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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/24578
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Patents Grants
last 30 patents
Information
Patent Grant
Auto-focus sensor implementation for multi-column microscopes
Patent number
12,322,568
Issue date
Jun 3, 2025
KLA Corporation
Nicholas Petrone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus, and method and program for controlling...
Patent number
12,315,704
Issue date
May 27, 2025
Tokyo Electron Limited
Yusuke Saitoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and methods of manufacturing semiconduc...
Patent number
12,315,703
Issue date
May 27, 2025
Samsung Electronics Co., Ltd.
Kyoungchon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern height metrology using an e-beam system
Patent number
12,278,086
Issue date
Apr 15, 2025
Imec VZW
Gian Francesco Lorusso
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron microscope and image generation method
Patent number
12,278,084
Issue date
Apr 15, 2025
Jeol Ltd.
Motohiro Nakamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope and image generation method using scan...
Patent number
12,255,043
Issue date
Mar 18, 2025
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Numerically compensating SEM-induced charging using diffusion-based...
Patent number
12,255,042
Issue date
Mar 18, 2025
ASML Netherlands B.V.
Thomas Jarik Huisman
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ultra-precision timing clock method
Patent number
12,226,246
Issue date
Feb 18, 2025
Weng-Dah Ken
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Plasma process monitoring apparatus using terahertz waves and monit...
Patent number
12,198,893
Issue date
Jan 14, 2025
IUCF-HYU (Industry-University Cooperation Foundation Hanyang University)
Hak Sung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and interlock method thereof
Patent number
12,170,188
Issue date
Dec 17, 2024
Jusung Engineering Co., Ltd.
Sang Kyo Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam device
Patent number
12,148,593
Issue date
Nov 19, 2024
HITACHI HIGH-TECH CORPORATION
Shinichi Matsubara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus and image acquiring method
Patent number
12,148,594
Issue date
Nov 19, 2024
Jeol Ltd.
Takeshi Otsuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing chambers configured for tunable substrate and edg...
Patent number
12,142,469
Issue date
Nov 12, 2024
Applied Materials, Inc.
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
Patent number
12,100,574
Issue date
Sep 24, 2024
KLA Corporation
Nadav Gutman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a multi-beam particle beam microscope
Patent number
12,094,683
Issue date
Sep 17, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for processing wafer
Patent number
12,074,074
Issue date
Aug 27, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Po-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
12,074,076
Issue date
Aug 27, 2024
HITACHI HIGH-TECH CORPORATION
Soichiro Eto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
12,046,446
Issue date
Jul 23, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Chiba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Diagnosis apparatus, plasma processing apparatus and diagnosis method
Patent number
12,040,167
Issue date
Jul 16, 2024
HITACHI HIGH-TECH CORPORATION
Shota Umeda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
Patent number
12,033,831
Issue date
Jul 9, 2024
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer de-chucking detection and arcing prevention
Patent number
12,002,702
Issue date
Jun 4, 2024
Applied Materials, Inc.
Ganesh Balasubramanian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Non-contact angle measuring apparatus
Patent number
11,903,755
Issue date
Feb 20, 2024
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring method and plasma processing apparatus
Patent number
11,854,767
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masanori Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method with fiducials having offset layouts
Patent number
11,835,460
Issue date
Dec 5, 2023
Illumina, Inc.
John S. Vieceli
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
System using pixelated faraday sensor
Patent number
11,810,754
Issue date
Nov 7, 2023
Applied Materials, Inc.
Eric D. Hermanson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of determining aberrations of a charged particle beam, and...
Patent number
11,810,753
Issue date
Nov 7, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dominik Ehberger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System for deriving electrical characteristics and non-transitory c...
Patent number
11,776,103
Issue date
Oct 3, 2023
HITACHI HIGH-TECH CORPORATION
Heita Kimizuka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for measuring CD using scanning electron microscope
Patent number
11,740,073
Issue date
Aug 29, 2023
Samsung Electronics Co., Ltd.
Jooho Kim
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
NON-INVASIVE MEASURING/DIAGNOSIS/TREATMENT APPARATUS AND METHOD
Publication number
20250176925
Publication date
Jun 5, 2025
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROGRAMMABLE PRECISION ETCHING
Publication number
20250183019
Publication date
Jun 5, 2025
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION ANGLE SENSOR
Publication number
20250157784
Publication date
May 15, 2025
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONITORING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250157799
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Mohd Fairuz BIN BUDIMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...
Publication number
20250157785
Publication date
May 15, 2025
HITACHI HIGH-TECH CORPORATION
Hidenori MACHIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING MACHINE AND LOWER ELECTRODE STRUCTURE THEREOF
Publication number
20250140512
Publication date
May 1, 2025
JIANGSU LEUVEN INSTRUMENTS CO., LTD.
Huaidong ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPROVED OPTICAL ACCESS FOR SPECTROSCOPIC MONITORING OF SEMICONDUCT...
Publication number
20250118603
Publication date
Apr 10, 2025
Verity Instruments, Inc.
Mark Meloni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND INTERLOCK METHOD THEREOF
Publication number
20250112028
Publication date
Apr 3, 2025
JUSUNG ENGINEERING CO., LTD.
Sang Kyo KWON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM PROFILING USING OPTICAL TOMOGRAPHY
Publication number
20250087448
Publication date
Mar 13, 2025
Axcelis Technologies, Inc.
Neil J. Bassom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESS DEVICE AND METHOD OF MONITORING SEMICONDUCTOR...
Publication number
20250087509
Publication date
Mar 13, 2025
Samsung Electronics Co., Ltd.
Jitae Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM POSITION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM WRITING...
Publication number
20250054727
Publication date
Feb 13, 2025
NuFlare Technology, Inc.
Tsubasa NANAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETERMINING A BEAM CONVERGENCE OF A CHARGED PARTICLE BEAM...
Publication number
20250037965
Publication date
Jan 30, 2025
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Dominik Ehberger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BEAM POSITION DISPLACEMENT CORRECTION IN CHARGED PARTICLE INSPECTION
Publication number
20250037961
Publication date
Jan 30, 2025
ASML NETHERLANDS B.V.
Martin Frans, Pierre SMEETS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR SUBSTRATE, APPARATUS, AND METHOD
Publication number
20250029811
Publication date
Jan 23, 2025
ASML NETHERLANDS B.V.
Arthur Eduard OVERLACK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF GENERATING A SAMPLE MAP, COMPUTER PROGRAM PRODUCT, CHARGE...
Publication number
20240339295
Publication date
Oct 10, 2024
ASML NETHERLANDS B.V.
Tzu-Chao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED-PARTICLE APPARATUS, MULTI-DEVICE APPARATUS, METHOD OF USING...
Publication number
20240331968
Publication date
Oct 3, 2024
ASML NETHERLANDS B.V.
Yan REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
Publication number
20240312759
Publication date
Sep 19, 2024
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESS MONITORING APPARATUS USING TERAHERTZ WAVES AND MONIT...
Publication number
20240297014
Publication date
Sep 5, 2024
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY)
Hak Sung KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT METHOD AND MEASUREMENT SYSTEM
Publication number
20240280383
Publication date
Aug 22, 2024
TOKYO ELECTRON LIMITED
Hikaru FUJIWARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MACHINE LEARNING BASED YIELD PREDICTION
Publication number
20240281958
Publication date
Aug 22, 2024
APPLIED MATERIALS ISRAEL LTD.
Boris LEVANT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE POSITION MONITORING DEVICES
Publication number
20240274401
Publication date
Aug 15, 2024
KLA Corporation
James Richard Bella
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS,...
Publication number
20240258068
Publication date
Aug 1, 2024
CARL ZEISS MICROSCOPY GMBH
Josef Biberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
Publication number
20240258065
Publication date
Aug 1, 2024
CARL ZEISS MICROSCOPY GMBH
Dirk Preikszas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for Alignment Free Ion Column
Publication number
20240222067
Publication date
Jul 4, 2024
FEI Company
Radek Smolka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER STATE DETECTION
Publication number
20240219165
Publication date
Jul 4, 2024
LAM RESEARCH CORPORATION
Noah Elliot Baker
G01 - MEASURING TESTING
Information
Patent Application
XRAY DIFFRACTION ANGLE VERIFICATION IN AN ION IMPLANTER
Publication number
20240222070
Publication date
Jul 4, 2024
Applied Materials, Inc.
Stephen Krause
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Collision Judgment Apparatus, Recording Medium Recording Program, a...
Publication number
20240212975
Publication date
Jun 27, 2024
JEOL Ltd.
Kohei Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONITORING SYSTEM, APPARATUS, AND METHOD FOR DETERMINING MAINTENANC...
Publication number
20240186126
Publication date
Jun 6, 2024
Research & Business Foundation Sungkyunkwan University
Geun Young YEOM
G01 - MEASURING TESTING
Information
Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
Publication number
20240178022
Publication date
May 30, 2024
APPLIED MATERIALS ISRAEL LTD.
Ofer Dudovitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
USING LASER BEAM FOR SEM BASE TOOLS, WORKING DISTANCE MEASUREMENT A...
Publication number
20240177962
Publication date
May 30, 2024
APPLIED MATERIALS ISRAEL LTD.
Ofer Dudovitch
H01 - BASIC ELECTRIC ELEMENTS