SCM [Scanning Capacitance Microscopy] or apparatus therefor

Industry

CPC
G01Q60/46

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G01Measuring instruments G01QSCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES G01Q60/00Particular type of SPM [Scanning Probe Microscopy] or microscopes Essential components thereof

Current Industry

G01Q60/46SCM [Scanning Capacitance Microscopy] or apparatus therefor

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method of preparing a specimen for scanning capacitance microscopy
- Patent number 11,619,650
- Issue date Apr 4, 2023
- MSSCORPS CO., LTD.
- Chi-Lun Liu
- G01 - MEASURING TESTING
Information Patent Grant
Probe-based data collection system with adaptive mode of probing co...
- Patent number 9,891,280
- Issue date Feb 13, 2018
- FEI EFA, Inc.
- Vladimir A. Ukraintsev
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor testing structures and semiconductor testing apparatus
- Patent number 9,823,271
- Issue date Nov 21, 2017
- Semiconductor Manufacturing International (Beijing) Corporation
- Nan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor testing structures and fabrication method thereof
- Patent number 9,557,348
- Issue date Jan 31, 2017
- Semiconductor Manufacturing International (Beijing) Corporation
- Nan Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for two-dimensional profiling of doping profil...
- Patent number 7,788,732
- Issue date Aug 31, 2010
- Infineon Technologies AG
- Guenther Benstetter
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring nm-scale tip-sample capacitance
- Patent number 7,023,220
- Issue date Apr 4, 2006
- The Ohio State University
- Jonathan P. Pelz
- G01 - MEASURING TESTING
Information Patent Grant
Direct, low frequency capacitance measurement for scanning capacita...
- Patent number 6,856,145
- Issue date Feb 15, 2005
- The Ohio State University
- Jonathan P. Pelz
- G01 - MEASURING TESTING
Information Patent Grant
Scanning capacitance - voltage microscopy
- Patent number 5,065,103
- Issue date Nov 12, 1991
- International Business Machines Corporation
- James A. Slinkman
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC...
- Publication number 20240230710
- Publication date Jul 11, 2024
- MSSCORPS CO., LTD.
- MAO-NAN CHANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC...
- Publication number 20240133918
- Publication date Apr 25, 2024
- MSSCORPS CO., LTD.
- MAO-NAN CHANG
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF PREPARING A SPECIMEN FOR SCANNING CAPACITANCE MICROSCOPY
- Publication number 20230098264
- Publication date Mar 30, 2023
- MSSCORPS CO., LTD.
- CHI-LUN LIU
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM FOR SCANNING PROBE MICROSCOPY APPLICATIONS AND METHOD FOR OB...
- Publication number 20210318352
- Publication date Oct 14, 2021
- Consejo Superior de Investigaciones Cientificas (CSIC)
- Lidia MARTINEZ ORELLANA
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR TESTING STRUCTURES AND SEMICONDUCTOR TESTING APPARATUS
- Publication number 20170016934
- Publication date Jan 19, 2017
- Semiconductor Manufacturing International (Beijing) Corporation
- Nan LI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING PROCESS SOLUTION, AND SAMPLE PR...
- Publication number 20160061695
- Publication date Mar 3, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tzu-Sou CHUANG
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC...
- Publication number 20150169997
- Publication date Jun 18, 2015
- CARL ZEISS SMS GMBH
- Dieter Weber
- G02 - OPTICS
Information Patent Application
Method and apparatus for two-dimensional profiling of doping profil...
- Publication number 20070221841
- Publication date Sep 27, 2007
- INFINEON TECHNOLOGIES AG
- Guenther Benstetter
- G01 - MEASURING TESTING
Information Patent Application
Method for measuring nm-scale tip-sample capacitance
- Publication number 20050077915
- Publication date Apr 14, 2005
- The Ohio State University
- Jonathan P. Pelz
- G01 - MEASURING TESTING
Information Patent Application
Direct, low frequency capacitance measurement for scanning capacita...
- Publication number 20040008042
- Publication date Jan 15, 2004
- The Ohio State University
- Jonathan P. Pelz
- G01 - MEASURING TESTING

SCM [Scanning Capacitance Microscopy] or apparatus therefor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of preparing a specimen for scanning capacitance microscopy

Probe-based data collection system with adaptive mode of probing co...

Semiconductor testing structures and semiconductor testing apparatus

Semiconductor testing structures and fabrication method thereof

Method and apparatus for two-dimensional profiling of doping profil...

Method for measuring nm-scale tip-sample capacitance

Direct, low frequency capacitance measurement for scanning capacita...

Scanning capacitance - voltage microscopy

Patents Applicationslast 30 patents

METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC...

METHOD FOR OBTAINING THE EQUIVALENT OXIDE THICKNESS OF A DIELECTRIC...

METHOD OF PREPARING A SPECIMEN FOR SCANNING CAPACITANCE MICROSCOPY

SYSTEM FOR SCANNING PROBE MICROSCOPY APPLICATIONS AND METHOD FOR OB...

SEMICONDUCTOR TESTING STRUCTURES AND SEMICONDUCTOR TESTING APPARATUS

METHOD AND APPARATUS FOR INSPECTING PROCESS SOLUTION, AND SAMPLE PR...

APPARATUS AND METHOD FOR CORRELATING IMAGES OF A PHOTOLITHOGRAPHIC...

Method and apparatus for two-dimensional profiling of doping profil...

Method for measuring nm-scale tip-sample capacitance

Direct, low frequency capacitance measurement for scanning capacita...