Rotary scanning

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G03F7/70366

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70366Rotary scanning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,886,123
- Issue date Jan 30, 2024
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Grant
Supporting an optical element
- Patent number 11,314,177
- Issue date Apr 26, 2022
- Carl Zeiss SMT GmbH
- Jens Kugler
- G02 - OPTICS
Information Patent Grant
System and method for overlay error reduction
- Patent number 11,287,746
- Issue date Mar 29, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hung-Chung Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 11,269,258
- Issue date Mar 8, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 11,073,767
- Issue date Jul 27, 2021
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dense line extreme ultraviolet lithography system with distortion m...
- Patent number 11,067,900
- Issue date Jul 20, 2021
- NIKON CORPORATION
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,884,340
- Issue date Jan 5, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,747,118
- Issue date Aug 18, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dense line extreme ultraviolet lithography system with distortion m...
- Patent number 10,712,671
- Issue date Jul 14, 2020
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,691,027
- Issue date Jun 23, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,591,827
- Issue date Mar 17, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanoscale data recording
- Patent number 10,539,880
- Issue date Jan 21, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,527,945
- Issue date Jan 7, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Nanoscale pattern exposure system
- Patent number 10,191,385
- Issue date Jan 29, 2019
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,156,795
- Issue date Dec 18, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, processing apparatus, and method fo...
- Patent number 10,007,190
- Issue date Jun 26, 2018
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for creating nanoscale patterns
- Patent number 9,891,536
- Issue date Feb 13, 2018
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure device and exposure method
- Patent number 9,851,642
- Issue date Dec 26, 2017
- Sony Corporation
- Shinsuke Haga
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,568,831
- Issue date Feb 14, 2017
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,494,869
- Issue date Nov 15, 2016
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Super-resolution exposure system
- Patent number 9,442,382
- Issue date Sep 13, 2016
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,372,412
- Issue date Jun 21, 2016
- ASML Netherlands B.V.
- Erwin John Van Zwet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for writing nanoscale patterns
- Patent number 9,229,330
- Issue date Jan 5, 2016
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,134,630
- Issue date Sep 15, 2015
- ASML Netherlands B.V.
- Erwin John Van Zwet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for nanopatterning
- Patent number 9,128,380
- Issue date Sep 8, 2015
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,041,911
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Writing apparatuses and methods
- Patent number 8,822,879
- Issue date Sep 2, 2014
- Mycronic AB
- Lars Stiblert
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method and device using rotating printing arm to project or view im...
- Patent number 8,755,590
- Issue date Jun 17, 2014
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Lithographic printing system with placement corrections
- Patent number 8,570,613
- Issue date Oct 29, 2013
- Micronic Laser Systems AB
- Torbjorn Sandstrom
- G01 - MEASURING TESTING
Information Patent Grant
Rotor optics imaging method and system with variable dose during sweep
- Patent number 8,537,416
- Issue date Sep 17, 2013
- Micronic Laser Systems AB
- Torbjörn Sandström
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR LITHOGRAPHIC TOOLS WITH INCREASED TOLERANCES
- Publication number 20250021012
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Jasper WINTERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES
- Publication number 20240402607
- Publication date Dec 5, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Thomas Klein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, EXPOSURE DEVICE, AND METHOD OF FORMING OPTICALLY-A...
- Publication number 20240288678
- Publication date Aug 29, 2024
- FUJIFILM CORPORATION
- Hirotoshi ANDO
- G02 - OPTICS
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20240248407
- Publication date Jul 25, 2024
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD TO FABRICATE LARGE SCALE FLAT OPTICS LENSES
- Publication number 20220308460
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Yongan XU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20220197150
- Publication date Jun 23, 2022
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR OVERLAY ERROR REDUCTION
- Publication number 20220100103
- Publication date Mar 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hung-Chung CHIEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORTING AN OPTICAL ELEMENT
- Publication number 20210181644
- Publication date Jun 17, 2021
- Carl Zeiss SMT GMBH
- Jens Kugler
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20210124273
- Publication date Apr 29, 2021
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200379356
- Publication date Dec 3, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...
- Publication number 20200326633
- Publication date Oct 15, 2020
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200310253
- Publication date Oct 1, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20200166850
- Publication date May 28, 2020
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20200089129
- Publication date Mar 19, 2020
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190332018
- Publication date Oct 31, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...
- Publication number 20190212663
- Publication date Jul 11, 2019
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
- Publication number 20190155167
- Publication date May 23, 2019
- Franklin Mark Schellenberg
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20190025713
- Publication date Jan 24, 2019
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20180267413
- Publication date Sep 20, 2018
- NIKON CORPORATION
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
NANOSCALE PATTERN EXPOSURE SYSTEM
- Publication number 20180173106
- Publication date Jun 21, 2018
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...
- Publication number 20170168400
- Publication date Jun 15, 2017
- Nikon Corporation
- Masaki Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140354970
- Publication date Dec 4, 2014
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140340666
- Publication date Nov 20, 2014
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATING WAVEGUIDE FABRICATION METHOD
- Publication number 20140116982
- Publication date May 1, 2014
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method For Nanolithography
- Publication number 20140055769
- Publication date Feb 27, 2014
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS
- Publication number 20140049760
- Publication date Feb 20, 2014
- Micronic Mydata AB
- Torbjörn Sandström
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE USING ROTATING PRINTING ARM TO PROJECT OR VIEW IM...
- Publication number 20130250030
- Publication date Sep 26, 2013
- Micronic Mydata AB
- Torbjorn Sandstrom
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Variable Length Imaging Apparatus Using Electronically Registered A...
- Publication number 20130050803
- Publication date Feb 28, 2013
- Palo Alto Research Center Incorporated
- Timothy David Stowe
- G02 - OPTICS
Information Patent Application
Illuminating waveguide fabrication method
- Publication number 20120312774
- Publication date Dec 13, 2012
- Franklin Mark Schellenberg
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120314194
- Publication date Dec 13, 2012
- ASML NETHERLANDS B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Rotary scanning

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for nanoscale data recording

Supporting an optical element

System and method for overlay error reduction

Method and system for nanoscale data recording

Substrate processing apparatus, processing apparatus, and method fo...

Dense line extreme ultraviolet lithography system with distortion m...

Method and system for nanoscale data recording

Method and system for nanoscale data recording

Dense line extreme ultraviolet lithography system with distortion m...

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

Method and system for nanoscale data recording

Substrate processing apparatus, processing apparatus, and method fo...

Nanoscale pattern exposure system

Substrate processing apparatus, processing apparatus, and method fo...

Substrate processing apparatus, processing apparatus, and method fo...

System for creating nanoscale patterns

Exposure device and exposure method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Super-resolution exposure system

Lithographic apparatus and device manufacturing method

Method for writing nanoscale patterns

Lithographic apparatus and device manufacturing method

Method and system for nanopatterning

Lithographic apparatus and device manufacturing method

Writing apparatuses and methods

Method and device using rotating printing arm to project or view im...

Lithographic printing system with placement corrections

Rotor optics imaging method and system with variable dose during sweep

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR LITHOGRAPHIC TOOLS WITH INCREASED TOLERANCES

UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES

EXPOSURE METHOD, EXPOSURE DEVICE, AND METHOD OF FORMING OPTICALLY-A...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD TO FABRICATE LARGE SCALE FLAT OPTICS LENSES

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

SYSTEM AND METHOD FOR OVERLAY ERROR REDUCTION

SUPPORTING AN OPTICAL ELEMENT

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...

METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

NANOSCALE PATTERN EXPOSURE SYSTEM

SUBSTRATE PROCESSING APPARATUS, PROCESSING APPARATUS, AND METHOD FO...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

ILLUMINATING WAVEGUIDE FABRICATION METHOD

Method For Nanolithography

LITHOGRAPHIC PRINTING SYSTEM WITH PLACEMENT CORRECTIONS

METHOD AND DEVICE USING ROTATING PRINTING ARM TO PROJECT OR VIEW IM...

Variable Length Imaging Apparatus Using Electronically Registered A...

Illuminating waveguide fabrication method

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD