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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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Industries

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Patents Grantslast 30 patents

Information Patent Grant
Physical quantity sensor, inertial measurement unit, and method for...
- Patent number 12,174,214
- Issue date Dec 24, 2024
- Seiko Epson Corporation
- Teruo Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method, laser annealing device, and crystallized si...
- Patent number 12,148,616
- Issue date Nov 19, 2024
- V. Technology Co., Ltd.
- Jun Gotoh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for laser annealing
- Patent number 12,148,615
- Issue date Nov 19, 2024
- Coherent Lasersystems GmbH & Co. KG
- Paul Van Der Wilt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
In-die metrology methods and systems for process control
- Patent number 12,040,187
- Issue date Jul 16, 2024
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Laser irradiation apparatus and laser irradiation method
- Patent number 12,040,186
- Issue date Jul 16, 2024
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for spot beam crystallization
- Patent number 11,942,321
- Issue date Mar 26, 2024
- The Trustees of Columbia University in City of New York
- James S. Im
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,854,804
- Issue date Dec 26, 2023
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Physical quantity sensor, inertial measurement unit, and method for...
- Patent number 11,698,387
- Issue date Jul 11, 2023
- Seiko Epson Corporation
- Teruo Takizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-die metrology methods and systems for process control
- Patent number 11,527,405
- Issue date Dec 13, 2022
- ASML Netherlands B.V.
- Lingling Pu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for spot beam crystallization
- Patent number 11,437,236
- Issue date Sep 6, 2022
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THF CITY OF NEW YORK
- James S. Im
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus, laser irradiation method, and method o...
- Patent number 11,355,343
- Issue date Jun 7, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Takahiro Mikami
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser treatment device rectifier device and laser treatment device
- Patent number 11,355,364
- Issue date Jun 7, 2022
- JSW AKTINA SYSTEM CO., LTD.
- Daisuke Ito
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for laser irradiation and method for laser irradiation
- Patent number 11,335,561
- Issue date May 17, 2022
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation apparatus
- Patent number 11,227,764
- Issue date Jan 18, 2022
- Samsung Display Co., Ltd.
- Hiroshi Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser annealing method, laser annealing apparatus, and thin film tr...
- Patent number 10,971,361
- Issue date Apr 6, 2021
- V. Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method, laser annealing apparatus, and thin film tr...
- Patent number 10,950,437
- Issue date Mar 16, 2021
- V Technology Co., Ltd.
- Michinobu Mizumura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing method
- Patent number 10,937,651
- Issue date Mar 2, 2021
- SAKAI DISPLAY PRODUCTS CORPORATION
- Masakazu Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus, thin film transistor, and method of ma...
- Patent number 10,896,817
- Issue date Jan 19, 2021
- V Technology Co. Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing display, display, and liquid crystal televi...
- Patent number 10,879,279
- Issue date Dec 29, 2020
- The Japan Steel Works, Ltd.
- Naoyuki Kobayashi
- G02 - OPTICS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,879,272
- Issue date Dec 29, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing apparatus, and fabrication methods of polycrystalli...
- Patent number 10,872,767
- Issue date Dec 22, 2020
- BOE Technology Group Co., Ltd.
- Jingshuai Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser annealing device
- Patent number 10,651,049
- Issue date May 12, 2020
- Kyushu University, National University Corporation
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
LTPS layer, method for fabricating the same, display substrate and...
- Patent number 10,629,638
- Issue date Apr 21, 2020
- BOE Technology Group Co., Ltd.
- Huijuan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam irradiation device, thin-film transistor, and method of...
- Patent number 10,608,115
- Issue date Mar 31, 2020
- V. Technology Co., Ltd.
- Michinobu Mizumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,541,337
- Issue date Jan 21, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki Moriwaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,515,983
- Issue date Dec 24, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser crystallization device and method
- Patent number 10,475,647
- Issue date Nov 12, 2019
- Samsung Display Co., Ltd.
- Hong Ro Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device and semiconductor device production system
- Patent number 10,361,222
- Issue date Jul 23, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for forming a virtual germanium substrate using a laser
- Patent number 10,115,854
- Issue date Oct 30, 2018
- Newsouth Innovations Pty Limited
- Xiaojing Hao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Preparation methods of low temperature poly-silicon thin film and t...
- Patent number 10,049,873
- Issue date Aug 14, 2018
- BOE Technology Group Co., Ltd.
- Xiaowei Xu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER ANNEALING METHOD AND METHOD OF MANUFACTURING DISPLAY DEVICE U...
- Publication number 20240145243
- Publication date May 2, 2024
- SAMSUNG DISPLAY CO., LTD.
- CHEOLHO PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Physical Quantity Sensor, Inertial Measurement Unit, And Method For...
- Publication number 20230280366
- Publication date Sep 7, 2023
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR THERMAL TREATMENT OF A SEMICONDUCTOR LAYER IN SEMICONDU...
- Publication number 20230138575
- Publication date May 4, 2023
- Yangtze Memory Technologies Co., Ltd.
- Kun ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL
- Publication number 20230076943
- Publication date Mar 9, 2023
- ASML NETHERLANDS B.V.
- Lingling PU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR LASER ANNEALING
- Publication number 20220359197
- Publication date Nov 10, 2022
- COHERENT LASERSYSTEMS GMBH & CO. KG
- Paul VAN DER WILT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND SYSTEMS FOR SPOT BEAM CRYSTALLIZATION
- Publication number 20220359198
- Publication date Nov 10, 2022
- THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORK
- James S. IM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD US...
- Publication number 20220120938
- Publication date Apr 21, 2022
- SAMSUNG DISPLAY CO., LTD.
- Dong Eon Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
- Publication number 20220115233
- Publication date Apr 14, 2022
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD
- Publication number 20220084823
- Publication date Mar 17, 2022
- SAMSUNG DISPLAY CO., LTD.
- HIROSHI OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...
- Publication number 20220005692
- Publication date Jan 6, 2022
- V TECHNOLOGY CO., LTD.
- Jun GOTOH
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR LASER IRRADIATION AND METHOD FOR LASER IRRADIATION
- Publication number 20210143015
- Publication date May 13, 2021
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20210118916
- Publication date Apr 22, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL
- Publication number 20200211845
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Lingling PU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
- Publication number 20200185222
- Publication date Jun 11, 2020
- SAMSUNG DISPLAY CO., LTD.
- Hiroshi OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20200135770
- Publication date Apr 30, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
- Publication number 20190341404
- Publication date Nov 7, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Atsuo Isobe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20180308985
- Publication date Oct 25, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki MORIWAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD FOR FORMING A VIRTUAL GERMANIUM SUBSTRATE USING A LASER
- Publication number 20170244005
- Publication date Aug 24, 2017
- NewSouth Innovations Pty Limited
- Xiaojing Hao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...
- Publication number 20170103876
- Publication date Apr 13, 2017
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiangjun TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Laser Assisted SiC Growth On Silicon
- Publication number 20170040167
- Publication date Feb 9, 2017
- Board of Trustees of Michigan State University
- Premjeet CHAHAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING POLYSILICON
- Publication number 20160343569
- Publication date Nov 24, 2016
- Laser Systems & Solutions of Europe
- Fulvio MAZZAMUTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20160005611
- Publication date Jan 7, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Tomoaki MORIWAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOCALIZED REGION OF ISOLATED SILICON OVER DIELECTRIC MESA
- Publication number 20150294895
- Publication date Oct 15, 2015
- TEXAS INSTRUMENTS INCORPORATED
- Daniel Nelson Carothers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF CRYSTALLISING THIN FILMS
- Publication number 20140357066
- Publication date Dec 4, 2014
- Panorama Synergy, Ltd.
- Roger Dunstan Jeffery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF GROWING HETEROEPITAXIAL SINGLE CRYSTAL OR LARGE GRAINED S...
- Publication number 20140331915
- Publication date Nov 13, 2014
- Trustees of Dartmouth College
- Praveen Chaudhari
- C30 - CRYSTAL GROWTH
Information Patent Application
DISPLAY HAVING A BACKPLANE WITH INTERLACED LASER CRYSTALLIZED REGIONS
- Publication number 20140319468
- Publication date Oct 30, 2014
- Apple Inc.
- Yu Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING CRYSTALLINE THIN-FILM AND METHOD FOR MANUFACTURI...
- Publication number 20140308804
- Publication date Oct 16, 2014
- PANASONIC CORPORATION
- Kenichirou NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR IMPROVING CRYSTALLIZATION
- Publication number 20140308803
- Publication date Oct 16, 2014
- EverDisplay Optronics (Shanghai) Limited
- ShangHua Chung
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR FORMING POLYSILICON USING HIGH ENERGY RADIATION SOURCE
- Publication number 20140256118
- Publication date Sep 11, 2014
- EverDisplay Optronics (Shanghai) Limited
- YuChun Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HAVING THIN FILM AND METHOD OF THIN FILM FORMATION
- Publication number 20140231812
- Publication date Aug 21, 2014
- PANASONIC CORPORATION
- Kenichirou NISHIDA
- H01 - BASIC ELECTRIC ELEMENTS

Scanning of a beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Physical quantity sensor, inertial measurement unit, and method for...

Laser annealing method, laser annealing device, and crystallized si...

Method and apparatus for laser annealing

In-die metrology methods and systems for process control

Laser irradiation apparatus and laser irradiation method

Methods and systems for spot beam crystallization

Laser irradiation method and laser irradiation apparatus

Physical quantity sensor, inertial measurement unit, and method for...

In-die metrology methods and systems for process control

Methods and systems for spot beam crystallization

Laser irradiation apparatus, laser irradiation method, and method o...

Laser treatment device rectifier device and laser treatment device

Apparatus for laser irradiation and method for laser irradiation

Laser irradiation method and laser irradiation apparatus

Laser annealing method, laser annealing apparatus, and thin film tr...

Laser annealing method, laser annealing apparatus, and thin film tr...

Laser annealing method

Laser irradiation apparatus, thin film transistor, and method of ma...

Method of manufacturing display, display, and liquid crystal televi...

Semiconductor device and semiconductor device production system

Laser annealing apparatus, and fabrication methods of polycrystalli...

Laser annealing device

LTPS layer, method for fabricating the same, display substrate and...

Laser beam irradiation device, thin-film transistor, and method of...

Method for manufacturing semiconductor device

Semiconductor device and semiconductor device production system

Laser crystallization device and method

Semiconductor device and semiconductor device production system

Method for forming a virtual germanium substrate using a laser

Preparation methods of low temperature poly-silicon thin film and t...

Patents Applicationslast 30 patents

LASER ANNEALING METHOD AND METHOD OF MANUFACTURING DISPLAY DEVICE U...

Physical Quantity Sensor, Inertial Measurement Unit, And Method For...

METHODS FOR THERMAL TREATMENT OF A SEMICONDUCTOR LAYER IN SEMICONDU...

IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL

METHOD AND APPARATUS FOR LASER ANNEALING

METHODS AND SYSTEMS FOR SPOT BEAM CRYSTALLIZATION

LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD US...

LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

LASER IRRADIATION APPARATUS AND LASER IRRADIATION METHOD

LASER ANNEALING METHOD, LASER ANNEALING DEVICE, AND CRYSTALLIZED SI...

APPARATUS FOR LASER IRRADIATION AND METHOD FOR LASER IRRADIATION

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

IN-DIE METROLOGY METHODS AND SYSTEMS FOR PROCESS CONTROL

LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM

Method for manufacturing semiconductor device

A METHOD FOR FORMING A VIRTUAL GERMANIUM SUBSTRATE USING A LASER

PLASMA GENERATOR, ANNEALING DEVICE, DEPOSITION CRYSTALLIZATION APPA...

Laser Assisted SiC Growth On Silicon

METHOD FOR FORMING POLYSILICON

Method for manufacturing semiconductor device

LOCALIZED REGION OF ISOLATED SILICON OVER DIELECTRIC MESA

METHODS OF CRYSTALLISING THIN FILMS

METHOD OF GROWING HETEROEPITAXIAL SINGLE CRYSTAL OR LARGE GRAINED S...

DISPLAY HAVING A BACKPLANE WITH INTERLACED LASER CRYSTALLIZED REGIONS

METHOD FOR FORMING CRYSTALLINE THIN-FILM AND METHOD FOR MANUFACTURI...

DEVICE AND METHOD FOR IMPROVING CRYSTALLIZATION

METHOD FOR FORMING POLYSILICON USING HIGH ENERGY RADIATION SOURCE

SUBSTRATE HAVING THIN FILM AND METHOD OF THIN FILM FORMATION