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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/24578
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Patents Grants
last 30 patents
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Non-contact angle measuring apparatus
Patent number
11,903,755
Issue date
Feb 20, 2024
Weng-Dah Ken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring method and plasma processing apparatus
Patent number
11,854,767
Issue date
Dec 26, 2023
Tokyo Electron Limited
Masanori Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method with fiducials having offset layouts
Patent number
11,835,460
Issue date
Dec 5, 2023
Illumina, Inc.
John S. Vieceli
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
System using pixelated faraday sensor
Patent number
11,810,754
Issue date
Nov 7, 2023
Applied Materials, Inc.
Eric D. Hermanson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of determining aberrations of a charged particle beam, and...
Patent number
11,810,753
Issue date
Nov 7, 2023
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Dominik Ehberger
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
System for deriving electrical characteristics and non-transitory c...
Patent number
11,776,103
Issue date
Oct 3, 2023
HITACHI HIGH-TECH CORPORATION
Heita Kimizuka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for measuring CD using scanning electron microscope
Patent number
11,740,073
Issue date
Aug 29, 2023
Samsung Electronics Co., Ltd.
Jooho Kim
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Auto-calibration to a station of a process module that spins a wafer
Patent number
11,742,229
Issue date
Aug 29, 2023
Lam Research Corporation
Jacob L. Hiester
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for operating a multi-beam particle beam microscope
Patent number
11,735,393
Issue date
Aug 22, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection tool and method of determining a distortion of an inspec...
Patent number
11,728,129
Issue date
Aug 15, 2023
ASML Netherlands B.V.
Peter Christianus Johannes Maria De Loijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for charged particle detection
Patent number
11,715,619
Issue date
Aug 1, 2023
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
Patent number
11,664,253
Issue date
May 30, 2023
Kioxia Corporation
Kazuya Yoshimori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for determining a position of an element on a...
Patent number
11,650,495
Issue date
May 16, 2023
Carl Zeiss SMT GmbH
Michael Budach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining a beamlet position and method for determinin...
Patent number
RE49483
Issue date
Apr 4, 2023
ASML Netherlands B.V.
Paul IJmert Scheffers
Information
Patent Grant
Optical height detection system
Patent number
11,521,826
Issue date
Dec 6, 2022
ASML Netherlands B.V.
Jian Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ranging apparatus and method using the ranging apparatus
Patent number
11,513,194
Issue date
Nov 29, 2022
Tokyo Electron Limited
Kippei Sugita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam irradiation apparatus and electron beam alignment method
Patent number
11,515,118
Issue date
Nov 29, 2022
Ebara Corporation
Kenji Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion milling device
Patent number
11,508,552
Issue date
Nov 22, 2022
HITACHI HIGH-TECH CORPORATION
Hitoshi Kamoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interferometric stage positioning apparatus
Patent number
11,476,077
Issue date
Oct 18, 2022
ASML Netherlands B.V.
Marcel Koenraad Marie Baggen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer de-chucking detection and arcing prevention
Patent number
11,437,262
Issue date
Sep 6, 2022
Applied Materials, Inc.
Ganesh Balasubramanian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for determining a position of an element on a...
Patent number
11,385,540
Issue date
Jul 12, 2022
Carl Zeiss SMT GmbH
Michael Budach
G01 - MEASURING TESTING
Information
Patent Grant
In situ angle measurement using channeling
Patent number
11,387,073
Issue date
Jul 12, 2022
Applied Materials, Inc.
Frank Sinclair
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for spatially resolved optical metrology of an io...
Patent number
11,380,517
Issue date
Jul 5, 2022
Applied Materials, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam device
Patent number
11,380,515
Issue date
Jul 5, 2022
HITACHI HIGH-TECH CORPORATION
Keiichiro Hosobuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus, sample alignment method of charged...
Patent number
11,342,156
Issue date
May 24, 2022
HITACHI HIGH-TECH CORPORATION
Hironori Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam focusing
Patent number
11,328,895
Issue date
May 10, 2022
FEI Company
Herman Carlo Floresca
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for charged particle detection
Patent number
11,295,930
Issue date
Apr 5, 2022
ASML Netherlands B.V.
Yongxin Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Holes tilt angle measurement using FIB diagonal cut
Patent number
11,280,749
Issue date
Mar 22, 2022
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240153135
Publication date
May 9, 2024
SEMES CO., LTD.
Ho Hun LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
Publication number
20240145247
Publication date
May 2, 2024
INFINEON TECHNOLOGIES AG
Moriz JELINEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPONENT REPLACEMENT METHOD, COMPONENT REPLACEMENT DEVICE, AND COM...
Publication number
20240128064
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Hiroki ENDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA-PRECISION TIMING CLOCK METHOD AND APPARATUS
Publication number
20240115222
Publication date
Apr 11, 2024
Weng-Dah Ken
G04 - HOROLOGY
Information
Patent Application
SUBSTRATE ANALYSIS SYSTEM
Publication number
20240112881
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Jonghyeok PARK
G01 - MEASURING TESTING
Information
Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
Publication number
20240096601
Publication date
Mar 21, 2024
KIOXIA Corporation
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
Publication number
20240096590
Publication date
Mar 21, 2024
NuFlare Technology, Inc.
Yasutaka SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
Publication number
20240087838
Publication date
Mar 14, 2024
Carl Zeiss MultiSEM GmbH
Stefan Schubert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20240087843
Publication date
Mar 14, 2024
PSK INC.
JONG CHAN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE PIECE RELOCATING DEVICE
Publication number
20240087841
Publication date
Mar 14, 2024
HITACHI HIGH-TECH SCIENCE CORPORATION
Tatsuya ASAHATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTO-FOCUS SENSOR IMPLEMENTATION FOR MULTI-COLUMN MICROSCOPES
Publication number
20240079203
Publication date
Mar 7, 2024
KLA Corporation
Nicholas Petrone
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELEC...
Publication number
20240053301
Publication date
Feb 15, 2024
Evatec AG
Peter HORN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INSPECTION DEVICE AND INSPECTION METHOD
Publication number
20240055223
Publication date
Feb 15, 2024
KIOXIA Corporation
Chihiro IDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE
Publication number
20240027911
Publication date
Jan 25, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Jing LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA STATE ESTIMATION METHOD
Publication number
20240030015
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Eiki KAMATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System for Deriving Electrical Characteristics and Non-Transitory C...
Publication number
20240020816
Publication date
Jan 18, 2024
HITACHI HIGH-TECH CORPORATION
Heita KIMIZUKA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20230411111
Publication date
Dec 21, 2023
HITACHI HIGH-TECH CORPORATION
Tetsuro KADOWAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM EVALUATION METHOD, MULTI CHARGED PARTIC...
Publication number
20230402253
Publication date
Dec 14, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Analysis System
Publication number
20230377836
Publication date
Nov 23, 2023
Hitachi High-Tech Corporation
Azusa KONNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STAGE DEVICE, CHARGED PARTICLE BEAM DEVICE, AND VACUUM DEVICE
Publication number
20230369011
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Motohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH PRECISION EDGE RING CENTERING FOR SUBSTRATE PROCESSING SYSTEMS
Publication number
20230369025
Publication date
Nov 16, 2023
LAM RESEARCH CORPORATION
Hui Ling HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND DEVICE FOR THE OUTER-WALL AND/OR INNER-WALL COATING OF H...
Publication number
20230323529
Publication date
Oct 12, 2023
RHEINISCH-WESTFÄLISCHE TECHNISCHE HOCHSCHULE (RWTH) AACHEN KÖRPERSCHAFT DES Ö...
Montgomery JARITZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Charged Particle Beam System
Publication number
20230317406
Publication date
Oct 5, 2023
HITACHI HIGH-TECH CORPORATION
Yuto KAWASHIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20230307206
Publication date
Sep 28, 2023
JEOL Ltd.
Kenichi Tsutsumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...
Publication number
20230282443
Publication date
Sep 7, 2023
Shânêl Ondrej
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230260760
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
Publication number
20230260749
Publication date
Aug 17, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
Publication number
20230245874
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM
Publication number
20230238210
Publication date
Jul 27, 2023
HITACHI HIGH-TECH CORPORATION
Hiroaki KASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF MASK CD
Publication number
20230230807
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Beibei Jiang
H01 - BASIC ELECTRIC ELEMENTS