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H01J37/32376

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32376Scanning across large workpieces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Techniques, system and apparatus for selective deposition of a laye...
- Patent number 10,879,055
- Issue date Dec 29, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Drop-on-demand identification document printing with surface pre-tr...
- Patent number 10,800,194
- Issue date Oct 13, 2020
- ENTRUST DATACARD CORPORATION
- Cory Wooldridge
- B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information Patent Grant
Drop-on-demand identification document printing with surface pre-tr...
- Patent number 10,576,769
- Issue date Mar 3, 2020
- ENTRUST DATACARD CORPORATION
- Cory Wooldridge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for processing substrates using small plasma chambers
- Patent number 10,332,727
- Issue date Jun 25, 2019
- Lam Research Corporation
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Small plasma chamber systems and methods
- Patent number 9,911,578
- Issue date Mar 6, 2018
- Lam Research Corporation
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 9,343,269
- Issue date May 17, 2016
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Tomohiro Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus
- Patent number 9,293,300
- Issue date Mar 22, 2016
- Hitachi, Ltd.
- Hiroyuki Kobayashi
- B08 - CLEANING
Information Patent Grant
Dynamic electrode plasma system
- Patent number 9,190,248
- Issue date Nov 17, 2015
- Varian Semiconductor Equipment Associates, Inc.
- James P. Buonodono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small plasma chamber systems and methods
- Patent number 9,111,729
- Issue date Aug 18, 2015
- Lam Research Corporation
- Richard Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
E-beam enhanced decoupled source for semiconductor processing
- Patent number 9,111,728
- Issue date Aug 18, 2015
- Lam Research Corporation
- John Patrick Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma arc coating
- Patent number 8,997,687
- Issue date Apr 7, 2015
- Exatec LLC
- Steven M. Gasworth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for maskless patterned implantation
- Patent number 8,907,307
- Issue date Dec 9, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher J. Leavitt
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,703,613
- Issue date Apr 22, 2014
- Panasonic Corporation
- Tomohiro Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,558,134
- Issue date Oct 15, 2013
- Tokyo Electron Limited
- Yusuke Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing bevel protective film
- Patent number 8,501,283
- Issue date Aug 6, 2013
- Lam Research Corporation
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process and installation for surface preparation by dielectric barr...
- Patent number 8,470,095
- Issue date Jun 25, 2013
- AGC Glass Europe
- Eric Tixhon
- B08 - CLEANING
Information Patent Grant
Method of forming thin film and apparatus for forming thin film
- Patent number 8,460,522
- Issue date Jun 11, 2013
- ULVAC, Inc.
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for reactive atom plasma processing for materi...
- Patent number 7,955,513
- Issue date Jun 7, 2011
- RAPT Industries, Inc.
- Jeffrey W. Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for treating a substrate
- Patent number 7,645,495
- Issue date Jan 12, 2010
- OTB Solar B.V.
- Franciscus Cornelius Dings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and apparatus
- Patent number 7,465,407
- Issue date Dec 16, 2008
- Panasonic Corporation
- Mitsuo Saitoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for reactive atom plasma processing for materi...
- Patent number 7,311,851
- Issue date Dec 25, 2007
- RAPT Industries, Inc.
- Jeffrey W. Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning plasma reactor
- Patent number 7,270,724
- Issue date Sep 18, 2007
- UVTech Systems, Inc.
- David J. Elliott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric pressure plasma processing method and apparatus
- Patent number 7,056,416
- Issue date Jun 6, 2006
- Matsushita Electric Industrial Co., Ltd.
- Tomohiro Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma processing method
- Patent number 7,022,615
- Issue date Apr 4, 2006
- Matsushita Electric Industrial Co., Ltd.
- Tomohiro Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Local dry etching method
- Patent number 6,908,566
- Issue date Jun 21, 2005
- SPEEDFAM Co., Ltd.
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanotopography removing method
- Patent number 6,875,701
- Issue date Apr 5, 2005
- Speedfam Co., Ltd
- Michihiko Yanagisawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable apparatus and method for treating a workpiece
- Patent number 6,821,379
- Issue date Nov 23, 2004
- The Procter & Gamble Company
- Saswati Datta
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus and method for reactive atom plasma processing for materi...
- Patent number 6,660,177
- Issue date Dec 9, 2003
- Rapt Industries Inc.
- Jeffrey W. Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for treating articles with a plasma jet
- Patent number 6,238,587
- Issue date May 29, 2001
- Ipec Precison, Inc.
- Oleg Siniaguine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Localized plasma assisted chemical etching through a mask
- Patent number 5,688,415
- Issue date Nov 18, 1997
- Ipec Precision, Inc.
- David Bollinger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
- Publication number 20240213089
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Navaneetha Krishnan SUBBAIYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DROP-ON-DEMAND IDENTIFICATION DOCUMENT PRINTING WITH SURFACE PRE-TR...
- Publication number 20200164672
- Publication date May 28, 2020
- ENTRUST DATACARD CORPORATION
- Cory Wooldridge
- B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information Patent Application
TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...
- Publication number 20200027707
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- CHRISTOPHER HATEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DROP-ON-DEMAND IDENTIFICATION DOCUMENT PRINTING WITH SURFACE PRE-TR...
- Publication number 20180257416
- Publication date Sep 13, 2018
- ENTRUST DATACARD CORPORATION
- Cory Wooldridge
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Methods for Processing Substrates Using Small Plasma Chambers
- Publication number 20180144906
- Publication date May 24, 2018
- LAM RESEARCH CORPORATION
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL SPRAYING METHOD AND DEVICE THEREFOR
- Publication number 20160118228
- Publication date Apr 28, 2016
- MAHLE International GmbH
- Peter ENGLERT
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
TOOL AND PROCESS FOR TREATING AN OBJECT BY PLASMA GENERATORS
- Publication number 20140231242
- Publication date Aug 21, 2014
- Marc Brassier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Small Plasma Chamber Systems and Methods
- Publication number 20140151333
- Publication date Jun 5, 2014
- LAM RESEARCH CORPORATION
- Richard Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM
- Publication number 20130312913
- Publication date Nov 28, 2013
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20130105460
- Publication date May 2, 2013
- PANASONIC CORPORATION
- TOMOHIRO OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20130098556
- Publication date Apr 25, 2013
- Hitachi, Ltd
- Hiroyuki KOBAYASHI
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20120325777
- Publication date Dec 27, 2012
- PANASONIC CORPORATION
- Tomohiro Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-Beam Enhanced Decoupled Source for Semiconductor Processing
- Publication number 20120258606
- Publication date Oct 11, 2012
- LAM RESEARCH CORPORATION
- John Patrick Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MASKLESS PATTERNED IMPLANTION
- Publication number 20120228515
- Publication date Sep 13, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Christopher J. Leavitt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extended Reactor Assembly with Multiple Sections for Performing Ato...
- Publication number 20120125258
- Publication date May 24, 2012
- SYNOS TECHNOLOGY, INC.
- Sang In LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING BEVEL PROTECTIVE FILM
- Publication number 20120094502
- Publication date Apr 19, 2012
- Neungho Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20110209829
- Publication date Sep 1, 2011
- Sekisui Chemical Co., Ltd
- Takashi Umeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Insulator Interposed Type Plasma Processing Apparatus
- Publication number 20110180403
- Publication date Jul 28, 2011
- Ferrotec Corporation
- Yuichi Shiina
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS AND INSTALLATION FOR SURFACE PREPARATION BY DIELECTRIC BARR...
- Publication number 20110174333
- Publication date Jul 21, 2011
- AGC GLASS EUROPE
- Eric Tixhon
- B08 - CLEANING
Information Patent Application
SMALL PLASMA CHAMBER SYSTEMS AND METHODS
- Publication number 20110132874
- Publication date Jun 9, 2011
- Richard Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM
- Publication number 20100155225
- Publication date Jun 24, 2010
- Yuichi Oishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20090242520
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Yusuke HIRAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGH...
- Publication number 20090229972
- Publication date Sep 17, 2009
- R. Mohan Sankaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SURFACE TREATING SUBSTRATE AND PLASMA TREATMENT APPARATUS
- Publication number 20090133714
- Publication date May 28, 2009
- SEIKO EPSON CORPORATION
- Tadashi YAMAZAKI
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR PLASMA ARC COATING
- Publication number 20080160205
- Publication date Jul 3, 2008
- Steven M. Gasworth
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Processing Apparatus with Scanning Injector and Plasma Proce...
- Publication number 20080127892
- Publication date Jun 5, 2008
- Hynix Semiconductor Inc.
- Tai Ho Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR REACTIVE ATOM PLASMA PROCESSING FOR MATERI...
- Publication number 20080099441
- Publication date May 1, 2008
- RAPT INDUSTRIES, INC.
- Jeffrey W. Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Medium pressure plasma system for removal of surface layers without...
- Publication number 20070228008
- Publication date Oct 4, 2007
- University of Houston
- John C. Wolfe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for treating a substrate
- Publication number 20060231031
- Publication date Oct 19, 2006
- OTB GROUP B.V.
- Franciscus Cornelius Dings
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing method and apparatus
- Publication number 20050279458
- Publication date Dec 22, 2005
- Tomohiro Okumura
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Scanning across large workpieces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Techniques, system and apparatus for selective deposition of a laye...

Drop-on-demand identification document printing with surface pre-tr...

Drop-on-demand identification document printing with surface pre-tr...

Methods for processing substrates using small plasma chambers

Small plasma chamber systems and methods

Plasma processing apparatus

Plasma processing apparatus

Dynamic electrode plasma system

Small plasma chamber systems and methods

E-beam enhanced decoupled source for semiconductor processing

Apparatus and method for plasma arc coating

Apparatus and method for maskless patterned implantation

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Methods for depositing bevel protective film

Process and installation for surface preparation by dielectric barr...

Method of forming thin film and apparatus for forming thin film

Apparatus and method for reactive atom plasma processing for materi...

Method and apparatus for treating a substrate

Plasma processing method and apparatus

Apparatus and method for reactive atom plasma processing for materi...

Scanning plasma reactor

Atmospheric pressure plasma processing method and apparatus

Plasma processing method

Local dry etching method

Nanotopography removing method

Portable apparatus and method for treating a workpiece

Apparatus and method for reactive atom plasma processing for materi...

Method for treating articles with a plasma jet

Localized plasma assisted chemical etching through a mask

Patents Applicationslast 30 patents

INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL

DROP-ON-DEMAND IDENTIFICATION DOCUMENT PRINTING WITH SURFACE PRE-TR...

TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...

DROP-ON-DEMAND IDENTIFICATION DOCUMENT PRINTING WITH SURFACE PRE-TR...

Methods for Processing Substrates Using Small Plasma Chambers

THERMAL SPRAYING METHOD AND DEVICE THEREFOR

TOOL AND PROCESS FOR TREATING AN OBJECT BY PLASMA GENERATORS

Small Plasma Chamber Systems and Methods

ARRANGEMENT FOR DEPOSITING BEVEL PROTECTIVE FILM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

E-Beam Enhanced Decoupled Source for Semiconductor Processing

APPARATUS AND METHOD FOR MASKLESS PATTERNED IMPLANTION

Extended Reactor Assembly with Multiple Sections for Performing Ato...

METHODS FOR DEPOSITING BEVEL PROTECTIVE FILM

SURFACE TREATMENT APPARATUS

Insulator Interposed Type Plasma Processing Apparatus

PROCESS AND INSTALLATION FOR SURFACE PREPARATION BY DIELECTRIC BARR...

SMALL PLASMA CHAMBER SYSTEMS AND METHODS

METHOD OF FORMING THIN FILM AND APPARATUS FOR FORMING THIN FILM

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGH...

METHOD FOR SURFACE TREATING SUBSTRATE AND PLASMA TREATMENT APPARATUS

APPARATUS AND METHOD FOR PLASMA ARC COATING

Plasma Processing Apparatus with Scanning Injector and Plasma Proce...

APPARATUS AND METHOD FOR REACTIVE ATOM PLASMA PROCESSING FOR MATERI...

Medium pressure plasma system for removal of surface layers without...

Method and apparatus for treating a substrate

Plasma processing method and apparatus