Reducing or preventing effect of tilt or misalignment

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G01B9/02061

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

Current Industry

G01B9/02061Reducing or preventing effect of tilt or misalignment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device for interferometric distance measurement
- Patent number 11,885,607
- Issue date Jan 30, 2024
- Dr. Johannes Heidenhain GmbH
- Herbert Huber-Lenk
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for improved OCT measurements
- Patent number 10,571,243
- Issue date Feb 25, 2020
- Carl Zeiss Meditec, Inc.
- Matthew J. Everett
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Position measurement system, interferometer and lithographic apparatus
- Patent number 10,289,011
- Issue date May 14, 2019
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light detection module for OCT device and OCT device
- Patent number 10,168,140
- Issue date Jan 1, 2019
- Hamamatsu Photonics K.K.
- Kenji Makino
- G01 - MEASURING TESTING
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 10,095,125
- Issue date Oct 9, 2018
- Canon Kabushiki Kaisha
- Hiroshi Okuda
- G02 - OPTICS
Information Patent Grant
Displacement detection apparatus
- Patent number 10,066,924
- Issue date Sep 4, 2018
- DMG MORI CO., LTD.
- Kenji Matsushita
- G01 - MEASURING TESTING
Information Patent Grant
Laser heterodyne interferometric straightness measurement apparatus...
- Patent number 9,863,753
- Issue date Jan 9, 2018
- Zhejiang Sci-Tech University
- Benyong Chen
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer having two transparent plates in parallel for making...
- Patent number 9,797,704
- Issue date Oct 24, 2017
- Dr. Johannes Heidenhain GmbH
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Grant
Device for interferential distance measurement
- Patent number 9,739,598
- Issue date Aug 22, 2017
- Dr. Johannes Heidenhain GmbH
- Ralph Joerger
- G01 - MEASURING TESTING
Information Patent Grant
Device for distance measurement
- Patent number 9,400,168
- Issue date Jul 26, 2016
- Dr. Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Grant
Measuring apparatus including multi-wavelength interferometer
- Patent number 9,372,068
- Issue date Jun 21, 2016
- Canon Kabushiki Kaisha
- Akihiro Hatada
- G01 - MEASURING TESTING
Information Patent Grant
Measuring device for high-precision optical determination of distan...
- Patent number 9,310,183
- Issue date Apr 12, 2016
- Dr. Johannes Heidenhain GmbH
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Grant
System and method for setting up secondary reflective optic
- Patent number 9,279,658
- Issue date Mar 8, 2016
- Exelis, Inc.
- Steven Paul Maffett
- G01 - MEASURING TESTING
Information Patent Grant
Supporting structure for a movable mirror, method for reducing the...
- Patent number 9,170,397
- Issue date Oct 27, 2015
- Gasera Ltd.
- Jyrki Kauppinen
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 9,127,924
- Issue date Sep 8, 2015
- Dr. Johannes Heidenhain GmbH
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and fourier-transform spectroscopic analyzer
- Patent number 9,109,869
- Issue date Aug 18, 2015
- Konica Minolta, Inc.
- Yusuke Hirao
- G01 - MEASURING TESTING
Information Patent Grant
Device for determining distance interferometrically
- Patent number 9,068,811
- Issue date Jun 30, 2015
- Dr. Johannes Heidenhain GmbH
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Grant
Multi-wavelength interferometer, measurement apparatus, and measure...
- Patent number 9,062,957
- Issue date Jun 23, 2015
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Method and arrangement for robust interferometry for detecting a fe...
- Patent number 8,934,104
- Issue date Jan 13, 2015
- Universitaet Stuttgart
- Klaus Koerner
- G01 - MEASURING TESTING
Information Patent Grant
Grazing incidence interferometer
- Patent number 8,913,250
- Issue date Dec 16, 2014
- Mitutoyo Corporation
- Reiya Ootao
- G01 - MEASURING TESTING
Information Patent Grant
Interferometric distance measurement device using a scanning plate...
- Patent number 8,797,546
- Issue date Aug 5, 2014
- Dr. Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for acquiring position with a confocal Fabry-Pero...
- Patent number 8,773,666
- Issue date Jul 8, 2014
- attocube Systems AG
- Khaled Karrai
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam interferometer displacement measuring system utilized in...
- Patent number 8,441,649
- Issue date May 14, 2013
- National Yunlin University of Science and Technology
- Yung-Cheng Wang
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer
- Patent number 8,253,943
- Issue date Aug 28, 2012
- The University of Birmingham
- Clive C. Speake
- G01 - MEASURING TESTING
Information Patent Grant
Optical tomographic imaging apparatus including a beam scattering s...
- Patent number 8,213,020
- Issue date Jul 3, 2012
- FUJIFILM Corporation
- Kiichi Kato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical tomographic imaging system
- Patent number 8,174,701
- Issue date May 8, 2012
- FUJIFILM Corporation
- Tadashi Masuda
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical rotary adapter and optical tomographic imaging system using...
- Patent number 8,055,107
- Issue date Nov 8, 2011
- FUJIFILM Corporation
- Tadashi Masuda
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Optical rotary adaptor and optical tomographic imaging apparatus us...
- Patent number 7,924,428
- Issue date Apr 12, 2011
- FUJIFILM Corporation
- Masahiro Toida
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Image amplifying, servo-loop controlled, point diffraction interometer
- Patent number 7,633,630
- Issue date Dec 15, 2009
- Northrop Grumman Corporation
- Peter Y. M. Livingston
- G01 - MEASURING TESTING
Information Patent Grant
Multi-axis interferometers and methods and systems using multi-axis...
- Patent number 7,548,322
- Issue date Jun 16, 2009
- Zygo Corporation
- Henry A. Hill
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD, INTERFEROMETER AND SIGNAL PROCESSING DEVICE, EACH FOR DETER...
- Publication number 20240369345
- Publication date Nov 7, 2024
- Martin Berz
- G01 - MEASURING TESTING
Information Patent Application
Method of Processing Interferometry Signal, and Associated Interfer...
- Publication number 20240053136
- Publication date Feb 15, 2024
- Selene RODD-ROUTLEY
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...
- Publication number 20230108466
- Publication date Apr 6, 2023
- Carl Zeiss SMT GMBH
- Regina CHRIST
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR INTERFEROMETRIC DISTANCE MEASUREMENT
- Publication number 20220276040
- Publication date Sep 1, 2022
- Dr. Johannes Heidenhain Gmbh
- Herbert HUBER-LENK
- G01 - MEASURING TESTING
Information Patent Application
METHOD, INTERFEROMETER AND SIGNAL DEVICE, EACH FOR DETERMINING AN I...
- Publication number 20220034645
- Publication date Feb 3, 2022
- Martin BERZ
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED OCT MEASUREMENTS
- Publication number 20190056214
- Publication date Feb 21, 2019
- Carl Zeiss Meditec, Inc.
- Matthew J. EVERETT
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
POSITION MEASUREMENT SYSTEM, INTERFEROMETER AND LITHOGRAPHIC APPARATUS
- Publication number 20180224757
- Publication date Aug 9, 2018
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISPLACEMENT DETECTION APPARATUS
- Publication number 20170350689
- Publication date Dec 7, 2017
- DMG MORI CO., LTD.
- Kenji MATSUSHITA
- G01 - MEASURING TESTING
Information Patent Application
Interferometer
- Publication number 20140376002
- Publication date Dec 25, 2014
- Markus Meissner
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR DISTANCE MEASUREMENT
- Publication number 20130335746
- Publication date Dec 19, 2013
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETER AND FOURIER-TRANSFORM SPECTROSCOPIC ANALYZER
- Publication number 20130222790
- Publication date Aug 29, 2013
- KONICA MINOLTA INC
- Yusuke Hirao
- G01 - MEASURING TESTING
Information Patent Application
MEASURING APPARATUS INCLUDING MULTI-WAVELENGTH INTERFEROMETER
- Publication number 20130155414
- Publication date Jun 20, 2013
- Canon Kabushiki Kaisha
- Akihiro Hatada
- G01 - MEASURING TESTING
Information Patent Application
MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...
- Publication number 20130100458
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining Distance Interferometrically
- Publication number 20130057872
- Publication date Mar 7, 2013
- Wolfgang Holzapfel
- G01 - MEASURING TESTING
Information Patent Application
GRAZING INCIDENCE INTERFEROMETER
- Publication number 20120327425
- Publication date Dec 27, 2012
- Mitutoyo Corporation
- Reiya Ootao
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY
- Publication number 20120307258
- Publication date Dec 6, 2012
- UNIVERSITAET STUTTGART
- Klaus Koerner
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE
- Publication number 20120242994
- Publication date Sep 27, 2012
- Johannes Heidenhain GmbH
- Walter Huber
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR ACQUIRING POSITION WITH A CONFOCAL FABRY-PERO...
- Publication number 20110211199
- Publication date Sep 1, 2011
- ATTOCUBE SYSTEMS AG
- Khaled KARRAI
- G01 - MEASURING TESTING
Information Patent Application
SUPPORTING STRUCTURE FOR A MOVABLE MIRROR, METHOD FOR REDUCING THE...
- Publication number 20110205545
- Publication date Aug 25, 2011
- GASERA LTD
- Jyrki Kauppinen
- G02 - OPTICS
Information Patent Application
Multi-beam interferometer displacement measuring system utilized in...
- Publication number 20110157598
- Publication date Jun 30, 2011
- NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Yung-Cheng WANG
- G01 - MEASURING TESTING
Information Patent Application
Interferometer
- Publication number 20100238456
- Publication date Sep 23, 2010
- Clive Christopher Speake
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND OPTICAL PROBE
- Publication number 20100002240
- Publication date Jan 7, 2010
- Kiichi Kato
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
OPTICAL ROTARY ADAPTER AND OPTICAL TOMOGRAPHIC IMAGING SYSTEM USING...
- Publication number 20090251704
- Publication date Oct 8, 2009
- FUJIFILM CORPORATION
- Tadashi MASUDA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
OPTICAL ROTARY ADAPTOR AND OPTICAL TOMOGRAPHIC IMAGING APPARATUS US...
- Publication number 20090244545
- Publication date Oct 1, 2009
- FUJIFILM CORPORATION
- Masahiro TOIDA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
OPTICAL TOMOGRAPHIC IMAGING SYSTEM
- Publication number 20090086213
- Publication date Apr 2, 2009
- FUJIFILM CORPORATION
- Tadashi MASUDA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Multi-Axis Interferometers and Methods and Systems Using Multi-Axis...
- Publication number 20080117428
- Publication date May 22, 2008
- Zygo Corporation
- Henry A. Hill
- G01 - MEASURING TESTING
Information Patent Application
Image amplifying, servo-loop controlled, point diffraction interometer
- Publication number 20080037030
- Publication date Feb 14, 2008
- Peter Y. M. Livingston
- G01 - MEASURING TESTING
Information Patent Application
Interferometer for measurement of dome-like objects
- Publication number 20070019207
- Publication date Jan 25, 2007
- William P. Kuhn
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and methods for reducing non-cyclic non-linear errors in...
- Publication number 20070002330
- Publication date Jan 4, 2007
- Zygo Corporation
- Henry A. Hill
- G01 - MEASURING TESTING
Information Patent Application
Tilt compensated interferometers
- Publication number 20060238769
- Publication date Oct 26, 2006
- Christopher J. Manning
- G01 - MEASURING TESTING

Reducing or preventing effect of tilt or misalignment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device for interferometric distance measurement

Systems and methods for improved OCT measurements

Position measurement system, interferometer and lithographic apparatus

Light detection module for OCT device and OCT device

Measurement apparatus, lithography apparatus, and method of manufac...

Displacement detection apparatus

Laser heterodyne interferometric straightness measurement apparatus...

Interferometer having two transparent plates in parallel for making...

Device for interferential distance measurement

Device for distance measurement

Measuring apparatus including multi-wavelength interferometer

Measuring device for high-precision optical determination of distan...

System and method for setting up secondary reflective optic

Supporting structure for a movable mirror, method for reducing the...

Interferometer

Interferometer and fourier-transform spectroscopic analyzer

Device for determining distance interferometrically

Multi-wavelength interferometer, measurement apparatus, and measure...

Method and arrangement for robust interferometry for detecting a fe...

Grazing incidence interferometer

Interferometric distance measurement device using a scanning plate...

Device and method for acquiring position with a confocal Fabry-Pero...

Multi-beam interferometer displacement measuring system utilized in...

Interferometer

Optical tomographic imaging apparatus including a beam scattering s...

Optical tomographic imaging system

Optical rotary adapter and optical tomographic imaging system using...

Optical rotary adaptor and optical tomographic imaging apparatus us...

Image amplifying, servo-loop controlled, point diffraction interometer

Multi-axis interferometers and methods and systems using multi-axis...

Patents Applicationslast 30 patents

METHOD, INTERFEROMETER AND SIGNAL PROCESSING DEVICE, EACH FOR DETER...

Method of Processing Interferometry Signal, and Associated Interfer...

METHOD AND DEVICE FOR CHARACTERIZING THE SURFACE SHAPE OF AN OPTICA...

DEVICE FOR INTERFEROMETRIC DISTANCE MEASUREMENT

METHOD, INTERFEROMETER AND SIGNAL DEVICE, EACH FOR DETERMINING AN I...

SYSTEMS AND METHODS FOR IMPROVED OCT MEASUREMENTS

POSITION MEASUREMENT SYSTEM, INTERFEROMETER AND LITHOGRAPHIC APPARATUS

DISPLACEMENT DETECTION APPARATUS

Interferometer

DEVICE FOR DISTANCE MEASUREMENT

INTERFEROMETER AND FOURIER-TRANSFORM SPECTROSCOPIC ANALYZER

MEASURING APPARATUS INCLUDING MULTI-WAVELENGTH INTERFEROMETER

MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...

Device for Determining Distance Interferometrically

GRAZING INCIDENCE INTERFEROMETER

METHOD AND ARRANGEMENT FOR ROBUST INTERFEROMETRY

INTERFEROMETRIC DISTANCE MEASUREMENT DEVICE

DEVICE AND METHOD FOR ACQUIRING POSITION WITH A CONFOCAL FABRY-PERO...

SUPPORTING STRUCTURE FOR A MOVABLE MIRROR, METHOD FOR REDUCING THE...

Multi-beam interferometer displacement measuring system utilized in...

Interferometer

OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND OPTICAL PROBE

OPTICAL ROTARY ADAPTER AND OPTICAL TOMOGRAPHIC IMAGING SYSTEM USING...

OPTICAL ROTARY ADAPTOR AND OPTICAL TOMOGRAPHIC IMAGING APPARATUS US...

OPTICAL TOMOGRAPHIC IMAGING SYSTEM

Multi-Axis Interferometers and Methods and Systems Using Multi-Axis...

Image amplifying, servo-loop controlled, point diffraction interometer

Interferometer for measurement of dome-like objects

Apparatus and methods for reducing non-cyclic non-linear errors in...

Tilt compensated interferometers