Scanning microscopes

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H01J2237/28

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/28Scanning microscopes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for scanning a sample using multi-beam inspection...
- Patent number 12,165,837
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Martinus Gerardus Maria Johannes Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple charged-particle beam apparatus with low crosstalk
- Patent number 12,165,830
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Shichen Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 12,165,834
- Issue date Dec 10, 2024
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and image acquiring method
- Patent number 12,148,594
- Issue date Nov 19, 2024
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,142,457
- Issue date Nov 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of probabilistic process windows
- Patent number 12,142,454
- Issue date Nov 12, 2024
- Fractilla, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Testing assembly including a multiple degree of freedom stage
- Patent number 12,140,571
- Issue date Nov 12, 2024
- Bruker Nano, Inc.
- Edward Cyrankowski
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron microscope and specimen contamination prevention method
- Patent number 12,131,881
- Issue date Oct 29, 2024
- Jeol Ltd.
- Takeshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-source charged particle illumination apparatus
- Patent number 12,125,671
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Stijn Wilem Herman Karel Steenbrink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,125,667
- Issue date Oct 22, 2024
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 12,125,669
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron detector
- Patent number 12,106,932
- Issue date Oct 1, 2024
- DECTRIS AG
- Radosav Pantelic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus and computer program for analyzing and/or process...
- Patent number 12,105,415
- Issue date Oct 1, 2024
- Carl Zeiss SMT GmbH
- Oliver Jäckel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analysis method
- Patent number 12,094,682
- Issue date Sep 17, 2024
- Kioxia Corporation
- Takeshi Owaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged-particle-beam microscopy with energy-dispersive x-...
- Patent number 12,094,684
- Issue date Sep 17, 2024
- Mochii, Inc.
- Christopher Su-Yan Own
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 12,087,542
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for tilting characterization by microscopy
- Patent number 12,078,791
- Issue date Sep 3, 2024
- Yangtze Memory Technologies Co., Ltd.
- Jun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscope for examining a specimen, and method of...
- Patent number 12,080,512
- Issue date Sep 3, 2024
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cross-talk cancellation in multiple charged-particle beam inspection
- Patent number 12,080,513
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and method
- Patent number 12,072,181
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Yan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for high-performance electron microscopy
- Patent number 12,073,541
- Issue date Aug 27, 2024
- The Board of Regents of the University of Texas System
- Zbyszek Otwinowski
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
- Patent number 12,055,861
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Kihyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 12,057,286
- Issue date Aug 6, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and inspection method
- Patent number 12,057,288
- Issue date Aug 6, 2024
- HITACHI HIGH-TECH CORPORATION
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,046,446
- Issue date Jul 23, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Chiba
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240420915
- Publication date Dec 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Mihiro TAKASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING A REGION OF A SAMPLE
- Publication number 20240420917
- Publication date Dec 19, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Roey Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240412943
- Publication date Dec 12, 2024
- Samsung Electronics Co., LTD
- Jinwoo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS
- Publication number 20240404784
- Publication date Dec 5, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Itamar Shani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...
- Publication number 20240395496
- Publication date Nov 28, 2024
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...
- Publication number 20240379327
- Publication date Nov 14, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20240369356
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Yan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY
- Publication number 20240355581
- Publication date Oct 24, 2024
- Integrated Dynamic Electron Solutions, Inc.
- Bryan Walter REED
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
- Publication number 20240355685
- Publication date Oct 24, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Application
TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY
- Publication number 20240347314
- Publication date Oct 17, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...
- Publication number 20240347315
- Publication date Oct 17, 2024
- Fuji Electric Co., Ltd.
- Yusuke SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20240339286
- Publication date Oct 10, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY
- Publication number 20240339293
- Publication date Oct 10, 2024
- Oxford Instruments Nanotechnology Tools Limited
- Peter Statham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
- Publication number 20240339295
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Tzu-Chao CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...
- Publication number 20240312757
- Publication date Sep 19, 2024
- FRACTILIA, LLC
- Chris MACK
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM
- Publication number 20240304411
- Publication date Sep 12, 2024
- WINBOND ELECTRONICS CORP.
- Yen-Chiao CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (...
- Publication number 20240297015
- Publication date Sep 5, 2024
- FEI Company
- Ludek Cervinka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...
- Publication number 20240290571
- Publication date Aug 29, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
- Publication number 20240282547
- Publication date Aug 22, 2024
- NuFlare Technology, Inc.
- Koichi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEM Orientation Mapping via Dark-Field Vector Images
- Publication number 20240272097
- Publication date Aug 15, 2024
- Virginia Commonwealth University
- Carl R. Mayer
- G01 - MEASURING TESTING
Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF GLOBAL AND LOCAL OPTIMIZATION OF IMAGING RESOLUTION IN A...
- Publication number 20240274398
- Publication date Aug 15, 2024
- Carl Zeiss MultiSEM GmbH
- Christof Riedesel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIZATION DEVICE FOR AN ELECTRON MICROSCOPE AND METHOD
- Publication number 20240258064
- Publication date Aug 1, 2024
- FORSCHUNGSZENTRUM JULICH GmbH
- Amir Hossein TAVABI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Dispositioning and Control of a Semiconductor Manufacturi...
- Publication number 20240258066
- Publication date Aug 1, 2024
- FRACTILIA, LLC
- Chris Mack
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD
- Publication number 20240249912
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS

Scanning microscopes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transmission electron microscope and inspection method using transm...

System and method for scanning a sample using multi-beam inspection...

Multiple charged-particle beam apparatus with low crosstalk

Method and apparatus for Schottky TFE inspection

Automated ion-beam alignment for dual-beam instrument

Observation method by means of scanning transmission electron micro...

Charged particle beam apparatus and image acquiring method

Charged particle beam device

Detection of probabilistic process windows

Testing assembly including a multiple degree of freedom stage

Electron microscope and specimen contamination prevention method

Multi-source charged particle illumination apparatus

Charged particle beam device

Thermal-aided inspection by advanced charge controller module in a...

Electron detector

Method, apparatus and computer program for analyzing and/or process...

Analysis method

Scanning charged-particle-beam microscopy with energy-dispersive x-...

Apparatus of plural charged-particle beams

Image contrast enhancement in sample inspection

Method for tilting characterization by microscopy

Charged particle microscope for examining a specimen, and method of...

Cross-talk cancellation in multiple charged-particle beam inspection

Apparatus for multiple charged-particle beams

Inspection apparatus and method

Methods for high-performance electron microscopy

Inspection method, inspection system, and semiconductor fabrication...

Systems and methods of clamp compensation

Charged particle beam device and inspection method

Charged particle beam device

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

DISCHARGING A REGION OF A SAMPLE

SUBSTRATE INSPECTION METHOD

SCANNING ELECTRON MICROSCOPY-BASED TOMOGRAPHY OF SPECIMENS

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF...

ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

INSPECTION APPARATUS AND METHOD

METHODS AND SYSTEMS FOR EVENT MODULATED ELECTRON MICROSCOPY

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

TECHNIQUES FOR ELECTRON ENERGY LOSS SPECTROSCOPY AT HIGH ENERGY

ANALYSIS METHOD, COMPUTER-READABLE MEDIUM, AND MANUFACTURING METHOD...

SYSTEMS AND METHODS OF CLAMP COMPENSATION

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

IMPROVED NAVIGATION FOR ELECTRON MICROSCOPY

METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...

SYSTEM AND METHOD FOR GENERATING AND ANALYZING ROUGHNESS MEASUREMEN...

SEMICONDUCTOR STRUCTURE, INSPECTION METHOD AND INSPECTION SYSTEM

METHOD OF PREPARING A SAMPLE FOR TRANSMISSION ELECTRON MICROSCOPY (...

CHARGED PARTICLE OPTICS, CHARGED PARTICLE BEAM APPARATUS, AND METHO...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...

TEM Orientation Mapping via Dark-Field Vector Images

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

METHOD OF GLOBAL AND LOCAL OPTIMIZATION OF IMAGING RESOLUTION IN A...

MAGNETIZATION DEVICE FOR AN ELECTRON MICROSCOPE AND METHOD

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

Method of Dispositioning and Control of a Semiconductor Manufacturi...

CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD