Reaction force control means

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G03F7/70766

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/70766Reaction force control means

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Patents Grantslast 30 patents

Information Patent Grant
Elastic guiding device, positioning device, blade and lithographic...
- Patent number 11,421,729
- Issue date Aug 23, 2022
- ASML Netherlands B.V.
- Erwin Andreas Bernardus Mulder
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Imprint device and method for manufacturing article
- Patent number 11,209,731
- Issue date Dec 28, 2021
- Canon Kabushiki Kaisha
- Hirotoshi Torii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device, stiffness reduction device and electron beam ap...
- Patent number 11,131,937
- Issue date Sep 28, 2021
- ASML Netherlands B.V.
- Michaël Johannes Christiaan Ronde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning system and lithographic apparatus
- Patent number 11,003,095
- Issue date May 11, 2021
- ASML Netherlands B.V.
- Krijn Frederik Bustraan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device, lithographic apparatus, method for compensating...
- Patent number 10,962,890
- Issue date Mar 30, 2021
- ASML Netherlands B.V.
- Wilhelmus Franciscus Johannes Simons
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage system and metrology tool
- Patent number 10,809,634
- Issue date Oct 20, 2020
- ASML Netherlands B.V.
- Peter Paul Hempenius
- G01 - MEASURING TESTING
Information Patent Grant
Vibration isolation device, lithographic apparatus and method to tu...
- Patent number 10,782,620
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Alexander Petrus Josephus Van Lankvelt
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Reaction force diversion mechanism, motor device and photolithograp...
- Patent number 10,691,025
- Issue date Jun 23, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Baoliang Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,649,347
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Michael Johannes Christiaan Ronde
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chuck-driving device and substrate-processing apparatus
- Patent number 10,635,006
- Issue date Apr 28, 2020
- Samsung Electronics Co., Ltd.
- Sang-joon Hong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 10,599,050
- Issue date Mar 24, 2020
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography with in...
- Patent number 10,466,598
- Issue date Nov 5, 2019
- Carl Zeiss SMT GmbH
- Alireza Akbarinia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,409,175
- Issue date Sep 10, 2019
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Moving platform device, exposure device and lithography machine
- Patent number 10,353,297
- Issue date Jul 16, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Lili Ge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device, lithographic apparatus and device manufacturing...
- Patent number 10,310,392
- Issue date Jun 4, 2019
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration-assisted positioning stage
- Patent number 10,281,829
- Issue date May 7, 2019
- The Regents of the University of Michigan
- Chinedum E. Okwudire
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device positioning system and method for semiconducto...
- Patent number 10,192,773
- Issue date Jan 29, 2019
- Nexperia B.V.
- Thijs Kniknie
- G05 - CONTROLLING REGULATING
Information Patent Grant
Stage device, exposure apparatus, and method of manufacturing devices
- Patent number 10,120,288
- Issue date Nov 6, 2018
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for actuating an element
- Patent number 10,025,203
- Issue date Jul 17, 2018
- Carl Zeiss SMT GmbH
- Gerald Rothenhoefer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Silicon wafer edge protection device
- Patent number 9,964,864
- Issue date May 8, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xu Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, positioning system for use in a lithographi...
- Patent number 9,958,793
- Issue date May 1, 2018
- ASML Netherlands B.V.
- Roan Marinus Westerhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus comprising an actuator, and method for prote...
- Patent number 9,921,494
- Issue date Mar 20, 2018
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposing method, method for manufacturing devic...
- Patent number 9,915,882
- Issue date Mar 13, 2018
- Nikon Corporation
- Shinji Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coarse motion and fine motion integrated reticle stage driven by pl...
- Patent number 9,904,183
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography device with eddy-current brake
- Patent number 9,887,613
- Issue date Feb 6, 2018
- Carl Zeiss SMT GmbH
- Alexander Vogler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetically suspended coarse motion and fine motion integrated ret...
- Patent number 9,791,789
- Issue date Oct 17, 2017
- Tsinghua University
- Ming Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reaction force counteracting device for a metrology tool
- Patent number 9,768,722
- Issue date Sep 19, 2017
- Hiwin Mikrosystem Corp.
- Yun-Wei Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Linear Stage for reflective electron beam lithography
- Patent number 9,690,213
- Issue date Jun 27, 2017
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Balance mass system shared by workpiece table and mask table, and l...
