Scanning microscopes

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H01J2237/28

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/28Scanning microscopes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Multiple electron beam image acquisition method, multiple electron...
- Patent number 12,288,666
- Issue date Apr 29, 2025
- NuFlare Technology, Inc.
- Koichi Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
- Patent number 12,288,705
- Issue date Apr 29, 2025
- Carl Zeiss SMT GmbH
- Amir Avishai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Entropy based image processing for focused ion beam delayer-edge sl...
- Patent number 12,288,668
- Issue date Apr 29, 2025
- Applied Materials Israel Ltd.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern height metrology using an e-beam system
- Patent number 12,278,086
- Issue date Apr 15, 2025
- Imec VZW
- Gian Francesco Lorusso
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and image generation method
- Patent number 12,278,084
- Issue date Apr 15, 2025
- Jeol Ltd.
- Motohiro Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3D metrology from 3D datacube created from stack of registered imag...
- Patent number 12,272,518
- Issue date Apr 8, 2025
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fiducial guided cross-sectioning and lamella preparation with tomog...
- Patent number 12,255,044
- Issue date Mar 18, 2025
- FIBICS INCORPORATED
- Michael William Phaneuf
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 12,255,045
- Issue date Mar 18, 2025
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and method of correcting aberration
- Patent number 12,255,041
- Issue date Mar 18, 2025
- Jeol Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage anti-fretting mechanism for roller bearing lifetime improvement
- Patent number 12,249,481
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Mark Henricus Wilhelmus Van Gerven
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lens designs
- Patent number 12,243,714
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Laura Del Tin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus, and program for determining condition related to...
- Patent number 12,243,711
- Issue date Mar 4, 2025
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for event modulated electron microscopy
- Patent number 12,237,147
- Issue date Feb 25, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Bryan Walter Reed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
- Patent number 12,217,930
- Issue date Feb 4, 2025
- ASML Netherlands B.V.
- Martijn Petrus Christianus Van Heumen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene based substrates for imaging
- Patent number 12,217,931
- Issue date Feb 4, 2025
- University of Kansas
- Eduardo Rosa-Molinar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detachable column unit of scanning electron microscope, and method...
- Patent number 12,217,933
- Issue date Feb 4, 2025
- COXEM CO., LTD
- Jun Hee Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High framerate and high dynamic range electron microscopy
- Patent number 12,211,667
- Issue date Jan 28, 2025
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Ruth Bloom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fabricating thin film liquid cells
- Patent number 12,209,979
- Issue date Jan 28, 2025
- Universiteit Leiden
- Pauline Marthe Gerardina Van Deursen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 12,198,895
- Issue date Jan 14, 2025
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and method for determining observation...
- Patent number 12,191,111
- Issue date Jan 7, 2025
- HITACHI HIGH-TECH CORPORATION
- Fumiya Ishizaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for defect inspection using voltage contrast in a...
- Patent number 12,191,112
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system and overlay misalignment measurement m...
- Patent number 12,183,541
- Issue date Dec 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of hysteresis compensation
- Patent number 12,183,537
- Issue date Dec 31, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of determining aberrations in images obtained b...
- Patent number 12,183,540
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Yifeng Shao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern measurement device and pattern measurement method
- Patent number 12,174,551
- Issue date Dec 24, 2024
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for reducing off-axial aberration in elec...
- Patent number 12,176,179
- Issue date Dec 24, 2024
- FEI Company
- Maarten Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspecting device
- Patent number 12,176,181
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Wei Sun
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ASSESSMENT APPARATUS AND METHODS
- Publication number 20250132122
- Publication date Apr 24, 2025
- ASML NETHERLANDS B.V.
- Thomas Izaak Fred HAARTSEN
- G01 - MEASURING TESTING
Information Patent Application
LENS DESIGNS
- Publication number 20250125120
- Publication date Apr 17, 2025
- ASML NETHERLANDS B.V.
- Laura DEL TIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE
- Publication number 20250123192
- Publication date Apr 17, 2025
- Bruker Nano, Inc.
- Edward Cyrankowski
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20250118528
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20250112023
- Publication date Apr 3, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...
- Publication number 20250109013
- Publication date Apr 3, 2025
- City University of Hong Kong
- Lixin Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BLANKER-ENHANCED MOIRE IMAGING
- Publication number 20250104958
- Publication date Mar 27, 2025
- FEI Company
- Bert Freitag
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE CARRIER AND USES THEREOF
- Publication number 20250104962
- Publication date Mar 27, 2025
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...
- Publication number 20250104966
- Publication date Mar 27, 2025
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE
- Publication number 20250095133
- Publication date Mar 20, 2025
- ASML NETHERLANDS B.V.
- Vincent Sylvester KUIPER
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES
- Publication number 20250095955
- Publication date Mar 20, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Konstantin Chirko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
- Publication number 20250087444
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...
- Publication number 20250069842
- Publication date Feb 27, 2025
- FEI Company
- Neel Leslie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Detection of Probabilistic Process Windows
- Publication number 20250069843
- Publication date Feb 27, 2025
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY
- Publication number 20250069208
- Publication date Feb 27, 2025
- The Board of Regents of the University of Texas System
- Zbyszek Otwinowski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Measurement Device and Pattern Measurement Method
- Publication number 20250060678
- Publication date Feb 20, 2025
- HITACHI HIGH-TECH CORPORATION
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...
- Publication number 20250054726
- Publication date Feb 13, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
- Publication number 20250029811
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Arthur Eduard OVERLACK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
- Publication number 20250022680
- Publication date Jan 16, 2025
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS
- Publication number 20250022681
- Publication date Jan 16, 2025
- INFINEON TECHNOLOGIES AG
- Maximilian Alexander MOSER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Correction Method and Correction Device
- Publication number 20250014858
- Publication date Jan 9, 2025
- Hitachi High-Tech Corporation
- Tomoaki YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...
- Publication number 20250005739
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Shengcheng JIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20250006456
- Publication date Jan 2, 2025
- ASML NETHERLANDS B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIO...
- Publication number 20240429107
- Publication date Dec 26, 2024
- Shanghai Huali Integrated Circuit Corporation
- Guanbo Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240420915
- Publication date Dec 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Mihiro TAKASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING A REGION OF A SAMPLE
- Publication number 20240420917
- Publication date Dec 19, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Roey Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS
- Publication number 20240404784
- Publication date Dec 5, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Itamar Shani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...
- Publication number 20240395496
- Publication date Nov 28, 2024
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS

Scanning microscopes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multiple electron beam image acquisition method, multiple electron...

FIB-SEM 3D tomography for measuring shape deviations of HAR structures

Entropy based image processing for focused ion beam delayer-edge sl...

Pattern height metrology using an e-beam system

Electron microscope and image generation method

3D metrology from 3D datacube created from stack of registered imag...

Scanning electron microscope and image generation method using scan...

Fiducial guided cross-sectioning and lamella preparation with tomog...

Transmission charged particle microscope with an electron energy lo...

Electron microscope and method of correcting aberration

Stage anti-fretting mechanism for roller bearing lifetime improvement

Lens designs

Method, apparatus, and program for determining condition related to...

Methods and systems for event modulated electron microscopy

Systems and methods for thermally conditioning a wafer in a charged...

Graphene based substrates for imaging

Detachable column unit of scanning electron microscope, and method...

High framerate and high dynamic range electron microscopy

Fabricating thin film liquid cells

Method and device for preparing a microscopic sample from a volume...

Charged particle beam system and method for determining observation...

System and method for defect inspection using voltage contrast in a...

Charged particle beam system and overlay misalignment measurement m...

Systems and methods of hysteresis compensation

Systems and methods of determining aberrations in images obtained b...

Pattern measurement device and pattern measurement method

Method, device and system for reducing off-axial aberration in elec...

Pattern inspecting device

Transmission electron microscope and inspection method using transm...

System and method for scanning a sample using multi-beam inspection...

Patents Applicationslast 30 patents

ASSESSMENT APPARATUS AND METHODS

LENS DESIGNS

TESTING ASSEMBLY INCLUDING A MULTIPLE DEGREE OF FREEDOM STAGE

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

CANTILEVER-BASED OPTO-ELECTROMECHANICAL SYSTEMS AND FABRICATION MET...

BLANKER-ENHANCED MOIRE IMAGING

SAMPLE CARRIER AND USES THEREOF

MULTI-BEAM CHARGED PARTICLE IMAGING SYSTEM WITH IMPROVED IMAGING OF...

METHOD OF PROCESSING DATA DERIVED FROM A SAMPLE

METHOD AND SYSTEM FOR CALIBRATION OF DIFFRACTION ANGLES

DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...

TECHNIQUES FOR WAVEFORM DETECTION OF PERIODIC SIGNALS USING VOLTAGE...

Detection of Probabilistic Process Windows

METHODS FOR HIGH-PERFORMANCE ELECTRON MICROSCOPY

Pattern Measurement Device and Pattern Measurement Method

METHOD TO MORE PRECISELY CALIBRATE THE MECHANICAL TILT AND ROTATION...

SENSOR SUBSTRATE, APPARATUS, AND METHOD

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...

SCANNING ELECTRON MICROSCOPY-BASED SAMPLE ANALYSIS

Correction Method and Correction Device

SYSTEMS AND METHODS FOR DEFECT DETECTION AND DEFECT LOCATION IDENTI...

CROSS-TALK CANCELLATION IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

METHOD FOR REDUCING MEASUREMENT ERRORS IN CRITICAL PATTERN DIMENSIO...

CHARGED PARTICLE BEAM DEVICE

DISCHARGING A REGION OF A SAMPLE

SUBSTRATE INSPECTION METHOD

SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...