Sectored detectors

Industry

CPC
H01J2237/24465

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/24465Sectored detectors

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,996,276
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,715,619
- Issue date Aug 1, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,581,169
- Issue date Feb 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,398,368
- Issue date Jul 26, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,295,930
- Issue date Apr 5, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,049,686
- Issue date Jun 29, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and method for determining crystal ori...
- Patent number 10,935,505
- Issue date Mar 2, 2021
- Jeol Ltd.
- Takeshi Otsuka
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and sensitivity correction metho...
- Patent number 10,840,057
- Issue date Nov 17, 2020
- NuFlare Technology, Inc.
- Koichi Ishii
- G01 - MEASURING TESTING
Information Patent Grant
Aberration measurement method and electron microscope
- Patent number 10,840,058
- Issue date Nov 17, 2020
- Jeol Ltd.
- Yuji Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,811,222
- Issue date Oct 20, 2020
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method and electron microscope
- Patent number 10,714,308
- Issue date Jul 14, 2020
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discriminative imaging technique in scanning transmission charged p...
- Patent number 10,699,872
- Issue date Jun 30, 2020
- FEI Company
- Eric Gerardus Bosch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intelligent pre-scan in scanning transmission charged particle micr...
- Patent number 10,665,419
- Issue date May 26, 2020
- FEI Company
- Erik Michiel Franken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 10,643,819
- Issue date May 5, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 10,553,411
- Issue date Feb 4, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,535,494
- Issue date Jan 14, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam dark field imaging
- Patent number 10,192,716
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,163,603
- Issue date Dec 25, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,141,160
- Issue date Nov 27, 2018
- Hermes-Microvision, Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Signal processing method and signal processing apparatus
- Patent number 9,960,010
- Issue date May 1, 2018
- TOSHIBA MEMORY CORPORATION
- Motoki Kadowaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device and charged particle beam device contr...
- Patent number 9,881,769
- Issue date Jan 30, 2018
- Hitachi High-Technologies Corporation
- Kenji Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiographic image capturing device, method for detecting radiation...
- Patent number 9,833,214
- Issue date Dec 5, 2017
- FUJIFILM Corporation
- Ryou Imamura
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Electron microscope and method of measuring aberrations
- Patent number 9,779,911
- Issue date Oct 3, 2017
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement method and electron microscope
- Patent number 9,728,372
- Issue date Aug 8, 2017
- Jeol Ltd.
- Yuji Kohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional mapping using scanning electron microscope images
- Patent number 9,378,923
- Issue date Jun 28, 2016
- Applied Materials Israel, Ltd.
- Ishai Schwarzband
- G01 - MEASURING TESTING
Information Patent Grant
In-column detector for particle-optical column
- Patent number 9,362,086
- Issue date Jun 7, 2016
- FEI Company
- Lubomír Tůma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged particle microscope, image acquisition method, and...
- Patent number 9,275,830
- Issue date Mar 1, 2016
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-dimensional mapping using scanning electron microscope images
- Patent number 8,946,627
- Issue date Feb 3, 2015
- Applied Materials Israel, Ltd.
- Ishai Schwarzband
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20240290588
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...
- Publication number 20240222069
- Publication date Jul 4, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20230197424
- Publication date Jun 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES
- Publication number 20230135167
- Publication date May 4, 2023
- Inficon Inc.
- Matan Lapidot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...
- Publication number 20230040811
- Publication date Feb 9, 2023
- THE UNIVERSITY OF TOKYO
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION
- Publication number 20220375716
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210193433
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20200227232
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20200111651
- Publication date Apr 9, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20200098541
- Publication date Mar 26, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION
- Publication number 20200027694
- Publication date Jan 23, 2020
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCRIMINATIVE IMAGING TECHNIQUE IN SCANNING TRANSMISSION CHARGED P...
- Publication number 20190272974
- Publication date Sep 5, 2019
- FEI Company
- Eric Gerardus BOSCH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE BEAM INSPECTION APPARATUS AND SENSITIVITY CORRECTION METHO...
- Publication number 20190214221
- Publication date Jul 11, 2019
- NuFlare Technology, Inc.
- Koichi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20190172677
- Publication date Jun 6, 2019
- HERMES MICROVISION, INC.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20190122852
- Publication date Apr 25, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED DETECTOR FOR A CHARGED PARTICLE BEAM DEVICE
- Publication number 20180217059
- Publication date Aug 2, 2018
- FEI Company
- Nicholas C. BARBI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20170076920
- Publication date Mar 16, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Otto CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Charged Particle Beam Device Contr...
- Publication number 20160203947
- Publication date Jul 14, 2016
- Hitachi High-Technologies Corporation
- Kenji AOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
- Publication number 20140312224
- Publication date Oct 23, 2014
- Advantest Corporation
- Tsutomu Murakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SECONDARY ELECTRON OPTICS AND DETECTION DEVICE
- Publication number 20140175277
- Publication date Jun 26, 2014
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN
- Publication number 20140097341
- Publication date Apr 10, 2014
- FEI Company
- Lubomir Tuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES
- Publication number 20140074419
- Publication date Mar 13, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Ishai Schwarzband
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPLIED APPARATUS, AND IRRADIATION METHOD
- Publication number 20130299697
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Momoyo Enyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD O...
- Publication number 20130270438
- Publication date Oct 17, 2013
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik GmbH
- Stefan LANIO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIGNAL PROCESSING METHOD AND SIGNAL PROCESSING APPARATUS
- Publication number 20130245989
- Publication date Sep 19, 2013
- Kabushiki Kaisha Toshiba
- Motoki KADOWAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES
- Publication number 20130200255
- Publication date Aug 8, 2013
- APPLIED MATERIALS ISRAEL, LTD.
- Ishai Schwarzband
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND PARTICLE BEAM DEVICE FOR PRODUCING AN IMAGE OF AN OBJECT
- Publication number 20130082175
- Publication date Apr 4, 2013
- Heiner Jaksch
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20120298864
- Publication date Nov 29, 2012
- Hideo Morishita
- H01 - BASIC ELECTRIC ELEMENTS

