specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industry

CPC
C23C16/45529

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45529specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,961,733
- Issue date Apr 16, 2024
- Kokusai Electric Corporation
- Tomiyuki Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
- Patent number 11,942,365
- Issue date Mar 26, 2024
- Eugenus, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,923,191
- Issue date Mar 5, 2024
- Kokusai Electric Corporation
- Shoma Miyata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,914
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,915,914
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Sena Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,918
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,728,162
- Issue date Aug 15, 2023
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,713,504
- Issue date Aug 1, 2023
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-conformal high selectivity film for etch critical dimension con...
- Patent number 11,702,751
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Bo Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing flexible organic-inorganic laminates
- Patent number 11,685,995
- Issue date Jun 27, 2023
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 11,680,915
- Issue date Jun 20, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen resistant coatings and methods of making and using thereof
- Patent number 11,639,547
- Issue date May 2, 2023
- Applied Materials, Inc.
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing organic-inorganic laminates
- Patent number 11,639,549
- Issue date May 2, 2023
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,631,580
- Issue date Apr 18, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of forming tungsten film and controller
- Patent number 11,629,404
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition on optical structures
- Patent number 11,629,402
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Jinrui Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of protecting metallic components against corrosion using c...
- Patent number 11,603,767
- Issue date Mar 14, 2023
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molten Al—Si alloy corrosion resistant composite coating and prepar...
- Patent number 11,572,627
- Issue date Feb 7, 2023
- CHANGSHA UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Wei Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing coatings on aerospace components
- Patent number 11,560,804
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Yuriy Melnik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating system having synthetic oxide layers
- Patent number 11,555,241
- Issue date Jan 17, 2023
- Raytheon Technologies Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of charge trapping layers
- Patent number 11,532,757
- Issue date Dec 20, 2022
- ASM IP Holding B.V.
- Pauline Calka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,519,068
- Issue date Dec 6, 2022
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,417,521
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,390,943
- Issue date Jul 19, 2022
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing coatings on aerospace components
- Patent number 11,384,648
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Yuriy Melnik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 11,346,795
- Issue date May 31, 2022
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Thomas Larson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of electrode materials for energy storage devices
- Patent number 11,342,556
- Issue date May 24, 2022
- Hunt Energy Enterprises, L.L.C.
- Jin-Myoung Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 11,326,253
- Issue date May 10, 2022
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing flexible organic-inorganic laminates
- Patent number 11,286,561
- Issue date Mar 29, 2022
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer plasma resistant coating by atomic layer deposition
- Patent number 11,251,023
- Issue date Feb 15, 2022
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240124976
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kazumi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240043992
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20240044825
- Publication date Feb 8, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Charles LARSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240026532
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- YeaHyun Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...
- Publication number 20240026567
- Publication date Jan 25, 2024
- ASM IP HOLDING, B.V.
- Rami Khazaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUC...
- Publication number 20240018650
- Publication date Jan 18, 2024
- Houxun Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AG- AND/OR CU- CONTAINING HARD COATINGS WITH ANTIBACTERIAL, ANTIVIR...
- Publication number 20240003001
- Publication date Jan 4, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Marie-Hélène LINDIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER APPARATUS AND METHOD FOR ALD
- Publication number 20230416912
- Publication date Dec 28, 2023
- Levitech B.V.
- Vladimir KUZNETSOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION USING NOVEL OXYGEN-CONTAINING PRECURSORS
- Publication number 20230416915
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Geetika Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DOPING METHOD AND AN INTERMEDIATE SEMICONDUCTOR DEVICE
- Publication number 20230411153
- Publication date Dec 21, 2023
- BENEQ OY
- Katja VÄYRYNEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SiOCN LAYER
- Publication number 20230407465
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230402279
- Publication date Dec 14, 2023
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...
- Publication number 20230374659
- Publication date Nov 23, 2023
- Forge Nano, Inc.
- Daniel Higgs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD
- Publication number 20230361163
- Publication date Nov 9, 2023
- Tokyo Electron Limited
- Koji AKIYAMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RESISTIVE COATING FOR A CAPILLARY
- Publication number 20230313366
- Publication date Oct 5, 2023
- Agilent Technologies, Inc.
- Elizabeth CARR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND APPARATUS
- Publication number 20230295801
- Publication date Sep 21, 2023
- KIOXIA Corporation
- Shigeru KINOSHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230295797
- Publication date Sep 21, 2023
- Tokyo Electron Limited
- Nobuo MATSUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HALOGEN RESISTANT COATINGS AND METHODS OF MAKING AND USING THEREOF
- Publication number 20230279541
- Publication date Sep 7, 2023
- Applied Materials, Inc.
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF PROTECTING METALLIC COMPONENTS AGAINST CORROSION USING C...
- Publication number 20230184119
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Thomas KNISLEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR HARD MASK DEPOSITION
- Publication number 20230178371
- Publication date Jun 8, 2023
- ASM IP HOLDING, B.V.
- Shaoren Deng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING SYSTEM HAVING SYNTHETIC OXIDE LAYERS
- Publication number 20230151483
- Publication date May 18, 2023
- Raytheon Technologies Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...
- Publication number 20230141275
- Publication date May 11, 2023
- Honda Motor Co., Ltd.
- Avetik R. HARUTYUNYAN
- B82 - NANO-TECHNOLOGY
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20230137865
- Publication date May 4, 2023
- TOKYO ELECTRON LIMITED
- Takayuki KARAKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS
- Publication number 20230139917
- Publication date May 4, 2023
- ASM IP HOLDING, B.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...
- Publication number 20230104924
- Publication date Apr 6, 2023
- Forge Nano, Inc.
- Daniel Higgs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20230021209
- Publication date Jan 19, 2023
- NOVA MEASURING INSTRUMENTS INC.
- Charles LARSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Power Semiconductor Device and Method of Producing a Power Semicond...
- Publication number 20220415820
- Publication date Dec 29, 2022
- INFINEON TECHNOLOGIES AG
- Christian Hammer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20220396874
- Publication date Dec 15, 2022
- Tokyo Electron Limited
- Tatsuhiko TANIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...
- Publication number 20220350248
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Zecheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...
- Publication number 20220316056
- Publication date Oct 6, 2022
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing semiconductor device, substrate processing...

