Replacing parts of guns Mutual adjustment of electrodes

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CPC
H01J37/067

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/067Replacing parts of guns Mutual adjustment of electrodes

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Patents Grantslast 30 patents

Information Patent Grant
Filament positioning system and filament positioning method
- Patent number 10,607,805
- Issue date Mar 31, 2020
- NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY, CHINA
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- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Gun lens design in a charged particle microscope
- Patent number 10,410,827
- Issue date Sep 10, 2019
- FEI Company
- Ali Mohammadi-Gheidari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source architecture for a scanning electron microscopy system
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- Issue date Aug 20, 2019
- KLA-Tencor Corporation
- Mohammed Tahmassebpur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam generating apparatus, charged particle beam a...
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- Issue date Jan 17, 2017
- Hitachi High-Technologies Corporation
- Takashi Onishi
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Information Patent Grant
Ion beam device
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- Issue date Nov 29, 2016
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
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Enclosure and method for handling electron gun or ion gun
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- Issue date Nov 15, 2016
- DENKA COMPANY LIMITED
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indirectly heated cathode cartridge design
- Patent number 9,076,625
- Issue date Jul 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Craig Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High brightness electron gun with moving condenser lens
- Patent number 8,921,804
- Issue date Dec 30, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam device
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- Issue date Jul 15, 2014
- Hitachi High-Technologies Corporation
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion sources, systems and methods
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- Billy W. Ward
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Information Patent Grant
Nanotip repair and characterization using field ion microscopy
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- Issue date Apr 5, 2011
- Texas Instruments Incorporated
- Vladimir Ukraintsev
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle gun
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- Issue date Dec 21, 2010
- Nanobeam Limited
- Tao Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extraction electrode manipulator
- Patent number 7,842,931
- Issue date Nov 30, 2010
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extractor for an microcolumn, an alignment method for an extractor...
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- Issue date Jul 6, 2010
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- Ho Soeb Kim
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Information Patent Grant
Charged particle beam equipment
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- Issue date Feb 2, 2010
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Focusing apparatus and lithography system using the same
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- Issue date Jan 12, 2010
- Samsung Electronics Co., Ltd.
- Chang-Wook Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun assembly
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- Issue date Jun 9, 2009
- NuFlare Technology, Inc.
- Rodney Kendall
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Information Patent Grant
Charged particle beam emitting device and method for operating a ch...
- Patent number 7,501,638
- Issue date Mar 10, 2009
- ICT Integrated Circuit Testing Gesellschaft für Halbeiterprüftechnik mbH
- Fang Zhou
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Accelerating electrostatic lens gun for high-speed electron beam in...
- Patent number 7,465,922
- Issue date Dec 16, 2008
- KLA-Tencor Technologies Corporation
- Mark A. McCord
- G01 - MEASURING TESTING
Information Patent Grant
Micro-column electron beam apparatus
- Patent number 7,375,351
- Issue date May 20, 2008
- Electronics and Telecommunications Research Instutute
- Sang Kuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus
- Patent number 7,227,141
- Issue date Jun 5, 2007
- Ebara Corporation
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for use with an electron gun employing a therm...
- Patent number 6,781,296
- Issue date Aug 24, 2004
- United Technologies Corporation
- Brian E. Mensinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
- Patent number 6,297,584
- Issue date Oct 2, 2001
- Etec Systems, Inc.
- Ho-Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for use an electron gun employing a thermionic...
- Patent number 6,196,889
- Issue date Mar 6, 2001
- United Technologies Corporation
- Brian E. Mensinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precision alignment of microcolumn tip to a micron-size extractor a...
- Patent number 6,171,165
- Issue date Jan 9, 2001
- Etec Systems, Inc.
- Ho-Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun having electrically isolated and adjustable cathode
- Patent number 5,686,785
- Issue date Nov 11, 1997
- Mishznarodnii Zentr Elektronno-Prome-newikh Tekhnologii IES im. E.O. Patona NAN
- Boris A. Movchan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for the generation of electron beams
- Patent number 5,623,148
- Issue date Apr 22, 1997
- von Ardenne Anlagentechnik GmbH
- Bernd-Dieter Wenzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for retaining an electrode by a magnetically shielded magnet
- Patent number 5,218,262
- Issue date Jun 8, 1993
- The Perkin-Elmer Corporation
- Masami Taguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron beam generator and emission cathode
- Patent number 5,159,234
- Issue date Oct 27, 1992
- Balzers Aktiengesellschaft
- Urs Wegmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generator for an electron beam gun
- Patent number 5,089,686
- Issue date Feb 18, 1992
- PTR Prazisionstechnik GmbH
- Dieter Fritz
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Charged Particle Beam Source and Charged Particle Beam System
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- JEOL Ltd.
- Kyouichi Kamino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILAMENT POSITIONING SYSTEM AND FILAMENT POSITIONING METHOD
- Publication number 20190074156
- Publication date Mar 7, 2019
- National Center for Nanoscience and Technology, China
- Xixue HU
- G06 - COMPUTING CALCULATING COUNTING
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ION BEAM DEVICE
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IRRADIATION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURI...
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- Nobuo Imaoka
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ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN
- Publication number 20140000104
- Publication date Jan 2, 2014
- DENKI KAGAKU KOGYO KABUSHIKI KAISHA
- Toshiyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
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HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS
- Publication number 20130327951
- Publication date Dec 12, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
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ELECTRON BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE
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- Publication date Nov 15, 2012
- Canon Kabushiki Kaisha
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INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN
- Publication number 20120256097
- Publication date Oct 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
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ION SOURCES, SYSTEMS AND METHODS
- Publication number 20120241640
- Publication date Sep 27, 2012
- CARL ZEISS NTS, LLC.
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- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
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ION BEAM DEVICE
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- Publication date Jun 23, 2011
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- H01 - BASIC ELECTRIC ELEMENTS
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Housing for A Micro-Column
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- Publication date Jul 1, 2010
- CEBT CO. LTD.
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION ELECTRODE MANIPULATOR
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- Publication date Mar 25, 2010
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NANOTIP REPAIR AND CHARACTERIZATION USING FIELD ION MICROSCOPY
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- Texas Instruments Inc.
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SCANNING ELECTRON MICROSCOPE
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- Publication date Mar 5, 2009
- HITACHI
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Charged particle beam equipment
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- Publication date Feb 19, 2009
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Charged Particle Gun
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Electron gun assembly
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- NuFLARE TECHNOLOGY, INC.
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Information Patent Application
Focusing apparatus and lithography system using the same
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- Chang-Wook Moon
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Information Patent Application
Micro-column electron beam apparatus
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- Sang Kuk Choi
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Information Patent Application
Extractor for an microcolumn, an alignment method for an extractor...
- Publication number 20060071175
- Publication date Apr 6, 2006
- CEBT Co., Ltd.
- Ho Seob Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus
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- Publication date Jun 17, 2004
- Mamoru Nakasuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for use with an electron gun employing a therm...
- Publication number 20010000702
- Publication date May 3, 2001
- United Technologies Corporation
- Brian E. Mensinger
- H01 - BASIC ELECTRIC ELEMENTS

