Scanning microscopes

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H01J2237/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/28Scanning microscopes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method, apparatus, and system for dynamically controlling an electr...
- Patent number 12,368,067
- Issue date Jul 22, 2025
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for inspecting a specimen and charged particle beam device
- Patent number 12,362,131
- Issue date Jul 15, 2025
- Applied Materials Israel Ltd.
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Simple spherical aberration corrector for SEM
- Patent number 12,362,132
- Issue date Jul 15, 2025
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for automatic zone axis alignment
- Patent number 12,362,135
- Issue date Jul 15, 2025
- FEI Company
- John J. Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor inspection apparatus and semiconductor inspection met...
- Patent number 12,362,139
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Yujin Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 12,354,831
- Issue date Jul 8, 2025
- NuFlare Technology, Inc.
- Masataka Shiratsuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple landing energy scanning electron microscopy systems and me...
- Patent number 12,354,833
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay measurement system and overlay measurement device for overl...
- Patent number 12,354,829
- Issue date Jul 8, 2025
- HITACHI HIGH-TECH CORPORATION
- Masaki Sugie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Computer system, dimension measurement method, and storage medium
- Patent number 12,345,522
- Issue date Jul 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Yutaka Okuyama
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor analysis system
- Patent number 12,347,707
- Issue date Jul 1, 2025
- HITACHI HIGH-TECH CORPORATION
- Yudai Kubo
- G05 - CONTROLLING REGULATING
Information Patent Grant
Multiple charged-particle beam apparatus and methods of operating t...
- Patent number 12,347,643
- Issue date Jul 1, 2025
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus match detection method, detection system, prewarning meth...
- Patent number 12,341,070
- Issue date Jun 24, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Weigang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun and electron microscope
- Patent number 12,340,969
- Issue date Jun 24, 2025
- KLA Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for observing permeation and diffusion path of observation t...
- Patent number 12,315,696
- Issue date May 27, 2025
- National Institute for Materials Science
- Akiko Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting a sample by means of multiple c...
- Patent number 12,306,121
- Issue date May 20, 2025
- DELMIC IP B.V.
- Andries Pieter Johan Effting
- G01 - MEASURING TESTING
Information Patent Grant
Multi-electron beam inspection apparatus, multipole array control m...
- Patent number 12,308,202
- Issue date May 20, 2025
- NuFlare Technology, Inc.
- Yuichi Maekawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System comprising a multi-beam particle microscope and method for o...
- Patent number 12,300,462
- Issue date May 13, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for positioning objects in a particle beam microscope with t...
- Patent number 12,300,459
- Issue date May 13, 2025
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple electron beam image acquisition method, multiple electron...
- Patent number 12,288,666
- Issue date Apr 29, 2025
- NuFlare Technology, Inc.
- Koichi Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
- Patent number 12,288,705
- Issue date Apr 29, 2025
- Carl Zeiss SMT GmbH
- Amir Avishai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Entropy based image processing for focused ion beam delayer-edge sl...
- Patent number 12,288,668
- Issue date Apr 29, 2025
- Applied Materials Israel Ltd.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern height metrology using an e-beam system
- Patent number 12,278,086
- Issue date Apr 15, 2025
- Imec VZW
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and image generation method
- Patent number 12,278,084
- Issue date Apr 15, 2025
- Jeol Ltd.
- Motohiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 12,272,518
- Issue date Apr 8, 2025
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fiducial guided cross-sectioning and lamella preparation with tomog...
- Patent number 12,255,044
- Issue date Mar 18, 2025
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 12,255,045
- Issue date Mar 18, 2025
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of correcting aberration
- Patent number 12,255,041
- Issue date Mar 18, 2025
- Jeol Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage anti-fretting mechanism for roller bearing lifetime improvement
- Patent number 12,249,481
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Mark Henricus Wilhelmus Van Gerven
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lens designs
- Patent number 12,243,714
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Laura Del Tin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS
- Publication number 20250239431
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jian-Ming Zheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
- Publication number 20250232946
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Minami UCHIHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME
- Publication number 20250231130
- Publication date Jul 17, 2025
- FEI Company
- Jan Trojek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
- Publication number 20250231129
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM
- Publication number 20250232941
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Zizhou GONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE
- Publication number 20250226173
- Publication date Jul 10, 2025
- DELONG INSTRUMENTS A.S.
- Tomas Bejdak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...
- Publication number 20250226174
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...
- Publication number 20250226175
- Publication date Jul 10, 2025
- ASML NETHERLANDS B.V.
- Zhong-wei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...
- Publication number 20250210301
- Publication date Jun 26, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELDING PLASMA ETCHING DATA COLLECTION WINDOWS USING POSITIVELY C...
- Publication number 20250191890
- Publication date Jun 12, 2025
- International Business Machines Corporation
- Viswas Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE
- Publication number 20250183000
- Publication date Jun 5, 2025
- Carl Zeiss SMT GMBH
- David Laemmle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF AN EXAMINATION SYSTEM
- Publication number 20250183001
- Publication date Jun 5, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Rafael BISTRITZER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DE...
- Publication number 20250167051
- Publication date May 22, 2025
- Samsung Electronics Co., Ltd.
- Seonghyeon Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC GRID FINGER DETECTION
- Publication number 20250166964
- Publication date May 22, 2025
- FEI Company
- Tomas Onderlicka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
- Publication number 20250166961
- Publication date May 22, 2025
- Fibics Incorporated
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ASSESSMENT APPARATUS AND METHODS
- Publication number 20250132122
- Publication date Apr 24, 2025
- ASML NETHERLANDS B.V.
- Thomas Izaak Fred HAARTSEN
- G01 - MEASURING TESTING
Information Patent Application
LENS DESIGNS
- Publication number 20250125120
- Publication date Apr 17, 2025
- ASML NETHERLANDS B.V.
- Laura DEL TIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE
- Publication number 20250123192
- Publication date Apr 17, 2025
- Bruker Nano, Inc.
- Edward Cyrankowski
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20250118528
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20250112023
- Publication date Apr 3, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...
- Publication number 20250109013
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BLANKER-ENHANCED MOIRE IMAGING
- Publication number 20250104958
- Publication date Mar 27, 2025
- FEI Company
- Bert Freitag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE CARRIER AND USES THEREOF
- Publication number 20250104962
- Publication date Mar 27, 2025
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
- Publication number 20250104966
- Publication date Mar 27, 2025
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
- Publication number 20250095133
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Vincent Sylvester KUIPER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
- Publication number 20250095955
- Publication date Mar 20, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Konstantin Chirko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20250087444
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...
- Publication number 20250069842
- Publication date Feb 27, 2025
- FEI Company
- Neel Leslie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detection of Probabilistic Process Windows
- Publication number 20250069843
- Publication date Feb 27, 2025
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY
- Publication number 20250069208
- Publication date Feb 27, 2025
- The Board of Regents of the University of Texas System
- Zbyszek Otwinowski
- G06 - COMPUTING CALCULATING COUNTING

Scanning microscopes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method, apparatus, and system for dynamically controlling an electr...

Method for inspecting a specimen and charged particle beam device

Simple spherical aberration corrector for SEM

Method and system for automatic zone axis alignment

Semiconductor inspection apparatus and semiconductor inspection met...

Pattern inspection apparatus and pattern inspection method

Multiple landing energy scanning electron microscopy systems and me...

Overlay measurement system and overlay measurement device for overl...

Computer system, dimension measurement method, and storage medium

Semiconductor analysis system

Multiple charged-particle beam apparatus and methods of operating t...

Apparatus match detection method, detection system, prewarning meth...

Electron gun and electron microscope

Device for observing permeation and diffusion path of observation t...

Method and apparatus for inspecting a sample by means of multiple c...

Multi-electron beam inspection apparatus, multipole array control m...

System comprising a multi-beam particle microscope and method for o...

Method for positioning objects in a particle beam microscope with t...

Multiple electron beam image acquisition method, multiple electron...

FIB-SEM 3D tomography for measuring shape deviations of HAR structures

Entropy based image processing for focused ion beam delayer-edge sl...

Pattern height metrology using an e-beam system

Electron microscope and image generation method

3D metrology from 3D datacube created from stack of registered imag...

Scanning electron microscope and image generation method using scan...

Fiducial guided cross-sectioning and lamella preparation with tomog...

Transmission charged particle microscope with an electron energy lo...

Electron microscope and method of correcting aberration

Stage anti-fretting mechanism for roller bearing lifetime improvement

Lens designs

Patents Applicationslast 30 patents

ELECTRON MICROSCOPE DETECTOR AND RELATED METHODS

CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD

IMPROVED SCANNING ELECTRON MICROSCOPE AND METHOD OF USING THE SAME

E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES

WAFER EDGE INSPECTION OF CHARGED PARTICLE INSPECTION SYSTEM

A MULTI-MODE LOW-VOLTAGE ELECTRON MICROSCOPE

SYSTEM AND METHOD FOR DEFECT INSPECTION USING VOLTAGE CONTRAST IN A...

DYNAMIC DETERMINATION OF A SAMPLE INSPECTION RECIPE OF CHARGED PART...

3D METROLOGY FROM 3D DATACUBE CREATED FROM STACK OF REGISTERED IMAG...

SHIELDING PLASMA ETCHING DATA COLLECTION WINDOWS USING POSITIVELY C...

METHOD OF CHARACTERIZING A FAULT IN A SCANNING ELECTRON MICROSCOPE

CALIBRATION OF AN EXAMINATION SYSTEM

ELECTRONIC DEVICE FOR PREDICTING CHARACTERISTIC OF SEMICONDUCTOR DE...

AUTOMATIC GRID FINGER DETECTION

MICROSCOPY IMAGING METHOD AND SYSTEM

ASSESSMENT APPARATUS AND METHODS

LENS DESIGNS

TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...

BLANKER-ENHANCED MOIRE IMAGING

SAMPLE CARRIER AND USES THEREOF

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...

Detection of Probabilistic Process Windows

METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY