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H01J2237/036
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/036
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Patents Grants
last 30 patents
Information
Patent Grant
Anode, and x-ray generating tube, x-ray generating apparatus, and r...
Patent number
10,998,161
Issue date
May 4, 2021
Canon Kabushiki Kaisha
Yasuo Ohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sustained self-sputtering of lithium for lithium physical vapor dep...
Patent number
10,443,121
Issue date
Oct 15, 2019
View, Inc.
Martin John Neumann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray tube including hybrid electron emission source
Patent number
10,147,581
Issue date
Dec 4, 2018
Electronics and Telecommunications Research Institute
Jun Tae Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
X-ray generation device having multiple metal target members
Patent number
10,115,557
Issue date
Oct 30, 2018
Hamamatsu Photonics K.K.
Atsushi Ishii
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Cathode filament assembly
Patent number
9,916,959
Issue date
Mar 13, 2018
Koninklijke Philips N.V.
Marcus Walter Foellmer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generator
Patent number
9,704,691
Issue date
Jul 11, 2017
Evgenij Vladimirovich Berlin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insulation structure and insulation method
Patent number
9,281,160
Issue date
Mar 8, 2016
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Masateru Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insulation structure of high voltage electrodes for ion implantatio...
Patent number
9,117,630
Issue date
Aug 25, 2015
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Masateru Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-voltage insulation device for charged-particle optical apparatus
Patent number
9,093,201
Issue date
Jul 28, 2015
IMS Nanofabrication AG
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Sample observing device and sample observing method
Patent number
8,884,225
Issue date
Nov 11, 2014
Ebara Corporation
Tsutomu Karimata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Assembly for providing an aligned stack of two or more modules and...
Patent number
8,710,461
Issue date
Apr 29, 2014
Mapper Lithography IP B.V.
Pieter Kappelhof
B82 - NANO-TECHNOLOGY
Information
Patent Grant
End terminations for electrodes used in ion implantation systems
Patent number
8,309,935
Issue date
Nov 13, 2012
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid providing beamlet steering
Patent number
8,309,937
Issue date
Nov 13, 2012
Veeco Instruments, Inc.
Ikuya Kameyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Beam optical component for charged particle beams
Patent number
7,675,042
Issue date
Mar 9, 2010
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE DEVICE AND METHOD
Publication number
20240087835
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Albertus Victor Gerardus MANGNUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
Publication number
20230369023
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Che Wei Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCKING PROCESS
Publication number
20200328063
Publication date
Oct 15, 2020
Applied Materials, Inc.
Sarah Michelle BOBEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUSTAINED SELF-SPUTTERING OF LITHIUM FOR LITHIUM PHYSICAL VAPOR DEP...
Publication number
20160076139
Publication date
Mar 17, 2016
VIEW, INC.
Martin John Neumann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATOR (VARIANTS)
Publication number
20150279620
Publication date
Oct 1, 2015
Evgenij Vladimirovich Berlin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSULATION STRUCTURE AND INSULATION METHOD
Publication number
20140353518
Publication date
Dec 4, 2014
SEN Corporation
Masateru Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSULATION STRUCTURE OF HIGH VOLTAGE ELECTRODES FOR ION IMPLANTATIO...
Publication number
20140291543
Publication date
Oct 2, 2014
SEN Corporation
Masateru Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-VOLTAGE INSULATION DEVICE FOR CHARGED-PARTICLE OPTICAL APPARATUS
Publication number
20140197327
Publication date
Jul 17, 2014
IMS Nanofabrication AG
Elmar Platzgummer
B82 - NANO-TECHNOLOGY
Information
Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
Publication number
20130161511
Publication date
Jun 27, 2013
EBARA CORPORATION
Tsutomu Karimata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSEMBLY FOR PROVIDING AN ALIGNED STACK OF TWO OR MORE MODULES AND...
Publication number
20130087702
Publication date
Apr 11, 2013
Pieter Kappelhof
A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information
Patent Application
GRID PROVIDING BEAMLET STEERING
Publication number
20130037725
Publication date
Feb 14, 2013
VEECO INSTRUMENTS, INC.
Ikuya Kameyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GRID PROVIDING BEAMLET STEERING
Publication number
20120080609
Publication date
Apr 5, 2012
VEECO INSTRUMENTS, INC.
Ikuya Kameyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
END TERMINATIONS FOR ELECTRODES USED IN ION IMPLANTATION SYSTEMS
Publication number
20100252746
Publication date
Oct 7, 2010
Varian Semiconductor Equipment Associates, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS
Publication number
20100044579
Publication date
Feb 25, 2010
NORDIKO TECHNICAL SERVICES LIMITED
Timothy Andrew James Holmes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam optical component for charged particle beams
Publication number
20070125954
Publication date
Jun 7, 2007
Juergen Frosien
H01 - BASIC ELECTRIC ELEMENTS