Rotating beam around optical axis

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H01J2237/1505

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1505Rotating beam around optical axis

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Patents Grantslast 30 patents

Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam trajectory via combination of image shift and hardware alpha tilt
- Patent number 11,574,794
- Issue date Feb 7, 2023
- FEI Company
- OndOnd{hacek over (r)}ej L. Shánel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 11,469,076
- Issue date Oct 11, 2022
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Massen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques, system and apparatus for selective deposition of a laye...
- Patent number 10,879,055
- Issue date Dec 29, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Measurement method and electron microscope
- Patent number 10,714,308
- Issue date Jul 14, 2020
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning transmission electron microscope
- Patent number 10,636,622
- Issue date Apr 28, 2020
- Tescan Orsay Holding, A.S.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SEM image acquisition device and SEM image acquisition method
- Patent number 10,553,391
- Issue date Feb 4, 2020
- HOLON CO., LTD.
- Izumi Santo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and charged particle beam writ...
- Patent number 10,504,686
- Issue date Dec 10, 2019
- NuFlare Technology, Inc.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, apparatuses, systems and software for treatment of a speci...
- Patent number 10,354,836
- Issue date Jul 16, 2019
- IB Labs, Inc.
- Dimitry Boguslavsky
- G01 - MEASURING TESTING
Information Patent Grant
Methods, apparatuses, systems and software for treatment of a speci...
- Patent number 9,911,573
- Issue date Mar 6, 2018
- IB Labs, Inc.
- Dimitry Boguslavsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing and/or for observing an object, and particle...
- Patent number 9,685,300
- Issue date Jun 20, 2017
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin rotation device
- Patent number 9,466,454
- Issue date Oct 11, 2016
- SANYU DENSHI CO., LTD.
- Tuneo Yasue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotation angle measuring method of multi-charged particle beam imag...
- Patent number 9,466,461
- Issue date Oct 11, 2016
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving characteristic peak signals in anal...
- Patent number 9,406,496
- Issue date Aug 2, 2016
- Universitat de Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Grant
Off-axis ion milling device for manufacture of magnetic recording m...
- Patent number 8,232,532
- Issue date Jul 31, 2012
- Hitachi Global Storage Technologies Netherlands B.V.
- Thomas Robert Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for controlling a charged particle beam and a lithographi...
- Patent number 5,663,568
- Issue date Sep 2, 1997
- Lucent Technologies Inc.
- Warren Kazmir Waskiewicz
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam lithography system and method therefor
- Patent number 5,311,026
- Issue date May 10, 1994
- Hitachi, Ltd.
- Norio Saitou
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Variable shaped spot electron beam pattern generator
- Patent number 4,825,033
- Issue date Apr 25, 1989
- U.S. Philips Corporation
- James P. Beasley
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for electron beam lithography
- Patent number 4,577,111
- Issue date Mar 18, 1986
- Hitachi, Ltd.
- Norio Saitou
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20230274906
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...
- Publication number 20230260744
- Publication date Aug 17, 2023
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- G01 - MEASURING TESTING
Information Patent Application
BEAM TRAJECTORY VIA COMBINATION OF IMAGE SHIFT AND HARDWARE ALPHA TILT
- Publication number 20220310354
- Publication date Sep 29, 2022
- FEI Company
- Ondrej L. Shánel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...
- Publication number 20210217582
- Publication date Jul 15, 2021
- ASML NETHERLANDS B.V.
- Martinus Gerardus, Maria, Johannes MAASSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Measurement Method and Electron Microscope
- Publication number 20190088447
- Publication date Mar 21, 2019
- JEOL Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEM IMAGE ACQUISITION DEVICE AND SEM IMAGE ACQUISITION METHOD
- Publication number 20180286626
- Publication date Oct 4, 2018
- HOLON CO., LTD.
- Izumi Santo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods, Apparatuses, Systems and Software for Treatment of a Speci...
- Publication number 20180174798
- Publication date Jun 21, 2018
- IB LABS, INC.
- Dimitry BOGUSLAVSKY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATION ANGLE MEASURING METHOD OF MULTI-CHARGED PARTICLE BEAM IMAG...
- Publication number 20160211111
- Publication date Jul 21, 2016
- NuFlare Technology, Inc.
- Osamu IIZUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE...
- Publication number 20160181058
- Publication date Jun 23, 2016
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN ROTATION DEVICE
- Publication number 20140197734
- Publication date Jul 17, 2014
- SANYU DENSHI CO., LTD
- Tuneo Yasue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...
- Publication number 20130240728
- Publication date Sep 19, 2013
- Universitat De Barcelona
- Sonia Estrade Albiol
- G01 - MEASURING TESTING
Information Patent Application
OFF-AXIS ION MILLING DEVICE FOR MANUFACTURE OF MAGNETIC RECORDING M...
- Publication number 20100320393
- Publication date Dec 23, 2010
- Thomas Robert Albrecht
- H01 - BASIC ELECTRIC ELEMENTS

Rotating beam around optical axis

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for scanning a sample using multi-beam inspection...

Beam trajectory via combination of image shift and hardware alpha tilt

System and method for scanning a sample using multi-beam inspection...

Techniques, system and apparatus for selective deposition of a laye...

Measurement method and electron microscope

Scanning transmission electron microscope

SEM image acquisition device and SEM image acquisition method

Charged particle beam writing method and charged particle beam writ...

Methods, apparatuses, systems and software for treatment of a speci...

Methods, apparatuses, systems and software for treatment of a speci...

Method for processing and/or for observing an object, and particle...

Spin rotation device

Rotation angle measuring method of multi-charged particle beam imag...

Method and system for improving characteristic peak signals in anal...

Off-axis ion milling device for manufacture of magnetic recording m...

Apparatus for controlling a charged particle beam and a lithographi...

Charged particle beam lithography system and method therefor

Variable shaped spot electron beam pattern generator

Apparatus for electron beam lithography

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...

BEAM TRAJECTORY VIA COMBINATION OF IMAGE SHIFT AND HARDWARE ALPHA TILT

SYSTEM AND METHOD FOR SCANNING A SAMPLE USING MULTI-BEAM INSPECTION...

Measurement Method and Electron Microscope

SEM IMAGE ACQUISITION DEVICE AND SEM IMAGE ACQUISITION METHOD

Methods, Apparatuses, Systems and Software for Treatment of a Speci...

ROTATION ANGLE MEASURING METHOD OF MULTI-CHARGED PARTICLE BEAM IMAG...

METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE...

SPIN ROTATION DEVICE

METHOD AND SYSTEM FOR IMPROVING CHARACTERISTIC PEAK SIGNALS IN ANAL...

OFF-AXIS ION MILLING DEVICE FOR MANUFACTURE OF MAGNETIC RECORDING M...