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specially adapted for containing masks, reticles or pellicles

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/67359specially adapted for containing masks, reticles or pellicles
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Lid opening-and-closing device
    • Patent number 11,961,752
    • Issue date Apr 16, 2024
    • Murata Machinery, Ltd.
    • Ryoma Nunome
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle enclosure for lithography systems
    • Patent number 11,940,727
    • Issue date Mar 26, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Chih-Tsung Shih
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Container for holding and transporting reticles having a transparen...
    • Patent number 11,914,287
    • Issue date Feb 27, 2024
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod with spoiler structure
    • Patent number 11,854,847
    • Issue date Dec 26, 2023
    • Gudeng Precision Industrial Co., Ltd.
    • Chia-Ho Chuang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle transportation container
    • Patent number 11,837,486
    • Issue date Dec 5, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Yu-Ching Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod and wear parts thereof
    • Patent number 11,787,621
    • Issue date Oct 17, 2023
    • Gudeng Precision Industrial Co., Ltd.
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Particle prevention method in reticle pod
    • Patent number 11,703,754
    • Issue date Jul 18, 2023
    • Taiwan Semiconductor Manufacturing Company Ltd.
    • Tzu Han Liu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod for preventing haze contamination and reticle stocker h...
    • Patent number 11,693,307
    • Issue date Jul 4, 2023
    • XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
    • Jiyong Yoo
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Reticle carrier and associated methods
    • Patent number 11,687,011
    • Issue date Jun 27, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Yen-Hsun Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Alignment module with a cleaning chamber
    • Patent number 11,637,004
    • Issue date Apr 25, 2023
    • Applied Materials, Inc.
    • Alexander N. Lerner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reticle enclosure for lithography systems
    • Patent number 11,614,683
    • Issue date Mar 28, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd
    • Chih-Tsung Shih
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod having side containment of reticle
    • Patent number 11,594,437
    • Issue date Feb 28, 2023
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transportation method
    • Patent number 11,592,332
    • Issue date Feb 28, 2023
    • Hamamatsu Photonics K.K.
    • Hiroki Oyama
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Reticle pod conversion plate for interfacing with a tool
    • Patent number 11,569,108
    • Issue date Jan 31, 2023
    • GLOBALFOUNDRIES U.S. Inc.
    • Michael Raga-Barone
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Transportation method
    • Patent number 11,555,740
    • Issue date Jan 17, 2023
    • Hamamatsu Photonics K.K.
    • Hiroki Oyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    System and method for aligning a mask with a substrate
    • Patent number 11,538,706
    • Issue date Dec 27, 2022
    • Applied Materials, Inc.
    • Alexander N. Lerner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sealed reticle storage device with soft contact
    • Patent number 11,511,920
    • Issue date Nov 29, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Chia-Ho Chuang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle retaining system
    • Patent number 11,508,592
    • Issue date Nov 22, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Shu-Hung Lin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Article storage facility
    • Patent number 11,460,766
    • Issue date Oct 4, 2022
    • Taiwan Daifuku Co., Ltd.
    • Isamu Sasaki
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle retaining system
    • Patent number 11,442,370
    • Issue date Sep 13, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Chia-Ho Chuang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod and gripping unit thereof
    • Patent number 11,430,682
    • Issue date Aug 30, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Yung-Chin Pan
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle enclosure for lithography systems
    • Patent number 11,415,879
    • Issue date Aug 16, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Chih-Tsung Shih
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Grant

    Reticle container
    • Patent number 11,333,967
    • Issue date May 17, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle pod having positioning member
    • Patent number 11,314,175
    • Issue date Apr 26, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Chia-Ho Chuang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    EUV reticle pod
    • Patent number 11,249,392
    • Issue date Feb 15, 2022
    • Gudeng Precision Industrial Co., Ltd.
    • Hsin-Min Hsueh
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle container
    • Patent number 11,237,477
    • Issue date Feb 1, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Pei-Cheng Hsu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reticle compartment and diffusor plate
    • Patent number 11,171,024
    • Issue date Nov 9, 2021
    • Brooks Automation GmbH
    • Lutz Rebstock
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor cleaner systems and methods
    • Patent number 11,152,203
    • Issue date Oct 19, 2021
    • Brooks Automation (Germany) GmbH
    • Lutz Rebstock
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Cleaning method and cleaning system for reticle pod
    • Patent number 11,143,974
    • Issue date Oct 12, 2021
    • Samsung Electronics Co., Ltd.
    • Yongseung Moon
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Non-sealed reticle storage device
    • Patent number 11,104,496
    • Issue date Aug 31, 2021
    • Gudeng Precision Industrial Co., Ltd.
    • Chia-Ho Chuang
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

