Special contact materials used for MEMS

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H01H2001/0052

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HELECTRICITY H01Electric elements H01HELECTRIC SWITCHES RELAYS SELECTORS EMERGENCY PROTECTIVE DEVICES

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H01H2001/0052Special contact materials used for MEMS

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 12,148,580
- Issue date Nov 19, 2024
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 11,501,928
- Issue date Nov 15, 2022
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnetically actuated microelectromechanical switch
- Patent number 10,825,628
- Issue date Nov 3, 2020
- Analog Devices Global Unlimited Company
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical switch with metamaterial contacts
- Patent number 10,784,066
- Issue date Sep 22, 2020
- Synergy Microwave Corporation
- Shiban K. Koul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromechanical relay device
- Patent number 10,727,016
- Issue date Jul 28, 2020
- The University of Bristol
- Sunil Rana
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical switching device with electrodes having 2D layere...
- Patent number 10,546,708
- Issue date Jan 28, 2020
- International Business Machines Corporation
- Urs T. Duerig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contact material for MEMS devices
- Patent number 10,388,468
- Issue date Aug 20, 2019
- Innovative Micro Technology
- Suresh Sampath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
RF MEMS electrodes with limited grain growth
- Patent number 10,301,173
- Issue date May 28, 2019
- Cavendish Kinetics, Inc.
- Mickael Renault
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch device and method of fabrication
- Patent number 9,911,563
- Issue date Mar 6, 2018
- Analog Devices Global
- John G Macnamara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical switching device with electrodes having 2D layere...
- Patent number 9,896,328
- Issue date Feb 20, 2018
- International Business Machines Corporation
- Urs T. Duerig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical switching device with electrodes having 2D layere...
- Patent number 9,682,855
- Issue date Jun 20, 2017
- International Business Machines Corporation
- Urs T. Duerig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metallic device having mobile element in a cavity of the BEOL of an...
- Patent number 9,653,392
- Issue date May 16, 2017
- STMicroelectronics (Rousset) SAS
- Christian Rivero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromechanical switching device with electrodes having 2D layere...
- Patent number 9,643,839
- Issue date May 9, 2017
- International Business Machines Corporation
- Urs T. Duerig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical switch
- Patent number 9,318,291
- Issue date Apr 19, 2016
- Korea Advanced Institute of Science and Technology
- Jun Bo Yoon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact structure for electromechanical switch
- Patent number 9,196,429
- Issue date Nov 24, 2015
- Intai Technology Corp.
- Richard Loon Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanoelectromechanical switch with localized nanoscale conductive pa...
- Patent number 9,171,680
- Issue date Oct 27, 2015
- International Business Machines Corporation
- Daniel Grogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact structure for electromechanical switch
- Patent number 8,884,726
- Issue date Nov 11, 2014
- Intai Technology Corp.
- Richard Loon Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a micro-electromechanical system device
- Patent number 8,826,529
- Issue date Sep 9, 2014
- General Electric Company
- Andrew Joseph Detor
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
MEMS switches and fabrication methods
- Patent number 8,829,626
- Issue date Sep 9, 2014
- International Business Machines Corporation
- Jeffrey P. Gambino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switch structures
- Patent number 8,779,886
- Issue date Jul 15, 2014
- General Electric Company
- Marco Francesco Aimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS switches and fabrication methods
- Patent number 8,609,450
- Issue date Dec 17, 2013
- International Business Machines Corporation
- Jeffrey P. Gambino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
RF MEMS switch device and manufacturing method thereof
- Patent number 8,476,995
- Issue date Jul 2, 2013
- MEMS Solution Inc.
- Kwang-Jae Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing micromachine
- Patent number 8,470,629
- Issue date Jun 25, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Mayumi Mikami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS switch structure
- Patent number 8,451,078
- Issue date May 28, 2013
- National Chip Implementation Center
- You-Liang Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio-frequency microelectromechanical systems and method of manufa...
- Patent number 8,367,215
- Issue date Feb 5, 2013
- EPCOS AG
- Jacob M. J. Den Toonder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switch structure and method
- Patent number 8,354,899
- Issue date Jan 15, 2013
- General Electric Company
- Christopher Fred Keimel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Structure, electronic device, and method for fabricating a structure
- Patent number 8,350,160
- Issue date Jan 8, 2013
- Kabushiki Kaisha Toshiba
- Tadashi Sakai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switch for use in microelectromechanical systems (MEMS) and MEMS de...
- Patent number 8,138,859
- Issue date Mar 20, 2012
- FormFactor, Inc.
- John K. Gritters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS switch capping and passivation method
- Patent number 8,124,436
- Issue date Feb 28, 2012
- Analog Devices, Inc.
- Mark Schirmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Contact material, device including contact material, and method of...
- Patent number 8,054,148
- Issue date Nov 8, 2011
- General Electric Company
- Duraiswamy Srinivasan
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
CONTACT SURFACE FOR MEMS DEVICE
- Publication number 20190341211
- Publication date Nov 7, 2019
- Innovative Micro Technology
- Christopher S. GUDEMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETICALLY ACTUATED MICROELECTROMECHANICAL SWITCH
- Publication number 20190019644
- Publication date Jan 17, 2019
- Analog Devices Global Unlimited Company
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SWITCH WITH METAMATERIAL CONTACTS
- Publication number 20180261415
- Publication date Sep 13, 2018
- Synergy Microwave Corporation
- Shiban K. Koul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRINTED MEMS SWITCH
- Publication number 20170271114
- Publication date Sep 21, 2017
- Northrop Grumman Systems Corporation
- XING LAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERE...
- Publication number 20170217758
- Publication date Aug 3, 2017
- International Business Machines Corporation
- Urs T. Duerig
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCHES AND FABRICATION METHODS
- Publication number 20140209442
- Publication date Jul 31, 2014
- International Business Machines Corporation
- Jeffrey P. Gambino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL SWITCH
- Publication number 20140158506
- Publication date Jun 12, 2014
- Korea Advanced Institute of Science and Technology
- Jun Bo YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Nanoelectromechanical Switch With Localized Nanoscale Conductive Pa...
- Publication number 20140090964
- Publication date Apr 3, 2014
- International Business Machines Corporation
- Daniel Grogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY
- Publication number 20140034465
- Publication date Feb 6, 2014
- Omron Corporation
- Takahiro Masuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH
- Publication number 20120305373
- Publication date Dec 6, 2012
- INTAI TECHNOLOGY CORP.
- Richard Loon Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CMOS-MEMS SWITCH STRUCTURE
- Publication number 20120279838
- Publication date Nov 8, 2012
- National Chip Implementation Center National Applied Research Laboratories
- You-Liang LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF MEMS SWITCH DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20120255841
- Publication date Oct 11, 2012
- Kwang-Jae SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS SWITCHES AND FABRICATION METHODS
- Publication number 20120138436
- Publication date Jun 7, 2012
- International Business Machines Corporation
- Jeffrey P. Gambino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Switch Capping and Passivation Method
- Publication number 20110287586
- Publication date Nov 24, 2011
- Analog Devices, Inc.
- Mark Schirmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromachine and Method for Manufacturing the Same
- Publication number 20110281389
- Publication date Nov 17, 2011
- Semiconductor Energy Laboratory Co., Ltd
- Mayumi Mikami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and method for manufacturing a micromecha...
- Publication number 20110220471
- Publication date Sep 15, 2011
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY
- Publication number 20110209970
- Publication date Sep 1, 2011
- Omron Corporation
- Takahiro Masuda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Composition and Manufacturing Method
- Publication number 20110163397
- Publication date Jul 7, 2011
- Andrew Joseph Detor
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
STRUCTURE, ELECTRONIC DEVICE, AND METHOD FOR FABRICATING A STRUCTURE
- Publication number 20110147177
- Publication date Jun 23, 2011
- Kabushiki Kaisha Toshiba
- Tadashi Sakai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCH STRUCTURES
- Publication number 20110128112
- Publication date Jun 2, 2011
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCH STRUCTURE AND METHOD
- Publication number 20110067983
- Publication date Mar 24, 2011
- GENERAL ELECTRIC COMPANY
- Christopher Fred Keimel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT MATERIAL, DEVICE INCLUDING CONTACT MATERIAL, AND METHOD OF...
- Publication number 20110062003
- Publication date Mar 17, 2011
- GENERAL ELECTRIC COMPANY
- Duraiswamy Srinivasan
- G02 - OPTICS
Information Patent Application
Radio-Frequency Microelectromechanical Systems and Method of Manufa...
- Publication number 20100255322
- Publication date Oct 7, 2010
- Koninklijke Philips Electronics N.V.
- Jacob M. J. Den Toonder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Switch Capping and Passivation Method
- Publication number 20100068854
- Publication date Mar 18, 2010
- Analog Devices, Inc.
- Mark Schirmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW WORK FUNCTION ELECTRICAL COMPONENT
- Publication number 20100018843
- Publication date Jan 28, 2010
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micro-Electromechanical Device and Method of Making the Same
- Publication number 20100015744
- Publication date Jan 21, 2010
- CAVENDISH KINETICS LTD.
- Robert Kazinzci
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCH FOR USE IN MICROELECTROMECHANICAL SYSTEMS (MEMS) AND MEMS DE...
- Publication number 20090260960
- Publication date Oct 22, 2009
- FormFactor, Inc.
- John K. Gritters
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT DEVICE AND METHOD FOR PRODUCING THE SAME
- Publication number 20090184728
- Publication date Jul 23, 2009
- Advantest Corporation
- Kiyoto Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachine and Method for Manufacturing the Same
- Publication number 20090145629
- Publication date Jun 11, 2009
- Semiconductor Energy Laboratory Co., Ltd
- Mayumi Mikami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device with gold alloy contacts and method of manuf...
- Publication number 20080250785
- Publication date Oct 16, 2008
- Innovative Micro Technology
- Gregory A. Carlson
- H01 - BASIC ELECTRIC ELEMENTS

