Shower nozzles

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CPC
C23C16/45565

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45565Shower nozzles

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Remote capacitively coupled plasma deposition of amorphous silicon
- Patent number 12,365,986
- Issue date Jul 22, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus with pressure sensor and shower head on same p...
- Patent number 12,365,985
- Issue date Jul 22, 2025
- Tokyo Electron Limited
- Yuji Obata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and method of forming metal oxide layer using...
- Patent number 12,359,313
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating substrate and assembly for distributing gas
- Patent number 12,362,148
- Issue date Jul 15, 2025
- Semes Co., Ltd.
- Hyoung Kyu Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
- Patent number 12,362,149
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,351,913
- Issue date Jul 8, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas showerhead with controllable airflow distribution
- Patent number 12,351,916
- Issue date Jul 8, 2025
- PIOTECH INC.
- Zhenjie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium aluminum oxide coatings deposited by atomic layer deposition
- Patent number 12,351,910
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing chamber for improved precursor flow
- Patent number 12,340,979
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Tien Fak Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shaped showerhead for edge plasma modulation
- Patent number 12,338,530
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Saketh Pemmasani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas mixer
- Patent number D1080812
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Youngki Chang
- D23 - Environmental heating and cooling
Information Patent Grant
Method of forming metal oxide layer using deposition apparatus
- Patent number 12,331,398
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Fa Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,331,402
- Issue date Jun 17, 2025
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing method, method of manufacturing semiconductor...
- Patent number 12,315,719
- Issue date May 27, 2025
- Kokusai Electric Corporation
- Yoshiro Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating method and substrate treating apparatus
- Patent number 12,315,743
- Issue date May 27, 2025
- Semes Co., Ltd.
- Ki Yung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
- Patent number 12,308,216
- Issue date May 20, 2025
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,305,280
- Issue date May 20, 2025
- Kioxia Corporation
- Tomoki Ishimaru
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system and film forming method
- Patent number 12,297,539
- Issue date May 13, 2025
- Tokyo Electron Limited
- Syuji Nozawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Gas dispenser and deposition apparatus using the same
- Patent number 12,281,385
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chung-Liang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and methods for chemical vapor deposition
- Patent number 12,276,024
- Issue date Apr 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead assembly for distributing a gas within a reaction chamber
- Patent number 12,276,023
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Melvin Verbaas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor wafer with wafer chuck havin...
- Patent number 12,249,493
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Sheng-Chun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detaching and installing device for gas distribution plate of etchi...
- Patent number 12,230,480
- Issue date Feb 18, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ko Wei Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,227,837
- Issue date Feb 18, 2025
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 12,227,838
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ban Seok You
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning of a processing chamber
- Patent number 12,221,694
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Pramit Manna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHOWERHEAD STRUCTURE AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20250223699
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Seung YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COOLING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND COOLING METHOD
- Publication number 20250223700
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Kyoko IKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER HEAD UNIT, GAS SUPPLY UNIT AND SUBSTRATE PROCESSING DEVICE H...
- Publication number 20250215569
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Jaeoh BANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20250210313
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Sunwoo BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250198000
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250198001
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250198003
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR GAS DISTRIBUTION
- Publication number 20250197999
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING COMPONMENT AND COMPONENT
- Publication number 20250191887
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Ryou SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Device for Performing Plasma Treatment, and Method for Performing P...
- Publication number 20250188610
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Jianming HAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
- Publication number 20250179634
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Mariusch GREGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20250179637
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Simon CHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING SYSTEMS FOR IMPROVING...
- Publication number 20250179638
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- Eli JEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDITIONING OF A PROCESSING CHAMBER
- Publication number 20250179629
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Pramit MANNA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250163576
- Publication date May 22, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAD FOR EJECTING REACTIVE GAS FOR FILM FORMATION AND METHOD FOR MA...
- Publication number 20250163579
- Publication date May 22, 2025
- NHK Spring Co., Ltd.
- Yoshihito ARAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL PLENUM SHOWERHEAD WITH CENTER TO EDGE TUNABILITY
- Publication number 20250163581
- Publication date May 22, 2025
- LAM RESEARCH CORPORATION
- Krishna Birru
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA SHOWERHEAD ASSEMBLY AND METHOD OF REDUCING DEFECTS
- Publication number 20250163578
- Publication date May 22, 2025
- Applied Materials, Inc.
- Hanhong Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250154650
- Publication date May 15, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYER UNIFORMITY IMPROVEMENT OF DEPOSITION-INHIBITION-DEPOSITION PR...
- Publication number 20250154652
- Publication date May 15, 2025
- LAM RESEARCH CORPORATION
- Krishna BIRRU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVE TEMPERATURE CONTROL OF SHOWERHEADS FOR HIGH TEMPERATURE PROC...
- Publication number 20250146132
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Lipyeow YAP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...
- Publication number 20250146129
- Publication date May 8, 2025
- SEMES CO., LTD.
- Yeong Gyu KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHANNEL STRUCTURE AND SEMICONDUCTOR MANUFACTURING DEVICE
- Publication number 20250146884
- Publication date May 8, 2025
- KYOCERA CORPORATION
- Miki HAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM ALLOY MEMBER FOR FORMING FLUORIDE COATING THEREON AND ALUM...
- Publication number 20250137101
- Publication date May 1, 2025
- Resonac Corporation
- Katsumasa HIROSE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS SUPPLY DEVICE AND SUBSTRATE PROCESSING SYSTEM HAVING TH...
- Publication number 20250137128
- Publication date May 1, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20250137129
- Publication date May 1, 2025
- SAMSUNG DISPLAY CO., LTD.
- CHOELMIN JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas Manifold for Simultaneous Gas Property Control in Deposition Sy...
- Publication number 20250137130
- Publication date May 1, 2025
- Arradiance, LLC
- David R. Beaulieu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE
- Publication number 20250137131
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Minju LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE INPUT POST MIX SHOWERHEAD
- Publication number 20250129475
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Norman JACOBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shower nozzles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Remote capacitively coupled plasma deposition of amorphous silicon

Deposition apparatus with pressure sensor and shower head on same p...

Semiconductor chamber components with advanced coating techniques

Deposition apparatus and method of forming metal oxide layer using...

Apparatus for treating substrate and assembly for distributing gas

Film stress control for plasma enhanced chemical vapor deposition

Film forming apparatus and film forming method

Gas showerhead with controllable airflow distribution

Hafnium aluminum oxide coatings deposited by atomic layer deposition

Semiconductor processing chamber for improved precursor flow

Spatially tunable deposition to compensate within wafer differentia...

Shaped showerhead for edge plasma modulation

Gas mixer

Method of forming metal oxide layer using deposition apparatus

Integrated showerhead with thermal control for delivering radical a...

Substrate processing method, method of manufacturing semiconductor...

Substrate treating method and substrate treating apparatus

Mechanical suppression of parasitic plasma in substrate processing...

Film forming apparatus and film forming method

Film forming system and film forming method

Gas dispenser and deposition apparatus using the same

Device and methods for chemical vapor deposition

Showerhead assembly for distributing a gas within a reaction chamber

Methods and systems for depositing a layer

Method for manufacturing semiconductor wafer with wafer chuck havin...

Apparatus for performing film forming process on substrate and meth...

Detaching and installing device for gas distribution plate of etchi...

Ex situ coating of chamber components for semiconductor processing

Substrate processing apparatus and substrate processing method usin...

Conditioning of a processing chamber

Patents Applicationslast 30 patents

SHOWERHEAD STRUCTURE AND APPARATUS FOR TREATING SUBSTRATE

COOLING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND COOLING METHOD

SHOWER HEAD UNIT, GAS SUPPLY UNIT AND SUBSTRATE PROCESSING DEVICE H...

APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHODS AND APPARATUS FOR GAS DISTRIBUTION

METHOD FOR MANUFACTURING COMPONMENT AND COMPONENT

Device for Performing Plasma Treatment, and Method for Performing P...

SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL

SHOWERHEAD FOR SUBSTRATE PROCESSING SYSTEMS

SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING SYSTEMS FOR IMPROVING...

CONDITIONING OF A PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS

HEAD FOR EJECTING REACTIVE GAS FOR FILM FORMATION AND METHOD FOR MA...

DUAL PLENUM SHOWERHEAD WITH CENTER TO EDGE TUNABILITY

PLASMA SHOWERHEAD ASSEMBLY AND METHOD OF REDUCING DEFECTS

SUBSTRATE PROCESSING APPARATUS

LAYER UNIFORMITY IMPROVEMENT OF DEPOSITION-INHIBITION-DEPOSITION PR...

ACTIVE TEMPERATURE CONTROL OF SHOWERHEADS FOR HIGH TEMPERATURE PROC...

SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...

CHANNEL STRUCTURE AND SEMICONDUCTOR MANUFACTURING DEVICE

ALUMINUM ALLOY MEMBER FOR FORMING FLUORIDE COATING THEREON AND ALUM...

PROCESS GAS SUPPLY DEVICE AND SUBSTRATE PROCESSING SYSTEM HAVING TH...

DEPOSITION APPARATUS

Gas Manifold for Simultaneous Gas Property Control in Deposition Sy...

DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE

MULTIPLE INPUT POST MIX SHOWERHEAD