  • Information Patent Application

    CONTAINER FOR NON-RECTANGULAR RETICLE
    • Publication number 20240128106
    • Publication date Apr 18, 2024
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien CHIU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PERIMETER FRAME FOR SPACING RETICLE PODS
    • Publication number 20240096670
    • Publication date Mar 21, 2024
    • Entegris, Inc.
    • Brian Wiseman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
    • Publication number 20240006210
    • Publication date Jan 4, 2024
    • BROOKS AUTOMATION (GERMANY) GMBH
    • Lutz REBSTOCK
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
    • Publication number 20230314931
    • Publication date Oct 5, 2023
    • ASML Holding N.V.
    • Boris KOGAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CARRIER AND ASSOCIATED METHODS
    • Publication number 20230280664
    • Publication date Sep 7, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yen-Hsun CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20230236498
    • Publication date Jul 27, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Tsung SHIH
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
    • Publication number 20230187246
    • Publication date Jun 15, 2023
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORTATION METHOD
    • Publication number 20230118479
    • Publication date Apr 20, 2023
    • HAMAMATSU PHOTONICS K. K.
    • Hiroki OYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TRANSPORTATION METHOD
    • Publication number 20230122733
    • Publication date Apr 20, 2023
    • HAMAMATSU PHOTONICS K. K.
    • Hiroki OYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20230064383
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chi-Hung LIAO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...
    • Publication number 20230065892
    • Publication date Mar 2, 2023
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CARRIER AND ASSOCIATED METHODS
    • Publication number 20230062852
    • Publication date Mar 2, 2023
    • Taiwan Semiconductor Manufacturing Company Limited
    • Yen-Hsun CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING RETENTION THROUGH RETICLE COMPARTMENT WALL
    • Publication number 20230038768
    • Publication date Feb 9, 2023
    • Entegris, Inc.
    • Russ V. Raschke
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING RETENTION THROUGH BASEPLATE
    • Publication number 20230014864
    • Publication date Jan 19, 2023
    • Entegris, Inc.
    • Russ V. RASCHKE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MASK POD AND SEMICONDUCTOR DEVICE
    • Publication number 20230020975
    • Publication date Jan 19, 2023
    • CHANGXIN MEMORY TECHNOLOGIES, INC
    • Chuang SHAN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EUV RETICLE STOCKER AND METHOD OF OPERATING THE SAME
    • Publication number 20230011873
    • Publication date Jan 12, 2023
    • BROOKS AUTOMATION (GERMANY) GMBH
    • Lutz Rebstock
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    BONDED LAYER ON EXTREME ULTRAVIOLET PLATE
    • Publication number 20220404696
    • Publication date Dec 22, 2022
    • Entegris, Inc.
    • Huaping Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PARTICLE PREVENTION METHOD IN RETICLE POD
    • Publication number 20220382143
    • Publication date Dec 1, 2022
    • Taiwan Semiconductor Manufacturing company Ltd.
    • TZU HAN LIU
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
    • Publication number 20220357651
    • Publication date Nov 10, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chih-Tsung SHIH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METAL PLATING WITH LUBRICANT
    • Publication number 20220357650
    • Publication date Nov 10, 2022
    • Entegris, Inc.
    • Huaping WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RETICLE RETAINING SYSTEM
    • Publication number 20220351998
    • Publication date Nov 3, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD
    • SHU-HUNG LIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
    • Publication number 20220238362
    • Publication date Jul 28, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LID OPENING-AND-CLOSING DEVICE
    • Publication number 20220172974
    • Publication date Jun 2, 2022
    • MURATA MACHINERY, LTD.
    • Ryoma Nunome
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE CONTAINER
    • Publication number 20220155676
    • Publication date May 19, 2022
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Pei-Cheng HSU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LID OPENING-AND-CLOSING DEVICE
    • Publication number 20220135326
    • Publication date May 5, 2022
    • MURATA MACHINERY, LTD.
    • Akifumi Sakamoto
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    RETICLE POD WITH ANTISTATIC CAPABILITY
    • Publication number 20220102177
    • Publication date Mar 31, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • Ming-Chien Chiu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING ANTI-COLLISION GAP STRUCTURE
    • Publication number 20220102178
    • Publication date Mar 31, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • MING-CHIEN CHIU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD CLEANSING APPARATUS
    • Publication number 20220062955
    • Publication date Mar 3, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • CHIA-HO CHUANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STORAGE SYSTEM, QUERY SYSTEM AND STORAGE METHOD FOR RETICLES, AND C...
    • Publication number 20220044950
    • Publication date Feb 10, 2022
    • CHANGXIN MEMORY TECHNOLOGIES, INC
    • Xueyu LIANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    RETICLE POD HAVING POSITIONING MEMBER
    • Publication number 20220026818
    • Publication date Jan 27, 2022
    • GUDENG PRECISION INDUSTRIAL CO., LTD.
    • CHIA-HO CHUANG
    • H01 - BASIC ELECTRIC ELEMENTS