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C23C16/45565
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Parent Industries
C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/45565
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Patents Grants
last 30 patents
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,767
Issue date
Apr 30, 2024
Tokyo Electron Limited
Taichi Monden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing an alumina dispersible at a pH greater than 8
Patent number
11,965,245
Issue date
Apr 23, 2024
Allison L. Hann
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Atomic layer deposition method
Patent number
11,961,716
Issue date
Apr 16, 2024
Industrial Technology Research Institute
Hsuan-Fu Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing systems including gas delivery system with red...
Patent number
11,959,172
Issue date
Apr 16, 2024
Lam Research Corporation
Ramesh Chandrasekharan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method
Patent number
11,952,661
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
Patent number
11,946,142
Issue date
Apr 2, 2024
Lam Research Corporation
Fayaz A. Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hot showerhead
Patent number
11,946,140
Issue date
Apr 2, 2024
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for improving thermal chemical vapor depositi...
Patent number
11,939,675
Issue date
Mar 26, 2024
Applied Materials, Inc.
Rui Cheng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Lids and lid assembly kits for atomic layer deposition chambers
Patent number
11,932,939
Issue date
Mar 19, 2024
Applied Materials, Inc.
Muhammad M. Rasheed
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
11,920,239
Issue date
Mar 5, 2024
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for modulating film uniformity
Patent number
11,913,113
Issue date
Feb 27, 2024
Lam Research Corporation
Pulkit Agarwal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-stack susceptor reactor for high-throughput superconductor ma...
Patent number
11,910,726
Issue date
Feb 20, 2024
MetOx International, Inc.
Shahab Khandan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD process
Patent number
11,898,249
Issue date
Feb 13, 2024
Applied Materials, Inc.
Nagarajan Rajagopalan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High throughput and metal contamination control oven for chamber co...
Patent number
11,898,245
Issue date
Feb 13, 2024
Applied Materials, Inc.
Chien-Min Liao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition tool and method for depositing metal oxide films on orga...
Patent number
11,887,846
Issue date
Jan 30, 2024
Lam Research Corporation
Akhil Singhal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
Patent number
11,887,856
Issue date
Jan 30, 2024
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
11,887,855
Issue date
Jan 30, 2024
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mechanical suppression of parasitic plasma in substrate processing...
Patent number
11,862,435
Issue date
Jan 2, 2024
Lam Research Corporation
Douglas Keil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shower head structure and plasma processing apparatus using the same
Patent number
11,859,284
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Huan-Chieh Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabrication of a high temperature showerhead
Patent number
11,851,758
Issue date
Dec 26, 2023
Applied Materials, Inc.
Sumit Agarwal
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Faceplate having a curved surface
Patent number
11,851,759
Issue date
Dec 26, 2023
Applied Materials, Inc.
Shailendra Srivastava
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film stress control for plasma enhanced chemical vapor deposition
Patent number
11,854,771
Issue date
Dec 26, 2023
Applied Materials, Inc.
Chien-Teh Kao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD deposition system for deposition on selective side of the sub...
Patent number
11,851,760
Issue date
Dec 26, 2023
Lam Research Corporation
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition apparatus and method of manufacturing dis...
Patent number
11,842,883
Issue date
Dec 12, 2023
Samsung Display Co., Ltd.
Jong-hoon Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Segmented showerhead for uniform delivery of multiple precursors
Patent number
11,834,743
Issue date
Dec 5, 2023
Applied Materials, Inc.
Alexander Lerner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems and methods for pulse width modulated dose control
Patent number
11,834,736
Issue date
Dec 5, 2023
Lam Research Corporation
Mariusch Gregor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Spatial atomic layer deposition
Patent number
11,834,745
Issue date
Dec 5, 2023
Tokyo Electron Limited
Anthony Dip
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ceramic showerheads with conductive electrodes
Patent number
11,834,744
Issue date
Dec 5, 2023
Applied Materials, Inc.
Laksheswar Kalita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Isolator apparatus and methods for substrate processing chambers
Patent number
11,827,980
Issue date
Nov 28, 2023
Applied Materials, Inc.
Nitin Pathak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Control system for plasma chamber having controllable valve
Patent number
11,821,089
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Shuo Su
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
VAPOR PHASE PRECURSOR DELIVERY SYSTEM
Publication number
20240141485
Publication date
May 2, 2024
ASM IP HOLDING B.V.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NOZZLE FOR REMOTE PLASMA CLEANING OF PROCESS CHAMBERS
Publication number
20240141482
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING DEVICE AND FILM FORMING METHOD
Publication number
20240133031
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Jun YAMAWAKU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
Publication number
20240136161
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Karl Frederick LEESER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPORIZATION DEVICE, SEMICONDUCTOR MANUFACTURING SYSTEM, AND METHOD...
Publication number
20240124971
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuichi FURUYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS INLET TUBE ASSEMBLY FOR AN IMPROVED GAS MIXTURE IN A SUBSTRATE...
Publication number
20240124981
Publication date
Apr 18, 2024
ASM IP HOLDING B.V.
Arun Thottappayil
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM STRESS CONTROL FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Publication number
20240105427
Publication date
Mar 28, 2024
Applied Materials, Inc.
Chien-Teh KAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EDGE RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND S...
Publication number
20240093368
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
HONGTAEK LIM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR PULSE WIDTH MODULATED DOSE CONTROL
Publication number
20240093365
Publication date
Mar 21, 2024
LAM RESEARCH CORPORATION
Mariusch GREGOR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20240093372
Publication date
Mar 21, 2024
Kokusai Electric Corporation
Tadashi TAKASAKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
Publication number
20240093367
Publication date
Mar 21, 2024
Sriharsha DHARMAPURA SATHYANARAYANAMURTHY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
Publication number
20240096605
Publication date
Mar 21, 2024
Applied Materials, Inc.
Arun Kumar Kotrappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
Publication number
20240084450
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing company Ltd.
HUAN-CHIEH CHEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR...
Publication number
20240084456
Publication date
Mar 14, 2024
KIOXIA Corporation
Kazuhiro KATONO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING TH...
Publication number
20240087856
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Jiwon Son
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRIER DEVICE AND SEMICONDUCTOR PROCESSING EQUIPMENT
Publication number
20240084453
Publication date
Mar 14, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Xu ZHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND APPARATUS FOR A REACTION CHAMBER
Publication number
20240076778
Publication date
Mar 7, 2024
ASM IP HOLDING B.V.
Jessica Akemi Cimada da Silva
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS DISTRIBUTION APPARATUSES FOR IMPROVING MIXING UNIFORMITY
Publication number
20240068095
Publication date
Feb 29, 2024
Applied Materials, Inc.
Youngki Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20240060183
Publication date
Feb 22, 2024
Samsung Electronics Co., Ltd.
Youngjoon OH
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240042462
Publication date
Feb 8, 2024
TES CO., LTD.
Kyung-Ho JANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHOWERHEAD ASSEMBLY AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240042463
Publication date
Feb 8, 2024
TES CO., LTD.
Kyung-Ho JANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FACEPLATE HAVING A CURVED SURFACE
Publication number
20240044000
Publication date
Feb 8, 2024
Applied Materials, Inc.
Shailendra SRIVASTAVA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS
Publication number
20240038498
Publication date
Feb 1, 2024
TOKYO ELECTRON LIMITED
Taehoon PARK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATION OF FULLY ALIGNED VIA THROUGH SELECTIVE DEPOSITION AND R...
Publication number
20240030062
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH SELECTIVITY, LOW STRESS, AND LOW HYDROGEN CARBON HARDMASKS IN...
Publication number
20240030028
Publication date
Jan 25, 2024
LAM RESEARCH CORPORATION
Abbin Antony
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20240011158
Publication date
Jan 11, 2024
SEMES CO., LTD.
Hee Hwan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CONTINUOUS LINER FOR USE IN A PROCESSING CHAMBER
Publication number
20240011153
Publication date
Jan 11, 2024
Applied Materials, Inc.
James D. Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BACKSIDE DEPOSITION AND LOCAL STRESS MODULATION FOR WAFER BOW COMPE...
Publication number
20240003010
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Yanhui Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECURSOR DISPENSING SYSTEMS WITH LINE CHARGE VOLUME CONTAINERS FOR...
Publication number
20240003008
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Saangrut SANGPLUG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM
Publication number
20230420245
Publication date
Dec 28, 2023
Applied Materials, Inc.
Daemian Raj BENJAMIN RAJ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...