Sectored detectors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion collector for use in plasma systems

Method and apparatus for charged particle detection

Particle beam system and method for the particle-optical examinatio...

Ion collector for use in plasma systems

Apparatus of plural charged-particle beams

Method and apparatus for charged particle detection

Method and system for charged particle microscopy with improved ima...

Particle beam system and method for the particle-optical examinatio...

Scanning electron microscope and method for determining crystal ori...

Multiple beam inspection apparatus and sensitivity correction metho...

Aberration measurement method and electron microscope

Apparatus of plural charged-particle beams

Measurement method and electron microscope

Discriminative imaging technique in scanning transmission charged p...

Intelligent pre-scan in scanning transmission charged particle micr...

Method and system for charged particle microscopy with improved ima...

Ion collector for use in plasma systems

Particle beam system and method for the particle-optical examinatio...

Multi-beam dark field imaging

Particle beam system and method for the particle-optical examinatio...

Apparatus of plural charged-particle beams

Signal processing method and signal processing apparatus

Charged particle beam device and charged particle beam device contr...

Radiographic image capturing device, method for detecting radiation...

Electron microscope and method of measuring aberrations

Measurement method and electron microscope

Three-dimensional mapping using scanning electron microscope images

In-column detector for particle-optical column

Scanning charged particle microscope, image acquisition method, and...

Three-dimensional mapping using scanning electron microscope images

Patents Applicationslast 30 patents

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES

OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...

METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

Method and System for Charged Particle Microscopy with Improved Ima...

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION

DISCRIMINATIVE IMAGING TECHNIQUE IN SCANNING TRANSMISSION CHARGED P...

MULTIPLE BEAM INSPECTION APPARATUS AND SENSITIVITY CORRECTION METHO...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

SEGMENTED DETECTOR FOR A CHARGED PARTICLE BEAM DEVICE

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

Charged Particle Beam Device and Charged Particle Beam Device Contr...

PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS

SECONDARY ELECTRON OPTICS AND DETECTION DEVICE

IN-COLUMN DETECTOR FOR PARTICLE-OPTICAL COLUMN

THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES

CHARGED PARTICLE BEAM APPLIED APPARATUS, AND IRRADIATION METHOD

SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD O...

SIGNAL PROCESSING METHOD AND SIGNAL PROCESSING APPARATUS

THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES

METHOD AND PARTICLE BEAM DEVICE FOR PRODUCING AN IMAGE OF AN OBJECT

Charged Particle Beam Apparatus