Replacing parts of guns Mutual adjustment of electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Filament positioning system and filament positioning method

Gun lens design in a charged particle microscope

Electron source architecture for a scanning electron microscopy system

Charged particle beam generating apparatus, charged particle beam a...

Ion beam device

Enclosure and method for handling electron gun or ion gun

Indirectly heated cathode cartridge design

High brightness electron gun with moving condenser lens

Ion beam device

Ion sources, systems and methods

Nanotip repair and characterization using field ion microscopy

Charged particle gun

Extraction electrode manipulator

Extractor for an microcolumn, an alignment method for an extractor...

Charged particle beam equipment

Focusing apparatus and lithography system using the same

Electron gun assembly

Charged particle beam emitting device and method for operating a ch...

Accelerating electrostatic lens gun for high-speed electron beam in...

Micro-column electron beam apparatus

Electron beam apparatus

Method and apparatus for use with an electron gun employing a therm...

Precision alignment of microcolumn tip to a micron-size extractor a...

Method and apparatus for use an electron gun employing a thermionic...

Precision alignment of microcolumn tip to a micron-size extractor a...

Electron gun having electrically isolated and adjustable cathode

Device for the generation of electron beams

Apparatus for retaining an electrode by a magnetically shielded magnet

Electron beam generator and emission cathode

Electron beam generator for an electron beam gun

Patents Applicationslast 30 patents

Charged Particle Beam Source and Charged Particle Beam System

FILAMENT POSITIONING SYSTEM AND FILAMENT POSITIONING METHOD

ION BEAM DEVICE

IRRADIATION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURI...

ENCLOSURE AND METHOD FOR HANDLING ELECTRIC GUN OR ION GUN

HIGH BRIGHTNESS ELECTRON GUN WITH MOVING CONDENSER LENS

ELECTRON BEAM DRAWING APPARATUS AND METHOD OF MANUFACTURING DEVICE

INDIRECTLY HEATED CATHODE CARTRIDGE DESIGN

ION SOURCES, SYSTEMS AND METHODS

ION BEAM DEVICE

Housing for A Micro-Column

EXTRACTION ELECTRODE MANIPULATOR

NANOTIP REPAIR AND CHARACTERIZATION USING FIELD ION MICROSCOPY

SCANNING ELECTRON MICROSCOPE

Charged particle beam equipment

Charged Particle Gun

Electron gun assembly

Focusing apparatus and lithography system using the same

Micro-column electron beam apparatus

Extractor for an microcolumn, an alignment method for an extractor...

Electron beam apparatus

Method and apparatus for use with an electron gun employing a therm...