specially adapted for containing masks, reticles or pellicles

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CPC
H01L21/67359

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67359specially adapted for containing masks, reticles or pellicles

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,216,399
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage apparatus provided with storage environment detec...
- Patent number 12,198,958
- Issue date Jan 14, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Reticle carrier and associated methods
- Patent number 12,189,311
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 12,189,283
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system, query system and storage method for reticles, and c...
- Patent number 12,191,177
- Issue date Jan 7, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod with window
- Patent number 12,140,860
- Issue date Nov 12, 2024
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pod and semiconductor device
- Patent number 12,125,726
- Issue date Oct 22, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang Shan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod with antistatic capability
- Patent number 12,087,605
- Issue date Sep 10, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Reticle pod having side containment of reticle
- Patent number 12,062,560
- Issue date Aug 13, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for fabricating a semiconductor device and method for fab...
- Patent number 12,009,238
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-detachable valve, substrate container provided with the same,...
- Patent number 12,009,239
- Issue date Jun 11, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,987,445
- Issue date May 21, 2024
- Murata Machinery, Ltd.
- Akifumi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Reticle pod provided with optically identifiable marks and method f...
- Patent number 11,982,937
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,961,752
- Issue date Apr 16, 2024
- Murata Machinery, Ltd.
- Ryoma Nunome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,940,727
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for holding and transporting reticles having a transparen...
- Patent number 11,914,287
- Issue date Feb 27, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod with spoiler structure
- Patent number 11,854,847
- Issue date Dec 26, 2023
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod and wear parts thereof
- Patent number 11,787,621
- Issue date Oct 17, 2023
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 11,703,754
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod for preventing haze contamination and reticle stocker h...
- Patent number 11,693,307
- Issue date Jul 4, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jiyong Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle carrier and associated methods
- Patent number 11,687,011
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment module with a cleaning chamber
- Patent number 11,637,004
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,614,683
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod having side containment of reticle
- Patent number 11,594,437
- Issue date Feb 28, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transportation method
- Patent number 11,592,332
- Issue date Feb 28, 2023
- Hamamatsu Photonics K.K.
- Hiroki Oyama
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Reticle pod conversion plate for interfacing with a tool
- Patent number 11,569,108
- Issue date Jan 31, 2023
- GLOBALFOUNDRIES U.S. Inc.
- Michael Raga-Barone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...
- Publication number 20250053100
- Publication date Feb 13, 2025
- GUDENG PRECISION INDUSTRIAL CO,. LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20240385511
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD WITH BACKSIDE STATIC DISSIPATION
- Publication number 20240312816
- Publication date Sep 19, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
- Publication number 20240297057
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIEN HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
- Publication number 20240242991
- Publication date Jul 18, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240192588
- Publication date Jun 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER FOR NON-RECTANGULAR RETICLE
- Publication number 20240128106
- Publication date Apr 18, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIMETER FRAME FOR SPACING RETICLE PODS
- Publication number 20240096670
- Publication date Mar 21, 2024
- Entegris, Inc.
- Brian Wiseman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
- Publication number 20230314931
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Boris KOGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230280664
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230236498
- Publication date Jul 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
- Publication number 20230187246
- Publication date Jun 15, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORTATION METHOD
- Publication number 20230122733
- Publication date Apr 20, 2023
- HAMAMATSU PHOTONICS K. K.
- Hiroki OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORTATION METHOD
- Publication number 20230118479
- Publication date Apr 20, 2023
- HAMAMATSU PHOTONICS K. K.
- Hiroki OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230064383
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...
- Publication number 20230065892
- Publication date Mar 2, 2023
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230062852
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL
- Publication number 20230038768
- Publication date Feb 9, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD HAVING RETENTION THROUGH BASEPLATE
- Publication number 20230014864
- Publication date Jan 19, 2023
- Entegris, Inc.
- Russ V. RASCHKE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK POD AND SEMICONDUCTOR DEVICE
- Publication number 20230020975
- Publication date Jan 19, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Chuang SHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
- Publication number 20230011873
- Publication date Jan 12, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
BONDED LAYER ON EXTREME ULTRAVIOLET PLATE
- Publication number 20220404696
- Publication date Dec 22, 2022
- Entegris, Inc.
- Huaping Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE PREVENTION METHOD IN RETICLE POD
- Publication number 20220382143
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20220357651
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PLATING WITH LUBRICANT
- Publication number 20220357650
- Publication date Nov 10, 2022
- Entegris, Inc.
- Huaping WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RETICLE RETAINING SYSTEM
- Publication number 20220351998
- Publication date Nov 3, 2022
- GUDENG PRECISION INDUSTRIAL CO., LTD
- SHU-HUNG LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
- Publication number 20220238362
- Publication date Jul 28, 2022
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID OPENING-AND-CLOSING DEVICE
- Publication number 20220172974
- Publication date Jun 2, 2022
- MURATA MACHINERY, LTD.
- Ryoma Nunome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CONTAINER
- Publication number 20220155676
- Publication date May 19, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pei-Cheng HSU
- H01 - BASIC ELECTRIC ELEMENTS

specially adapted for containing masks, reticles or pellicles

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Substrate storage apparatus provided with storage environment detec...

Reticle carrier and associated methods

Particle prevention method in reticle pod

Storage system, query system and storage method for reticles, and c...

Humidity control in semiconductor systems

Reticle pod with window

Mask pod and semiconductor device

Method for containing a reticle in a pod

Reticle pod with antistatic capability

Reticle pod having side containment of reticle

Apparatus for fabricating a semiconductor device and method for fab...

Quick-detachable valve, substrate container provided with the same,...

Lid opening-and-closing device

Quick-release valve module, reticle pod provided with quick-release...

Reticle pod provided with optically identifiable marks and method f...

Lid opening-and-closing device

Reticle enclosure for lithography systems

Container for holding and transporting reticles having a transparen...

Reticle pod with spoiler structure

Reticle transportation container

Reticle pod and wear parts thereof

Particle prevention method in reticle pod

Reticle pod for preventing haze contamination and reticle stocker h...

Reticle carrier and associated methods

Alignment module with a cleaning chamber

Reticle enclosure for lithography systems

Reticle pod having side containment of reticle

Transportation method

Reticle pod conversion plate for interfacing with a tool

Patents Applicationslast 30 patents

RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

RETICLE POD WITH BACKSIDE STATIC DISSIPATION

APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...

RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

CONTAINER FOR NON-RECTANGULAR RETICLE

PERIMETER FRAME FOR SPACING RETICLE PODS

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE

RETICLE CARRIER AND ASSOCIATED METHODS

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

TRANSPORTATION METHOD

TRANSPORTATION METHOD

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...

RETICLE CARRIER AND ASSOCIATED METHODS

RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL

RETICLE POD HAVING RETENTION THROUGH BASEPLATE

MASK POD AND SEMICONDUCTOR DEVICE

EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME

BONDED LAYER ON EXTREME ULTRAVIOLET PLATE

PARTICLE PREVENTION METHOD IN RETICLE POD

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

METAL PLATING WITH LUBRICANT

RETICLE RETAINING SYSTEM

RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM

LID OPENING-AND-CLOSING DEVICE

RETICLE CONTAINER