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Sensing velocity of translation or rotation
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CPC
H01J2237/2025
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/2025
Sensing velocity of translation or rotation
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Patents Grants
last 30 patents
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Patent Grant
Ion milling device
Patent number
11,004,652
Issue date
May 11, 2021
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device and control method of charged particle...
Patent number
10,636,620
Issue date
Apr 28, 2020
Hitachi High-Technologies Corporation
Hiroshi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Exposure apparatus and exposure method
Patent number
9,859,099
Issue date
Jan 2, 2018
Advantest Corporation
Akio Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Roller mold manufacturing device and manufacturing method
Patent number
9,000,325
Issue date
Apr 7, 2015
Asahi Kasei Kabushiki Kaisha
Naoto Ito
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Magnetic bearing, a rotary stage, and a reflective electron beam li...
Patent number
8,836,190
Issue date
Sep 16, 2014
Koninklijke Philips N.V.
Sahin Funda
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Charged particle beam deflection method with separate stage trackin...
Patent number
8,384,048
Issue date
Feb 26, 2013
Multibeam Corporation
John C. Wiesner
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Move mechanism for moving target object and charged particle beam w...
Patent number
8,277,603
Issue date
Oct 2, 2012
NuFlare Technology, Inc.
Shuichi Tamamushi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Moving module of a wafer ion-implanting machine
Patent number
7,956,333
Issue date
Jun 7, 2011
Inotera Memories, Inc.
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam exposure apparatus involving the position and velocit...
Patent number
7,777,202
Issue date
Aug 17, 2010
Advantest Corp.
Takamasa Satoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged-particle beam system
Patent number
7,329,881
Issue date
Feb 12, 2008
Jeol Ltd.
Osamu Wakimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission electron microscope and image observation method using it
Patent number
7,235,784
Issue date
Jun 26, 2007
Hitachi High-Technologies Corporation
Yoshifumi Taniguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for electron beam processing of substrates
Patent number
7,038,225
Issue date
May 2, 2006
Seagate Technology LLC
David Shiao-Min Kuo
G11 - INFORMATION STORAGE
Information
Patent Grant
Ion beam scan control
Patent number
5,432,352
Issue date
Jul 11, 1995
Eaton Corporation
Marcus van Bavel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for ion implantation including contactless cooling and be...
Patent number
5,338,940
Issue date
Aug 16, 1994
Nissin-High Voltage Co., Ltd.
Kunihiko Takeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for positioning objects within a sealed chamber
Patent number
5,139,383
Issue date
Aug 18, 1992
Huntington Mechanical Laboratories, Inc.
Alexander Polyak
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Sample Holder and Sample Processing Apparatus
Publication number
20240331970
Publication date
Oct 3, 2024
JEOL Ltd.
Jun Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM APPARATUS, AND VACUUM APPARATUS
Publication number
20230260740
Publication date
Aug 17, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device
Publication number
20200357602
Publication date
Nov 12, 2020
Hitachi High-Technologies Corporation
Asako KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE AND CONTROL METHOD OF CHARGED PARTICLE...
Publication number
20180151328
Publication date
May 31, 2018
Hitachi High-Technologies Corporation
Hiroshi KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD
Publication number
20160314934
Publication date
Oct 27, 2016
Advantest Corporation
Akio YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKIN...
Publication number
20130266894
Publication date
Oct 10, 2013
Multibeam Corporation
John C. Wiesner
B82 - NANO-TECHNOLOGY
Information
Patent Application
ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
Publication number
20130068734
Publication date
Mar 21, 2013
ASAHI KASEI KABUSHIKI KAISHA
Naoto Ito
B82 - NANO-TECHNOLOGY
Information
Patent Application
MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LI...
Publication number
20120038233
Publication date
Feb 16, 2012
Koninklijke Philips Electronics N.V.
Sahin Funda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Moving module of a wafer ion-implanting machine
Publication number
20100218720
Publication date
Sep 2, 2010
Ting-Wei Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOROBOT MODULE, AUTOMATION AND EXCHANGE
Publication number
20100140473
Publication date
Jun 10, 2010
Volker Klocke
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM DEFLECTION METHOD WITH SEPARATE STAGE TRACKIN...
Publication number
20080315112
Publication date
Dec 25, 2008
John C. Wiesner
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam exposure apparatus
Publication number
20080277598
Publication date
Nov 13, 2008
Takamasa Satoh
B82 - NANO-TECHNOLOGY
Information
Patent Application
Move mechanism for moving target object and charged particle beam w...
Publication number
20070152169
Publication date
Jul 5, 2007
NuFLARE TECHNOLOGY, INC.
Shuichi Tamamushi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Transmission electron microscope and image observation method using it
Publication number
20060076492
Publication date
Apr 13, 2006
Yoshifumi Taniguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for electron beam processing of substrates
Publication number
20050285053
Publication date
Dec 29, 2005
David Shiao-Min Kuo
G11 - INFORMATION STORAGE
Information
Patent Application
Charged-particle beam system
Publication number
20050211681
Publication date
Sep 29, 2005
JEOL Ltd.
Osamu Wakimoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY