Shower nozzles

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CPC
C23C16/45565

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45565Shower nozzles

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Shower head structure and plasma processing apparatus using the same
- Patent number 12,215,422
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Huan-Chieh Chen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas manifold for simultaneous gas property control in deposition sy...
- Patent number 12,215,423
- Issue date Feb 4, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for pulse width modulated dose control
- Patent number 12,215,421
- Issue date Feb 4, 2025
- Lam Research Corporation
- Mariusch Gregor
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,217,959
- Issue date Feb 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF tuning systems including tuning circuits having impedances for s...
- Patent number 12,217,939
- Issue date Feb 4, 2025
- Lam Research Corporation
- David French
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor and related methods
- Patent number 12,209,308
- Issue date Jan 28, 2025
- ASM IP Holding B.V.
- Antonius Aarnink
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal deposition
- Patent number 12,203,168
- Issue date Jan 21, 2025
- Lam Research Corporation
- Ravi Vellanki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,205,800
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Taro Ikeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Batch curing chamber with gas distribution and individual pumping
- Patent number 12,203,171
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual RF for controllable film deposition
- Patent number 12,191,115
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
- Patent number 12,188,124
- Issue date Jan 7, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead and substrate processing apparatus
- Patent number 12,188,125
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Takanobu Hotta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for process tool
- Patent number 12,180,589
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas mixing system for semiconductor fabrication
- Patent number 12,179,161
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ming Shing Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead assembly with heated showerhead
- Patent number 12,170,186
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 12,163,218
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Screwless semiconductor processing chambers
- Patent number 12,165,909
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bo-Ru Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic multi zone flow control for a processing system
- Patent number 12,159,785
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Daemian Raj Benjamin Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Intersecting module
- Patent number 12,152,303
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Syuan Lan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-channel showerhead design and methods in manufacturing
- Patent number 12,152,302
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Kazuya Daito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flow control features of CVD chambers
- Patent number 12,146,219
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kien N. Chuc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead faceplates with angled gas distribution passages for sem...
- Patent number 12,139,791
- Issue date Nov 12, 2024
- Lam Research Corporation
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tool and method for chandelier showerhead installation
- Patent number 12,140,208
- Issue date Nov 12, 2024
- Lam Research Corporation
- Aleksey V. Altecor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition chamber system diffuser with increased power efficiency
- Patent number 12,136,538
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Changling Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device fabrication apparatus
- Patent number 12,136,539
- Issue date Nov 5, 2024
- SK ENPULSE CO., LTD.
- Jong Kyu Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Manufacturing method for exhaust gas purification device
- Patent number 12,121,858
- Issue date Oct 22, 2024
- Cataler Corporation
- Yuki Kido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY
- Publication number 20250046578
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Changling Li
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM
- Publication number 20250043419
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Jerome Innocent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20250043425
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS WITH AUXILIARY GROUND PATHS
- Publication number 20250043427
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Songwhe Herr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWERHEAD ASSEMBLY
- Publication number 20250025896
- Publication date Jan 23, 2025
- SEMES CO., LTD.
- Sung Yeon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COLLAPSIBLE IMPELLER WIRE FRAMES FOR BLOOD PUMP
- Publication number 20250027555
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Aleksey V. Altecor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED METAL LID FOR SELECTIVE PECVD
- Publication number 20250029816
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Douglas Long
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...
- Publication number 20250022694
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pranav Vijay Gadre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME
- Publication number 20250011932
- Publication date Jan 9, 2025
- Samsung Electronics Co., Ltd.
- Junho Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...
- Publication number 20250003074
- Publication date Jan 2, 2025
- LAM RESEARCH CORPORATION
- Rachel E. BATZER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM
- Publication number 20250006487
- Publication date Jan 2, 2025
- Applied Materials, Inc.
- Daemian Raj BENJAMIN RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY AND SHOWERHEAD PLATE
- Publication number 20240425987
- Publication date Dec 26, 2024
- ASM IP HOLDING B.V.
- Qi Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD
- Publication number 20240417854
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Troy GOMM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Integrated Pressure Sensor for Process Chamber Assemblies
- Publication number 20240410773
- Publication date Dec 12, 2024
- Chih-Yang CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240401198
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
- Publication number 20240401200
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hideki NAGAOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, ASSEMBLY AND KIT FOR TRANSPORTING A GAS DISTRIBUTION DEVICE
- Publication number 20240391645
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dinkar Nandwana
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CLEANING PLASMA CHAMBERS
- Publication number 20240395513
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD WITH EM RADIATION
- Publication number 20240384409
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tze-Liang Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...
- Publication number 20240384413
- Publication date Nov 21, 2024
- EUGENUS, INC.
- Martin J. Salinas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20240384414
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Systems with Rotating Electrostatic Chuck and Methods Th...
- Publication number 20240376602
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shower nozzles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Shower head structure and plasma processing apparatus using the same

Gas manifold for simultaneous gas property control in deposition sy...

Systems and methods for pulse width modulated dose control

Method of manufacturing semiconductor device, substrate processing...

RF tuning systems including tuning circuits having impedances for s...

Reactor and related methods

Metal deposition

Plasma processing apparatus and plasma processing method

Batch curing chamber with gas distribution and individual pumping

Dual RF for controllable film deposition

Substrate processing apparatus, gas nozzle and method of manufactur...

Systems and methods for faceplate temperature control

Showerhead and substrate processing apparatus

Showerhead for process tool

Gas mixing system for semiconductor fabrication

Showerhead assembly with heated showerhead

Film formation method and film formation device

Continuous liner for use in a processing chamber

Ex situ coating of chamber components for semiconductor processing

Screwless semiconductor processing chambers

Dynamic multi zone flow control for a processing system

Intersecting module

Multiple-channel showerhead design and methods in manufacturing

Flow control features of CVD chambers

Showerhead faceplates with angled gas distribution passages for sem...

Tool and method for chandelier showerhead installation

Deposition chamber system diffuser with increased power efficiency

Semiconductor device fabrication apparatus

Integrated epitaxy and preclean system

Manufacturing method for exhaust gas purification device

Patents Applicationslast 30 patents

DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY

FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

WAFER PROCESSING APPARATUS WITH AUXILIARY GROUND PATHS

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

SUBSTRATE PROCESSING APPARATUS INCLUDING SHOWERHEAD ASSEMBLY

COLLAPSIBLE IMPELLER WIRE FRAMES FOR BLOOD PUMP

HEATED METAL LID FOR SELECTIVE PECVD

HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

SHOWERHEAD AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME

INTEGRATED SHOWERHEAD WITH IMPROVED HOLE PATTERN FOR DELIVERING RAD...

DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM

SHOWERHEAD ASSEMBLY AND SHOWERHEAD PLATE

MODULATING THERMAL CONDUCTIVITY TO CONTROL COOLING OF SHOWERHEAD

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

Integrated Pressure Sensor for Process Chamber Assemblies

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SHOWER HEAD, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

METHOD, ASSEMBLY AND KIT FOR TRANSPORTING A GAS DISTRIBUTION DEVICE

APPARATUS FOR CLEANING PLASMA CHAMBERS

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

DEPOSITION APPARATUS AND METHOD WITH EM RADIATION

SHOWERHEAD ASSEMBLY FOR CYCLIC VAPOR DEPOSITION WITH ENHANCED GAS M...

DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION

Deposition Systems with Rotating Electrostatic Chuck and Methods Th...