Number | Name | Date | Kind |
---|---|---|---|
3715582 | Akahori et al. | Feb 1973 | |
4362942 | Yasuda | Dec 1982 | |
4400622 | Takeuchi et al. | Aug 1983 | |
4468565 | Blair et al. | Aug 1984 | |
4825033 | Beasley | Apr 1989 | |
4871912 | Kokubo et al. | Oct 1989 | |
4973849 | Nakamura et al. | Nov 1990 | |
5258246 | Berger et al. | Nov 1993 | |
5288567 | Sakamoto et al. | Feb 1994 | |
5311026 | Saitou et al. | May 1994 |
Number | Date | Country |
---|---|---|
56-45025 | Apr 1981 | JPX |
2-82612 | Mar 1990 | JPX |
Entry |
---|
"Electron-Optical Design for the Scalpel Proof-of-Concept Tool," Waskiewicz et al. |