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CPC
G03F9/7015

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces

Current Industry

G03F9/7015Reference

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lithography measurement machine and operating method thereof
- Patent number 12,197,124
- Issue date Jan 14, 2025
- Hon Hai Precision Industry Co., Ltd.
- Kuo-Kuei Fu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lithographic apparatus
- Patent number 11,914,308
- Issue date Feb 27, 2024
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,609,503
- Issue date Mar 21, 2023
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, apparatus, and system for forming code
- Patent number 11,307,506
- Issue date Apr 19, 2022
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Wei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus, determination method, and method of manufact...
- Patent number 11,275,319
- Issue date Mar 15, 2022
- Canon Kabushiki Kaisha
- Koshiro Arahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,976,675
- Issue date Apr 13, 2021
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 10,930,469
- Issue date Feb 23, 2021
- NuFlare Technology, Inc.
- Takahito Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment mark, imprinting method, manufacturing method of semicond...
- Patent number 10,908,519
- Issue date Feb 2, 2021
- TOSHIBA MEMORY CORPORATION
- Satoshi Mitsugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coaxial mask alignment device, photolithography apparatus and align...
- Patent number 10,901,331
- Issue date Jan 26, 2021
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Chengshuang Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Length measurement device
- Patent number 10,760,895
- Issue date Sep 1, 2020
- Nidec-Read Corporation
- Tatsufumi Kusuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Angle adjustment tool, angle adjustment system for liquid crystal p...
- Patent number 10,642,170
- Issue date May 5, 2020
- BOE Technology Group Co., Ltd.
- Zhe Wang
- G01 - MEASURING TESTING
Information Patent Grant
Adjustable load transmitter
- Patent number 10,605,649
- Issue date Mar 31, 2020
- International Business Machines Corporation
- Martin Eckert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for wafer alignment
- Patent number 10,600,667
- Issue date Mar 24, 2020
- Micron Technology, Inc.
- Yang Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual-layer alignment device and method
- Patent number 10,578,986
- Issue date Mar 3, 2020
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xuchao Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus
- Patent number 10,571,815
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,466,599
- Issue date Nov 5, 2019
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustable load transmitter
- Patent number 10,345,136
- Issue date Jul 9, 2019
- International Business Machines Corporation
- Martin Eckert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Systems and methods for wafer alignment
- Patent number 10,347,519
- Issue date Jul 9, 2019
- Micron Technology, Inc.
- Yang Chao
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Systems and methods for wafer alignment
- Patent number 10,242,901
- Issue date Mar 26, 2019
- Micron Technology, Inc.
- Yang Chao
- G01 - MEASURING TESTING
Information Patent Grant
Adjustable load transmitter
- Patent number 10,146,144
- Issue date Dec 4, 2018
- International Business Machines Corporation
- Martin Eckert
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithography apparatus, control method therefor, and method of manuf...
- Patent number 10,108,098
- Issue date Oct 23, 2018
- Canon Kabushiki Kaisha
- Atsushi Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustable load transmitter
- Patent number 10,082,419
- Issue date Sep 25, 2018
- International Business Machines Corporation
- Martin Eckert
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for wafer alignment
- Patent number 10,062,595
- Issue date Aug 28, 2018
- Micron Technology, Inc.
- Yang Chao
- G01 - MEASURING TESTING
Information Patent Grant
Alignment method and alignment system thereof
- Patent number 10,048,603
- Issue date Aug 14, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Qiang Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,939,739
- Issue date Apr 10, 2018
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for wafer alignment
- Patent number 9,748,128
- Issue date Aug 29, 2017
- Micron Technology, Inc.
- Yang Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interconnection structure, fabricating method thereof, and exposure...
- Patent number 9,646,865
- Issue date May 9, 2017
- Semiconductor Manufacturing International (Beijing) Corporation
- Qiang Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus, imprint method and method of manufacturing an ar...
- Patent number 9,465,308
- Issue date Oct 11, 2016
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment correction method for substrate to be exposed, and exposu...
- Patent number 9,360,776
- Issue date Jun 7, 2016
- V Technology Co., Ltd.
- Yoshiaki Nomura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of aligning an exposure apparatus, method of exposing a phot...
- Patent number 9,329,504
- Issue date May 3, 2016
- Samsung Electronics Co., Ltd.
- Sang-Hyun Park
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTION DEVICE, DETECTION METHOD, LITHOGRAPHY APPARATUS, AND ARTI...
- Publication number 20240069455
- Publication date Feb 29, 2024
- Canon Kabushiki Kaisha
- KOHEI SENSHU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PACKAGE IMAGING FOR DIE LOCATION CORRECTION IN DIGITAL LITHOGRAPHY
- Publication number 20230288822
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Ulrich Mueller
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20230266678
- Publication date Aug 24, 2023
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20210223703
- Publication date Jul 22, 2021
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT MARK, IMPRINTING METHOD, MANUFACTURING METHOD OF SEMICOND...
- Publication number 20200301293
- Publication date Sep 24, 2020
- Toshiba Memory Corporation
- Satoshi MITSUGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS, DETERMINATION METHOD, AND METHOD OF MANUFACT...
- Publication number 20200174384
- Publication date Jun 4, 2020
- Canon Kabushiki Kaisha
- Koshiro Arahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20200159126
- Publication date May 21, 2020
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LENGTH MEASUREMENT DEVICE
- Publication number 20200018590
- Publication date Jan 16, 2020
- NIDEC-READ CORPORATION
- Tatsufumi KUSUDA
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20190377266
- Publication date Dec 12, 2019
- ASML NETHERLANDS B.V.
- Hans BUTLER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ANGLE ADJUSTMENT TOOL, ANGLE ADJUSTMENT SYSTEM FOR LIQUID CRYSTAL P...
- Publication number 20190361364
- Publication date Nov 28, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Zhe Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR WAFER ALIGNMENT
- Publication number 20190279892
- Publication date Sep 12, 2019
- Micron Technology, Inc.
- Yang Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADJUSTABLE LOAD TRANSMITTER
- Publication number 20190204138
- Publication date Jul 4, 2019
- International Business Machines Corporation
- Martin Eckert
- G01 - MEASURING TESTING
Information Patent Application
DUAL-LAYER ALIGNMENT DEVICE AND METHOD
- Publication number 20190146364
- Publication date May 16, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Xuchao ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR WAFER ALIGNMENT
- Publication number 20190148202
- Publication date May 16, 2019
- Micron Technology, Inc.
- Yang Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADJUSTABLE LOAD TRANSMITTER
- Publication number 20190017861
- Publication date Jan 17, 2019
- International Business Machines Corporation
- Martin Eckert
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR WAFER ALIGNMENT
- Publication number 20180330976
- Publication date Nov 15, 2018
- Micron Technology, Inc.
- Yang Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20180196352
- Publication date Jul 12, 2018
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR WAFER ALIGNMENT
- Publication number 20170352563
- Publication date Dec 7, 2017
- Micron Technology, Inc.
- Yang Chao
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT METHOD AND ALIGNMENT SYSTEM THEREOF
- Publication number 20170329241
- Publication date Nov 16, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Qiang ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERCONNECTION STRUCTURE, FABRICATING METHOD THEREOF, AND EXPOSURE...
- Publication number 20170133256
- Publication date May 11, 2017
- Semiconductor Manufacturing International (Beijing) Corpor
- QIANG ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20140293249
- Publication date Oct 2, 2014
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT CORRECTION METHOD FOR SUBSTRATE TO BE EXPOSED, AND EXPOSU...
- Publication number 20140146299
- Publication date May 29, 2014
- V TECHNOLOGY CO., LTD.
- Yoshiaki NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE ALIGNMENT APPARATUS AND METHOD
- Publication number 20130271750
- Publication date Oct 17, 2013
- Bing Xu
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20130169945
- Publication date Jul 4, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION ALIGNER
- Publication number 20130155398
- Publication date Jun 20, 2013
- ORC MANUFACTURING CO., LTD.
- Yuken Nakamoto
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF ALIGNING AN EXPOSURE APPARATUS, METHOD OF EXPOSING A PHOT...
- Publication number 20130077075
- Publication date Mar 28, 2013
- Samsung Electronics Co., Ltd.
- Sang-Hyun PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20130070228
- Publication date Mar 21, 2013
- Ushio Denki Kabushiki Kaisha
- Shigehisa Sugiyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE AND DEVICE MANUFACTURING ME...
- Publication number 20130050674
- Publication date Feb 28, 2013
- ASML NETHERLANDS B.V.
- Vitaliy Prosyentsov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE AP...
- Publication number 20120262691
- Publication date Oct 18, 2012
- Nikon Corporation
- Yuichi Shibazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...
- Publication number 20120258391
- Publication date Oct 11, 2012
- Canon Kabushiki Kaisha
- Nobuo Imaoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lithography measurement machine and operating method thereof

Lithographic apparatus

Lithographic apparatus

Method, apparatus, and system for forming code

Lithography apparatus, determination method, and method of manufact...

Lithographic apparatus

Charged particle beam writing apparatus and charged particle beam w...

Alignment mark, imprinting method, manufacturing method of semicond...

Coaxial mask alignment device, photolithography apparatus and align...

Length measurement device

Angle adjustment tool, angle adjustment system for liquid crystal p...

Adjustable load transmitter

Systems and methods for wafer alignment

Dual-layer alignment device and method

Lithographic apparatus

Lithographic apparatus

Adjustable load transmitter

Systems and methods for wafer alignment

Systems and methods for wafer alignment

Adjustable load transmitter

Lithography apparatus, control method therefor, and method of manuf...

Adjustable load transmitter

Systems and methods for wafer alignment

Alignment method and alignment system thereof

Exposure apparatus and method for producing device

Systems and methods for wafer alignment

Interconnection structure, fabricating method thereof, and exposure...

Imprint apparatus, imprint method and method of manufacturing an ar...

Alignment correction method for substrate to be exposed, and exposu...

Method of aligning an exposure apparatus, method of exposing a phot...

Patents Applicationslast 30 patents

DETECTION DEVICE, DETECTION METHOD, LITHOGRAPHY APPARATUS, AND ARTI...

PACKAGE IMAGING FOR DIE LOCATION CORRECTION IN DIGITAL LITHOGRAPHY

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS

ALIGNMENT MARK, IMPRINTING METHOD, MANUFACTURING METHOD OF SEMICOND...

LITHOGRAPHY APPARATUS, DETERMINATION METHOD, AND METHOD OF MANUFACT...

LITHOGRAPHIC APPARATUS

LENGTH MEASUREMENT DEVICE

LITHOGRAPHIC APPARATUS

ANGLE ADJUSTMENT TOOL, ANGLE ADJUSTMENT SYSTEM FOR LIQUID CRYSTAL P...

SYSTEMS AND METHODS FOR WAFER ALIGNMENT

ADJUSTABLE LOAD TRANSMITTER

DUAL-LAYER ALIGNMENT DEVICE AND METHOD

SYSTEMS AND METHODS FOR WAFER ALIGNMENT

ADJUSTABLE LOAD TRANSMITTER

SYSTEMS AND METHODS FOR WAFER ALIGNMENT

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

SYSTEMS AND METHODS FOR WAFER ALIGNMENT

ALIGNMENT METHOD AND ALIGNMENT SYSTEM THEREOF

INTERCONNECTION STRUCTURE, FABRICATING METHOD THEREOF, AND EXPOSURE...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

ALIGNMENT CORRECTION METHOD FOR SUBSTRATE TO BE EXPOSED, AND EXPOSU...

BACKSIDE ALIGNMENT APPARATUS AND METHOD

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

PROJECTION ALIGNER

METHOD OF ALIGNING AN EXPOSURE APPARATUS, METHOD OF EXPOSING A PHOT...

EXPOSURE APPARATUS

LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE AND DEVICE MANUFACTURING ME...

MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION APPARATUS, EXPOSURE AP...

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE FABRICATION M...