Spectrometric ellipsometry

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CPC
G01N2021/213

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GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

Current Industry

G01N2021/213Spectrometric ellipsometry

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Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 12,138,742
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Prayudi Lianto
- B24 - GRINDING POLISHING
Information Patent Grant
Cooperative polarization skylight background radiation measurement...
- Patent number 12,135,277
- Issue date Nov 5, 2024
- Hefei Institutes of Physical Science, CAS
- Congming Dai
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for generating model for spectroscopic ellipsometry const...
- Patent number 12,105,028
- Issue date Oct 1, 2024
- AUROS TECHNOLOGY, INC.
- Sang Jun Kim
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology models for in-line film thickness measurements
- Patent number 12,062,583
- Issue date Aug 13, 2024
- Applied Materials Israel Ltd.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Film thickness measurement method, film thickness measurement devic...
- Patent number 12,018,928
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Kazunaga Ono
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology tool equipped with modulated illumination sources
- Patent number 11,913,874
- Issue date Feb 27, 2024
- KLA Corporation
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring film thickness of semiconductor device
- Patent number 11,867,497
- Issue date Jan 9, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yongshang Sheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring characteristic of thin film
- Patent number 11,835,447
- Issue date Dec 5, 2023
- AUROS TECHNOLOGY, INC.
- Tae Dong Kang
- G01 - MEASURING TESTING
Information Patent Grant
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
- Patent number 11,740,176
- Issue date Aug 29, 2023
- J. A. Woollam Co., Inc.
- Stefan Schoeche
- G01 - MEASURING TESTING
Information Patent Grant
Techniques for characterizing films on optically clear substrates u...
- Patent number 11,714,045
- Issue date Aug 1, 2023
- Meta Platforms Technologies, LLC
- Gangadhara Raja Muthinti
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for semiconductor chip hole geometry metrology
- Patent number 11,674,909
- Issue date Jun 13, 2023
- Yangtze Memory Technologies Co., Ltd.
- Le Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spectroscopic ellipsometry system for thin film imaging
- Patent number 11,668,645
- Issue date Jun 6, 2023
- Bruker Nano, Inc.
- Emad Zawaideh
- G02 - OPTICS
Information Patent Grant
Inspection and metrology using broadband infrared radiation
- Patent number 11,662,646
- Issue date May 30, 2023
- KLA Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film spectroellipsometric imaging
- Patent number 11,644,412
- Issue date May 9, 2023
- Aizhong Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring dielectric tensor of material
- Patent number 11,644,413
- Issue date May 9, 2023
- Huazhong University of Science & Technology
- Honggang Gu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Conical pocket laser-sustained plasma lamp
- Patent number 11,637,008
- Issue date Apr 25, 2023
- KLA Corporation
- Sumeet Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for evaluating structure used for nuclide transmutation reac...
- Patent number 11,630,055
- Issue date Apr 18, 2023
- Mitsubishi Heavy Industries, Ltd.
- Shigenori Tsuruga
- G01 - MEASURING TESTING
Information Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
- Patent number 11,624,699
- Issue date Apr 11, 2023
- Samsung Electronics Co., Ltd.
- Jaehwang Jung
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining optical constant of material,...
- Patent number 11,619,578
- Issue date Apr 4, 2023
- Nankai University
- Meng-Xin Ren
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical property evaluation apparatus and optical property evaluati...
- Patent number 11,585,696
- Issue date Feb 21, 2023
- Hamamatsu Photonics K.K.
- Yoshiro Nomoto
- G01 - MEASURING TESTING
Information Patent Grant
Automated accuracy-oriented model optimization system for critical...
- Patent number 11,537,837
- Issue date Dec 27, 2022
- KLA-Tencor Corporation
- Yuerui Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measuring apparatus
- Patent number 11,506,536
- Issue date Nov 22, 2022
- Kioxia Corporation
- Taro Shiokawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Normal incidence ellipsometer and method for measuring optical prop...
- Patent number 11,493,433
- Issue date Nov 8, 2022
- Korea Research Institute of Standards and Science
- Yong Jai Cho
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection device and method of manufacturing semiconductor d...
- Patent number 11,428,645
- Issue date Aug 30, 2022
- Samsung Electronics Co., Ltd.
- Kihak Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Snapshot ellipsometer
- Patent number 11,391,666
- Issue date Jul 19, 2022
- J. A. Woollam Co., Inc.
- Griffin A. P. Hovorka
- G01 - MEASURING TESTING
Information Patent Grant
Beamsplitter based ellipsometer focusing system
- Patent number 11,385,167
- Issue date Jul 12, 2022
- Onto Innovation Inc.
- John F. Lesoine
- G01 - MEASURING TESTING
Information Patent Grant
EUV spectroscopic polarimeter
- Patent number 11,313,727
- Issue date Apr 26, 2022
- National Tsing Hua University
- Ming-Chang Chen
- G01 - MEASURING TESTING
Information Patent Grant
Variable aperture mask
- Patent number 11,268,901
- Issue date Mar 8, 2022
- KLA Corporation
- Barry Blasenheim
- G01 - MEASURING TESTING
Information Patent Grant
System and method for use in high spatial resolution ellipsometry
- Patent number 11,262,293
- Issue date Mar 1, 2022
- Ronen Rapaport
- G01 - MEASURING TESTING
Information Patent Grant
Multi-environment polarized infrared reflectometer for semiconducto...
- Patent number 11,231,362
- Issue date Jan 25, 2022
- KLA Corporation
