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Semiconductor manufacturing apparatus
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Patent number 11,913,114
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Issue date Feb 27, 2024
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Samsung Electronics Co., Ltd.
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Jae Hyun Yang
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,674,225
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Issue date Jun 13, 2023
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Tokyo Electron Limted
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Hitoshi Kato
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,495,477
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Issue date Nov 8, 2022
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Kokusai Electric Corporation
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Shuhei Saido
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Film-forming device
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Patent number 11,377,731
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Issue date Jul 5, 2022
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Murata Manufacturing Co., Ltd.
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Yasuhiro Chikaishi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate loading in an ALD reactor
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Patent number 11,280,001
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Issue date Mar 22, 2022
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Picosun Oy
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Vaino Kilpi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus and method
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Patent number 11,230,766
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Issue date Jan 25, 2022
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ASM IP Holding B.V.
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Dieter Pierreux
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Substrate processing apparatus
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Patent number 11,222,796
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Issue date Jan 11, 2022
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Kokusai Electric Corporation
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Shuhei Saido
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H01 - BASIC ELECTRIC ELEMENTS
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