Claims
- 1. Apparatus for counterweighting a diffusion furnace cantilever arm which is inserted into the furnace for processing semiconductor wafers, said apparatus including a novel empty boat and other boats which contain a full load of wafers, where said empty boats provide a means for balancing the cantilever arm, said empty novel boat has a cylindrical outer cover and is empty of any semiconductor wafers, and said novel boat provides a means for balancing with other boats which contain a full load of wafers and said empty novel boat has the same weight as one of said other boats which contain a full load of wafers so that one or more of said novel empty boats is mounted on a cantilever arm with other boars which contain wafers as a balancing mechanism.
- 2. Apparatus for counterweighting a diffusion furnace cantilever arm according to claim 1 wherein said novel boat is formed of quartz.
- 3. Apparatus for counterweighting a diffusion furnace cantilever arm which is inserted into the furnace for processing semiconductor wafers, said apparatus including a novel boat and other boats which contain a full load of wafers where said novel boats provide a means for balancing the cantilever arm, and said novel boat provides a means for balancing with other boats which contain a full load of wafers, said novel boat has a cylindrical outer cover which extends substantially the full length of said novel boat except for slots for receiving wafers that are the same as wafers in other boats and which are less than a full load of wafers therein and said novel boat provides a means for balancing other boats which contain a full load of wafers, and said novel boat contains wafers which is less than a full load and has the same weight as one of said other boats which contain a full load of wafers so that one or more of said novel boats is mounted on a cantilever arm with other boats which contain a full load of wafers as a balancing mechanism.
- 4. Apparatus for counterweighting a diffusion furnace cantilever arm according to claim 3 wherein said novel boat is formed of quartz.
Parent Case Info
This is a continuation of application Ser. No. 07/864,416, filed Apr. 6, 1992, now abandoned.
US Referenced Citations (5)
Continuations (1)
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Number |
Date |
Country |
Parent |
864416 |
Apr 1992 |
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