Resolution enhancement techniques not otherwise provided for

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G03F7/70325

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70325Resolution enhancement techniques not otherwise provided for

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Frequency broadening apparatus and method
- Patent number 11,733,617
- Issue date Aug 22, 2023
- ASML Netherlands B.V.
- Patrick Sebastian Uebel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for industrial scale continuous holographic litho...
- Patent number 11,687,004
- Issue date Jun 27, 2023
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,604,416
- Issue date Mar 14, 2023
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,269,258
- Issue date Mar 8, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Frequency broadening apparatus and method
- Patent number 11,262,665
- Issue date Mar 1, 2022
- ASML Netherlands B.V.
- Patrick Sebastian Uebel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining curvilinear patterns for patterning device
- Patent number 11,232,249
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Quan Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser processing method and laser processing system
- Patent number 11,194,255
- Issue date Dec 7, 2021
- Gigaphoton Inc.
- Koji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Euv lithography system for dense line patterning
- Patent number 11,099,483
- Issue date Aug 24, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling an industrial process using pr...
- Patent number 11,054,813
- Issue date Jul 6, 2021
- ASML Netherlands B.V.
- Alexander Ypma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large area high resolution feature reduction lithography technique
- Patent number 11,042,098
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Arvinder Chadha
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for light field correction of colored surfaces in...
- Patent number 10,892,166
- Issue date Jan 12, 2021
- L'Oreal
- Parham Aarabi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
EUV lithography system for dense line patterning
- Patent number 10,890,849
- Issue date Jan 12, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,884,340
- Issue date Jan 5, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System and method for industrial scale continuous holographic litho...
- Patent number 10,845,709
- Issue date Nov 24, 2020
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,747,118
- Issue date Aug 18, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electromagnetic radiation enhancement methods and systems
- Patent number 10,732,422
- Issue date Aug 4, 2020
- Yakov G. Soskind
- G02 - OPTICS
Information Patent Grant
Method and apparatus for exposing a structure on a substrate
- Patent number 10,670,972
- Issue date Jun 2, 2020
- Infineon Technologies AG
- Rudolf Zelsacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Etch-assist features
- Patent number 10,627,722
- Issue date Apr 21, 2020
- ASML Netherlands B.V.
- Wim Tjibbo Tel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,539,880
- Issue date Jan 21, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography patterning with a gas phase resist
- Patent number 10,514,610
- Issue date Dec 24, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shu-Hao Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target feeding system
- Patent number 10,495,974
- Issue date Dec 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ming-Hsun Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spin torque MRAM fabrication using negative tone lithography and io...
- Patent number 10,388,857
- Issue date Aug 20, 2019
- International Business Machines Corporation
- Anthony J. Annunziata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask plate
- Patent number 10,209,616
- Issue date Feb 19, 2019
- BOE Technology Group Co., Ltd.
- Chaobo Zhang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electromagnetic radiation enhancement methods and systems
- Patent number 10,209,526
- Issue date Feb 19, 2019
- Yakov Soskind
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 10,191,388
- Issue date Jan 29, 2019
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Nanoscale pattern exposure system
- Patent number 10,191,385
- Issue date Jan 29, 2019
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Spin torque MRAM fabrication using negative tone lithography and io...
- Patent number 10,170,698
- Issue date Jan 1, 2019
- Anthony J. Annunziata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 10,126,661
- Issue date Nov 13, 2018
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for imparting direction-selective light attenu...
- Patent number 10,114,294
- Issue date Oct 30, 2018
- Carl Zeiss SMS Ltd
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
A METHOD AND APPARATUS FOR IMPROVING THE UNIFORMITY OF EXPOSURE OF...
- Publication number 20250053095
- Publication date Feb 13, 2025
- EULITHA A.G.
- FRANCIS CLUBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INFORMATION PROCESSING APPARATUS, EXPOSURE APPARATUS, AND ARTICLE M...
- Publication number 20240393700
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- JUN KITAGAWA
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD FOR DETERMINING A POSITION OF A MIRROR
- Publication number 20240255319
- Publication date Aug 1, 2024
- Carl Zeiss SMT GMBH
- Michael Patra
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERNING DEVICE DEFECT DETECTION SYSTEMS AND METHODS
- Publication number 20240210336
- Publication date Jun 27, 2024
- ASML NETHERLANDS B.V.
- Marie-Claire VAN LARE
- G01 - MEASURING TESTING
Information Patent Application
CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LI...
- Publication number 20240201486
- Publication date Jun 20, 2024
- ASML NETHERLANDS B.V.
- Krishanu SHOME
- G02 - OPTICS
Information Patent Application
PHYSICALLY DETECTABLE ID INTRODUCED BY LITHOGRAPHY SRAF INSERTION F...
- Publication number 20240201583
- Publication date Jun 20, 2024
- International Business Machines Corporation
- Cheng Chi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH-SPEED NANOPATTERNING METHOD AND APPARATUS OF TWO-COLOR SUPER-R...
- Publication number 20240061343
- Publication date Feb 22, 2024
- Foundation of Soongsil University-Industry Cooperation
- Dong-Ryoung LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20220197150
- Publication date Jun 23, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
FREQUENCY BROADENING APPARATUS AND METHOD
- Publication number 20220128912
- Publication date Apr 28, 2022
- ASML NETHERLANDS B.V.
- Patrick Sebastian UEBEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
- Publication number 20220121804
- Publication date Apr 21, 2022
- ASML Netherland B.V.
- Quan Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM
- Publication number 20220050382
- Publication date Feb 17, 2022
- Gigaphoton Inc.
- Koji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...
- Publication number 20210173311
- Publication date Jun 10, 2021
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20210124273
- Publication date Apr 29, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE
- Publication number 20210048753
- Publication date Feb 18, 2021
- ASML NETHERLANDS B.V.
- Quan ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200379356
- Publication date Dec 3, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Frequency Broadening Apparatus and Method
- Publication number 20200310251
- Publication date Oct 1, 2020
- ASML NETHERLANDS B.V.
- Patrick Sebastian UEBEL
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200166850
- Publication date May 28, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR LIGHT FIELD CORRECTION OF COLORED SURFACES IN...
- Publication number 20200027744
- Publication date Jan 23, 2020
- L'Oreal
- Parham AARABI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY TARGET
- Publication number 20200011650
- Publication date Jan 9, 2020
- Carl Zeiss SMT GMBH
- Hans-Michael Stiepan
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20190155167
- Publication date May 23, 2019
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Application
Electromagnetic Radiation Enhancement Methods and Systems
- Publication number 20190137769
- Publication date May 9, 2019
- Yakov G. Soskind
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Target Feeding System
- Publication number 20190079401
- Publication date Mar 14, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsun Tsai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20190064678
- Publication date Feb 28, 2019
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...
- Publication number 20180329309
- Publication date Nov 15, 2018
- Photia Incorporated
- Joseph Bernhardt Geddes
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Patterning with a Gas Phase Resist
- Publication number 20180314167
- Publication date Nov 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Shu-Hao Chang
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS
- Publication number 20180307216
- Publication date Oct 25, 2018
- Alexander YPMA
- G05 - CONTROLLING REGULATING
Information Patent Application
EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
- Publication number 20180299788
- Publication date Oct 18, 2018
- Nikon Corporation
- Akimitsu Ebihara
- B82 - NANO-TECHNOLOGY
Information Patent Application
NANOSCALE PATTERN EXPOSURE SYSTEM
- Publication number 20180173106
- Publication date Jun 21, 2018
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE
- Publication number 20180173107
- Publication date Jun 21, 2018
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Resolution enhancement techniques not otherwise provided for