Special contact materials used for MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device built on substrate with ruthenium based contact surface...

MEMS device built on substrate with ruthenium based contact surface...

Electromagnetically actuated microelectromechanical switch

Microelectromechanical switch with metamaterial contacts

Electromechanical relay device

Electromechanical switching device with electrodes having 2D layere...

Contact material for MEMS devices

RF MEMS electrodes with limited grain growth

MEMS switch device and method of fabrication

Electromechanical switching device with electrodes having 2D layere...

Electromechanical switching device with electrodes having 2D layere...

Metallic device having mobile element in a cavity of the BEOL of an...

Electromechanical switching device with electrodes having 2D layere...

Mechanical switch

Contact structure for electromechanical switch

Nanoelectromechanical switch with localized nanoscale conductive pa...

Contact structure for electromechanical switch

Method of forming a micro-electromechanical system device

MEMS switches and fabrication methods

Switch structures

MEMS switches and fabrication methods

RF MEMS switch device and manufacturing method thereof

Method for manufacturing micromachine

CMOS-MEMS switch structure

Radio-frequency microelectromechanical systems and method of manufa...

Switch structure and method

Structure, electronic device, and method for fabricating a structure

Switch for use in microelectromechanical systems (MEMS) and MEMS de...

MEMS switch capping and passivation method

Contact material, device including contact material, and method of...

Patents Applicationslast 30 patents

CONTACT SURFACE FOR MEMS DEVICE

ELECTROMAGNETICALLY ACTUATED MICROELECTROMECHANICAL SWITCH

MICROELECTROMECHANICAL SWITCH WITH METAMATERIAL CONTACTS

PRINTED MEMS SWITCH

ELECTROMECHANICAL SWITCHING DEVICE WITH ELECTRODES HAVING 2D LAYERE...

MEMS SWITCHES AND FABRICATION METHODS

MECHANICAL SWITCH

Nanoelectromechanical Switch With Localized Nanoscale Conductive Pa...

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

CONTACT STRUCTURE FOR ELECTROMECHANICAL SWITCH

CMOS-MEMS SWITCH STRUCTURE

RF MEMS SWITCH DEVICE AND MANUFACTURING METHOD THEREOF

MEMS SWITCHES AND FABRICATION METHODS

MEMS Switch Capping and Passivation Method

Micromachine and Method for Manufacturing the Same

Micromechanical component and method for manufacturing a micromecha...

SWITCH AND METHOD FOR MANUFACTURING THE SAME, AND RELAY

Composition and Manufacturing Method

STRUCTURE, ELECTRONIC DEVICE, AND METHOD FOR FABRICATING A STRUCTURE

SWITCH STRUCTURES

SWITCH STRUCTURE AND METHOD

CONTACT MATERIAL, DEVICE INCLUDING CONTACT MATERIAL, AND METHOD OF...

Radio-Frequency Microelectromechanical Systems and Method of Manufa...

MEMS Switch Capping and Passivation Method

LOW WORK FUNCTION ELECTRICAL COMPONENT

Micro-Electromechanical Device and Method of Making the Same

SWITCH FOR USE IN MICROELECTROMECHANICAL SYSTEMS (MEMS) AND MEMS DE...

CONTACT DEVICE AND METHOD FOR PRODUCING THE SAME

Micromachine and Method for Manufacturing the Same

Micromechanical device with gold alloy contacts and method of manuf...