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H01J37/32926
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32926
Software, data control or modelling
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Patents Grants
last 30 patents
Information
Patent Grant
System and method for detecting abnormality of thin-film deposition...
Patent number
11,965,237
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen-Hao Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Glow plasma gas measurement signal processing
Patent number
11,948,774
Issue date
Apr 2, 2024
Servomex Group Limited
Bahram Alizadeh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Control system, control method, recording medium storing control pr...
Patent number
11,948,782
Issue date
Apr 2, 2024
Tokyo Electron Limited
Ryuta Higuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, plasma state detection method, and pla...
Patent number
11,935,731
Issue date
Mar 19, 2024
Tokyo Electron Limited
Daisuke Hayashi
G08 - SIGNALLING
Information
Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
Patent number
11,908,660
Issue date
Feb 20, 2024
Lam Research Corporation
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ignition optimization in semiconductor processing chambers
Patent number
11,894,217
Issue date
Feb 6, 2024
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling a processing reactor
Patent number
11,894,220
Issue date
Feb 6, 2024
Applied Materials, Inc.
Michael Nichols
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic pressure control for processing chambers implementing real-...
Patent number
11,869,754
Issue date
Jan 9, 2024
Applied Materials, Inc.
Tina Dhekial-Phukan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Virtual metrology enhanced plasma process optimization method
Patent number
11,869,756
Issue date
Jan 9, 2024
Tokyo Electron Limited
Jun Shinagawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Microwave heating device
Patent number
11,862,432
Issue date
Jan 2, 2024
Mitsubishi Electric Corporation
Hiroshi Suenobu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, calculation method, and calculation pr...
Patent number
11,862,438
Issue date
Jan 2, 2024
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
Patent number
11,854,775
Issue date
Dec 26, 2023
Board of Trustees of Michigan State University
Timothy A. Grotjohn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing system, substrate processing method, and contr...
Patent number
11,823,877
Issue date
Nov 21, 2023
Tokyo Electron Limited
Koichi Miyashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Performing radio frequency matching control using a model-based dig...
Patent number
11,784,028
Issue date
Oct 10, 2023
Applied Materials, Inc.
Tao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing method and plasma processing apparatus
Patent number
11,721,595
Issue date
Aug 8, 2023
Tokyo Electron Limited
Sho Oikawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual plasma pre-clean for selective gap fill
Patent number
11,721,542
Issue date
Aug 8, 2023
Applied Materials, Inc.
Yi Xu
B08 - CLEANING
Information
Patent Grant
Methods and apparatus for microwave plasma assisted chemical vapor...
Patent number
11,702,749
Issue date
Jul 18, 2023
Board of Trustees of Michigan State University
Jes Asmussen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Programmable ignition profiles for enhanced plasma ignition
Patent number
11,688,584
Issue date
Jun 27, 2023
Advanced Energy Industries, Inc.
Mike Armstrong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arcing protection method and processing tool
Patent number
11,664,206
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Wun-Kai Tsai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for plasma processing
Patent number
11,646,178
Issue date
May 9, 2023
Tokyo Electron Limited
Yuji Onuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,643,727
Issue date
May 9, 2023
HITACHI HIGH-TECH CORPORATION
Akira Kagoshima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and calculation method
Patent number
11,621,177
Issue date
Apr 4, 2023
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, data processing apparatus and data pro...
Patent number
11,605,530
Issue date
Mar 14, 2023
HITACHI HIGH-TECH CORPORATION
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma ignition optimization in semiconductor processing chambers
Patent number
11,587,765
Issue date
Feb 21, 2023
Applied Materials, Inc.
Soonwook Jung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Learning method, management device, and management program
Patent number
11,556,853
Issue date
Jan 17, 2023
Tokyo Electron Limited
Yuki Kataoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing apparatus, temperature control method, and temper...
Patent number
11,557,468
Issue date
Jan 17, 2023
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitive sensing data integration for plasma chamber condition mo...
Patent number
11,545,346
Issue date
Jan 3, 2023
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and temperature control method
Patent number
11,546,970
Issue date
Jan 3, 2023
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adaptive control for a power generator
Patent number
11,531,312
Issue date
Dec 20, 2022
MKS Instruments, Inc.
David J. Coumou
G05 - CONTROLLING REGULATING
Information
Patent Grant
Plasma processing apparatus, calculation method, and calculation pr...
Patent number
11,488,808
Issue date
Nov 1, 2022
Tokyo Electron Limited
Shinsuke Oka
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DYNAMIC PRESSURE CONTROL FOR PROCESSING CHAMBERS IMPLEMENTING REAL-...
Publication number
20240153750
Publication date
May 9, 2024
Applied Materials, Inc.
Tina Dhekial-Phukan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for OES Data Collection and Endpoint Detection
Publication number
20240136164
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIRELESS DATA COMMUNICATION IN PLASMA PROCESS CHAMBER THROUGH VI SE...
Publication number
20240112885
Publication date
Apr 4, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROFILE TWISTING CONTROL IN DIELECTRIC ETCH
Publication number
20240105432
Publication date
Mar 28, 2024
LAM RESEARCH CORPORATION
Neil Macaraeg Mackie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SIGNAL PROCESSING SYSTEM AND POWER SUPPLY DEVICE HAVING A SIGNAL PR...
