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H01L2224/75982
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L2224/00
Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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H01L2224/75982
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Patent Grant
Wafer bonding apparatus and wafer bonding system including the same
Patent number
10,639,875
Issue date
May 5, 2020
Samsung Electronics Co., Ltd.
Tae-yeong Kim
B32 - LAYERED PRODUCTS