Reduction of impurities in the source gas

Industry

CPC
C23C16/4402

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4402Reduction of impurities in the source gas

Industries

Patents Grantslast 30 patents

Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,773,485
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD apparatus, method and valve
- Patent number 11,761,082
- Issue date Sep 19, 2023
- Picosun Oy
- Marko Pudas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor delivery systems for solid and liquid materials
- Patent number 11,661,653
- Issue date May 30, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Yumin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bottom fed sublimation bed for high saturation efficiency in semico...
- Patent number 11,584,990
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process and apparatus for removal of impurities from chlorosilanes
- Patent number 11,560,316
- Issue date Jan 24, 2023
- NexWafe GmbH
- Kai Schillinger
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vacuum systems in semiconductor fabrication facilities
- Patent number 11,525,185
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,519,068
- Issue date Dec 6, 2022
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device, non-transitory comput...
- Patent number 11,299,804
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor flow control apparatus for atomic layer deposition
- Patent number 11,208,722
- Issue date Dec 28, 2021
- ASM IP Holding B.V.
- Carl L. White
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Treatment chamber for a chemical vapour deposition (CVD) reactor an...
- Patent number 11,193,207
- Issue date Dec 7, 2021
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Diffuser and semiconductor processing system using same
- Patent number 11,183,404
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sheng-chun Yang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,139,152
- Issue date Oct 5, 2021
- PSK INC.
- Hung Sheng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for supplying a precursor for an atomic layer dep...
- Patent number 11,053,584
- Issue date Jul 6, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Bor-Chiuan Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low vapor pressure chemical delivery
- Patent number 10,947,621
- Issue date Mar 16, 2021
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,914,003
- Issue date Feb 9, 2021
- Lam Research Corporation
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Solid precursor-based delivery of fluid utilizing controlled solids...
- Patent number 10,895,010
- Issue date Jan 19, 2021
- Entegris, Inc.
- John M. Cleary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution device for a wafer processing apparatus
- Patent number 10,829,852
- Issue date Nov 10, 2020
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, vaporization system and mist filter
- Patent number 10,767,260
- Issue date Sep 8, 2020
- Kokusai Electric Corporation
- Kosuke Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods to remove residual precursor inside gas lines...
- Patent number 10,752,990
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing of polycrystalline silicon
- Patent number 10,475,646
- Issue date Nov 12, 2019
- OCI Company Ltd
- Chang Ryol Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for supplying a precursor for an atomic layer dep...
- Patent number 10,443,127
- Issue date Oct 15, 2019
- Taiwan Semiconductor Manufacturing Company Limited
- Bor-Chiuan Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Source reagent-based delivery of fluid with high material flux for...
- Patent number 10,385,452
- Issue date Aug 20, 2019
- Entegris, Inc.
- Bryan C. Hendrix
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Delivery device, manufacturing system and process of manufacturing
- Patent number 10,316,408
- Issue date Jun 11, 2019
- Silcotek Corp.
- David A. Smith
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Porous polymers for the abatement and purification of electronic ga...
- Patent number 10,260,148
- Issue date Apr 16, 2019
- NUMAT TECHNOLOGIES, INC.
- Paul Wai-Man Siu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition processing chamber permitting low-pressure...
- Patent number 10,184,179
- Issue date Jan 22, 2019
- Applied Materials, Inc.
- Shinichi Kurita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for growing diamonds by microwave plasma chemical vapour...
- Patent number 10,184,192
- Issue date Jan 22, 2019
- Sunset Peak International Limited
- Devi Shanker Misra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High purity tungsten hexachloride and method for making same
- Patent number 10,100,406
- Issue date Oct 16, 2018
- VERSUM MATERIALS US, LLC
- Xiaoxi Wu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Source container and vapour-deposition reactor
- Patent number 10,066,295
- Issue date Sep 4, 2018
- UNITEX CO., LTD
- Myung Gi Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for deuterium recovery
- Patent number 9,929,026
- Issue date Mar 27, 2018
- HPSP CO., LTD.
- Manuel Rivera
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Coating system and method for coating interior fluid wetted surface...
- Patent number 9,873,940
- Issue date Jan 23, 2018
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ALD APPARATUS, METHOD AND VALVE
- Publication number 20230383404
- Publication date Nov 30, 2023
- Picosun Oy
- Marko PUDAS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...
- Publication number 20230160064
- Publication date May 25, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...
- Publication number 20230141275
- Publication date May 11, 2023
- Honda Motor Co., Ltd.
- Avetik R. HARUTYUNYAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230087577
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Eiichi KOMORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20230060617
- Publication date Mar 2, 2023
- Creative Coatings Co., Ltd.
- Eiji SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...
- Publication number 20230002893
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- David Marquardt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN DEPOSITION
- Publication number 20220364232
- Publication date Nov 17, 2022
- LAM RESEARCH CORPORATION
- Pragna NANNAPANENI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Systems in Semiconductor Fabrication Facilities
- Publication number 20220356567
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS
- Publication number 20220122867
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Shingo HISHIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220042170
- Publication date Feb 10, 2022
- Kokusai Electric Corporation
- Kosuke TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20210388493
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yuta SORITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DELIVERY OF VANADIUM COMPOUNDS
- Publication number 20210348267
- Publication date Nov 11, 2021
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...
- Publication number 20210324515
- Publication date Oct 21, 2021
- Honda Motor Co., Ltd.
- Avetik R. HARUTYUNYAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210292892
- Publication date Sep 23, 2021
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20210238739
- Publication date Aug 5, 2021
- KIOXIA Corporation
- Ryu KOMATSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAMINANT TRAP SYSTEM FOR A REACTOR SYSTEM
- Publication number 20210230744
- Publication date Jul 29, 2021
- ASM IP HOLDING B.V.
- Ankit Kimtee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DELIVERY SYSTEMS FOR SOLID AND LIQUID MATERIALS
- Publication number 20210189558
- Publication date Jun 24, 2021
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Yumin LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD
- Publication number 20210102287
- Publication date Apr 8, 2021
- EUGENE TECHNOLOGY CO., LTD.
- Kwang Woon LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNTHETIC DIAMOND JEWELRY AND FABRICATION METHOD THEREOF
- Publication number 20210095373
- Publication date Apr 1, 2021
- PT CREATIONS
- Parke G. BALLANTINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Gauge Protector for Deposition Systems
- Publication number 20210088402
- Publication date Mar 25, 2021
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum Systems in Semiconductor Fabrication Facilities
- Publication number 20210079522
- Publication date Mar 18, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Fa Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS AND APPARATUS FOR REMOVAL OF IMPURITIES FROM CHLOROSILANES
- Publication number 20200283298
- Publication date Sep 10, 2020
- NexWafe GmbH
- Kai SCHILLINGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS
- Publication number 20200173015
- Publication date Jun 4, 2020
- SAMSUNG DISPLAY CO., LTD.
- CHOEL-MIN JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20200141002
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Application
Method of Manufacturing Semiconductor Device, Non-transitory Comput...
- Publication number 20200095676
- Publication date Mar 26, 2020
- Kokusai Electric Corporation
- Yuji TAKEBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION DEVICE FOR A WAFER PROCESSING APPARATUS
- Publication number 20200056282
- Publication date Feb 20, 2020
- ASM IP HOLDING B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and Method for Supplying a Precursor for an Atomic Layer Dep...
- Publication number 20200040450
- Publication date Feb 6, 2020
- Taiwan Semiconductor Manufacturing Company Limited
- BOR-CHIUAN HSIEH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE PROCESS VOLUME TO PERFORM HIGH-PRESSURE AND LOW-PRESSURE PRO...
- Publication number 20190352774
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- Kelvin Chan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TREATMENT CHAMBER FOR A CHEMICAL VAPOUR DEPOSITION (CVD) REACTOR AN...
- Publication number 20190323123
- Publication date Oct 24, 2019
- KOBUS SAS
- Patrice Nal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZER AND VAPORIZED GAS SUPPLY UNIT
- Publication number 20190271079
- Publication date Sep 5, 2019
- Toshiba Memory Corporation
- Mari Kusunoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Reduction of impurities in the source gas

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Bottom fed sublimation bed for high saturation efficiency in semico...

ALD apparatus, method and valve

Vapor delivery systems for solid and liquid materials

Bottom fed sublimation bed for high saturation efficiency in semico...

Process and apparatus for removal of impurities from chlorosilanes

Vacuum systems in semiconductor fabrication facilities

Moisture governed growth method of atomic layer ribbons and nanorib...

Method of manufacturing semiconductor device, non-transitory comput...

Vapor flow control apparatus for atomic layer deposition

Treatment chamber for a chemical vapour deposition (CVD) reactor an...

Diffuser and semiconductor processing system using same

Substrate processing apparatus

System and method for supplying a precursor for an atomic layer dep...

Low vapor pressure chemical delivery

Monolithic gas distribution manifold and various construction techn...

Solid precursor-based delivery of fluid utilizing controlled solids...

Gas distribution device for a wafer processing apparatus

Substrate processing apparatus, vaporization system and mist filter

Apparatus and methods to remove residual precursor inside gas lines...

Process for producing of polycrystalline silicon

System and method for supplying a precursor for an atomic layer dep...

Source reagent-based delivery of fluid with high material flux for...

Delivery device, manufacturing system and process of manufacturing

Porous polymers for the abatement and purification of electronic ga...

Atomic layer deposition processing chamber permitting low-pressure...

Apparatus for growing diamonds by microwave plasma chemical vapour...

High purity tungsten hexachloride and method for making same

Source container and vapour-deposition reactor

Methods and apparatuses for deuterium recovery

Coating system and method for coating interior fluid wetted surface...

Patents Applicationslast 30 patents

ALD APPARATUS, METHOD AND VALVE

BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICO...

MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

FILM FORMING APPARATUS

Bottom Fed Sublimation Bed for High Saturation Efficiency in Semico...

TUNGSTEN DEPOSITION

Vacuum Systems in Semiconductor Fabrication Facilities

BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHODS AND SYSTEMS FOR DELIVERY OF VANADIUM COMPOUNDS

MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...

SUBSTRATE PROCESSING APPARATUS

PROCESSING APPARATUS AND PROCESSING METHOD

CONTAMINANT TRAP SYSTEM FOR A REACTOR SYSTEM

VAPOR DELIVERY SYSTEMS FOR SOLID AND LIQUID MATERIALS

THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD

SYNTHETIC DIAMOND JEWELRY AND FABRICATION METHOD THEREOF

Vacuum Gauge Protector for Deposition Systems

Vacuum Systems in Semiconductor Fabrication Facilities

PROCESS AND APPARATUS FOR REMOVAL OF IMPURITIES FROM CHLOROSILANES

VAPOR DEPOSITION APPARATUS

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...

Method of Manufacturing Semiconductor Device, Non-transitory Comput...

GAS DISTRIBUTION DEVICE FOR A WAFER PROCESSING APPARATUS

System and Method for Supplying a Precursor for an Atomic Layer Dep...

SINGLE PROCESS VOLUME TO PERFORM HIGH-PRESSURE AND LOW-PRESSURE PRO...

TREATMENT CHAMBER FOR A CHEMICAL VAPOUR DEPOSITION (CVD) REACTOR AN...

VAPORIZER AND VAPORIZED GAS SUPPLY UNIT