specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industry

CPC
C23C16/45529

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45529specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industries

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition of protective coatings for semiconductor pr...
- Patent number 12,104,246
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- David Fenwick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase photoresists deposition
- Patent number 12,084,764
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Lakmal Charidu Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer ALD coating for critical components in process chamber
- Patent number 12,049,697
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming method and film-forming apparatus
- Patent number 12,018,370
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Tatsuhiko Tanimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory device and manufacturing method therefor
- Patent number 12,010,929
- Issue date Jun 11, 2024
- Industry-University Cooperation Foundation Hanyang University Erica Campus
- Tae Joo Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer plasma resistant coating by atomic layer deposition
- Patent number 12,002,657
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,981,996
- Issue date May 14, 2024
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus and method for atomic layer deposition (ALD)
- Patent number 11,970,773
- Issue date Apr 30, 2024
- Beneq Oy
- Matti Malila
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,961,733
- Issue date Apr 16, 2024
- Kokusai Electric Corporation
- Tomiyuki Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
- Patent number 11,942,365
- Issue date Mar 26, 2024
- Eugenus, Inc.
- Vinayak Veer Vats
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,923,191
- Issue date Mar 5, 2024
- Kokusai Electric Corporation
- Shoma Miyata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,914
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,915,914
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Sena Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,918
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,728,162
- Issue date Aug 15, 2023
- Kokusai Electric Corporation
- Tsukasa Kamakura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical resistant multi-layer coatings applied by atomic layer dep...
- Patent number 11,713,504
- Issue date Aug 1, 2023
- Entegris, Inc.
- I-Kuan Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-conformal high selectivity film for etch critical dimension con...
- Patent number 11,702,751
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Bo Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing flexible organic-inorganic laminates
- Patent number 11,685,995
- Issue date Jun 27, 2023
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
XPS metrology for process control in selective deposition
- Patent number 11,680,915
- Issue date Jun 20, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Charles Larson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Halogen resistant coatings and methods of making and using thereof
- Patent number 11,639,547
- Issue date May 2, 2023
- Applied Materials, Inc.
- Prerna Goradia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for producing organic-inorganic laminates
- Patent number 11,639,549
- Issue date May 2, 2023
- BASF Coatings GmbH
- Maraike Ahlf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Formulation for deposition of silicon doped hafnium oxide as ferroe...
- Patent number 11,631,580
- Issue date Apr 18, 2023
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of forming tungsten film and controller
- Patent number 11,629,404
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Kensaku Narushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition on optical structures
- Patent number 11,629,402
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Jinrui Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of protecting metallic components against corrosion using c...
- Patent number 11,603,767
- Issue date Mar 14, 2023
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molten Al—Si alloy corrosion resistant composite coating and prepar...
- Patent number 11,572,627
- Issue date Feb 7, 2023
- CHANGSHA UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Wei Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing coatings on aerospace components
- Patent number 11,560,804
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Yuriy Melnik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating system having synthetic oxide layers
- Patent number 11,555,241
- Issue date Jan 17, 2023
- Raytheon Technologies Corporation
- Paul Sheedy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of charge trapping layers
- Patent number 11,532,757
- Issue date Dec 20, 2022
- ASM IP Holding B.V.
- Pauline Calka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Moisture governed growth method of atomic layer ribbons and nanorib...
- Patent number 11,519,068
- Issue date Dec 6, 2022
- Honda Motor Co., Ltd.
- Avetik R. Harutyunyan
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240384401
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME
- Publication number 20240343917
- Publication date Oct 17, 2024
- Raytheon Technologies Corporation
- James T. Beals
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...
- Publication number 20240322186
- Publication date Sep 26, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240304436
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Miyako KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS
- Publication number 20240301552
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Harshil Kashyap
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240282571
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Lin Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
- Publication number 20240263309
- Publication date Aug 8, 2024
- SAMSUNG DISPLAY CO., LTD.
- WOO-SEOK JEON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOLAMINATE COATING, RELATED COATED ITEMS AND USES, METHOD FOR IMP...
- Publication number 20240261467
- Publication date Aug 8, 2024
- Picosun Oy
- Riina RITASALO
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PLASMA RESISTANT COATING, RELATED PRODUCTION METHOD AND USES
- Publication number 20240240310
- Publication date Jul 18, 2024
- Picosun Oy
- Jesse KALLIOMÄKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF PRODUCING COMPOSITE VEHICLE BRAKING COMPONENTS INCLUDING...
- Publication number 20240218909
- Publication date Jul 4, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Zhongyi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL OXIDE THIN FILM PRECURSOR, METHOD OF FABRICATING METAL OXIDE...
- Publication number 20240199670
- Publication date Jun 20, 2024
- University-Industry Cooperation Group of Kyung Hee University
- Jongwook PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Publication number 20240194769
- Publication date Jun 13, 2024
- Fujian Jinhua Integrated Circuit Co., Ltd.
- Chia-Wei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20240186137
- Publication date Jun 6, 2024
- Kokusai Electric Corporation
- Shoma Miyata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND USE RELATED TO A FILM AND A FILM
- Publication number 20240158914
- Publication date May 16, 2024
- BENEQ OY
- Ville MALINEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
- Publication number 20240153758
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Tomiyuki SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION SYSTEM
- Publication number 20240150895
- Publication date May 9, 2024
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...
- Publication number 20240141503
- Publication date May 2, 2024
- Quantinuum LLC
- Christopher Todd Ertsgaard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240124976
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kazumi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240043992
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION
- Publication number 20240044825
- Publication date Feb 8, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Charles LARSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240026532
- Publication date Jan 25, 2024
- ASM IP HOLDING B.V.
- YeaHyun Gu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...
- Publication number 20240026567
- Publication date Jan 25, 2024
- ASM IP HOLDING, B.V.
- Rami Khazaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUC...
- Publication number 20240018650
- Publication date Jan 18, 2024
- Houxun Miao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AG- AND/OR CU- CONTAINING HARD COATINGS WITH ANTIBACTERIAL, ANTIVIR...
- Publication number 20240003001
- Publication date Jan 4, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Marie-Hélène LINDIC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER APPARATUS AND METHOD FOR ALD
- Publication number 20230416912
- Publication date Dec 28, 2023
- Levitech B.V.
- Vladimir KUZNETSOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION USING NOVEL OXYGEN-CONTAINING PRECURSORS
- Publication number 20230416915
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Geetika Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DOPING METHOD AND AN INTERMEDIATE SEMICONDUCTOR DEVICE
- Publication number 20230411153
- Publication date Dec 21, 2023
- BENEQ OY
- Katja VÄYRYNEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SiOCN LAYER
- Publication number 20230407465
- Publication date Dec 21, 2023
- ASM IP HOLDING B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230402279
- Publication date Dec 14, 2023
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...
- Publication number 20230374659
- Publication date Nov 23, 2023
- Forge Nano, Inc.
- Daniel Higgs
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

specially adapted for making a layer stack of alternating different compositions or gradient compositions

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic layer deposition of protective coatings for semiconductor pr...

Vapor phase photoresists deposition

Multilayer ALD coating for critical components in process chamber

Film-forming method and film-forming apparatus

Memory device and manufacturing method therefor

Multi-layer plasma resistant coating by atomic layer deposition

Moisture governed growth method of atomic layer ribbons and nanorib...

Apparatus and method for atomic layer deposition (ALD)

Method of manufacturing semiconductor device, substrate processing...

Multi-region diffusion barrier containing titanium, silicon and nit...

Method of manufacturing semiconductor device, method of processing...

Phosphor particle coating

Film forming method and film forming apparatus

Phosphor particle coating

Method of manufacturing semiconductor device, substrate processing...

Chemical resistant multi-layer coatings applied by atomic layer dep...

Non-conformal high selectivity film for etch critical dimension con...

Process for producing flexible organic-inorganic laminates

XPS metrology for process control in selective deposition

Halogen resistant coatings and methods of making and using thereof

Process for producing organic-inorganic laminates

Formulation for deposition of silicon doped hafnium oxide as ferroe...

Method of forming tungsten film and controller

Atomic layer deposition on optical structures

Methods of protecting metallic components against corrosion using c...

Molten Al—Si alloy corrosion resistant composite coating and prepar...

Methods for depositing coatings on aerospace components

Coating system having synthetic oxide layers

Deposition of charge trapping layers

Moisture governed growth method of atomic layer ribbons and nanorib...

Patents Applicationslast 30 patents

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME

ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

ULTRA HIGH-K HAFNIUM OXIDE AND HAFNIUM ZIRCONIUM OXIDE FILMS

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

ATOMIC LAYER DEPOSITION APPARATUS

NANOLAMINATE COATING, RELATED COATED ITEMS AND USES, METHOD FOR IMP...

PLASMA RESISTANT COATING, RELATED PRODUCTION METHOD AND USES

METHODS OF PRODUCING COMPOSITE VEHICLE BRAKING COMPONENTS INCLUDING...

METAL OXIDE THIN FILM PRECURSOR, METHOD OF FABRICATING METAL OXIDE...

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

METHOD AND USE RELATED TO A FILM AND A FILM

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...

FILM FORMATION METHOD AND FILM FORMATION SYSTEM

METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...

FILM FORMING METHOD AND FILM FORMING APPARATUS

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

XPS METROLOGY FOR PROCESS CONTROL IN SELECTIVE DEPOSITION

SUBSTRATE PROCESSING METHOD

METHOD AND A SUBSTRATE PROCESSING APPARATUS FOR FORMING AN EPITAXIA...

METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUC...

AG- AND/OR CU- CONTAINING HARD COATINGS WITH ANTIBACTERIAL, ANTIVIR...

MULTI-CHAMBER APPARATUS AND METHOD FOR ALD

ATOMIC LAYER DEPOSITION USING NOVEL OXYGEN-CONTAINING PRECURSORS

SEMICONDUCTOR DOPING METHOD AND AN INTERMEDIATE SEMICONDUCTOR DEVICE

METHOD OF FORMING SiOCN LAYER

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Atomic Layer Deposition (ALD) for Multi-Layer Ceramic Capacitors (M...