- Guorong V. Zhuang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL METROLOGY WITH INFLUENCE MAP OF UNKNOWN SECTION
- Publication number 20250012737
- Publication date Jan 9, 2025
- ONTO INNOVATION INC.
- Yiliang LIU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...
- Publication number 20240369473
- Publication date Nov 7, 2024
- Seoul National University R&DB Foundation
- Heui Jae PAHK
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING AND RECONSTRUCTING A SHAPE AND A MATERIAL PROPERTY OF A...
- Publication number 20240369352
- Publication date Nov 7, 2024
- Meta Platforms Technologies, LLC
- Salim BOUTAMI
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SPLIT PRISM SILICON-BASED LIQUID IMMERSION MICROCHANNEL MEASURING D...
- Publication number 20240337591
- Publication date Oct 10, 2024
- Korea Research Institute of Standards and Science
- Dong Hyung KIM
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Scatterometry Based Metrology Of Structures...
- Publication number 20240201073
- Publication date Jun 20, 2024
- KLA Corporation
- Shankar Krishnan
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...
- Publication number 20240027330
- Publication date Jan 25, 2024
- ZEON CORPORATION
- Tomofumi YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD
- Publication number 20240019380
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Kihong Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES
- Publication number 20240019358
- Publication date Jan 18, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Jonathan A. Fan
- G01 - MEASURING TESTING
Information Patent Application
IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...
- Publication number 20230408401
- Publication date Dec 21, 2023
- Samsung Electronics Co., Ltd.
- Jaehyeon Son
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM
- Publication number 20230384213
- Publication date Nov 30, 2023
- AUROS TECHNOLOGY, INC.
- Tae Dong KANG
- G01 - MEASURING TESTING
Information Patent Application
SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING
- Publication number 20230324283
- Publication date Oct 12, 2023
- Bruker Nano, Inc.
- Emad Zawaideh
- G01 - MEASURING TESTING
Information Patent Application
INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...
- Publication number 20230304921
- Publication date Sep 28, 2023
- NANKAI UNIVERSITY
- MENG-XIN REN
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM
- Publication number 20230236007
- Publication date Jul 27, 2023
- HUAQIAO UNIVERSITY
- Changcai Cui
- G01 - MEASURING TESTING
Information Patent Application
IMAGING ASSEMBLY AND SPECTRAL IMAGING ELLIPSOMETER INCLUDING THE SAME
- Publication number 20230204422
- Publication date Jun 29, 2023
- Samsung Electronics Co., Ltd.
- Jinwoo Ahn
- G01 - MEASURING TESTING
Information Patent Application
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
- Publication number 20230184671
- Publication date Jun 15, 2023
- J. A. WOOLLAM CO., INC.
- STEFAN SCHOECHE
- G01 - MEASURING TESTING
Information Patent Application
POLARIZATION IMAGING SYSTEM AND POLARIZATION IMAGING METHOD
- Publication number 20230034139
- Publication date Feb 2, 2023
- SONY GROUP CORPORATION
- Piergiorgio SARTOR
- G01 - MEASURING TESTING
Information Patent Application
TECHNIQUES FOR CHARACTERIZING FILMS ON OPTICALLY CLEAR SUBSTRATES U...
- Publication number 20230025649
- Publication date Jan 26, 2023
- Meta Platforms Technologies, LLC
- Gangadhara Raja MUTHINTI
- G01 - MEASURING TESTING
Information Patent Application
Spectroscopic ellipsometry system for thin film imaging
- Publication number 20230010806
- Publication date Jan 12, 2023
- Scientific Computing International
- Emad Zawaideh
- G01 - MEASURING TESTING
Information Patent Application
FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...
- Publication number 20230011226
- Publication date Jan 12, 2023
- TOKYO ELECTRON LIMITED
- Kazunaga ONO
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING FILM THICKNESS OF SEMICONDUCTOR DEVICE
- Publication number 20220307818
- Publication date Sep 29, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Yongshang SHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220258304
- Publication date Aug 18, 2022
- National University of Singapore
- Prayudi LIANTO
- G01 - MEASURING TESTING
Information Patent Application
DIRECT MEASUREMENT METHOD OF QUANTUM RELAXATION TIME OF ELECTRONS A...
- Publication number 20220214268
- Publication date Jul 7, 2022
- Ningbo Galaxy Materials Technology Co. Ltd.
- Xiaodong Xiang
- G01 - MEASURING TESTING
Information Patent Application
EUV SPECTROSCOPIC POLARIMETER
- Publication number 20220049990
- Publication date Feb 17, 2022
- National Tsing Hua University
- Ming-Chang CHEN
- G01 - MEASURING TESTING
Information Patent Application
THIN FILM SPECTROELLIPSOMETRIC IMAGING
- Publication number 20220034791
- Publication date Feb 3, 2022
- Aizhong ZHANG
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...
- Publication number 20210364420
- Publication date Nov 25, 2021
- Samsung Electronics Co., Ltd.
- Jaehwang JUNG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP HOLE GEOMETRY METROLOGY
- Publication number 20210293727
- Publication date Sep 23, 2021
- YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Le Wang
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING DIELECTRIC TENSOR OF MATERIAL
- Publication number 20210262922
- Publication date Aug 26, 2021
- HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Honggang GU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20210247328
- Publication date Aug 12, 2021
- Samsung Electronics Co., Ltd.
- Kihak NAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
- Publication number 20210223166
- Publication date Jul 22, 2021
- Andrei V. Shchegrov
- G01 - MEASURING TESTING
Information Patent Application
NORMAL INCIDENCE ELLIPSOMETER AND METHOD FOR MEASURING OPTICAL PROP...
- Publication number 20210181090
- Publication date Jun 17, 2021
- Korea Research Institute of Standards and Science
- Yong Jai Cho
- G01 - MEASURING TESTING

Spectrometric ellipsometry

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate

Cooperative polarization skylight background radiation measurement...

Apparatus for generating model for spectroscopic ellipsometry const...

Optical metrology models for in-line film thickness measurements

Film thickness measurement method, film thickness measurement devic...

Optical metrology tool equipped with modulated illumination sources

Method for measuring film thickness of semiconductor device

Method for measuring characteristic of thin film

Fast and accurate mueller matrix infrared spectroscopic ellipsometer

Techniques for characterizing films on optically clear substrates u...

Systems and methods for semiconductor chip hole geometry metrology

Spectroscopic ellipsometry system for thin film imaging

Inspection and metrology using broadband infrared radiation

Thin film spectroellipsometric imaging

Method for measuring dielectric tensor of material

Conical pocket laser-sustained plasma lamp

Method for evaluating structure used for nuclide transmutation reac...

Measurement system capable of adjusting AOI, AOI spread and azimuth...

Method and apparatus for determining optical constant of material,...

Optical property evaluation apparatus and optical property evaluati...

Automated accuracy-oriented model optimization system for critical...

Measuring apparatus

Normal incidence ellipsometer and method for measuring optical prop...

Wafer inspection device and method of manufacturing semiconductor d...

Snapshot ellipsometer

Beamsplitter based ellipsometer focusing system

EUV spectroscopic polarimeter

Variable aperture mask

System and method for use in high spatial resolution ellipsometry

Multi-environment polarized infrared reflectometer for semiconducto...

Patents Applicationslast 30 patents

OPTICAL METROLOGY WITH INFLUENCE MAP OF UNKNOWN SECTION

ANGLE-RESOLVED SPECTROSCOPIC ELLIPSOMETER USING SPATIAL LIGHT MODUL...

DETERMINING AND RECONSTRUCTING A SHAPE AND A MATERIAL PROPERTY OF A...

SPLIT PRISM SILICON-BASED LIQUID IMMERSION MICROCHANNEL MEASURING D...

Methods And Systems For Scatterometry Based Metrology Of Structures...

METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...

SUBSTRATE INSPECTION METHOD

METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES

IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...

METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM

SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING

INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...

METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM

IMAGING ASSEMBLY AND SPECTRAL IMAGING ELLIPSOMETER INCLUDING THE SAME

Fast and accurate mueller matrix infrared spectroscopic ellipsometer

POLARIZATION IMAGING SYSTEM AND POLARIZATION IMAGING METHOD

TECHNIQUES FOR CHARACTERIZING FILMS ON OPTICALLY CLEAR SUBSTRATES U...

Spectroscopic ellipsometry system for thin film imaging

FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...

METHOD FOR MEASURING FILM THICKNESS OF SEMICONDUCTOR DEVICE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

DIRECT MEASUREMENT METHOD OF QUANTUM RELAXATION TIME OF ELECTRONS A...

EUV SPECTROSCOPIC POLARIMETER

THIN FILM SPECTROELLIPSOMETRIC IMAGING

MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...

SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP HOLE GEOMETRY METROLOGY

METHOD FOR MEASURING DIELECTRIC TENSOR OF MATERIAL

WAFER INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR D...

OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES

NORMAL INCIDENCE ELLIPSOMETER AND METHOD FOR MEASURING OPTICAL PROP...