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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/28
Scanning microscopes
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Patents Grants
last 30 patents
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Patent Grant
Scanning electron microscope having detachable column, and image ac...
Patent number
11,978,610
Issue date
May 7, 2024
COXEM CO., LTD
Jun Hee Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for calibrating a scanning charged particle microscope
Patent number
11,972,922
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Hermanus Adrianus Dillen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring variation, inspection system, computer program,...
Patent number
11,966,168
Issue date
Apr 23, 2024
ASML Netherlands B.V.
Antoine Gaston Marie Kiers
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for examining a beam of charged particles
Patent number
11,961,705
Issue date
Apr 16, 2024
Carl Zeiss SMT GmbH
Daniel Rhinow
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for image enhancement for a multi-beam charged-...
Patent number
11,961,700
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Maikel Robert Goosen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Apparatus using charged particle beams
Patent number
11,961,697
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication of in situ HR-LCTEM nanofluidic cell for nanobubble int...
Patent number
11,961,702
Issue date
Apr 16, 2024
Saudi Arabian Oil Company
Hassan Alqahtani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
Patent number
11,961,709
Issue date
Apr 16, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aperture device and analyzer arrangement
Patent number
11,942,316
Issue date
Mar 26, 2024
SCIENTA OMICRON AB
Peter Amann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for preparing a microscopic sample from a volume...
Patent number
11,935,723
Issue date
Mar 19, 2024
Carl Zeiss Microscopy GmbH
Fabian Perez Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System comprising a multi-beam particle microscope and method for o...
Patent number
11,935,721
Issue date
Mar 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
Patent number
11,929,232
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Frank Nan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analysis method and analysis system of voltage contrast defect
Patent number
11,927,625
Issue date
Mar 12, 2024
Powerchip Semiconductor Manufacturing Corporation
Yue-Ying Yen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Lateral recess measurement in a semiconductor specimen
Patent number
11,921,063
Issue date
Mar 5, 2024
Applied Materials Israel Ltd.
Michael Chemama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of aligning a charged particle beam apparatus
Patent number
11,901,155
Issue date
Feb 13, 2024
FEI Company
Mykola Kaplenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for inspection
Patent number
11,875,966
Issue date
Jan 16, 2024
ASML Netherlands B.V.
Bernardo Kastrup
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Information
Patent Grant
Hyperdimensional scanning transmission electron microscopy and exam...
Patent number
11,852,598
Issue date
Dec 26, 2023
Battelle Energy Alliance, LLC
Jeffery A. Aguiar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and charged particle beam device calib...
Patent number
11,848,171
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scintillator for charged particle beam apparatus and charged partic...
Patent number
11,846,736
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Eri Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for event modulated electron microscopy
Patent number
11,848,173
Issue date
Dec 19, 2023
INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
Bryan Walter Reed
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measurement device and signal processing method
Patent number
11,842,881
Issue date
Dec 12, 2023
HITACHI HIGH-TECH CORPORATION
Akio Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Estimation model generation method and electron microscope
Patent number
11,842,880
Issue date
Dec 12, 2023
Jeol Ltd.
Ryusuke Sagawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION SYSTEM
Publication number
20240151665
Publication date
May 9, 2024
Hitachi High-Tech Corporation
Yohei NAKAMURA
G01 - MEASURING TESTING
Information
Patent Application
PRECISION IN STEREOSCOPIC MEASUREMENTS USING A PRE-DEPOSITION LAYER
Publication number
20240153738
Publication date
May 9, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Microscope, Multipole Element for Use Therein, and Control...
Publication number
20240145210
Publication date
May 2, 2024
JEOL Ltd.
Shigeyuki Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF AUTOMATED DATA ACQUISITION FOR A TRANSMISSION ELECTRON MI...
Publication number
20240128050
Publication date
Apr 18, 2024
FEI Company
Yuchen DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCTION OF POWER CONSUMPTION FOR A CHARGED PARTICLE SYSTEM
Publication number
20240120171
Publication date
Apr 11, 2024
FEI Company
Casper Smit
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY
Publication number
20240105418
Publication date
Mar 28, 2024
Integrated Dynamic Electron Solutions, Inc.
Ruth BLOOM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transmission Electron Microscope
Publication number
20240096588
Publication date
Mar 21, 2024
JEOL Ltd.
Kanako Noguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-DESTRUCTIVE SEM-BASED DEPTH-PROFILING OF SAMPLES
Publication number
20240094150
Publication date
Mar 21, 2024
APPLIED MATERIALS ISRAEL LTD.
Dror Shemesh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DATA PROCESSING DEVICE AND METHOD, CHARGED PARTICLE ASSESSMENT SYST...
Publication number
20240087842
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR THERMALLY CONDITIONING A WAFER IN A CHARGED...
Publication number
20240079202
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Martijn Petrus, Christianus VAN HEUMEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE (SEM) MEASUREMENT METHOD AND APPARATUS
Publication number
20240079206
Publication date
Mar 7, 2024
Samsung Electronics Co., Ltd.
Kihyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSESSMENT SYSTEM, METHOD OF ASSESSING
Publication number
20240079205
Publication date
Mar 7, 2024
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240062986
Publication date
Feb 22, 2024
Hitachi High-Tech Corporation
Naho TERAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Simple Spherical Aberration Corrector for SEM
Publication number
20240047170
Publication date
Feb 8, 2024
FEI Company
Ali MOHAMMADI-GHEIDARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Simple Spherical Aberration Corrector for SEM
Publication number
20240047169
Publication date
Feb 8, 2024
FEI Company
Alexander Henstra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle optics components and their fabrication
Publication number
20240047171
Publication date
Feb 8, 2024
FEI Company
Ali MOHAMMADI-GHEIDARI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL DEVICE
Publication number
20240038485
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
Publication number
20240038486
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ching Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
Publication number
20240029993
Publication date
Jan 25, 2024
FEI Company
Maarten BISCHOFF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL SYSTEM AND METHOD OF OPERATING AN ELECTRON-OPTICAL...
Publication number
20240029995
Publication date
Jan 25, 2024
ASML NETHERLANDS B.V.
Stijn Wilem Herman Karel STEENBRINK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE FOR INSPECTION OF A SPECIMEN WITH A PL...
Publication number
20240006149
Publication date
Jan 4, 2024
FEI Company
Ali Mohammadi-Gheidari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING CHARGED PARTICLE BEAMS
Publication number
20230411110
Publication date
Dec 21, 2023
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING DEFECTS ON A WAFER AND RELATED NON-...
Publication number
20230411224
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing company Ltd.
SHIH-CHANG WANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Charged Particle Beam Device and Image Acquisition Method
Publication number
20230402252
Publication date
Dec 14, 2023
JEOL Ltd.
Nobuyuki Ikeo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT INSPECTION APPARATUS
Publication number
20230402249
Publication date
Dec 14, 2023
HITACHI HIGH-TECH CORPORATION
Yasuhiro YOSHIDA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
Publication number
20230402250
Publication date
Dec 14, 2023
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Paolo CATTANEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
Publication number
20230395352
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Ning YE
H01 - BASIC ELECTRIC ELEMENTS