shearing interferometers

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CPC
G01B9/02098

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GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

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G01B9/02098shearing interferometers

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Patents Grantslast 30 patents

Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 12,188,769
- Issue date Jan 7, 2025
- Shimadzu Corporation
- Koki Yoshida
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting changes in direction of a light...
- Patent number 12,104,902
- Issue date Oct 1, 2024
- Max-Planck Gesellschaft zur Foerderung der Wissenschaften e.V.
- Johann Engelhardt
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Extended reality virtual distance measurement system
- Patent number 11,867,507
- Issue date Jan 9, 2024
- MLOptic Corp.
- Pengfei Wu
- G01 - MEASURING TESTING
Information Patent Grant
Common lens transmitter for motion compensated illumination
- Patent number 11,650,042
- Issue date May 16, 2023
- BAE Systems Information and Electronic Systems Integration Inc.
- Christopher E. Saxer
- G02 - OPTICS
Information Patent Grant
Composite laminate damage detection method using an in-situ thermal...
- Patent number 11,618,591
- Issue date Apr 4, 2023
- The Boeing Company
- Samuel R. Goertz
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
System and method for lateral shearing interferometry in an inspect...
- Patent number 11,609,506
- Issue date Mar 21, 2023
- KLA Corporation
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Grant
Methods, systems and apparatus of interferometry for imaging and se...
- Patent number 11,598,627
- Issue date Mar 7, 2023
- Virginia Tech Intellectual Properties, Inc.
- Yizheng Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Method for compensation during the process of wavefront reconstruct...
- Patent number 11,561,082
- Issue date Jan 24, 2023
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Peng Li
- G01 - MEASURING TESTING
Information Patent Grant
Method for high-accuracy wavefront measurement base on grating shea...
- Patent number 11,340,118
- Issue date May 24, 2022
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Yunjun Lu
- G01 - MEASURING TESTING
Information Patent Grant
Regularized shearograms for phase resolved shearography
- Patent number 11,287,244
- Issue date Mar 29, 2022
- BAE Systems Information and Electronic Systems Integration Inc.
- Andrew N. Acker
- G01 - MEASURING TESTING
Information Patent Grant
Shearing interferometry measurement device for microscopy
- Patent number 11,248,901
- Issue date Feb 15, 2022
- NIKON CORPORATION
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Grant
Light intensity fluctuation-insensitive projection objective wave a...
- Patent number 11,215,512
- Issue date Jan 4, 2022
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Feng Tang
- G01 - MEASURING TESTING
Information Patent Grant
Metrology and profilometry using light field generator
- Patent number 11,092,427
- Issue date Aug 17, 2021
- The Charles Stark Draper Laboratory, Inc.
- Steven J. Byrnes
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection device and method
- Patent number 10,942,152
- Issue date Mar 9, 2021
- Shimadzu Corporation
- Takahide Hatahori
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional interferometer and method for determining a phase...
- Patent number 10,663,351
- Issue date May 26, 2020
- Martin Berz
- G01 - MEASURING TESTING
Information Patent Grant
Lateral shearing interferometer for auto alignment beam sensing
- Patent number 10,571,261
- Issue date Feb 25, 2020
- Raytheon Company
- Kyle Heideman
- G02 - OPTICS
Information Patent Grant
Optical interferometry
- Patent number 10,466,032
- Issue date Nov 5, 2019
- Optonor AS
- Eiolf Vikhagen
- G01 - MEASURING TESTING
Information Patent Grant
Motion compensation system for a shearography apparatus
- Patent number 10,466,038
- Issue date Nov 5, 2019
- BAE Systems Information and Electronic Systems Integration Inc.
- Daniel N. Kokubun
- G02 - OPTICS
Information Patent Grant
Defect detection method and defect detection device
- Patent number 10,429,172
- Issue date Oct 1, 2019
- Shimadzu Corporation
- Takahide Hatahori
- G01 - MEASURING TESTING
Information Patent Grant
Spatial phase-shift shearography system for non-destructive testing...
- Patent number 10,330,463
- Issue date Jun 25, 2019
- Oakland University
- Lianxiang Yang
- G01 - MEASURING TESTING
Information Patent Grant
Vibration measurement device
- Patent number 10,317,190
- Issue date Jun 11, 2019
- Shimadzu Corporation
- Takahide Hatahori
- G01 - MEASURING TESTING
Information Patent Grant
Lensless imaging with reduced aperture
- Patent number 10,281,258
- Issue date May 7, 2019
- John Farah
- G01 - MEASURING TESTING
Information Patent Grant
Spectral shearing ladar
- Patent number 10,274,377
- Issue date Apr 30, 2019
- The United States of America as represented by the Secretary of the Air Force
- David J. Rabb
- G01 - MEASURING TESTING
Information Patent Grant
Defect detection method and defect detection apparatus
- Patent number 10,267,618
- Issue date Apr 23, 2019
- Shimadzu Corporation
- Takahide Hatahori
- G01 - MEASURING TESTING
Information Patent Grant
Overall Z-direction displacement measuring system
- Patent number 10,234,264
- Issue date Mar 19, 2019
- SHENZHEN ORBBEC CO., LTD.
- Yuanhao Huang
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for overlay measurement
- Patent number 10,042,269
- Issue date Aug 7, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Liwan Yue
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods of characterizing process-induced wafer shape f...
- Patent number 9,935,022
- Issue date Apr 3, 2018
- Ultratech, Inc.
- David M. Owen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polarization-based coherent gradient sensing systems and methods
- Patent number 9,784,570
- Issue date Oct 10, 2017
- Ultratech, Inc.
- David G. Stites
- G01 - MEASURING TESTING
Information Patent Grant
Interferometer and phase shift amount measuring apparatus with diff...
- Patent number 9,719,859
- Issue date Aug 1, 2017
- LASERTEC CORPORATION
- Haruhiko Kusunose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus and measuring method
- Patent number 9,544,558
- Issue date Jan 10, 2017
- Lasertec Corporation
- Koyo Tada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE-MIRROR SHEAR INTERFEROMETER
- Publication number 20240418499
- Publication date Dec 19, 2024
- HOCHSCHULE TRIER
- Christopher PETRY
- G01 - MEASURING TESTING
Information Patent Application
DETERMINATION OF A CHANGE OF OBJECT'S SHAPE
- Publication number 20240401928
- Publication date Dec 5, 2024
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Application
COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY
- Publication number 20240255273
- Publication date Aug 1, 2024
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Andrew N. Acker
- G01 - MEASURING TESTING
Information Patent Application
COMPACT SHEAROGRAPHY SYSTEM WITH ADJUSTABLE SHEAR DISTANCE
- Publication number 20230296368
- Publication date Sep 21, 2023
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION APPARATUS
- Publication number 20230251204
- Publication date Aug 10, 2023
- Shimadzu Corporation
- Hiroshi HORIKAWA
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR MEASURING A FEATURE OF GLASS-BASED SUBSTRATE
- Publication number 20230152082
- Publication date May 18, 2023
- Corning Incorporated
- Earle William Gillis
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20230062821
- Publication date Mar 2, 2023
- Shimadzu Corporation
- Koki YOSHIDA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR COMPENSATION DURING THE PROCESS OF WAVEFRONT RECONSTRUCT...
- Publication number 20220412720
- Publication date Dec 29, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Peng LI
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR LATERAL SHEARING INTERFEROMETRY IN AN INSPECT...
- Publication number 20220342325
- Publication date Oct 27, 2022
- KLA Corporation
- Markus Mengel
- G01 - MEASURING TESTING
Information Patent Application
DETERMINATION OF A CHANGE OF OBJECT'S SHAPE
- Publication number 20220065617
- Publication date Mar 3, 2022
- Nikon Corporation
- Eric Peter Goodwin
- G01 - MEASURING TESTING
Information Patent Application
COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY
- Publication number 20220011091
- Publication date Jan 13, 2022
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Andrew N. Acker
- G01 - MEASURING TESTING
Information Patent Application
SHEARING INTERFEROMETRY MEASUREMENT DEVICE FOR MICROSCOPY
- Publication number 20210302150
- Publication date Sep 30, 2021
- Nikon Corporation
- Eric Peter Goodwin
- G02 - OPTICS
Information Patent Application
GEOMETRIC PHASE SHEAROGRAPHY SYSTEM AND METHOD THEREOF
- Publication number 20210293526
- Publication date Sep 23, 2021
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Jacob D. Garan
- G01 - MEASURING TESTING
Information Patent Application
Composite Laminate Damage Detection Method Using an In-Situ Thermal...
- Publication number 20210245897
- Publication date Aug 12, 2021
- The Boeing Company
- Samuel R. Goertz
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Detecting Changes in Direction of a Light...
- Publication number 20210239452
- Publication date Aug 5, 2021
- Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.v
- Johann Engelhardt
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY AND PROFILOMETRY USING LIGHT FIELD GENERATOR
- Publication number 20200096315
- Publication date Mar 26, 2020
- The Charles Stark Draper Laboratory, Inc.
- Steven J. Byrnes
- G01 - MEASURING TESTING
Information Patent Application
LATERAL SHEARING INTERFEROMETER FOR AUTO ALIGNMENT BEAM SENSING
- Publication number 20200049493
- Publication date Feb 13, 2020
- Raytheon Company
- Kyle Heideman
- G02 - OPTICS
Information Patent Application
LENSLESS IMAGING WITH REDUCED APERTURE
- Publication number 20190271534
- Publication date Sep 5, 2019
- John Farah
- G01 - MEASURING TESTING
Information Patent Application
Three-dimensional Interferometer and Method for Determining a Phase...
- Publication number 20190145831
- Publication date May 16, 2019
- Martin BERZ
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL INTERFEROMETRY
- Publication number 20180328713
- Publication date Nov 15, 2018
- OPTONOR AS
- Eiolf VIKHAGEN
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION MEASUREMENT DEVICE
- Publication number 20180283847
- Publication date Oct 4, 2018
- Shimadzu Corporation
- Takahide HATAHORI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR OVERLAY MEASUREMENT
- Publication number 20160313115
- Publication date Oct 27, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- YANG LIU
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR OVERLAY MEASUREMENT
- Publication number 20160313655
- Publication date Oct 27, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- LIWAN YUE
- G01 - MEASURING TESTING
Information Patent Application
SPATIAL PHASE-SHIFT SHEAROGRAPHY SYSTEM FOR NON-DESTRUCTIVE TESTING...
- Publication number 20160265900
- Publication date Sep 15, 2016
- Oakland University
- Lianxiang Yang
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL APPARATUS AND METHODS
- Publication number 20160153766
- Publication date Jun 2, 2016
- Robert JONES
- G01 - MEASURING TESTING
Information Patent Application
IMAGING APPARATUS AND PROGRAM AND METHOD FOR ANALYZING INTERFERENCE...
- Publication number 20140114615
- Publication date Apr 24, 2014
- Canon Kabushiki Kaisha
- Kentaro Nagai
- G01 - MEASURING TESTING
Information Patent Application
LOW COHERENCE INTERFEROMETRIC SYSTEM FOR PHASE STEPPING SHEAROGRAPH...
- Publication number 20130141712
- Publication date Jun 6, 2013
- Pascal Blain
- G01 - MEASURING TESTING
Information Patent Application
ALL-REFLECTIVE, RADIALLY SHEARING INTERFEROMETER
- Publication number 20120120410
- Publication date May 17, 2012
- Raytheon Company
- David N. SITTER, JR.
- G01 - MEASURING TESTING
Information Patent Application
FIXED WAVELENGTH ABSOLUTE DISTANCE INTERFEROMETER
- Publication number 20120038930
- Publication date Feb 16, 2012
- Mitutoyo Corporation
- David William Sesko
- G01 - MEASURING TESTING
Information Patent Application
INTERFEROMETRIC TRACKING DEVICE
- Publication number 20100002242
- Publication date Jan 7, 2010
- Richard A. Hutchin
- G01 - MEASURING TESTING

shearing interferometers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Defect inspection device and defect inspection method

Method and apparatus for detecting changes in direction of a light...

Extended reality virtual distance measurement system

Common lens transmitter for motion compensated illumination

Composite laminate damage detection method using an in-situ thermal...

System and method for lateral shearing interferometry in an inspect...

Methods, systems and apparatus of interferometry for imaging and se...

Method for compensation during the process of wavefront reconstruct...

Method for high-accuracy wavefront measurement base on grating shea...

Regularized shearograms for phase resolved shearography

Shearing interferometry measurement device for microscopy

Light intensity fluctuation-insensitive projection objective wave a...

Metrology and profilometry using light field generator

Defect inspection device and method

Three-dimensional interferometer and method for determining a phase...

Lateral shearing interferometer for auto alignment beam sensing

Optical interferometry

Motion compensation system for a shearography apparatus

Defect detection method and defect detection device

Spatial phase-shift shearography system for non-destructive testing...

Vibration measurement device

Lensless imaging with reduced aperture

Spectral shearing ladar

Defect detection method and defect detection apparatus

Overall Z-direction displacement measuring system

Apparatus and method for overlay measurement

Systems and methods of characterizing process-induced wafer shape f...

Polarization-based coherent gradient sensing systems and methods

Interferometer and phase shift amount measuring apparatus with diff...

Measuring apparatus and measuring method

Patents Applicationslast 30 patents

DOUBLE-MIRROR SHEAR INTERFEROMETER

DETERMINATION OF A CHANGE OF OBJECT'S SHAPE

COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY

COMPACT SHEAROGRAPHY SYSTEM WITH ADJUSTABLE SHEAR DISTANCE

DEFECT INSPECTION APPARATUS

METHODS AND APPARATUS FOR MEASURING A FEATURE OF GLASS-BASED SUBSTRATE

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

METHOD FOR COMPENSATION DURING THE PROCESS OF WAVEFRONT RECONSTRUCT...

SYSTEM AND METHOD FOR LATERAL SHEARING INTERFEROMETRY IN AN INSPECT...

DETERMINATION OF A CHANGE OF OBJECT'S SHAPE

COMPUTATIONAL SHEAR BY PHASE STEPPED SPECKLE HOLOGRAPHY

SHEARING INTERFEROMETRY MEASUREMENT DEVICE FOR MICROSCOPY

GEOMETRIC PHASE SHEAROGRAPHY SYSTEM AND METHOD THEREOF

Composite Laminate Damage Detection Method Using an In-Situ Thermal...

Method and Apparatus for Detecting Changes in Direction of a Light...

METROLOGY AND PROFILOMETRY USING LIGHT FIELD GENERATOR

LATERAL SHEARING INTERFEROMETER FOR AUTO ALIGNMENT BEAM SENSING

LENSLESS IMAGING WITH REDUCED APERTURE

Three-dimensional Interferometer and Method for Determining a Phase...

OPTICAL INTERFEROMETRY

VIBRATION MEASUREMENT DEVICE

APPARATUS AND METHOD FOR OVERLAY MEASUREMENT

APPARATUS AND METHOD FOR OVERLAY MEASUREMENT

SPATIAL PHASE-SHIFT SHEAROGRAPHY SYSTEM FOR NON-DESTRUCTIVE TESTING...

OPTICAL APPARATUS AND METHODS

IMAGING APPARATUS AND PROGRAM AND METHOD FOR ANALYZING INTERFERENCE...

LOW COHERENCE INTERFEROMETRIC SYSTEM FOR PHASE STEPPING SHEAROGRAPH...

ALL-REFLECTIVE, RADIALLY SHEARING INTERFEROMETER

FIXED WAVELENGTH ABSOLUTE DISTANCE INTERFEROMETER

INTERFEROMETRIC TRACKING DEVICE