- Patent number 9,588,444
- Issue date Mar 7, 2017
- Shanghai Micro Electronics Equipment Co., Ltd.
- Tianming Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for limiting counter-mass trim-motor force and stage assemb...
- Patent number 9,529,353
- Issue date Dec 27, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING
- Publication number 20240419088
- Publication date Dec 19, 2024
- ASML NETHERLANDS B.V.
- Akshay Dipakkumar HARLALKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD
- Publication number 20240168395
- Publication date May 23, 2024
- ORBOTECH LTD.
- Tal Goichman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20240085806
- Publication date Mar 14, 2024
- Canon Kabushiki Kaisha
- YUICHI OZAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELASTIC GUIDING DEVICE, POSITIONING DEVICE, BLADE AND LITHOGRAPHIC...
- Publication number 20220082126
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Erwin Andreas Bernardus MULDER
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Positioning Device, Lithographic Apparatus, Method for Compensating...
- Publication number 20200363732
- Publication date Nov 19, 2020
- ASML NETHERLANDS B.V.
- Wilhelmus Franciscus Johannes SIMONS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING DEVICE, STIFFNESS REDUCTION DEVICE AND ELECTRON BEAM AP...
- Publication number 20200201196
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Michaël Johannes Christiaan RONDE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHUCK-DRIVING DEVICE AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20200089123
- Publication date Mar 19, 2020
- Samsung Electronics Co., Ltd.
- SANG-JOON HONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...
- Publication number 20190371643
- Publication date Dec 5, 2019
- Nikon Corporation
- Yasuo AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20190219932
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Krijn Frederik BUSTRAAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190129317
- Publication date May 2, 2019
- ASML NETHERLANDS B.V.
- Michael RONDE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVING PLATFORM DEVICE, EXPOSURE DEVICE AND LITHOGRAPHY MACHINE
- Publication number 20190025712
- Publication date Jan 24, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Lili GE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage System and Metrology Tool
- Publication number 20180267410
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Peter Paul HEMPENIUS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...
- Publication number 20180196359
- Publication date Jul 12, 2018
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...
- Publication number 20170115580
- Publication date Apr 27, 2017
- TSINGHUA UNIVERSITY
- Yu ZHU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...
- Publication number 20170060002
- Publication date Mar 2, 2017
- Nikon Corporation
- Shinji SATO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND ARRANGEMENT FOR ACTUATING AN ELEMENT
- Publication number 20170023869
- Publication date Jan 26, 2017
- Carl Zeiss SMT GMBH
- Gerald Rothenhoefer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Balance Mass System Shared by Workpiece Table and Mask Table, and L...
- Publication number 20150286154
- Publication date Oct 8, 2015
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Tianming Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF...
- Publication number 20150268566
- Publication date Sep 24, 2015
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE
- Publication number 20140346909
- Publication date Nov 27, 2014
- Alexander Vogler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...
- Publication number 20140322655
- Publication date Oct 30, 2014
- Canon Kabushiki Kaisha
- Toshihiko Nishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT FOR ACTUATING AN ELEMENT IN A PROJECTION EXPOSURE APPAR...
- Publication number 20140016109
- Publication date Jan 16, 2014
- Markus Hauf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Linear Stage for Reflective Electron Beam Lithography
- Publication number 20130293865
- Publication date Nov 7, 2013
- KLA-Tencor Corporation
- Upendra Ummethala
- B82 - NANO-TECHNOLOGY
Information Patent Application
REACTION ASSEMBLY FOR A STAGE ASSEMBLY
- Publication number 20130088703
- Publication date Apr 11, 2013
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20130044306
- Publication date Feb 21, 2013
- Canon Kabushiki Kaisha
- Keiji EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASUREMENT STAGE WITH TUBE CARRIER
- Publication number 20120325027
- Publication date Dec 27, 2012
- Nikon Corporation
- Alexander Cooper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Positioning System, Lithographic Apparatus and Device Manufacturing...
- Publication number 20120147355
- Publication date Jun 14, 2012
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMB...
- Publication number 20120069316
- Publication date Mar 22, 2012
- NIKON CORPORATION
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
Inspection Method and Apparatus
- Publication number 20110176123
- Publication date Jul 21, 2011
- ASML Netherlands B.V.
- Olav Seijger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...
- Publication number 20110141449
- Publication date Jun 16, 2011
- ASML NETHERLANDS B.V.
- Olav Seijger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110085180
- Publication date Apr 14, 2011
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria Beerens
- G01 - MEASURING TESTING

Reaction force control means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Elastic guiding device, positioning device, blade and lithographic...

Imprint device and method for manufacturing article

Positioning device, stiffness reduction device and electron beam ap...

Positioning system and lithographic apparatus

Positioning device, lithographic apparatus, method for compensating...

Stage system and metrology tool

Vibration isolation device, lithographic apparatus and method to tu...

Reaction force diversion mechanism, motor device and photolithograp...

Lithographic apparatus and device manufacturing method

Chuck-driving device and substrate-processing apparatus

Exposure apparatus, exposing method, method for manufacturing devic...

Projection exposure apparatus for semiconductor lithography with in...

Lithographic apparatus and device manufacturing method

Moving platform device, exposure device and lithography machine

Positioning device, lithographic apparatus and device manufacturing...

Vibration-assisted positioning stage

Semiconductor device positioning system and method for semiconducto...

Stage device, exposure apparatus, and method of manufacturing devices

Method and arrangement for actuating an element

Silicon wafer edge protection device

Lithographic apparatus, positioning system for use in a lithographi...

Lithographic apparatus comprising an actuator, and method for prote...

Exposure apparatus, exposing method, method for manufacturing devic...

Coarse motion and fine motion integrated reticle stage driven by pl...

Lithography device with eddy-current brake

Magnetically suspended coarse motion and fine motion integrated ret...

Reaction force counteracting device for a metrology tool

Linear Stage for reflective electron beam lithography

Balance mass system shared by workpiece table and mask table, and l...

Methods for limiting counter-mass trim-motor force and stage assemb...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING

VERTICAL MOTION AXIS FOR IMAGING OPTICAL HEAD

STAGE APPARATUS, PATTERN FORMING APPARATUS, AND METHOD FOR MANUFACT...

ELASTIC GUIDING DEVICE, POSITIONING DEVICE, BLADE AND LITHOGRAPHIC...

Positioning Device, Lithographic Apparatus, Method for Compensating...

POSITIONING DEVICE, STIFFNESS REDUCTION DEVICE AND ELECTRON BEAM AP...

CHUCK-DRIVING DEVICE AND SUBSTRATE-PROCESSING APPARATUS

MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE...

POSITIONING SYSTEM AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

MOVING PLATFORM DEVICE, EXPOSURE DEVICE AND LITHOGRAPHY MACHINE

Stage System and Metrology Tool

EXPOSURE APPARATUS, EXPOSING METHOD, METHOD FOR MANUFACTURING DEVIC...

COARSE MOTION AND FINE MOTION INTEGRATED RETICLE STAGE DRIVEN BY PL...

EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE MANUFACTURING METHOD, P...

METHOD AND ARRANGEMENT FOR ACTUATING AN ELEMENT

Balance Mass System Shared by Workpiece Table and Mask Table, and L...

VIBRATION REDUCTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF...

LITHOGRAPHY DEVICE WITH EDDY-CURRENT BRAKE

STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING...

ARRANGEMENT FOR ACTUATING AN ELEMENT IN A PROJECTION EXPOSURE APPAR...

Linear Stage for Reflective Electron Beam Lithography

REACTION ASSEMBLY FOR A STAGE ASSEMBLY

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE

MEASUREMENT STAGE WITH TUBE CARRIER

Positioning System, Lithographic Apparatus and Device Manufacturing...

METHODS FOR LIMITING COUNTER-MASS TRIM-MOTOR FORCE AND STAGE ASSEMB...

Inspection Method and Apparatus

Inspection Method and Apparatus, Lithographic Apparatus, Lithograph...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD