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H01J2237/2448
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2448
Secondary particle detectors
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam device and operation method therefor
Patent number
11,961,701
Issue date
Apr 16, 2024
HITACHI HIGH-TECH CORPORATION
Tomoharu Nagashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed charged-particle beam system
Patent number
11,942,302
Issue date
Mar 26, 2024
ASML Netherlands B.V.
Arno Jan Bleeker
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for detecting or monitoring for a chemical precursor in a...
Patent number
11,939,673
Issue date
Mar 26, 2024
ASM IP Holding B.V.
John Kevin Shugrue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,923,167
Issue date
Mar 5, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope device and electron beam inspection ap...
Patent number
11,908,657
Issue date
Feb 20, 2024
Zhongke Jingyuan Electron Limited
Qinglang Meng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion energy analysis of plasma processes
Patent number
11,908,668
Issue date
Feb 20, 2024
IMPEDANS LTD
Paul Scullin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,869,745
Issue date
Jan 9, 2024
HITACHI HIGH-TECH CORPORATION
Minami Shouji
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
RE49784
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Weiming Ren
Information
Patent Grant
Scintillator for charged particle beam apparatus and charged partic...
Patent number
11,846,736
Issue date
Dec 19, 2023
HITACHI HIGH-TECH CORPORATION
Eri Takahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,823,861
Issue date
Nov 21, 2023
HITACHI HIGH-TECH CORPORATION
Yuta Imai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Primary charged particle beam current measurement
Patent number
11,817,292
Issue date
Nov 14, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
John Breuer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
11,756,763
Issue date
Sep 12, 2023
HITACHI HIGH-TECH CORPORATION
Teruo Kohashi
G01 - MEASURING TESTING
Information
Patent Grant
Bandpass charged particle energy filtering detector for charged par...
Patent number
11,749,495
Issue date
Sep 5, 2023
KLA Corp.
Youfei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
11,749,494
Issue date
Sep 5, 2023
HITACHI HIGH-TECH CORPORATION
Takafumi Miwa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Verification plates with automated evaluation of melt performance
Patent number
11,733,187
Issue date
Aug 22, 2023
Arcam AB
David Svensson
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Charged particle beam device
Patent number
11,728,127
Issue date
Aug 15, 2023
HITACHI HIGH-TECH CORPORATION
Takuma Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-beam inspection apparatus with improved detection performance...
Patent number
11,721,521
Issue date
Aug 8, 2023
ASML Netherlands B.V.
Weiming Ren
B82 - NANO-TECHNOLOGY
Information
Patent Grant
System and method for reducing the charging effect in a transmissio...
Patent number
11,715,618
Issue date
Aug 1, 2023
FEI Company
Yuchen Deng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and analysis method
Patent number
11,710,615
Issue date
Jul 25, 2023
Jeol Ltd.
Kenichi Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,705,304
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Shuai Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam apparatus and composite beam apparatus
Patent number
11,682,536
Issue date
Jun 20, 2023
Hitachi High-Tech Science Corporation
Koji Nagahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for inspecting an EUV mask
Patent number
11,662,323
Issue date
May 30, 2023
ASML Netherlands B.V.
Guochong Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam system and method for the particle-optical examinatio...
Patent number
11,657,999
Issue date
May 23, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and a method for overlay monitoring
Patent number
11,646,173
Issue date
May 9, 2023
Applied Materials Israel Ltd.
Itay Asulin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device defect detection method using a charged particle beam
Patent number
11,631,568
Issue date
Apr 18, 2023
HITACHI HIGH-TECH CORPORATION
Yasuhiro Shirasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Back-scatter electrons (BSE) imaging with a SEM in tilted mode usin...
Patent number
11,626,267
Issue date
Apr 11, 2023
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,610,754
Issue date
Mar 21, 2023
HITACHI HIGH-TECH CORPORATION
Katsura Takaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and control method
Patent number
11,610,756
Issue date
Mar 21, 2023
HITACHI HIGH-TECH CORPORATION
Kaori Bizen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensor module for scanning electron microscopy applications
Patent number
11,610,757
Issue date
Mar 21, 2023
KLA Corporation
Marcel Trimpl
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...
Publication number
20240153736
Publication date
May 9, 2024
Japan Science and Technology Agency
Takumi SANNOMIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE APPARATUS AND METHOD
Publication number
20240128043
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Jurgen VAN SOEST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sample Inspection Apparatus, Inspection System, Thin Piece Sample F...
Publication number
20240128047
Publication date
Apr 18, 2024
Hitachi High-Tech Corporation
Masahiro YOSHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM OF IMAGE-FORMING MULTI-ELECTRON BEAMS
Publication number
20240096586
Publication date
Mar 21, 2024
KLA Corporation
Xinrong JIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISTORTION OPTIMIZED MULTI-BEAM SCANNING SYSTEM
Publication number
20240096587
Publication date
Mar 21, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
Publication number
20240094056
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inspection System
Publication number
20240029994
Publication date
Jan 25, 2024
Hitachi High-Tech Corporation
Natsuki TSUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20240014002
Publication date
Jan 11, 2024
HITACHI HIGH-TECH CORPORATION
Takayasu IWATSUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND IMAGING METHOD
Publication number
20230420215
Publication date
Dec 28, 2023
HITACHI HIGH-TECH CORPORATION
Toshiyuki Yokosuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Spectrometer and Analytical Method
Publication number
20230411113
Publication date
Dec 21, 2023
JEOL Ltd.
Tatsuya Uchida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
Publication number
20230402250
Publication date
Dec 14, 2023
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Paolo CATTANEO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Creating Multiple Electron Beams with a Photocathode Film
Publication number
20230395349
Publication date
Dec 7, 2023
KLA Corporation
Xinrong Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device, Charged Particle Beam System, and Adj...
Publication number
20230386781
Publication date
Nov 30, 2023
HITACHI HIGH-TECH CORPORATION
Zhao JINYU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analysis System
Publication number
20230377836
Publication date
Nov 23, 2023
Hitachi High-Tech Corporation
Azusa KONNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20230377837
Publication date
Nov 23, 2023
HITACHI HIGH-TECH CORPORATION
Yohei NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS AND PROCESSOR SYSTEM
Publication number
20230335373
Publication date
Oct 19, 2023
HITACHI HIGH-TECH CORPORATION
Akio YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE TOOL, CALIBRATION METHOD, INSPECTION METHOD
Publication number
20230324318
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...
Publication number
20230326706
Publication date
Oct 12, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID SCANNING ELECTRON MICROSCOPY AND ACOUSTO-OPTIC BASED METROLOGY
Publication number
20230326713
Publication date
Oct 12, 2023
APPLIED MATERIALS ISRAEL LTD.
Guy Shwartz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam System
Publication number
20230317406
Publication date
Oct 5, 2023
HITACHI HIGH-TECH CORPORATION
Yuto KAWASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT TOOL, INSPECTION METHOD AND IMAGE
Publication number
20230304949
Publication date
Sep 28, 2023
ASML NETHERLANDS B.V.
Roy Ramon VEENSTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD OF ETCHING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20230307217
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
Dooyoung Gwak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Energy Filter, and Energy Analyzer and Charged Particle Beam Device...
Publication number
20230298845
Publication date
Sep 21, 2023
Hitachi High-Tech Corporation
Kazuhiro HONDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20230274910
Publication date
Aug 31, 2023
JEOL Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SUPPLY DEVICE, SYSTEM HAVING A GAS SUPPLY DEVICE, AND PARTICLE...
Publication number
20230241650
Publication date
Aug 3, 2023
CARL ZEISS MICROSCOPY GMBH
Andreas Schmaunz
B08 - CLEANING
Information
Patent Application
SENSOR MODULE FOR SCANNING ELECTRON MICROSCOPY APPLICATIONS
Publication number
20230230800
Publication date
Jul 20, 2023
KLA Corporation
Marcel Trimpl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam System and Method of Correcting Deviation of Field...
Publication number
20230230801
Publication date
Jul 20, 2023
JEOL Ltd.
Yuichiro Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED ARCHITECTURE FOR HIGH-PERFORMANCE DETECTION DEVICE TECHNIC...
Publication number
20230215685
Publication date
Jul 6, 2023
ASML NETHERLANDS B.V.
Yongxin WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED CHARGED-PARTICLE BEAM SYSTEM
Publication number
20230154722
Publication date
May 18, 2023
ASML NETHERLANDS B.V.
Arno Jan BLEEKER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIEN FILTER AND MULTIPLE ELECTRON BEAM INSPECTION APPARATUS
Publication number
20230136198
Publication date
May 4, 2023
NuFlare Technology, Inc.
Toshikatsu AKIBA
H01 - BASIC ELECTRIC ELEMENTS