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Special provisions for controlling the atmosphere during processing

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  • CPC
  • H01L51/0029
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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L51/00Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof

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H01L51/0029Special provisions for controlling the atmosphere during processing
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