Publication number
20240105431
Publication date
Mar 28, 2024
TRUMPF Huettinger GmbH + Co. KG
Florian A. Maier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, CALCULATION METHOD, AND CALCULATION PR...
Publication number
20240087855
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYNCHRONIZATION OF PLASMA PROCESSING COMPONENTS
Publication number
20240079213
Publication date
Mar 7, 2024
Advanced Energy Industries, Inc.
Gideon Van Zyl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF MULTI-STAGE ETCHING PROCESS AND PROCESSING DEVICE...
Publication number
20240047225
Publication date
Feb 8, 2024
United Microelectronics Corp.
Liang Ju WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM
Publication number
20240030013
Publication date
Jan 25, 2024
Horiba Stec, Co., Ltd.
Miyako HADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMPEDANCE MATCHING, IMPEDANCE MATCHING ARRANGEMENT AND P...
Publication number
20240006156
Publication date
Jan 4, 2024
TRUMPF Huettinger GmbH + Co. KG
Florian Maier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SMART DYNAMIC LOAD SIMULATOR FOR RF POWER DELIVERY CONTROL SYSTEM
Publication number
20230411119
Publication date
Dec 21, 2023
Applied Materials, Inc.
Jie Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYNCHRONIZATION OF BIAS SUPPLIES
Publication number
20230395355
Publication date
Dec 7, 2023
Advanced Energy Industries, Inc.
Denis Shaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR ADJUSTING LOCATION OF A WAFER AND A TOP PLATE...
Publication number
20230395361
Publication date
Dec 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Hsiang CHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Plasma Process
Publication number
20230386789
Publication date
Nov 30, 2023
TOKYO ELECTRON LIMITED
Charles Schlechte
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTIVELY COUPLED PLASMA APPARATUS FOR EXHAUST GAS TREATMENT AND...
Publication number
20230377842
Publication date
Nov 23, 2023
LOT CES CO., LTD.
Jin Ho BAE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING PROCESSING APPARATUS, ETCHING PROCESSING SYSTEM, ANALYSIS A...
Publication number
20230369032
Publication date
Nov 16, 2023
TOKYO ELECTRON LIMITED
Ryo IGOSAWA
G05 - CONTROLLING REGULATING
Information
Patent Application
ROBUST ASHABLE HARD MASK
Publication number
20230360922
Publication date
Nov 9, 2023
LAM RESEARCH CORPORATION
Matthew Scott WEIMER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEM AND METHOD FOR DETECTING EXCURSION IN PLASMA PROCESSING
Publication number
20230352284
Publication date
Nov 2, 2023
FORTH-RITE TECHNOLOGIES, LLC
Terry R. Turner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTONOMOUS OPERATION OF PLASMA PROCESSING TOOL
Publication number
20230352282
Publication date
Nov 2, 2023
TOKYO ELECTRON LIMITED
Jun SHINAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-LAYER HARDMASK FOR DEFECT REDUCTION IN EUV PATTERNING
Publication number
20230343593
Publication date
Oct 26, 2023
LAM RESEARCH CORPORATION
Bhaskar NAGABHIRAVA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVE SENSING DATA INTEGRATION FOR PLASMA CHAMBER CONDITION MO...
Publication number
20230343568
Publication date
Oct 26, 2023
Applied Materials, Inc.
Yaoling Pan
G01 - MEASURING TESTING
Information
Patent Application
NON-INVASIVE MEASUREMENT OF PLASMA SYSTEMS
Publication number
20230335382
Publication date
Oct 19, 2023
Dublin City University
Patrick McNally
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTISCALE PHYSICAL ETCH MODELING AND METHODS THEREOF
Publication number
20230297757
Publication date
Sep 21, 2023
ASML NETHERLANDS B.V.
Syam PARAYIL VENUGOPALAN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS CHARACTERIZATION AND CORRECTION USING OPTICAL WALL PROCESS...
Publication number
20230298872
Publication date
Sep 21, 2023
Applied Materials, Inc.
Jeffrey Yat Shan Au
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Programmable Plasma Ignition Profiles
Publication number
20230290612
Publication date
Sep 14, 2023
Advanced Energy Industries, Inc.
Mike Armstrong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADAPTIVE PREDICTIVE CONTROL SYSTEM
Publication number
20230282462
Publication date
Sep 7, 2023
Advanced Energy Industries, Inc.
Chad S. Samuels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STEP PREDICTIVE CONTROL SYSTEM
Publication number
20230280719
Publication date
Sep 7, 2023
Advanced Energy Industries, Inc.
Chad S. Samuels
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYNCHRONIZATION OF PLASMA PROCESSING COMPONENTS
Publication number
20230268162
Publication date
Aug 24, 2023
Advanced Energy Industries, Inc.
Gideon Van Zyl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONTROL KNOB ESTIMATION
Publication number
20230260767
Publication date
Aug 17, 2023
Applied Materials, Inc.
Jeong Jin Hong
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
Publication number
20230253195
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Wun-Kai TSAI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...