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  • CPC
  • H01J37/32651
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32651Shields
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA SOURCE COOLING SYSTEM
    • Publication number 20250218737
    • Publication date Jul 3, 2025
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Songjae Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
    • Publication number 20250218747
    • Publication date Jul 3, 2025
    • SEMES CO., LTD.
    • Dong Hun KIM
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RF BLOCKER FOR UNIFORMITY CONTROL
    • Publication number 20250218742
    • Publication date Jul 3, 2025
    • Applied Materials, Inc.
    • Vikram M. Bhosle
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Hybrid Plasma Source Array
    • Publication number 20250201517
    • Publication date Jun 19, 2025
    • Beijing E-Town Semiconductor Technology Co., LTD
    • Maolin Long
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20250174440
    • Publication date May 29, 2025
    • TOKYO ELECTRON LIMITED
    • Masato SHINADA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20250149308
    • Publication date May 8, 2025
    • TOKYO ELECTRON LIMITED
    • Nozomu NAGASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20250149307
    • Publication date May 8, 2025
    • TOKYO ELECTRON LIMITED
    • Nozomu NAGASHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20250112030
    • Publication date Apr 3, 2025
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Kenneth Scott Alexander Butcher
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING CHAMBER LID COOLING
    • Publication number 20250095970
    • Publication date Mar 20, 2025
    • Applied Materials, Inc.
    • Rajinder Dhindsa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Cooled Shield for ICP Source
    • Publication number 20250062103
    • Publication date Feb 20, 2025
    • Mattson Technology, Inc.
    • Maolin Long
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS AND METHOD FOR PLASMA PROCESSING
    • Publication number 20250037977
    • Publication date Jan 30, 2025
    • TOKYO ELECTRON LIMITED
    • Barton Lane
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR PLASMA PROCESSING
    • Publication number 20250014865
    • Publication date Jan 9, 2025
    • TOKYO ELECTRON LIMITED
    • Merritt Funk
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
    • Publication number 20250014873
    • Publication date Jan 9, 2025
    • View, Inc.
    • Bo Neilan
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Shield Ring Mounting Using Compliant Hardware
    • Publication number 20250014870
    • Publication date Jan 9, 2025
    • Applied Materials, Inc.
    • Jordan B. Tye
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND METHOD
    • Publication number 20240395508
    • Publication date Nov 28, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Hao Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    INDUCTIVELY COUPLED PLASMA APPARATUS WITH NOVEL FARADAY SHIELD
    • Publication number 20240387151
    • Publication date Nov 21, 2024
    • Applied Materials, Inc.
    • BENJAMIN ALEXANDROVICH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS OF SUBSTRATE PROCESSING AND METHODS OF MANUFACTURING SEMICO...
    • Publication number 20240376600
    • Publication date Nov 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Tsung-Cheng WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Ion Beam Etching Apparatus And Method
    • Publication number 20240379333
    • Publication date Nov 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jung-Hao Chang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240371612
    • Publication date Nov 7, 2024
    • JUSUNG ENGINEERING CO., LTD.
    • Young Rok KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20240371609
    • Publication date Nov 7, 2024
    • TOKYO ELECTRON LIMITED
    • Shin MATSUURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND ME...
    • Publication number 20240360546
    • Publication date Oct 31, 2024
    • Applied Materials, Inc.
    • Andreas LOPP
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20240304456
    • Publication date Sep 12, 2024
    • Hitachi High-Tech Corporation
    • Koichi TAKASAKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
    • Publication number 20240304426
    • Publication date Sep 12, 2024
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Sheng-chun YANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
    • Publication number 20240301546
    • Publication date Sep 12, 2024
    • Applied Materials, Inc.
    • Thomas Werner Zilbauer
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA TREATMENT APPARATUS MEMBER
    • Publication number 20240290582
    • Publication date Aug 29, 2024
    • KYOCERA CORPORATION
    • Daiki WATANABE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    APPARATUS FOR PREVENTING CONTAMINATION OF SELF-PLASMA CHAMBER
    • Publication number 20240258077
    • Publication date Aug 1, 2024
    • NANOTECH INC.
    • Dong Ho Cha
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20240249922
    • Publication date Jul 25, 2024
    • TOKYO ELECTRON LIMITED
    • Ryota SAKANE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
    • Publication number 20240242947
    • Publication date Jul 18, 2024
    • Applied Materials, Inc.
    • David GUNTHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • Publication number 20240242942
    • Publication date Jul 18, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Tsung-Cheng WU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Workpiece Processing Apparatus with Plasma and Thermal Processing S...
    • Publication number 20240212981
    • Publication date Jun 27, 2024
    • Beijing E-Town Semiconductor Technology Co., Ltd.
    • Dieter Hezler
    • H01 - BASIC ELECTRIC ELEMENTS