Multi-region diffusion barrier containing titanium, silicon and nit...

Method of manufacturing semiconductor device, method of processing...

Phosphor particle coating

Film forming method and film forming apparatus

Phosphor particle coating

Method of manufacturing semiconductor device, substrate processing...

Chemical resistant multi-layer coatings applied by atomic layer dep...

Non-conformal high selectivity film for etch critical dimension con...

Process for producing flexible organic-inorganic laminates

XPS metrology for process control in selective deposition

Halogen resistant coatings and methods of making and using thereof

Process for producing organic-inorganic laminates

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Method of forming tungsten film and controller

Atomic layer deposition on optical structures

Methods of protecting metallic components against corrosion using c...

Molten Al—Si alloy corrosion resistant composite coating and prepar...

Methods for depositing coatings on aerospace components

Coating system having synthetic oxide layers

Deposition of charge trapping layers

Moisture governed growth method of atomic layer ribbons and nanorib...

Film forming method and film forming apparatus

Chemical resistant multi-layer coatings applied by atomic layer dep...

Methods for depositing coatings on aerospace components

XPS metrology for process control in selective deposition

Coating of electrode materials for energy storage devices

Atomic layer deposition of protective coatings for semiconductor pr...

Process for producing flexible organic-inorganic laminates

Multi-layer plasma resistant coating by atomic layer deposition

Patents Applicationslast 30 patents

FILM FORMING METHOD AND FILM FORMING APPARATUS

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

SUBSTRATE PROCESSING METHOD

METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...

METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUC...

AG- AND/OR CU- CONTAINING HARD COATINGS WITH ANTIBACTERIAL, ANTIVIR...

MULTI-CHAMBER APPARATUS AND METHOD FOR ALD

ATOMIC LAYER DEPOSITION USING NOVEL OXYGEN-CONTAINING PRECURSORS

SEMICONDUCTOR DOPING METHOD AND AN INTERMEDIATE SEMICONDUCTOR DEVICE

METHOD OF FORMING SiOCN LAYER

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...

FILM FORMATION METHOD

RESISTIVE COATING FOR A CAPILLARY

FILM FORMING METHOD AND APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

HALOGEN RESISTANT COATINGS AND METHODS OF MAKING AND USING THEREOF

METHODS OF PROTECTING METALLIC COMPONENTS AGAINST CORROSION USING C...

METHOD AND APPARATUS FOR HARD MASK DEPOSITION

COATING SYSTEM HAVING SYNTHETIC OXIDE LAYERS

MOISTURE GOVERNED GROWTH METHOD OF ATOMIC LAYER RIBBONS AND NANORIB...

FILM FORMING METHOD AND FILM FORMING APPARATUS

SELECTIVE DEPOSITION USING THERMAL AND PLASMA-ENHANCED PROCESS

Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

Power Semiconductor Device and Method of Producing a Power Semicond...

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

METHOD OF FORMING AN ADHESION LAYER ON A PHOTORESIST UNDERLAYER AND...

CHEMICAL RESISTANT MULTI-LAYER COATINGS APPLIED BY ATOMIC LAYER DEP...