Removable or replaceable electrodes or electrode systems

Industry

CPC
H01J37/32605

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32605Removable or replaceable electrodes or electrode systems

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and wear amount measurement method
- Patent number 12,033,838
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Joji Takayoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mode-switching plasma systems and methods of operating thereof
- Patent number 11,251,021
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition apparatus
- Patent number 11,062,883
- Issue date Jul 13, 2021
- The Japan Steel Works, Ltd.
- Keisuke Washio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mode-switching plasma systems and methods of operating thereof
- Patent number 10,910,196
- Issue date Feb 2, 2021
- Tokyo Electron Limited
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system for small substrates
- Patent number 10,883,168
- Issue date Jan 5, 2021
- Massachusetts Institute of Technology
- Mitchell David Hsing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling the RF amplitude of an edge ring of a capacitively coup...
- Patent number 10,685,862
- Issue date Jun 16, 2020
- Applied Materials, Inc.
- James Rogers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ring-shaped electrode
- Patent number 10,553,405
- Issue date Feb 4, 2020
- THINKON NEW TECHNOLOGY JAPAN CORPORATION
- Atsushi Ikari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atmospheric lid with rigid plate for carousel processing chambers
- Patent number 10,508,340
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric pressure pulsed arc plasma source and methods of coatin...
- Patent number 10,354,845
- Issue date Jul 16, 2019
- Southwest Research Institute
- Vasiliki Zorbas Poenitzsch
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and apparatus for controlling substrate uniformity
- Patent number 10,177,050
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing an upper electrode of a plasma processing d...
- Patent number 10,081,090
- Issue date Sep 25, 2018
- Tokyo Electron Limited
- Tsuguo Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 9,899,228
- Issue date Feb 20, 2018
- Lam Research Corporation
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma generator, annealing device, deposition crystallization appa...
- Patent number 9,865,435
- Issue date Jan 9, 2018
- BOE Technology Group Co., Ltd.
- Xiangjun Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,728,379
- Issue date Aug 8, 2017
- Beijing NMC Co., Ltd.
- Fenggang Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for attachment of an electrode into an inductively-coupled p...
- Patent number 9,530,625
- Issue date Dec 27, 2016
- FEI Company
- Sean Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling substrate uniformity
- Patent number 9,412,579
- Issue date Aug 9, 2016
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 9,245,776
- Issue date Jan 26, 2016
- Tokyo Electron Limited
- Shinji Himori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cathode interface for a plasma gun and method of making and using t...
- Patent number 9,142,390
- Issue date Sep 22, 2015
- Oerlikon Metco (US) Inc.
- Robert F. Savill
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High temperature electrode connections
- Patent number 9,088,085
- Issue date Jul 21, 2015
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing a semiconductor substrate in a plasma processi...
- Patent number 9,064,909
- Issue date Jun 23, 2015
- Lam Research Corporation
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anchoring inserts, electrode assemblies, and plasma processing cham...
- Patent number 9,023,177
- Issue date May 5, 2015
- Lam Research Corporation
- Randall Hardin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System for attachment of an electrode into an inductively coupled p...
- Patent number 8,928,210
- Issue date Jan 6, 2015
- FEI Comapny
- Sean Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,796,153
- Issue date Aug 5, 2014
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 8,679,288
- Issue date Mar 25, 2014
- Lam Research Corporation
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for producing plasma
- Patent number 8,581,495
- Issue date Nov 12, 2013
- Reinhausen Plasma GmbH
- Michael Bisges
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Gasket with positioning feature for clamped monolithic showerhead e...
- Patent number 8,536,071
- Issue date Sep 17, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of joining components for a composite showerhead electrode a...
- Patent number 8,484,846
- Issue date Jul 16, 2013
- Lam Research Corporation
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,414,719
- Issue date Apr 9, 2013
- Lam Research Corporation
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clamped showerhead electrode assembly
- Patent number 8,313,805
- Issue date Nov 20, 2012
- Lam Research Corporation
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peripherally engaging electrode carriers and assemblies incorporati...
- Patent number 8,276,604
- Issue date Oct 2, 2012
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING APPARATUS
- Publication number 20240297025
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Kota SENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mode-Switching Plasma Systems and Methods of Operating Thereof
- Publication number 20210151296
- Publication date May 20, 2021
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing System For Small Substrates
- Publication number 20210087671
- Publication date Mar 25, 2021
- Massachusetts Institute of Technology
- Mitchell David Hsing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODE-SWITCHING PLASMA SYSTEMS AND METHODS OF OPERATING THEREOF
- Publication number 20210027991
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Peter Ventzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING-SHAPED ELECTRODE
- Publication number 20190172687
- Publication date Jun 6, 2019
- THINKON NEW TECHNOLOGY JAPAN CORPORATION
- Atsushi Ikari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...
- Publication number 20170103876
- Publication date Apr 13, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiangjun TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SURFACE TREATMENT OF UPPER ELECTRODE, PLASMA PROCESSING...
- Publication number 20160307741
- Publication date Oct 20, 2016
- TOKYO ELECTRON LIMITED
- Yusuke AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ATTACHMENT OF AN ELECTRODE INTO AN INDUCTIVELY-COUPLED P...
- Publication number 20150357166
- Publication date Dec 10, 2015
- FEI Company
- Sean Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE INTERFACE FOR A PLASMA GUN AND METHOD OF MAKING AND USING T...
- Publication number 20140167597
- Publication date Jun 19, 2014
- SULZER METCO (US) INC.
- Robert F. Savill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
- Publication number 20140154888
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Tom Stevenson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Electrode Connections
- Publication number 20140087587
- Publication date Mar 27, 2014
- Novellus Systems, Inc.
- Gary Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING ASSEMBLY FOR PLASMA PROCESSING CHAMBER AND METHOD OF MANU...
- Publication number 20140034242
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Sanket P. Sant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20130337654
- Publication date Dec 19, 2013
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY
- Publication number 20130288483
- Publication date Oct 31, 2013
- S.M. Reza Sadjadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20130280914
- Publication date Oct 24, 2013
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for Attachment of an Electrode into an Inductively Coupled P...
- Publication number 20130134855
- Publication date May 30, 2013
- FEI Company
- Sean Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20130034967
- Publication date Feb 7, 2013
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20120258603
- Publication date Oct 11, 2012
- LAM RESEARCH CORPORATION
- Roger Patrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anchoring Inserts, Electrode Assemblies, and Plasma Processing Cham...
- Publication number 20120193449
- Publication date Aug 2, 2012
- LAM RESEARCH CORPORATION
- Randall Hardin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...
- Publication number 20120171871
- Publication date Jul 5, 2012
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLAMPED SHOWERHEAD ELECTRODE ASSEMBLY
- Publication number 20120171872
- Publication date Jul 5, 2012
- LAM RESEARCH CORPORATION
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODES
- Publication number 20120160941
- Publication date Jun 28, 2012
- LAM RESEARCH CORPORATION
- Greg Bettencourt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adapter Ring For Silicon Electrode
- Publication number 20120073752
- Publication date Mar 29, 2012
- MEMC Electronic Materials, Inc.
- Terry Parde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...
- Publication number 20120013242
- Publication date Jan 19, 2012
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20110155322
- Publication date Jun 30, 2011
- TOKYO ELECTRON LIMITED
- Shinji HIMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Producing Plasma
- Publication number 20110095688
- Publication date Apr 28, 2011
- Reinhausen Plasma GmbH
- Michael Bisges
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...
- Publication number 20100261354
- Publication date Oct 14, 2010
- LAM RESEARCH CORPORATION
- GREGORY R. BETTENCOURT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composite showerhead electrode assembly for a plasma processing app...
- Publication number 20100184298
- Publication date Jul 22, 2010
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANCHORING INSERTS, ELECTRODE ASSEMBLIES, AND PLASMA PROCESSING CHAM...
- Publication number 20100038033
- Publication date Feb 18, 2010
- LAM RESEARCH CORPORATION
- Randall Hardin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ELECTRODE
- Publication number 20100021655
- Publication date Jan 28, 2010
- Robert P. Haley, JR.
- H01 - BASIC ELECTRIC ELEMENTS

Removable or replaceable electrodes or electrode systems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma processing apparatus and wear amount measurement method

Mode-switching plasma systems and methods of operating thereof

Atomic layer deposition apparatus

Mode-switching plasma systems and methods of operating thereof

Processing system for small substrates

Controlling the RF amplitude of an edge ring of a capacitively coup...

Ring-shaped electrode

Atmospheric lid with rigid plate for carousel processing chambers

Atmospheric pressure pulsed arc plasma source and methods of coatin...

Methods and apparatus for controlling substrate uniformity

Method of manufacturing an upper electrode of a plasma processing d...

Showerhead electrode assemblies for plasma processing apparatuses

Plasma generator, annealing device, deposition crystallization appa...

Plasma processing apparatus

Method for attachment of an electrode into an inductively-coupled p...

Methods and apparatus for controlling substrate uniformity

Plasma processing apparatus

Cathode interface for a plasma gun and method of making and using t...

High temperature electrode connections

Method of processing a semiconductor substrate in a plasma processi...

Anchoring inserts, electrode assemblies, and plasma processing cham...

System for attachment of an electrode into an inductively coupled p...

Clamped monolithic showerhead electrode

Showerhead electrode assemblies for plasma processing apparatuses

Apparatus for producing plasma

Gasket with positioning feature for clamped monolithic showerhead e...

Method of joining components for a composite showerhead electrode a...

Clamped monolithic showerhead electrode

Clamped showerhead electrode assembly

Peripherally engaging electrode carriers and assemblies incorporati...

Patents Applicationslast 30 patents

PLASMA PROCESSING SYSTEM AND PLASMA PROCESSING APPARATUS

Mode-Switching Plasma Systems and Methods of Operating Thereof

Processing System For Small Substrates

MODE-SWITCHING PLASMA SYSTEMS AND METHODS OF OPERATING THEREOF

RING-SHAPED ELECTRODE

PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...

METHOD FOR SURFACE TREATMENT OF UPPER ELECTRODE, PLASMA PROCESSING...

METHOD FOR ATTACHMENT OF AN ELECTRODE INTO AN INDUCTIVELY-COUPLED P...

CATHODE INTERFACE FOR A PLASMA GUN AND METHOD OF MAKING AND USING T...

SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES

High Temperature Electrode Connections

EDGE RING ASSEMBLY FOR PLASMA PROCESSING CHAMBER AND METHOD OF MANU...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

System for Attachment of an Electrode into an Inductively Coupled P...

GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

Anchoring Inserts, Electrode Assemblies, and Plasma Processing Cham...

COMPOSITE SHOWERHEAD ELECTRODE ASSEMBLY FOR A PLASMA PROCESSING APP...

CLAMPED SHOWERHEAD ELECTRODE ASSEMBLY

SHOWERHEAD ELECTRODES

Adapter Ring For Silicon Electrode

BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING TH...

PLASMA PROCESSING APPARATUS

Apparatus for Producing Plasma

GASKET WITH POSITIONING FEATURE FOR CLAMPED MONOLITHIC SHOWERHEAD E...

Composite showerhead electrode assembly for a plasma processing app...

ANCHORING INSERTS, ELECTRODE ASSEMBLIES, AND PLASMA PROCESSING CHAM...

PLASMA ELECTRODE