Recirculation of reactive gases

Industry

CPC
C23C16/45593

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45593Recirculation of reactive gases

Industries

Patents Grantslast 30 patents

Information Patent Grant
Facility for treating the surface of a moving substrate in a contro...
- Patent number 12,125,681
- Issue date Oct 22, 2024
- Coating Plasma Innovation
- Julien Vallade
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen recycle system and hydrogen recycle method
- Patent number 12,024,427
- Issue date Jul 2, 2024
- National University Corporation Tokai National Higher Education and Research...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 12,014,922
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tsai-Fu Hsiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for the continuous vapor deposition of silicon...
- Patent number 11,862,462
- Issue date Jan 2, 2024
- NexWafe GmbH
- Stefan Reber
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for densifying composite matertals
- Patent number 11,674,219
- Issue date Jun 13, 2023
- SAFRAN CERAMICS
- Jean-François Daniel René Potin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for chemical vapor infiltration and densification of porous...
- Patent number 11,639,545
- Issue date May 2, 2023
- Goodrich Corporation
- Tod Policandriotes
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Silane recirculation for rapid carbon/silicon carbide or silicon ca...
- Patent number 11,255,015
- Issue date Feb 22, 2022
- Goodrich Corporation
- Gavin Charles Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing a thin film and a method therefor
- Patent number 11,244,822
- Issue date Feb 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Fu Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internally cooled multi-hole injectors for delivery of process chem...
- Patent number 11,225,716
- Issue date Jan 18, 2022
- Tokyo Electron Limited
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for supplying a precursor for an atomic layer dep...
- Patent number 11,053,584
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Bor-Chiuan Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dichlorosilane compensating control strategy for improved polycryst...
- Patent number 10,851,459
- Issue date Dec 1, 2020
- HEMLOCK SEMICONDUCTOR OPERATIONS LLC
- John Victor Bucci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silane recirculation for rapid carbon/silicon carbide or silicon ca...
- Patent number 10,683,572
- Issue date Jun 16, 2020
- Goodrich Corporation
- Gavin Charles Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for chemical vapor infiltration and densificati...
- Patent number 10,648,075
- Issue date May 12, 2020
- Goodrich Corporation
- Tod Policandriotes
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method to improve precursor utilization in pulsed atomic layer proc...
- Patent number 10,619,243
- Issue date Apr 14, 2020
- Triratna P. Muneshwar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing of polycrystalline silicon
- Patent number 10,475,646
- Issue date Nov 12, 2019
- OCI Company Ltd
- Chang Ryol Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus having a peripheral spiral gas curtain
- Patent number 10,458,019
- Issue date Oct 29, 2019
- Industrial Technology Research Institute
- Ching-Chiun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for supplying a precursor for an atomic layer dep...
- Patent number 10,443,127
- Issue date Oct 15, 2019
- Taiwan Semiconductor Manufacturing Company Limited
- Bor-Chiuan Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for rapid and efficient chemical vapor infiltration and dens...
- Patent number 9,938,618
- Issue date Apr 10, 2018
- Goodrich Corporation
- Tod J. Policandriotes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,695,511
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium trichloride injection scheme
- Patent number 9,481,943
- Issue date Nov 1, 2016
- Soitec
- Chantal Arena
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition device
- Patent number 9,404,180
- Issue date Aug 2, 2016
- Tokyo Electron Limited
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the chemical vapor infiltration of refractive substances
- Patent number 9,376,749
- Issue date Jun 28, 2016
- CVT GMBH & CO. KG
- Rainer Hegermann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD-Siemens monosilane reactor process with complete utilization of...
- Patent number 8,657,958
- Issue date Feb 25, 2014
- Savi Research, Inc.
- Vithal Revankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming apparatus
- Patent number 8,573,154
- Issue date Nov 5, 2013
- Honda Motor Co., Ltd.
- Shunichi Yorozuya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for recycling a gas used to deposit a semiconduct...
- Patent number 8,444,766
- Issue date May 21, 2013
- ThinSilicon Corporation
- Jason Michael Stephens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial reactor for mass production of wafers
- Patent number 8,435,349
- Issue date May 7, 2013
- Universidad Politecnica de Madrid
- Antonio Luque Lopez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Raw material supply device
- Patent number 8,382,071
- Issue date Feb 26, 2013
- Mitsui Engineering & Shipbuilding Co., Ltd.
- Nozomu Hattori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gallium trichloride injection scheme
- Patent number 8,323,407
- Issue date Dec 4, 2012
- Soitec
- Chantal Arena
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus and method of cleaning the CVD apparatus
- Patent number 8,277,560
- Issue date Oct 2, 2012
- National Institute of Advanced Industrial Science and Technology
- Katsuo Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and apparatus, and storage medium
- Patent number 8,268,396
- Issue date Sep 18, 2012
- Tokyo Electron Limited
- Hitoshi Itoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD
- Publication number 20240217811
- Publication date Jul 4, 2024
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shinji Kambara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device for Producing a SiC Solid Material
- Publication number 20240035201
- Publication date Feb 1, 2024
- Zadient Technologies SAS
- Ivo Crössmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DENSIFYING COMPOSITE MATERIALS
- Publication number 20230160056
- Publication date May 25, 2023
- SAFRAN CERAMICS
- Jean-François Daniel René POTIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR MANUFACTURING A THIN FILM AND A METHOD THEREFOR
- Publication number 20220181143
- Publication date Jun 9, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tsai-Fu HSIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hydrogen Recycle System and Hydrogen Recycle Method
- Publication number 20210238034
- Publication date Aug 5, 2021
- NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
- Shinji Kambara
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHOD AND APPARATUS FOR THE CONTINUOUS VAPOR DEPOSITION OF SILICON...
- Publication number 20210202237
- Publication date Jul 1, 2021
- NexWage GmbH
- Stefan REBER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD
- Publication number 20210164100
- Publication date Jun 3, 2021
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILANE RECIRCULATION FOR RAPID CARBON/SILICON CARBIDE OR SILICON CA...
- Publication number 20200263302
- Publication date Aug 20, 2020
- GOODRICH CORPORATION
- Gavin Charles Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR CHEMICAL VAPOR INFILTRATION AND DENSIFICATI...
- Publication number 20200232092
- Publication date Jul 23, 2020
- GOODRICH CORPORATION
- Tod POLICANDRIOTES
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SILANE RECIRCULATION FOR RAPID CARBON/SILICON CARBIDE OR SILICON CA...
- Publication number 20200115799
- Publication date Apr 16, 2020
- GOODRICH CORPORATION
- Gavin Charles Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Supplying a Precursor for an Atomic Layer Dep...
- Publication number 20200040450
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- BOR-CHIUAN HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACILITY FOR TREATING THE SURFACE OF A MOVING SUBSTRATE IN A CONTRO...
- Publication number 20190259576
- Publication date Aug 22, 2019
- COATING PLASMA INNOVATION
- Julien Vallade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING APPARATUS FOR CONTAINERS
- Publication number 20180170801
- Publication date Jun 21, 2018
- Arkema B.V.
- Oliver Meurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PERFORMING SELENIZATION AND SULFURIZATION PROCESS ON...
- Publication number 20180127875
- Publication date May 10, 2018
- NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
- WEN-CHUEH PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO IMPROVE PRECURSOR UTILIZATION IN PULSED ATOMIC LAYER PROC...
- Publication number 20180023195
- Publication date Jan 25, 2018
- Triratna P. Muneshwar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD OF FORMING CARBON NANOTUBES
- Publication number 20170341938
- Publication date Nov 30, 2017
- The Boeing Company
- Keith Daniel Humfeld
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170260630
- Publication date Sep 14, 2017
- Sumitomo Chemical Company, Limited
- Hajime FUJIKURA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD FOR GROWING GRAPHENE BY CHEMICAL VAPOR DEPOSITION
- Publication number 20170144888
- Publication date May 25, 2017
- G-FORCE NANOTECHNOLOGY LTD.
- Jen-Kuan Chiu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Processing Plasma with a Circulation of Process Gas in M...
- Publication number 20170069468
- Publication date Mar 9, 2017
- MEYER BURGER (GERMANY) AG
- Hermann SCHLEMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Recursive Inject Apparatus For Improved Distribution Of Gas
- Publication number 20160376706
- Publication date Dec 29, 2016
- Applied Materials, Inc.
- Aaron Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR RAPID AND EFFICIENT CHEMICAL VAPOR INFILTRATION AND DENS...
- Publication number 20160281218
- Publication date Sep 29, 2016
- Tod J. Policandriotes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tilted Plate For Batch Processing And Methods Of Use
- Publication number 20150147889
- Publication date May 28, 2015
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093909
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR THE CHEMICAL VAPOR INFILTRATION OF REFRACTIVE SUBSTANCES
- Publication number 20140356534
- Publication date Dec 4, 2014
- CVT GmbH & Co. KG
- Rainer Hegermann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Spatial Atomic Layer Deposition With Recirculation An...
- Publication number 20140127404
- Publication date May 8, 2014
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXHAUST GAS TREATMENT SYSTEM
- Publication number 20130139690
- Publication date Jun 6, 2013
- JX Nippon Oil & Energy Corporation
- Tai OHUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GALLIUM TRICHLORIDE INJECTION SCHEME
- Publication number 20130104802
- Publication date May 2, 2013
- SOITEC
- Chantal Arena
- C30 - CRYSTAL GROWTH
Information Patent Application
DEPOSITION DEVICE
- Publication number 20130000558
- Publication date Jan 3, 2013
- Masamichi Hara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER
- Publication number 20120210937
- Publication date Aug 23, 2012
- Applied Materials, Inc.
- RANDHIR THAKUR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CO2 Recycling Method and CO2 Reduction Method and Device
- Publication number 20120107525
- Publication date May 3, 2012
- Nobuo Ohmae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Recirculation of reactive gases

