specially adapted for a substrate stack in the ALD reactor

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CPC
C23C16/45546

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/45546specially adapted for a substrate stack in the ALD reactor

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass flow controller and flow control method therefor
- Patent number 12,111,671
- Issue date Oct 8, 2024
- BEIJING SEVENSTAR FLOW CO., LTD
- Bowen Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming barrier layer in semiconductor structure
- Patent number 12,062,573
- Issue date Aug 13, 2024
- Yangtze Memory Technologies Co., Ltd.
- Peng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device, manufacturing method for semiconductor...
- Patent number 12,062,546
- Issue date Aug 13, 2024
- Kokusai Electric Corporation
- Hidenari Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,054,828
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,037,677
- Issue date Jul 16, 2024
- Kokusai Electric Corporation
- Ryuji Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for manufacturing semicon...
- Patent number 11,976,362
- Issue date May 7, 2024
- Kioxia Corporation
- Takashi Asano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for atomic layer deposition (ALD)
- Patent number 11,970,773
- Issue date Apr 30, 2024
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of operating a deposition or cleaning apparatus
- Patent number 11,970,774
- Issue date Apr 30, 2024
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,967,500
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Arito Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum valve and apparatus for fabricating semiconductor having the...
- Patent number 11,946,138
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Jaeheung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,913,114
- Issue date Feb 27, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas introduction structure and processing apparatus
- Patent number 11,885,024
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,859,285
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for cobalt metalization
- Patent number 11,854,876
- Issue date Dec 26, 2023
- ASM IP Holding B.V.
- Chiyu Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,781,219
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer encapsulation stacks by atomic layer deposition
- Patent number 11,732,356
- Issue date Aug 22, 2023
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,735,412
- Issue date Aug 22, 2023
- Kokusai Electric Corporation
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition or cleaning apparatus with movable structure
- Patent number 11,725,279
- Issue date Aug 15, 2023
- Picosun Oy
- Timo Malinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,674,225
- Issue date Jun 13, 2023
- Tokyo Electron Limted
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,591,694
- Issue date Feb 28, 2023
- Kokusai Electric Corporation
- Hiroaki Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,560,628
- Issue date Jan 24, 2023
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,555,246
- Issue date Jan 17, 2023
- Kokusai Electric Corporation
- Hironori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,542,602
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Yoshitaka Miura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Injector for batch processing and methods of use
- Patent number 11,530,480
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,499,222
- Issue date Nov 15, 2022
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,495,477
- Issue date Nov 8, 2022
- Kokusai Electric Corporation
- Shuhei Saido
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 11,450,524
- Issue date Sep 20, 2022
- Kokusai Electric Corporation
- Kosuke Takagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film-forming device
- Patent number 11,377,731
- Issue date Jul 5, 2022
- Murata Manufacturing Co., Ltd.
- Yasuhiro Chikaishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
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- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT
- Publication number 20240337019
- Publication date Oct 10, 2024
- BENEQ OY
- Olli-Pekka SUHONEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
- Publication number 20240301552
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Harshil Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240287671
- Publication date Aug 29, 2024
- Kokusai Electric Corporation
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH-THROUGHPUT SILICON CARBIDE REACTOR
- Publication number 20240175130
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Hichem M’Saad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240096669
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Fumiki AISO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240068097
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Subir Parui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...
- Publication number 20240026567
- Publication date Jan 25, 2024
- ASM IP HOLDING, B.V.
- Rami Khazaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240018657
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Jae Hyun YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230343580
- Publication date Oct 26, 2023
- Kokusai Electric Corporation
- Atsushi SANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OR CLEANING APPARATUS WITH MOVABLE STRUCTURE AND METHOD...
- Publication number 20230193461
- Publication date Jun 22, 2023
- Picosun Oy
- Timo MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230175124
- Publication date Jun 8, 2023
- Samsung Electronics Co., Ltd.
- Songyi BAEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230119730
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230118483
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230115403
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hiroaki HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...
- Publication number 20230112057
- Publication date Apr 13, 2023
- Kokusai Electric Corporation
- Hironori SHIMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20230091850
- Publication date Mar 23, 2023
- Kokusai Electric Corporation
- Hiroki HATTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20230067660
- Publication date Mar 2, 2023
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...
- Publication number 20220350248
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION (ALD)
- Publication number 20220275512
- Publication date Sep 1, 2022
- BENEQ OY
- Matti MALILA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING BARRIER LAYER IN SEMICONDUCTOR STRUCTURE
- Publication number 20220238372
- Publication date Jul 28, 2022
- YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Peng Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Injector For Batch Processing And Methods Of Use
- Publication number 20220162748
- Publication date May 26, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...
- Publication number 20220081772
- Publication date Mar 17, 2022
- KIOXIA Corporation
- Takashi ASANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INTRODUCTION STRUCTURE AND PROCESSING APPARATUS
- Publication number 20220081775
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20220081773
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Hiroki IRIUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20220042170
- Publication date Feb 10, 2022
- Kokusai Electric Corporation
- Kosuke TAKAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN LAYER DEPOSITION WITH PLASMA PULSING
- Publication number 20210388497
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Cong Trinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...
- Publication number 20210269914
- Publication date Sep 2, 2021
- ASM IP HOLDING B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20210246554
- Publication date Aug 12, 2021
- Kokusai Electric Corporation
- Hironori SHIMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20210198785
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- Kokusai Electric Corporation
- Ryuji YAMAMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

specially adapted for a substrate stack in the ALD reactor

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and method of manufacturing semicond...

Mass flow controller and flow control method therefor

Method for forming barrier layer in semiconductor structure

Substrate processing device, manufacturing method for semiconductor...

Substrate processing method and substrate processing apparatus

Method of manufacturing semiconductor device, substrate processing...

Substrate processing apparatus and method for manufacturing semicon...

Apparatus and method for atomic layer deposition (ALD)

Method of operating a deposition or cleaning apparatus

Method of manufacturing semiconductor device, substrate processing...

Cyclic deposition methods for forming metal-containing material and...

Vacuum valve and apparatus for fabricating semiconductor having the...

Semiconductor manufacturing apparatus

Gas introduction structure and processing apparatus

Processing apparatus and processing method

Systems and methods for cobalt metalization

Processing apparatus and processing method

Multilayer encapsulation stacks by atomic layer deposition

Method of manufacturing semiconductor device, substrate processing...

Deposition or cleaning apparatus with movable structure

Substrate processing apparatus

Method of manufacturing semiconductor device, method of processing...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus and substrate processing method

Injector for batch processing and methods of use

Cyclic deposition methods for forming metal-containing material and...

Substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Film-forming device

Patents Applicationslast 30 patents

REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME

AN ATOMIC LAYER DEPOSITION APPARATUS AND AN ARRANGEMENT

ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

HIGH-THROUGHPUT SILICON CARBIDE REACTOR

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

SUBSTRATE PROCESSING APPARATUS

METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...

SEMICONDUCTOR MANUFACTURING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

DEPOSITION OR CLEANING APPARATUS WITH MOVABLE STRUCTURE AND METHOD...

SUBSTRATE PROCESSING SYSTEM AND METHOD OF MANUFACTURING SEMICONDUCT...

Substrate Processing Method and Substrate Processing Apparatus

Substrate Processing Method and Substrate Processing Apparatus

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, AND...

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR...

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...

APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION (ALD)

METHOD FOR FORMING BARRIER LAYER IN SEMICONDUCTOR STRUCTURE

Injector For Batch Processing And Methods Of Use

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICON...

GAS INTRODUCTION STRUCTURE AND PROCESSING APPARATUS

PROCESSING APPARATUS AND PROCESSING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

THIN LAYER DEPOSITION WITH PLASMA PULSING

CYCLIC DEPOSITION METHODS FOR FORMING METAL-CONTAINING MATERIAL AND...

Substrate Processing Apparatus and Method of Manufacturing Semicond...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...