Silicon carbide

Industry

CPC
C23C16/325

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/325Silicon carbide

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,159,781
- Issue date Dec 3, 2024
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 12,077,441
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,065,732
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masayuki Harashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microstructured fiber interface coatings for composites
- Patent number 12,060,304
- Issue date Aug 13, 2024
- RTX Corporation
- Richard Wesley Jackson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aerospace mirror manufacturing assembly
- Patent number 12,044,867
- Issue date Jul 23, 2024
- Raytheon Company
- Keith Carrigan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing a CMC airfoil
- Patent number 12,037,680
- Issue date Jul 16, 2024
- RTX Corporation
- Christian X. Campbell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing silicon carbide epitaxial substrate and me...
- Patent number 12,020,927
- Issue date Jun 25, 2024
- Sumitomo Electric Industries, Ltd.
- Takaya Miyase
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seal coats to prevent silicon loss during re-melt infiltration of S...
- Patent number 12,017,962
- Issue date Jun 25, 2024
- General Electric Company
- Daniel Gene Dunn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-κ ALD gap-fill methods and material
- Patent number 12,020,923
- Issue date Jun 25, 2024
- Lam Research Corporation
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon carbide thin films and vapor deposition methods thereof
- Patent number 11,987,882
- Issue date May 21, 2024
- Gelest, Inc.
- Barry C. Arkles
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing ceramic multilayered tube used as cladding for...
- Patent number 11,976,354
- Issue date May 7, 2024
- BOCHVARI HIGH-TECH. RES. INST. FOR INORG. MATERIALS
- Leonid Aleksandrovich Karpyuk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-k films
- Patent number 11,970,777
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Shuaidi Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Systems and methods for depositing low-k dielectric films
- Patent number 11,967,498
- Issue date Apr 23, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer, production method therefor, and defect identif...
- Patent number 11,961,736
- Issue date Apr 16, 2024
- Resonac Corporation
- Ling Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing silicon carbide epitaxial wafer
- Patent number 11,948,794
- Issue date Apr 2, 2024
- Mitsubishi Electric Corporation
- Masashi Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
- Patent number 11,946,158
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Ruggero Anzalone
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for depositing a coating on a continuous fibre
- Patent number 11,932,942
- Issue date Mar 19, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Microstructured fiber interface coatings for composites
- Patent number 11,919,820
- Issue date Mar 5, 2024
- RTX Corporation
- Richard Wesley Jackson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-temperature component and method for the production thereof
- Patent number 11,910,494
- Issue date Feb 20, 2024
- Schunk Kohlenstofftechnik GmbH
- Gotthard Nauditt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer evaluation apparatus and semiconductor wafer ma...
- Patent number 11,906,569
- Issue date Feb 20, 2024
- Showa Denko K.K.
- Koichi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon precursor compound, preparation method therefor, and silico...
- Patent number 11,905,305
- Issue date Feb 20, 2024
- UP Chemical Co., Ltd.
- Jin Sik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 11,894,227
- Issue date Feb 6, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing device
- Patent number 11,879,171
- Issue date Jan 23, 2024
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing a CMC airfoil
- Patent number 11,866,820
- Issue date Jan 9, 2024
- RTX Corporation
- Christian X. Campbell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chemical-vapor-deposition silicon carbide bulk having improved etch...
- Patent number 11,859,309
- Issue date Jan 2, 2024
- DS TECHNO CO., LTD.
- Hak Jun Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing a coating on a yarn in a microwave field
- Patent number 11,858,859
- Issue date Jan 2, 2024
- SAFRAN CERAMICS
- Arnaud Delehouze
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing silicon-containing films
- Patent number 11,851,756
- Issue date Dec 26, 2023
- VERSUM MATERIALS US, LLC
- Ming Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 11,851,753
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of processing substrate and manufacturing semiconductor dev...
- Patent number 11,848,203
- Issue date Dec 19, 2023
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20240417266
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Peter J. GUERCIO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FOLDABLE SUBSTRATES AND METHODS OF MAKING
- Publication number 20240417320
- Publication date Dec 19, 2024
- Corning Incorporated
- ROBERT ALAN BELLMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURED FIBER INTERFACE COATINGS FOR COMPOSITES
- Publication number 20240391838
- Publication date Nov 28, 2024
- RTX Corporation
- Richard Wesley Jackson
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS
- Publication number 20240363337
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET
- Publication number 20240352585
- Publication date Oct 24, 2024
- KNJ CO.,LTD
- Bun-hei KOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20240304492
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Hui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240290611
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279797
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279799
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279794
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279796
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279798
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279793
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240279795
- Publication date Aug 22, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH METHOD
- Publication number 20240271273
- Publication date Aug 15, 2024
- NUFLARE TECHNOLOGY, INC.
- Ichiro MIZUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE THIN FILMS AND VAPOR DEPOSITION METHODS THEREOF
- Publication number 20240271279
- Publication date Aug 15, 2024
- Gelest, Inc.
- Barry C. ARKLES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INNER SPACER LINER FOR GATE-ALL-AROUND DEVICE
- Publication number 20240234544
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Sai Hooi Yeong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR SEMICONDUCTOR PRODUCTION APPARATUS AND METHOD FOR PRO...
- Publication number 20240191345
- Publication date Jun 13, 2024
- AGC Inc.
- Rui HAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING A CMC AIRFOIL
- Publication number 20240167152
- Publication date May 23, 2024
- RTX Corporation
- Christian X. Campbell
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR PRODUCING A SILICON CARBIDE-BASED SEMICONDUCTOR STRUCTUR...
- Publication number 20240170284
- Publication date May 23, 2024
- SOITEC
- Gweltaz Gaudin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20240158911
- Publication date May 16, 2024
- Applied Materials, Inc.
- Peter J. GUERCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
- Publication number 20240145234
- Publication date May 2, 2024
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON CARBIDE WAFER MANUFACTURING APPARATUS
- Publication number 20240141550
- Publication date May 2, 2024
- DENSO CORPORATION
- HIROAKI FUJIBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Deposition of Thin Films with Improved Stability
- Publication number 20240110284
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Lulu XIONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND RELATED METHODS
- Publication number 20240101583
- Publication date Mar 28, 2024
- Entegris, Inc.
- MinSeok Ryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR PROVIDING A PRECURSOR MIXTURE TO A REACTION CHAMBER
- Publication number 20240102156
- Publication date Mar 28, 2024
- ASM IP HOLDING, B.V.
- René Henricus Jozef Vervuurt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Silicon carbide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing a composite structure comprising a thin la...

Process for manufacturing a silicon carbide coated body

Film forming method and film forming apparatus

Microstructured fiber interface coatings for composites

Aerospace mirror manufacturing assembly

Method of processing a CMC airfoil

Method for manufacturing silicon carbide epitaxial substrate and me...

Seal coats to prevent silicon loss during re-melt infiltration of S...

Low-κ ALD gap-fill methods and material

Silicon carbide thin films and vapor deposition methods thereof

Method for producing ceramic multilayered tube used as cladding for...

Deposition of low-k films

Systems and methods for depositing low-k dielectric films

Method of manufacturing semiconductor device, substrate processing...

SiC epitaxial wafer, production method therefor, and defect identif...

Method of manufacturing silicon carbide epitaxial wafer

Apparatus for growing a semiconductor wafer and associated manufact...

Method and device for depositing a coating on a continuous fibre

Microstructured fiber interface coatings for composites

High-temperature component and method for the production thereof

Semiconductor wafer evaluation apparatus and semiconductor wafer ma...

Silicon precursor compound, preparation method therefor, and silico...

Conformal deposition of silicon carbide films

Semiconductor manufacturing device

Method of processing a CMC airfoil

Chemical-vapor-deposition silicon carbide bulk having improved etch...

Method for depositing a coating on a yarn in a microwave field

Methods for depositing silicon-containing films

Process for manufacturing a silicon carbide coated body

Methods of processing substrate and manufacturing semiconductor dev...

Patents Applicationslast 30 patents

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

FOLDABLE SUBSTRATES AND METHODS OF MAKING

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

MICROSTRUCTURED FIBER INTERFACE COATINGS FOR COMPOSITES

Batch Mode Silicon Carbide Epitaxial Reactor

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS

SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET

LOW-K ALD GAP-FILL METHODS AND MATERIAL

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

VAPOR PHASE GROWTH METHOD

SILICON CARBIDE THIN FILMS AND VAPOR DEPOSITION METHODS THEREOF

INNER SPACER LINER FOR GATE-ALL-AROUND DEVICE

COMPONENT FOR SEMICONDUCTOR PRODUCTION APPARATUS AND METHOD FOR PRO...

METHOD OF PROCESSING A CMC AIRFOIL

METHOD FOR PRODUCING A SILICON CARBIDE-BASED SEMICONDUCTOR STRUCTUR...

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS

SILICON CARBIDE WAFER MANUFACTURING APPARATUS

Selective Deposition of Thin Films with Improved Stability

PRECURSORS AND RELATED METHODS

METHODS FOR PROVIDING A PRECURSOR MIXTURE TO A REACTION CHAMBER