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H01J37/32651
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32651
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,978,614
Issue date
May 7, 2024
Tokyo Electron Limited
Yusuke Hayasaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shielding device and thin-film-deposition equipment with the same
Patent number
11,972,936
Issue date
Apr 30, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielding device and thin-film-deposition equipment with the same
Patent number
11,961,724
Issue date
Apr 16, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process kit having tall deposition ring for PVD chamber
Patent number
11,961,723
Issue date
Apr 16, 2024
Applied Materials, Inc.
David Gunther
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,955,315
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dieter Hezler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnet arrangement for a plasma source for performing plasma treatm...
Patent number
11,942,311
Issue date
Mar 26, 2024
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Jörg Vetter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit geometry for particle reduction in PVD processes
Patent number
11,935,732
Issue date
Mar 19, 2024
Applied Materials, Inc.
Adolph M. Allen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method of manufacturing a semiconductor device
Patent number
11,935,728
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tsung-Cheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Shielding mechanism and thin-film-deposition equipment using the same
Patent number
11,929,242
Issue date
Mar 12, 2024
SKY TECH INC.
Jing-Cheng Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,923,170
Issue date
Mar 5, 2024
Tokyo Electron Limited
Satoru Kawakami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for reducing sputtering of a grounded shield...
Patent number
11,915,917
Issue date
Feb 27, 2024
Applied Materials, Inc.
Alan Ritchie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and plasma processing apparatus
Patent number
11,881,410
Issue date
Jan 23, 2024
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,881,380
Issue date
Jan 23, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Toshihiro Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,869,753
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takahiro Senda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced ignition in inductively coupled plasmas for workpiece proc...
Patent number
11,848,204
Issue date
Dec 19, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,837,447
Issue date
Dec 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inductively coupled plasma treatment system
Patent number
11,837,439
Issue date
Dec 5, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing apparatus and processing method, and gas cluster generat...
Patent number
11,772,138
Issue date
Oct 3, 2023
Tokyo Electron Limited
Kazuya Dobashi
B08 - CLEANING
Information
Patent Grant
Plasma processing apparatus
Patent number
11,756,769
Issue date
Sep 12, 2023
Tokyo Electron Limited
Takashi Tohara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control using temperature control element coupled to fa...
Patent number
11,749,509
Issue date
Sep 5, 2023
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Yorkman Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and control method
Patent number
11,742,183
Issue date
Aug 29, 2023
Tokyo Electron Limited
Ryuji Hisatomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor process chamber with heat pipe
Patent number
11,710,620
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Kai-Chin Wei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Air cooled faraday shield and methods for using the same
Patent number
11,692,732
Issue date
Jul 4, 2023
Lam Research Corporation
Saravanapriyan Sriraman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier with vertical grid for supporting substrates in coater
Patent number
11,688,589
Issue date
Jun 27, 2023
View, Inc.
Bo Garrett Neilan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radio frequency screen for an ultraviolet lamp system
Patent number
11,670,491
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-chun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating device for conducting high efficient low temperature coating
Patent number
11,637,000
Issue date
Apr 25, 2023
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
Siegfried Krassnitzer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition apparatus and deposition method using the same
Patent number
11,637,001
Issue date
Apr 25, 2023
Samsung Display Co., Ltd.
Kwan Yong Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Targeted heat control systems
Patent number
11,600,470
Issue date
Mar 7, 2023
Applied Materials, Inc.
Venkata Sharat Chandra Parimi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Extreme edge uniformity control
Patent number
11,574,800
Issue date
Feb 7, 2023
Varian Semiconductor Equipment Associates, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cover ring and ground shield for physical vapor deposition chamber
Patent number
11,569,071
Issue date
Jan 31, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung-Cheng Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Metallic Shield For Stable Tape-Frame Substrate Processing
Publication number
20240136159
Publication date
Apr 25, 2024
Harish Varma PENMETHSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE
Publication number
20240096599
Publication date
Mar 21, 2024
Hitachi High-Tech Corporation
Koichi Takasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD, AND SEMICOND...
Publication number
20240087853
Publication date
Mar 14, 2024
KIOXIA Corporation
Kazuhiko NAKAMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Enhanced Ignition in Inductively Coupled Plasmas For Workpiece Proc...
Publication number
20240071754
Publication date
Feb 29, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Stephen E. Savas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20240055242
Publication date
Feb 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING APPARATUS FOR GENERATING PLASMA
Publication number
20240014016
Publication date
Jan 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chien-Hsiang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature Control Using Temperature Control Element Coupled to Fa...
Publication number
20230411125
Publication date
Dec 21, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Yorkman Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT DEVICE AND ELECTRODE MECHANISM
Publication number
20230402263
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Naoki Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus for Plasma Processing
Publication number
20230377845
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Merritt Funk
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS
Publication number
20230369026
Publication date
Nov 16, 2023
LAM RESEARCH CORPORATION
Christopher KIMBALL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230290618
Publication date
Sep 14, 2023
TOKYO ELECTRON LIMITED
Naoki KUBOTA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230282491
Publication date
Sep 7, 2023
HITACHI HIGH-TECH CORPORATION
Naoyuki KOFUJI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COVER RING TO MITIGATE CARBON CONTAMINATION IN PLASMA DOPING CHAMBER
Publication number
20230282451
Publication date
Sep 7, 2023
Applied Materials, Inc.
Vikram M. Bhosle
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL SHIELD FOR PROCESSING CHAMBER
Publication number
20230282454
Publication date
Sep 7, 2023
Applied Materials, Inc.
Youngki Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
Publication number
20230282458
Publication date
Sep 7, 2023
VIEW, INC.
Bo Garrett Neilan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING SYSTEM AND MULTI-SECTION FARADAY SHIELDING DEVICE...
Publication number
20230274918
Publication date
Aug 31, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE GEOMETRY TRIM COIL
Publication number
20230274911
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Andrew D. Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
Publication number
20230260764
Publication date
Aug 17, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Sheng-chun YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
Publication number
20230253190
Publication date
Aug 10, 2023
SAMSUNG DISPLAY CO., LTD.
Kwan Yong LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATION UNIT, AND APPARATUS FOR TREATING SUBSTRATE WITH T...
Publication number
20230207262
Publication date
Jun 29, 2023
PSK INC.
Jong Woo Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING SYSTEM AND FARADAY SHIELDING APPARATUS WHICH CAN BE...
Publication number
20230207284
Publication date
Jun 29, 2023
BEIJING LEUVEN SEMICONDUCTOR TECHNOLOGY CO. LTD
Song GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING SYSTEM AND FARADAY SHIELDING APPARATUS WHICH CAN BE...
Publication number
20230207283
Publication date
Jun 29, 2023
BEIJING LEUVEN SEMICONDUCTOR TECHNOLOGY CO. LTD
Song GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230197408
Publication date
Jun 22, 2023
Kokusai Electric Corporation
Tsuyoshi TAKEDA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS
Publication number
20230175113
Publication date
Jun 8, 2023
Samsung Electronics Co., Ltd.
Jaesuk KIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHIELDED GAS INLET FOR AN ION SOURCE
Publication number
20230135525
Publication date
May 4, 2023
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230118576
Publication date
Apr 20, 2023
Hitachi High-Tech Corporation
Hiroyuki Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230116739
Publication date
Apr 13, 2023
Samsung Electronics Co., Ltd.
Sung Hwi CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TO AN INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20230052071
Publication date
Feb 16, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING APPARATUS AND METHOD
Publication number
20230050650
Publication date
Feb 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Hao CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTOR WITH INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20230033058
Publication date
Feb 2, 2023
Applied Materials, Inc.
Khokan Chandra Paul
H01 - BASIC ELECTRIC ELEMENTS