Silicon carbide

Industry

CPC
C23C16/325

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/325Silicon carbide

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Conformal deposition of silicon carbide films using heterogeneous p...
- Patent number 12,359,311
- Issue date Jul 15, 2025
- Lam Research Corporation
- Matthew Scott Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,362,173
- Issue date Jul 15, 2025
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma based deposition of silicon carbide films using silic...
- Patent number 12,334,332
- Issue date Jun 17, 2025
- Lam Research Corporation
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of repairing ceramic composite articles
- Patent number 12,331,395
- Issue date Jun 17, 2025
- RTX Corporation
- Olivier H. Sudre
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for CVD deposition of n-type doped silicon carbide and epita...
- Patent number 12,325,932
- Issue date Jun 10, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deflector for chamber cleaning
- Patent number 12,325,913
- Issue date Jun 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuang-Wei Cheng
- B08 - CLEANING
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,320,031
- Issue date Jun 3, 2025
- Soitec
- Hugo Biard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film deposition process
- Patent number 12,322,591
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purity fiber feedstock for loose grain production
- Patent number 12,312,682
- Issue date May 27, 2025
- FREE FORM FIBERS, LLC
- Shay L. Harrison
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Continuous fiber-reinforced silicon carbide member, manufacturing m...
- Patent number 12,304,176
- Issue date May 20, 2025
- Kabushiki Kaisha Toshiba
- Shoko Suyama
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Scanning mirror and manufacturing method for scanning mirror
- Patent number 12,298,494
- Issue date May 13, 2025
- TOHOKU UNIVERSITY
- Kazuhiro Hane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of processing substrate and method of manufacturing semicond...
- Patent number 12,278,103
- Issue date Apr 15, 2025
- Kokusai Electric Corporation
- Takayuki Waseda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous multiple tow coating reactor
- Patent number 12,270,107
- Issue date Apr 8, 2025
- Raytheon Technologies Corporation
- Ying She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formation of SiOC thin films
- Patent number 12,272,546
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal deposition of silicon carbide films
- Patent number 12,272,547
- Issue date Apr 8, 2025
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions comprising silacycloalkanes and methods using same for...
- Patent number 12,264,258
- Issue date Apr 1, 2025
- VERSUM MATERIALS US, LLC
- Raymond N. Vrtis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for manufacturing hexagonal crystals
- Patent number 12,247,315
- Issue date Mar 11, 2025
- LNBS CO. LTD.
- Hyung Soo Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulation film
- Patent number 12,241,155
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of in situ ceramic coating deposition
- Patent number 12,234,549
- Issue date Feb 25, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor with carrying ring for substrate handling, and use of a...
- Patent number 12,234,553
- Issue date Feb 25, 2025
- Aixtron SE
- Benjamin David Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compositions and methods using same for deposition of silicon-conta...
- Patent number 12,221,692
- Issue date Feb 11, 2025
- VERSUM MATERIALS US, LLC
- Robert G. Ridgeway
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,217,959
- Issue date Feb 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purity polysilocarb derived silicon carbide powder
- Patent number 12,215,031
- Issue date Feb 4, 2025
- Pallidus, Inc.
- Andrew R. Hopkins
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Silicon carbide epitaxial substrate and method for manufacturing same
- Patent number 12,205,989
- Issue date Jan 21, 2025
- PROTERIAL, LTD.
- Tsuyoshi Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a composite structure comprising a thin layer...
- Patent number 12,198,983
- Issue date Jan 14, 2025
- Soitec
- Ionut Radu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Neural interface device manufacturing method
- Patent number 12,193,821
- Issue date Jan 14, 2025
- Board of Regents, The University of Texas System
- Timothy James Gardner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer...
- Patent number 12,188,152
- Issue date Jan 7, 2025
- Resonac Corporation
- Kensho Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a composite structure comprising a thin la...
- Patent number 12,159,781
- Issue date Dec 3, 2024
- Soitec
- Hugo Biard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing a silicon carbide coated body
- Patent number 12,077,441
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Peter J. Guercio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 12,065,732
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masayuki Harashima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH PURITY POLYSILOCARB DERIVED SILICON CARBIDE MATERIALS, APPLICA...
- Publication number 20250236524
- Publication date Jul 24, 2025
- Pallidus, Inc.
- Douglas M. Dukes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL
- Publication number 20250230540
- Publication date Jul 17, 2025
- Applied Materials, Inc.
- Supriya Ghosh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...
- Publication number 20250223466
- Publication date Jul 10, 2025
- VERSUM MATERIALS US, LLC
- RAYMOND N. VRTIS
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20250215557
- Publication date Jul 3, 2025
- VERSUM MATERIALS US, LLC
- ROBERT G. RIDGEWAY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...
- Publication number 20250201537
- Publication date Jun 19, 2025
- TOKYO ELECTRON LIMITED
- Taisei SEGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20250197303
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Peter J. GUERCIO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR FABRICATING A SEMICONDUCTOR, HAVING PLURALITY OF LAYE...
- Publication number 20250188603
- Publication date Jun 12, 2025
- TOKAI CARBON KOREA CO., LTD.
- JOUNG IL KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250174466
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SiC FORMED BODY AND METHOD FOR PRODUCING SiC FORMED BODY
- Publication number 20250154647
- Publication date May 15, 2025
- Tokai Carbon Co., Ltd.
- Mayuri IMAGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composite Structures for Semiconductor Process Chambers
- Publication number 20250149305
- Publication date May 8, 2025
- Tianshu LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...
- Publication number 20250149328
- Publication date May 8, 2025
- LAM RESEARCH CORPORATION
- Bhadri N. VARADARAJAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR PHASE GROWTH APPARATUS
- Publication number 20250129470
- Publication date Apr 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshiaki DAIGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER
- Publication number 20250109526
- Publication date Apr 3, 2025
- Resonac Corporation
- Kensho TANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...
- Publication number 20250092512
- Publication date Mar 20, 2025
- GOODRICH CORPORATION
- STEVEN POTEET
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARBON RICH LAYER FOR SCALE CONTROL
- Publication number 20250084735
- Publication date Mar 13, 2025
- SCHLUMBERGER TECHNOLOGY CORPORATION
- Manuel Marya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING INSULATION FILM
- Publication number 20250075316
- Publication date Mar 6, 2025
- TOKYO ELECTRON LIMITED
- Nobuo MATSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...
- Publication number 20250062117
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Shanshan Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REDUCING STACKING FAULTS IN SILICON CARBIDE, AND STRUCTU...
- Publication number 20250051962
- Publication date Feb 13, 2025
- KWANSEI GAKUIN EDUCATIONAL FOUNDATION
- Tadaaki KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP
- Publication number 20250006489
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY
- Publication number 20240417266
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Peter J. GUERCIO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
FOLDABLE SUBSTRATES AND METHODS OF MAKING
- Publication number 20240417320
- Publication date Dec 19, 2024
- Corning Incorporated
- ROBERT ALAN BELLMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSTRUCTURED FIBER INTERFACE COATINGS FOR COMPOSITES
- Publication number 20240391838
- Publication date Nov 28, 2024
- RTX Corporation
- Richard Wesley Jackson
- D06 - TREATMENT OF TEXTILES OR THE LIKE LAUNDERING FLEXIBLE MATERIALS NOT OTH...
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS
- Publication number 20240363337
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Batch Mode Silicon Carbide Epitaxial Reactor
- Publication number 20240360589
- Publication date Oct 31, 2024
- ThinSiC Inc.
- Tirunelveli Subramaniam Ravi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET
- Publication number 20240352585
- Publication date Oct 24, 2024
- KNJ CO.,LTD
- Bun-hei KOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR
- Publication number 20240304492
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Hui CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
- Publication number 20240290611
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Bo Xie
- H01 - BASIC ELECTRIC ELEMENTS

Silicon carbide

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Conformal deposition of silicon carbide films using heterogeneous p...

Method for manufacturing a composite structure comprising a thin la...

Remote plasma based deposition of silicon carbide films using silic...

Method of repairing ceramic composite articles

Method for CVD deposition of n-type doped silicon carbide and epita...

Deflector for chamber cleaning

Method for manufacturing a composite structure comprising a thin la...

Thin film deposition process

High purity fiber feedstock for loose grain production

Continuous fiber-reinforced silicon carbide member, manufacturing m...

Scanning mirror and manufacturing method for scanning mirror

Method of processing substrate and method of manufacturing semicond...

Continuous multiple tow coating reactor

Formation of SiOC thin films

Conformal deposition of silicon carbide films

Compositions comprising silacycloalkanes and methods using same for...

Apparatus and method for manufacturing hexagonal crystals

Method for forming insulation film

Method of in situ ceramic coating deposition

CVD reactor with carrying ring for substrate handling, and use of a...

Compositions and methods using same for deposition of silicon-conta...

Method of manufacturing semiconductor device, substrate processing...

High purity polysilocarb derived silicon carbide powder

Silicon carbide epitaxial substrate and method for manufacturing same

Method for producing a composite structure comprising a thin layer...

Neural interface device manufacturing method

SiC epitaxial wafer and method of manufacturing SiC epitaxial wafer...

Method for manufacturing a composite structure comprising a thin la...

Process for manufacturing a silicon carbide coated body

Film forming method and film forming apparatus

Patents Applicationslast 30 patents

HIGH PURITY POLYSILOCARB DERIVED SILICON CARBIDE MATERIALS, APPLICA...

SEAM PERFORMANCE IMPROVEMENT FOR LARGE AREA GAPFILL

COMPOSITIONS COMPRISING SILACYCLOALKANES AND METHODS USING SAME FOR...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

COMPONENT TO BE USED FOR PLASMA PROCESSING DEVICE, METHOD FOR MANUF...

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

COMPONENT FOR FABRICATING A SEMICONDUCTOR, HAVING PLURALITY OF LAYE...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SiC FORMED BODY AND METHOD FOR PRODUCING SiC FORMED BODY

Composite Structures for Semiconductor Process Chambers

REMOTE PLASMA BASED DEPOSITION OF SILICON CARBIDE FILMS USING SILIC...

VAPOR PHASE GROWTH APPARATUS

SiC EPITAXIAL WAFER AND METHOD OF MANUFACTURING SiC EPITAXIAL WAFER

METHOD OF FORMING SILICON CARBIDE CONVERSION COAT ON CARBON USING G...

CARBON RICH LAYER FOR SCALE CONTROL

METHOD FOR FORMING INSULATION FILM

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...

METHOD FOR REDUCING STACKING FAULTS IN SILICON CARBIDE, AND STRUCTU...

METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP

PROCESS FOR MANUFACTURING A SILICON CARBIDE COATED BODY

FOLDABLE SUBSTRATES AND METHODS OF MAKING

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

MICROSTRUCTURED FIBER INTERFACE COATINGS FOR COMPOSITES

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS

Batch Mode Silicon Carbide Epitaxial Reactor

SUPPORT SOCKET AND METHOD FOR MANUFACTURING PARTS USING SUPPORT SOCKET

LOW-K ALD GAP-FILL METHODS AND MATERIAL

BACK SIDE DESIGN FOR FLAT SILICON CARBIDE SUSCEPTOR

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES

SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS