899
- Publication date May 12, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON
- Publication number 20210254238
- Publication date Aug 19, 2021
- ASM IP HOLDING B.V.
- Rami Khazaka
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF DECOMPOSING QUARTZ SAMPLE, METHOD OF ANALYZING METAL CONT...
- Publication number 20190368071
- Publication date Dec 5, 2019
- SUMCO CORPORATION
- Hirokazu KATO
- G01 - MEASURING TESTING
Information Patent Application
Controlled Doping Device For Single Crystal Semiconductor Material...
- Publication number 20140033968
- Publication date Feb 6, 2014
- MEMC ELECTRONIC MATERIALS SPA
- Armando Giannattasio
- C30 - CRYSTAL GROWTH
Information Patent Application
DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...
- Publication number 20130025539
- Publication date Jan 31, 2013
- Centrotherm Photovoltaics AG
- Alexander PIECHULLA
- C30 - CRYSTAL GROWTH
Information Patent Application
DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...
- Publication number 20080292430
- Publication date Nov 27, 2008
- Centrotherm Photovoltaics AG
- Alexander PIECHULLA
- C30 - CRYSTAL GROWTH
Information Patent Application
DIFFUSION TUBE, DOPANT SOURCE FOR A DIFFUSION PROCESS AND DIFFUSION...
- Publication number 20070272990
- Publication date Nov 29, 2007
- Samsung Electronics Co., Ltd.
- Gi-bum KIM
- C30 - CRYSTAL GROWTH
Information Patent Application
Semiconductor processing
- Publication number 20070128837
- Publication date Jun 7, 2007
- Rohm and Haas Electronic Materials L.L.C.
- Jitendra S. Goela
- C30 - CRYSTAL GROWTH
Information Patent Application
Processing apparatus
- Publication number 20070075086
- Publication date Apr 5, 2007
- Manabu Honma
- C30 - CRYSTAL GROWTH
Information Patent Application
Device for producing electroconductive passages in a semiconductor...
- Publication number 20060243385
- Publication date Nov 2, 2006
- HTM REETZ GMBH
- Frank Kudella
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD OF AND AUXILIARY CLEANER FOR USE IN CLEANING A DIFFUSION FUR...
- Publication number 20060084023
- Publication date Apr 20, 2006
- Jung-Nam Kim
- C30 - CRYSTAL GROWTH
Information Patent Application
Reactor chamber
- Publication number 20050109275
- Publication date May 26, 2005
- Eric R. Wood
- C30 - CRYSTAL GROWTH
Information Patent Application
Diffusion system
- Publication number 20050092244
- Publication date May 5, 2005
- Samsung Electronics Co., Ltd.
- Jun-young Kim
- C30 - CRYSTAL GROWTH
Information Patent Application
Staggered ribs on process chamber to reduce thermal effects
- Publication number 20050092242
- Publication date May 5, 2005
- Eric R. Wood
- C30 - CRYSTAL GROWTH
Information Patent Application
Rapid thermal processing apparatus and methods
- Publication number 20040255860
- Publication date Dec 23, 2004
- Jae-Won Han
- C30 - CRYSTAL GROWTH
Information Patent Application
Diffusion furnace used for manufacturing integrated circuits and me...
- Publication number 20040154537
- Publication date Aug 12, 2004
- Choung-Ku Chon
- C30 - CRYSTAL GROWTH
Information Patent Application
Fabricating a semiconductor device
- Publication number 20030221623
- Publication date Dec 4, 2003
- Hitachi Kokusai Electric Inc.
- Nobuhito Shima
- C30 - CRYSTAL GROWTH
Information Patent Application
Heat treatment apparatus and method for processing substrates
- Publication number 20030183614
- Publication date Oct 2, 2003
- Hitachi Kokusai Electric Inc.
- Takatomo Yamaguchi
- C30 - CRYSTAL GROWTH
Information Patent Application
Quartz member for semiconductor manufacturing equipment and method...
- Publication number 20030000458
- Publication date Jan 2, 2003
- Yoshinori Marumo
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate processeing apparatus, substrate processing method and el...
- Publication number 20010029108
- Publication date Oct 11, 2001
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Reaction chambers Selection of material therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for depositing low temperature phosphorous-doped silicon

Apparatus for the manufacture of synthetic diamonds using different...

Method of decomposing quartz sample, method of analyzing metal cont...

Device for doping, deposition or oxidation of semiconductor materia...

Diffusion tube, dopant source for a diffusion process and diffusion...

Processing apparatus

Rapid thermal processing apparatus and methods

Semiconductor processing

Diffusion system

Reactor chamber

Staggered ribs on process chamber to reduce thermal effects

Method of and auxiliary cleaner for use in cleaning a diffusion fur...

Heat treatment apparatus and method for processing substrates

Apparatus for holding a quartz furnace

Apparatus for high-temperature and high-pressure treatment

Device for the vacuum-tight connecting of two bodies of different m...

Heat treatment apparatus, heat treatment process employing the same...

Process for making opaque quartz glass and opaque component made ac...

Method and apparatus for reducing particle contamination on wafers

Cooled window

Enveloping device and vertical heat-treating apparatus for semicond...

Cleaning process for rapid thermal processing system

Rapid heating and cooling vacuum oven

Semiconductor furnace processing vessel base

Light-impermeable, high purity silicon carbide material, a light sh...

Enveloping device and vertical heat-treating apparatus for semicond...

Water free furnace tube with self-heating quartz plug

Dimpled thermal processing furnace and method for processing semico...

Double wall reaction chamber glassware

Heat treatment apparatus

Patents Applicationslast 30 patents

APPARATUS AND METHODS FOR THE MANUFACTURE OF SYNTHETIC DIAMONDS AND...

WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...

METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON

METHOD OF DECOMPOSING QUARTZ SAMPLE, METHOD OF ANALYZING METAL CONT...

Controlled Doping Device For Single Crystal Semiconductor Material...

DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...

DEVICE FOR DOPING, DEPOSITION OR OXIDATION OF SEMICONDUCTOR MATERIA...

DIFFUSION TUBE, DOPANT SOURCE FOR A DIFFUSION PROCESS AND DIFFUSION...

Semiconductor processing

Processing apparatus

Device for producing electroconductive passages in a semiconductor...

METHOD OF AND AUXILIARY CLEANER FOR USE IN CLEANING A DIFFUSION FUR...

Reactor chamber

Diffusion system

Staggered ribs on process chamber to reduce thermal effects

Rapid thermal processing apparatus and methods

Diffusion furnace used for manufacturing integrated circuits and me...

Fabricating a semiconductor device

Heat treatment apparatus and method for processing substrates

Quartz member for semiconductor manufacturing equipment and method...

Substrate processeing apparatus, substrate processing method and el...