Membership
Tour
Register
Log in
Shields
Follow
Industry
CPC
H01J2237/026
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/026
Shields
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Magnetic-material shield around plasma chambers near pedestal
Patent number
11,984,302
Issue date
May 14, 2024
Applied Materials, Inc.
Job George Konnoth Joseph
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,869,748
Issue date
Jan 9, 2024
Kokusai Electric Corporation
Takeshi Yasui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Blanking aperture array unit
Patent number
11,837,429
Issue date
Dec 5, 2023
NuFlare Technology, Inc.
Shuji Yoshino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Specimen machining device and information provision method
Patent number
11,837,437
Issue date
Dec 5, 2023
Jeol Ltd.
Tatsuhito Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using multiple beams of charged particles
Patent number
11,804,356
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device and milling processing method using same
Patent number
11,742,178
Issue date
Aug 29, 2023
HITACHI HIGH-TECH CORPORATION
Hitoshi Kamoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Stage apparatus
Patent number
11,694,870
Issue date
Jul 4, 2023
ASML Netherlands B.V.
Jan-Gerard Cornelis Van Der Toorn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier with vertical grid for supporting substrates in coater
Patent number
11,688,589
Issue date
Jun 27, 2023
View, Inc.
Bo Garrett Neilan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Radio frequency screen for an ultraviolet lamp system
Patent number
11,670,491
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Sheng-chun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film-forming apparatus, film-forming system, and film-forming method
Patent number
11,664,207
Issue date
May 30, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion beam cutting calibration system and method
Patent number
11,658,001
Issue date
May 23, 2023
INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
Zhongming Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device and ion milling method
Patent number
11,621,141
Issue date
Apr 4, 2023
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,605,523
Issue date
Mar 14, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,574,793
Issue date
Feb 7, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma gun for treating tumors in vivo and use method thereof
Patent number
11,523,856
Issue date
Dec 13, 2022
JIANGSU CAPTAIN BIOTECHNOLOGY CO., LTD.
Xiaofeng Dai
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Inductively coupled plasma source
Patent number
11,521,828
Issue date
Dec 6, 2022
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
11,508,552
Issue date
Nov 22, 2022
HITACHI HIGH-TECH CORPORATION
Hitoshi Kamoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead shroud
Patent number
11,488,810
Issue date
Nov 1, 2022
Lam Research Corporation
Andrew Borth
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Three-dimensional (3D) imaging system and method for nanostructure
Patent number
11,488,801
Issue date
Nov 1, 2022
INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
Zhongming Du
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carrier with vertical grid for supporting substrates in coater
Patent number
11,424,109
Issue date
Aug 23, 2022
View, Inc.
Bo Neilan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and operational method thereof
Patent number
11,424,110
Issue date
Aug 23, 2022
HITACHI HIGH-TECH CORPORATION
Masahito Togami
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
TEM sample holder with cryogenic cooling and broadband RF irradiation
Patent number
11,410,829
Issue date
Aug 9, 2022
Euclid Beamlabs, LLC
Chunguang Jing
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lower electrode mechanism and reaction chamber
Patent number
11,410,833
Issue date
Aug 9, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yahui Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration correction in charged particle system
Patent number
11,348,756
Issue date
May 31, 2022
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
E-beam apparatus
Patent number
11,315,752
Issue date
Apr 26, 2022
ASML Netherlands B.V.
Peter Paul Hempenius
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using multiple beams of charged particles
Patent number
11,289,304
Issue date
Mar 29, 2022
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum apparatus and recovery support method
Patent number
11,260,427
Issue date
Mar 1, 2022
Jeol Ltd.
Kazunori Tsukamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sample holder, ion milling apparatus, sample processing method, sam...
Patent number
11,226,273
Issue date
Jan 18, 2022
HITACHI HIGH-TECH CORPORATION
Atsushi Kamino
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOS...
Publication number
20240136160
Publication date
Apr 25, 2024
Applied Materials, Inc.
Zheng John YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240071730
Publication date
Feb 29, 2024
TOKYO ELECTRON LIMITED
Masaki HIRAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20240071711
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED DEPOSITION RATE BY THERMAL ISOLATION COVER FOR GIS MANIPUL...
Publication number
20240062990
Publication date
Feb 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Sean Kashy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
Publication number
20240029999
Publication date
Jan 25, 2024
NuFlare Technology, Inc.
Hiroshi Yamashita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MICROSCOPE
Publication number
20240006146
Publication date
Jan 4, 2024
National University of Singapore
Jeroen Anton VAN KAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS DISTRIBUTION RING FOR PROCESS CHAMBER
Publication number
20230420222
Publication date
Dec 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Hsiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MICROWAVE PLASMA APPARATUS AND METHODS FOR PROCESSING MATERIALS USI...
Publication number
20230377848
Publication date
Nov 23, 2023
6K Inc.
Richard K. Holman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device and Ion Milling Method
Publication number
20230369010
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RECOMBINATION CHANNELS FOR ANGLE CONTROL OF NEUTRAL REACTIVE SPECIES
Publication number
20230369022
Publication date
Nov 16, 2023
Applied Materials, Inc.
Glen F. R. Gilchrist
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE APPARATUS
Publication number
20230360879
Publication date
Nov 9, 2023
ASML NETHERLANDS B.V.
Jan-Gerard Cornelis VAN DER TOORN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
Publication number
20230335380
Publication date
Oct 19, 2023
Tokyo Electron Limited
Takaaki KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON-OPTICAL ASSEMBLY COMPRISING ELECTROMAGNETIC SHIELDING
Publication number
20230317402
Publication date
Oct 5, 2023
ASML NETHERLANDS B.V.
Derk Ferdinand WALVOORT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230317425
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Ryoya ABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOELECTRIC SURFACE ELECTRON SOURCE
Publication number
20230290605
Publication date
Sep 14, 2023
Hamamatsu Photonics K.K.
Tomohiko HIRANO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
Publication number
20230282458
Publication date
Sep 7, 2023
VIEW, INC.
Bo Garrett Neilan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RADIO FREQUENCY SCREEN FOR AN ULTRAVIOLET LAMP SYSTEM
Publication number
20230260764
Publication date
Aug 17, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Sheng-chun YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HOLDING DEVICE, AND USE OF THE HOLDING DEVICE
Publication number
20230245868
Publication date
Aug 3, 2023
HANWHA Q CELLS GMBH
Martin SCHAPER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20230245867
Publication date
Aug 3, 2023
EUGENE TECHNOLOGY CO., LTD.
Woo Duck JUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A DETECTOR SUBSTRATE FOR USE IN A CHARGED PARTICLE MULTI-BEAM ASSES...
Publication number
20230238211
Publication date
Jul 27, 2023
ASML NETHERLANDS B.V.
Marco Jan-Jaco WIELAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20230207280
Publication date
Jun 29, 2023
SEMES CO., LTD.
Sun Joo PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY
Publication number
20230135352
Publication date
May 4, 2023
United Kingdom Research and Innovation
Greg MCMULLAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MAN...
Publication number
20230125679
Publication date
Apr 27, 2023
NGK Insulators, Ltd.
Hiroshi TAKEBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REPLACEABLE ELECTROSTATIC CHUCK OUTER RING FOR EDGE ARCING MITIGATION
Publication number
20230118651
Publication date
Apr 20, 2023
Applied Materials, Inc.
Timothy Joseph FRANKLIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR ARCING DIAGNOSIS, PLASMA PROCESS EQUIPMENT INCLUDING...
Publication number
20230109672
Publication date
Apr 13, 2023
Samsung Electronics Co., Ltd.
Changsoon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM
Publication number
20230109124
Publication date
Apr 6, 2023
CARL ZEISS MICROSCOPY GMBH
Gero Walter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
Publication number
20230071249
Publication date
Mar 9, 2023
LAM RESEARCH CORPORATION
Scott Briggs
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TO AN INDUCTIVELY COUPLED PLASMA SOURCE
Publication number
20230052071
Publication date
Feb 16, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR DETECTING DISCHARGE SITE
Publication number
20230028337
Publication date
Jan 26, 2023
NuFlare Technology, Inc.
Toru ARIIZUMI
H01 - BASIC ELECTRIC ELEMENTS