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Facility for treating the surface of a moving substrate in a contro...

Hydrogen recycle system and hydrogen recycle method

Apparatus for manufacturing a thin film and a method therefor

Method and apparatus for the continuous vapor deposition of silicon...

Method for densifying composite matertals

Methods for chemical vapor infiltration and densification of porous...

Silane recirculation for rapid carbon/silicon carbide or silicon ca...

Apparatus for manufacturing a thin film and a method therefor

Internally cooled multi-hole injectors for delivery of process chem...

System and method for supplying a precursor for an atomic layer dep...

Dichlorosilane compensating control strategy for improved polycryst...

Silane recirculation for rapid carbon/silicon carbide or silicon ca...

Systems and methods for chemical vapor infiltration and densificati...

Method to improve precursor utilization in pulsed atomic layer proc...

Process for producing of polycrystalline silicon

Film deposition apparatus having a peripheral spiral gas curtain

System and method for supplying a precursor for an atomic layer dep...

Method for rapid and efficient chemical vapor infiltration and dens...

Substrate processing apparatus, method of manufacturing semiconduct...

Gallium trichloride injection scheme

Deposition device

Method for the chemical vapor infiltration of refractive substances

CVD-Siemens monosilane reactor process with complete utilization of...

Plasma film forming apparatus

System and method for recycling a gas used to deposit a semiconduct...

Epitaxial reactor for mass production of wafers

Raw material supply device

Gallium trichloride injection scheme

CVD apparatus and method of cleaning the CVD apparatus

Film forming method and apparatus, and storage medium

Patents Applicationslast 30 patents

HYDROGEN RECYCLE SYSTEM AND HYDROGEN RECYCLE METHOD

Method and Device for Producing a SiC Solid Material

METHOD FOR DENSIFYING COMPOSITE MATERIALS

APPARATUS FOR MANUFACTURING A THIN FILM AND A METHOD THEREFOR

Hydrogen Recycle System and Hydrogen Recycle Method

METHOD AND APPARATUS FOR THE CONTINUOUS VAPOR DEPOSITION OF SILICON...

APPARATUS AND METHOD

SILANE RECIRCULATION FOR RAPID CARBON/SILICON CARBIDE OR SILICON CA...

SYSTEMS AND METHODS FOR CHEMICAL VAPOR INFILTRATION AND DENSIFICATI...

SILANE RECIRCULATION FOR RAPID CARBON/SILICON CARBIDE OR SILICON CA...

System and Method for Supplying a Precursor for an Atomic Layer Dep...

FACILITY FOR TREATING THE SURFACE OF A MOVING SUBSTRATE IN A CONTRO...

COATING APPARATUS FOR CONTAINERS

APPARATUS FOR PERFORMING SELENIZATION AND SULFURIZATION PROCESS ON...

METHOD TO IMPROVE PRECURSOR UTILIZATION IN PULSED ATOMIC LAYER PROC...

SYSTEM AND METHOD OF FORMING CARBON NANOTUBES

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD FOR GROWING GRAPHENE BY CHEMICAL VAPOR DEPOSITION

Device for Processing Plasma with a Circulation of Process Gas in M...

Recursive Inject Apparatus For Improved Distribution Of Gas

METHOD FOR RAPID AND EFFICIENT CHEMICAL VAPOR INFILTRATION AND DENS...

Tilted Plate For Batch Processing And Methods Of Use

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

METHOD FOR THE CHEMICAL VAPOR INFILTRATION OF REFRACTIVE SUBSTANCES

Apparatus For Spatial Atomic Layer Deposition With Recirculation An...

EXHAUST GAS TREATMENT SYSTEM

GALLIUM TRICHLORIDE INJECTION SCHEME

DEPOSITION DEVICE

SUBSTRATE PROCESSING APPARATUS USING A BATCH PROCESSING CHAMBER

CO2 Recycling Method and CO2 Reduction Method and Device