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H01J2237/036

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/036Spacing

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chucking process
- Patent number 12,100,609
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anode, and x-ray generating tube, x-ray generating apparatus, and r...
- Patent number 10,998,161
- Issue date May 4, 2021
- Canon Kabushiki Kaisha
- Yasuo Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sustained self-sputtering of lithium for lithium physical vapor dep...
- Patent number 10,443,121
- Issue date Oct 15, 2019
- View, Inc.
- Martin John Neumann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray tube including hybrid electron emission source
- Patent number 10,147,581
- Issue date Dec 4, 2018
- Electronics and Telecommunications Research Institute
- Jun Tae Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray generation device having multiple metal target members
- Patent number 10,115,557
- Issue date Oct 30, 2018
- Hamamatsu Photonics K.K.
- Atsushi Ishii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cathode filament assembly
- Patent number 9,916,959
- Issue date Mar 13, 2018
- Koninklijke Philips N.V.
- Marcus Walter Foellmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator
- Patent number 9,704,691
- Issue date Jul 11, 2017
- Evgenij Vladimirovich Berlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure and insulation method
- Patent number 9,281,160
- Issue date Mar 8, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulation structure of high voltage electrodes for ion implantatio...
- Patent number 9,117,630
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-voltage insulation device for charged-particle optical apparatus
- Patent number 9,093,201
- Issue date Jul 28, 2015
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Assembly for providing an aligned stack of two or more modules and...
- Patent number 8,710,461
- Issue date Apr 29, 2014
- Mapper Lithography IP B.V.
- Pieter Kappelhof
- B82 - NANO-TECHNOLOGY
Information Patent Grant
End terminations for electrodes used in ion implantation systems
- Patent number 8,309,935
- Issue date Nov 13, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid providing beamlet steering
- Patent number 8,309,937
- Issue date Nov 13, 2012
- Veeco Instruments, Inc.
- Ikuya Kameyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Beam optical component for charged particle beams
- Patent number 7,675,042
- Issue date Mar 9, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
- Publication number 20240387148
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Che Wei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE GAS GENERATION APPARATUS
- Publication number 20240297024
- Publication date Sep 5, 2024
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Ren ARITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20240087835
- Publication date Mar 14, 2024
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
- Publication number 20230369023
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Che Wei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKING PROCESS
- Publication number 20200328063
- Publication date Oct 15, 2020
- Applied Materials, Inc.
- Sarah Michelle BOBEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...
- Publication number 20160076139
- Publication date Mar 17, 2016
- VIEW, INC.
- Martin John Neumann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATOR (VARIANTS)
- Publication number 20150279620
- Publication date Oct 1, 2015
- Evgenij Vladimirovich Berlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE AND INSULATION METHOD
- Publication number 20140353518
- Publication date Dec 4, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...
- Publication number 20140291543
- Publication date Oct 2, 2014
- SEN Corporation
- Masateru Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE INSULATION DEVICE FOR CHARGED-PARTICLE OPTICAL APPARATUS
- Publication number 20140197327
- Publication date Jul 17, 2014
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
- Publication number 20130161511
- Publication date Jun 27, 2013
- EBARA CORPORATION
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ASSEMBLY FOR PROVIDING AN ALIGNED STACK OF TWO OR MORE MODULES AND...
- Publication number 20130087702
- Publication date Apr 11, 2013
- Pieter Kappelhof
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
GRID PROVIDING BEAMLET STEERING
- Publication number 20130037725
- Publication date Feb 14, 2013
- VEECO INSTRUMENTS, INC.
- Ikuya Kameyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRID PROVIDING BEAMLET STEERING
- Publication number 20120080609
- Publication date Apr 5, 2012
- VEECO INSTRUMENTS, INC.
- Ikuya Kameyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
END TERMINATIONS FOR ELECTRODES USED IN ION IMPLANTATION SYSTEMS
- Publication number 20100252746
- Publication date Oct 7, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS
- Publication number 20100044579
- Publication date Feb 25, 2010
- NORDIKO TECHNICAL SERVICES LIMITED
- Timothy Andrew James Holmes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam optical component for charged particle beams
- Publication number 20070125954
- Publication date Jun 7, 2007
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrostatic chucking process

Anode, and x-ray generating tube, x-ray generating apparatus, and r...

Sustained self-sputtering of lithium for lithium physical vapor dep...

X-ray tube including hybrid electron emission source

X-ray generation device having multiple metal target members

Cathode filament assembly

Plasma generator

Insulation structure and insulation method

Insulation structure of high voltage electrodes for ion implantatio...

High-voltage insulation device for charged-particle optical apparatus

Sample observing device and sample observing method

Assembly for providing an aligned stack of two or more modules and...

End terminations for electrodes used in ion implantation systems

Grid providing beamlet steering

Beam optical component for charged particle beams

Patents Applicationslast 30 patents

TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION

ACTIVE GAS GENERATION APPARATUS

CHARGED PARTICLE DEVICE AND METHOD

TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION

ELECTROSTATIC CHUCKING PROCESS

SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...

PLASMA GENERATOR (VARIANTS)

INSULATION STRUCTURE AND INSULATION METHOD

INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...

HIGH-VOLTAGE INSULATION DEVICE FOR CHARGED-PARTICLE OPTICAL APPARATUS

SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD

ASSEMBLY FOR PROVIDING AN ALIGNED STACK OF TWO OR MORE MODULES AND...

GRID PROVIDING BEAMLET STEERING

GRID PROVIDING BEAMLET STEERING

END TERMINATIONS FOR ELECTRODES USED IN ION IMPLANTATION SYSTEMS

APPARATUS

Beam optical component for charged particle beams