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for nanoscale data recording

Frequency broadening apparatus and method

System and method for industrial scale continuous holographic litho...

Laser processing method and laser processing system

Method and system for nanoscale data recording

Frequency broadening apparatus and method

Method for determining curvilinear patterns for patterning device

Laser processing method and laser processing system

Euv lithography system for dense line patterning

Method and apparatus for controlling an industrial process using pr...

Large area high resolution feature reduction lithography technique

System and method for light field correction of colored surfaces in...

EUV lithography system for dense line patterning

Method and system for nanoscale data recording

System and method for industrial scale continuous holographic litho...

Method and system for nanoscale data recording

Electromagnetic radiation enhancement methods and systems

Method and apparatus for exposing a structure on a substrate

Etch-assist features

Method and system for nanoscale data recording

Lithography patterning with a gas phase resist

Target feeding system

Spin torque MRAM fabrication using negative tone lithography and io...

Mask plate

Electromagnetic radiation enhancement methods and systems

Exposure apparatus, and device manufacturing method

Nanoscale pattern exposure system

Spin torque MRAM fabrication using negative tone lithography and io...

Exposure apparatus and device fabrication method

Apparatus and method for imparting direction-selective light attenu...

Patents Applicationslast 30 patents

A METHOD AND APPARATUS FOR IMPROVING THE UNIFORMITY OF EXPOSURE OF...

INFORMATION PROCESSING APPARATUS, EXPOSURE APPARATUS, AND ARTICLE M...

METHOD FOR DETERMINING A POSITION OF A MIRROR

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

PATTERNING DEVICE DEFECT DETECTION SYSTEMS AND METHODS

CONTROLLING ABERRATION IN AN OPTICAL SYSTEM, A METROLOGY SYSTEM, LI...

PHYSICALLY DETECTABLE ID INTRODUCED BY LITHOGRAPHY SRAF INSERTION F...

HIGH-SPEED NANOPATTERNING METHOD AND APPARATUS OF TWO-COLOR SUPER-R...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

FREQUENCY BROADENING APPARATUS AND METHOD

METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE

LASER PROCESSING METHOD AND LASER PROCESSING SYSTEM

SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD FOR DETERMINING CURVILINEAR PATTERNS FOR PATTERNING DEVICE

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

Frequency Broadening Apparatus and Method

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

SYSTEM AND METHOD FOR LIGHT FIELD CORRECTION OF COLORED SURFACES IN...

METROLOGY TARGET

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

Electromagnetic Radiation Enhancement Methods and Systems

Target Feeding System

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

SYSTEM AND METHOD FOR INDUSTRIAL SCALE CONTINUOUS HOLOGRAPHIC LITHO...

Lithography Patterning with a Gas Phase Resist

METHOD & APPARATUS FOR CONTROLLING AN INDUSTRIAL PROCESS

EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

NANOSCALE PATTERN EXPOSURE SYSTEM

EXPOSURE METHOD, EXPOSURE APPARATUS, AND METHOD FOR PRODUCING DEVICE