TREA

specially adapted for containing masks, reticles or pellicles

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  • H01L21/67359
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67359specially adapted for containing masks, reticles or pellicles
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20240385511
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Hung LIAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD WITH BACKSIDE STATIC DISSIPATION
    • Publication number 20240312816
    • Publication date Sep 19, 2024
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien Chiu
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
    • Publication number 20240297057
    • Publication date Sep 5, 2024
    • Taiwan Semiconductor Manufacturing company Ltd.
    • PO-CHIEN HUANG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
    • Publication number 20240242991
    • Publication date Jul 18, 2024
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    • Publication number 20240192588
    • Publication date Jun 13, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Tsung SHIH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONTAINER FOR NON-RECTANGULAR RETICLE
    • Publication number 20240128106
    • Publication date Apr 18, 2024
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien CHIU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PERIMETER FRAME FOR SPACING RETICLE PODS
    • Publication number 20240096670
    • Publication date Mar 21, 2024
    • Entegris, Inc.
    • Brian Wiseman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
    • Publication number 20240006210
    • Publication date Jan 4, 2024
    • BROOKS AUTOMATION (GERMANY) GMBH
    • Lutz REBSTOCK
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
    • Publication number 20230314931
    • Publication date Oct 5, 2023
    • ASML Holding N.V.
    • Boris KOGAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CARRIER AND ASSOCIATED METHODS
    • Publication number 20230280664
    • Publication date Sep 7, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yen-Hsun CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20230236498
    • Publication date Jul 27, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Tsung SHIH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
    • Publication number 20230187246
    • Publication date Jun 15, 2023
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORTATION METHOD
    • Publication number 20230122733
    • Publication date Apr 20, 2023
    • HAMAMATSU PHOTONICS K. K.
    • Hiroki OYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORTATION METHOD
    • Publication number 20230118479
    • Publication date Apr 20, 2023
    • HAMAMATSU PHOTONICS K. K.
    • Hiroki OYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20230064383
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Hung LIAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...
    • Publication number 20230065892
    • Publication date Mar 2, 2023
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CARRIER AND ASSOCIATED METHODS
    • Publication number 20230062852
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yen-Hsun CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL
    • Publication number 20230038768
    • Publication date Feb 9, 2023
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING RETENTION THROUGH BASEPLATE
    • Publication number 20230014864
    • Publication date Jan 19, 2023
    • Entegris, Inc.
    • Russ V. RASCHKE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MASK POD AND SEMICONDUCTOR DEVICE
    • Publication number 20230020975
    • Publication date Jan 19, 2023
    • CHANGXIN MEMORY TECHNOLOGIES, INC
    • Chuang SHAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
    • Publication number 20230011873
    • Publication date Jan 12, 2023
    • BROOKS AUTOMATION (GERMANY) GMBH
    • Lutz Rebstock
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    BONDED LAYER ON EXTREME ULTRAVIOLET PLATE
    • Publication number 20220404696
    • Publication date Dec 22, 2022
    • Entegris, Inc.
    • Huaping Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PARTICLE PREVENTION METHOD IN RETICLE POD
    • Publication number 20220382143
    • Publication date Dec 1, 2022
    • Taiwan Semiconductor Manufacturing company Ltd.
    • TZU HAN LIU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20220357651
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Tsung SHIH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METAL PLATING WITH LUBRICANT
    • Publication number 20220357650
    • Publication date Nov 10, 2022
    • Entegris, Inc.
    • Huaping WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RETICLE RETAINING SYSTEM
    • Publication number 20220351998
    • Publication date Nov 3, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • SHU-HUNG LIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
    • Publication number 20220238362
    • Publication date Jul 28, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LID OPENING-AND-CLOSING DEVICE
    • Publication number 20220172974
    • Publication date Jun 2, 2022
    • MURATA MACHINERY, LTD.
    • Ryoma Nunome
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CONTAINER
    • Publication number 20220155676
    • Publication date May 19, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng HSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LID OPENING-AND-CLOSING DEVICE
    • Publication number 20220135326
    • Publication date May 5, 2022
    • MURATA MACHINERY, LTD.
    • Akifumi Sakamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY