Membership
Tour
Register
Log in
Spectrometric ellipsometry
Follow
Industry
CPC
G01N2021/213
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
Current Industry
G01N2021/213
Spectrometric ellipsometry
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Optical metrology tool equipped with modulated illumination sources
Patent number
11,913,874
Issue date
Feb 27, 2024
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring film thickness of semiconductor device
Patent number
11,867,497
Issue date
Jan 9, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yongshang Sheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for measuring characteristic of thin film
Patent number
11,835,447
Issue date
Dec 5, 2023
AUROS TECHNOLOGY, INC.
Tae Dong Kang
G01 - MEASURING TESTING
Information
Patent Grant
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
Patent number
11,740,176
Issue date
Aug 29, 2023
J. A. Woollam Co., Inc.
Stefan Schoeche
G01 - MEASURING TESTING
Information
Patent Grant
Techniques for characterizing films on optically clear substrates u...
Patent number
11,714,045
Issue date
Aug 1, 2023
Meta Platforms Technologies, LLC
Gangadhara Raja Muthinti
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for semiconductor chip hole geometry metrology
Patent number
11,674,909
Issue date
Jun 13, 2023
Yangtze Memory Technologies Co., Ltd.
Le Wang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Spectroscopic ellipsometry system for thin film imaging
Patent number
11,668,645
Issue date
Jun 6, 2023
Bruker Nano, Inc.
Emad Zawaideh
G02 - OPTICS
Information
Patent Grant
Inspection and metrology using broadband infrared radiation
Patent number
11,662,646
Issue date
May 30, 2023
KLA Corporation
Yung-Ho Alex Chuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film spectroellipsometric imaging
Patent number
11,644,412
Issue date
May 9, 2023
Aizhong Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Method for measuring dielectric tensor of material
Patent number
11,644,413
Issue date
May 9, 2023
Huazhong University of Science & Technology
Honggang Gu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Conical pocket laser-sustained plasma lamp
Patent number
11,637,008
Issue date
Apr 25, 2023
KLA Corporation
Sumeet Kumar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for evaluating structure used for nuclide transmutation reac...
Patent number
11,630,055
Issue date
Apr 18, 2023
Mitsubishi Heavy Industries, Ltd.
Shigenori Tsuruga
G01 - MEASURING TESTING
Information
Patent Grant
Measurement system capable of adjusting AOI, AOI spread and azimuth...
Patent number
11,624,699
Issue date
Apr 11, 2023
Samsung Electronics Co., Ltd.
Jaehwang Jung
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for determining optical constant of material,...
Patent number
11,619,578
Issue date
Apr 4, 2023
Nankai University
Meng-Xin Ren
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical property evaluation apparatus and optical property evaluati...
Patent number
11,585,696
Issue date
Feb 21, 2023
Hamamatsu Photonics K.K.
Yoshiro Nomoto
G01 - MEASURING TESTING
Information
Patent Grant
Automated accuracy-oriented model optimization system for critical...
Patent number
11,537,837
Issue date
Dec 27, 2022
KLA-Tencor Corporation
Yuerui Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measuring apparatus
Patent number
11,506,536
Issue date
Nov 22, 2022
Kioxia Corporation
Taro Shiokawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Normal incidence ellipsometer and method for measuring optical prop...
Patent number
11,493,433
Issue date
Nov 8, 2022
Korea Research Institute of Standards and Science
Yong Jai Cho
G01 - MEASURING TESTING
Information
Patent Grant
Wafer inspection device and method of manufacturing semiconductor d...
Patent number
11,428,645
Issue date
Aug 30, 2022
Samsung Electronics Co., Ltd.
Kihak Nam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Snapshot ellipsometer
Patent number
11,391,666
Issue date
Jul 19, 2022
J. A. Woollam Co., Inc.
Griffin A. P. Hovorka
G01 - MEASURING TESTING
Information
Patent Grant
Beamsplitter based ellipsometer focusing system
Patent number
11,385,167
Issue date
Jul 12, 2022
Onto Innovation Inc.
John F. Lesoine
G01 - MEASURING TESTING
Information
Patent Grant
EUV spectroscopic polarimeter
Patent number
11,313,727
Issue date
Apr 26, 2022
National Tsing Hua University
Ming-Chang Chen
G01 - MEASURING TESTING
Information
Patent Grant
Variable aperture mask
Patent number
11,268,901
Issue date
Mar 8, 2022
KLA Corporation
Barry Blasenheim
G01 - MEASURING TESTING
Information
Patent Grant
System and method for use in high spatial resolution ellipsometry
Patent number
11,262,293
Issue date
Mar 1, 2022
Ronen Rapaport
G01 - MEASURING TESTING
Information
Patent Grant
Multi-environment polarized infrared reflectometer for semiconducto...
Patent number
11,231,362
Issue date
Jan 25, 2022
KLA Corporation
Guorong V. Zhuang
G01 - MEASURING TESTING
Information
Patent Grant
Method for conducting optical measurement usingfull Mueller matrix...
Patent number
11,187,649
Issue date
Nov 30, 2021
AK OPTICS TECHNOLOGY CO., LTD.
Tao Liu
G01 - MEASURING TESTING
Information
Patent Grant
Instantaneous ellipsometer or scatterometer and associated measurin...
Patent number
11,175,221
Issue date
Nov 16, 2021
HORIBA FRANCE SAS
Olivier Acher
G01 - MEASURING TESTING
Information
Patent Grant
Measurement methodology of advanced nanostructures
Patent number
11,156,548
Issue date
Oct 26, 2021
KLA-Tencor Corporation
Manh Nguyen
G05 - CONTROLLING REGULATING
Information
Patent Grant
Spectroscopic focal plane array and method of making same
Patent number
11,118,982
Issue date
Sep 14, 2021
Teledyne Scientific & Imaging, LLC
Majid Zandian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optimizing computational efficiency by multiple truncation of spati...
Patent number
11,086,288
Issue date
Aug 10, 2021
KLA-Tencor Corporation
Andrei Veldman
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF INSPECTING LITHIUM ION SECONDARY BATTERY SEPARATOR AND ME...
Publication number
20240027330
Publication date
Jan 25, 2024
ZEON CORPORATION
Tomofumi YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE INSPECTION METHOD
Publication number
20240019380
Publication date
Jan 18, 2024
Samsung Electronics Co., Ltd.
Kihong Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METASURFACE POLARIZATION FILTERING FOR CHARACTERIZATION OF SAMPLES
Publication number
20240019358
Publication date
Jan 18, 2024
The Board of Trustees of the Leland Stanford Junior University
Jonathan A. Fan
G01 - MEASURING TESTING
Information
Patent Application
IMAGING ELLIPSOMETER AND METHOD OF MEASURING AN OVERLAY ERROR USING...
Publication number
20230408401
Publication date
Dec 21, 2023
Samsung Electronics Co., Ltd.
Jaehyeon Son
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING CHARACTHERISTIC OF THIN FILM
Publication number
20230384213
Publication date
Nov 30, 2023
AUROS TECHNOLOGY, INC.
Tae Dong KANG
G01 - MEASURING TESTING
Information
Patent Application
SPECTROSCOPIC ELLIPSOMETRY SYSTEM FOR THIN FILM IMAGING
Publication number
20230324283
Publication date
Oct 12, 2023
Bruker Nano, Inc.
Emad Zawaideh
G01 - MEASURING TESTING
Information
Patent Application
INFRARED MEASUREMENT METHOD AND APPARATUS, COMPUTER DEVICE AND STOR...
Publication number
20230304921
Publication date
Sep 28, 2023
NANKAI UNIVERSITY
MENG-XIN REN
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING THICKNESS AND OPTICAL CONSTANTS OF DIAMOND FILM
Publication number
20230236007
Publication date
Jul 27, 2023
HUAQIAO UNIVERSITY
Changcai Cui
G01 - MEASURING TESTING
Information
Patent Application
IMAGING ASSEMBLY AND SPECTRAL IMAGING ELLIPSOMETER INCLUDING THE SAME
Publication number
20230204422
Publication date
Jun 29, 2023
Samsung Electronics Co., Ltd.
Jinwoo Ahn
G01 - MEASURING TESTING
Information
Patent Application
Fast and accurate mueller matrix infrared spectroscopic ellipsometer
Publication number
20230184671
Publication date
Jun 15, 2023
J. A. WOOLLAM CO., INC.
STEFAN SCHOECHE
G01 - MEASURING TESTING
Information
Patent Application
POLARIZATION IMAGING SYSTEM AND POLARIZATION IMAGING METHOD
Publication number
20230034139
Publication date
Feb 2, 2023
SONY GROUP CORPORATION
Piergiorgio SARTOR
G01 - MEASURING TESTING
Information
Patent Application
TECHNIQUES FOR CHARACTERIZING FILMS ON OPTICALLY CLEAR SUBSTRATES U...
Publication number
20230025649
Publication date
Jan 26, 2023
Meta Platforms Technologies, LLC
Gangadhara Raja MUTHINTI
G01 - MEASURING TESTING
Information
Patent Application
Spectroscopic ellipsometry system for thin film imaging
Publication number
20230010806
Publication date
Jan 12, 2023
Scientific Computing International
Emad Zawaideh
G01 - MEASURING TESTING
Information
Patent Application
FILM THICKNESS MEASUREMENT METHOD, FILM THICKNESS MEASUREMENT DEVIC...
Publication number
20230011226
Publication date
Jan 12, 2023
TOKYO ELECTRON LIMITED
Kazunaga ONO
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING FILM THICKNESS OF SEMICONDUCTOR DEVICE
Publication number
20220307818
Publication date
Sep 29, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC
Yongshang SHENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20220258304
Publication date
Aug 18, 2022
National University of Singapore
Prayudi LIANTO
G01 - MEASURING TESTING
Information
Patent Application
DIRECT MEASUREMENT METHOD OF QUANTUM RELAXATION TIME OF ELECTRONS A...
Publication number
20220214268
Publication date
Jul 7, 2022
Ningbo Galaxy Materials Technology Co. Ltd.
Xiaodong Xiang
G01 - MEASURING TESTING
Information
Patent Application
EUV SPECTROSCOPIC POLARIMETER
Publication number
20220049990
Publication date
Feb 17, 2022
National Tsing Hua University
Ming-Chang CHEN
G01 - MEASURING TESTING
Information
Patent Application
THIN FILM SPECTROELLIPSOMETRIC IMAGING
Publication number
20220034791
Publication date
Feb 3, 2022
Aizhong ZHANG
G01 - MEASURING TESTING
Information
Patent Application
MEASUREMENT SYSTEM CAPABLE OF ADJUSTING AOI, AOI SPREAD AND AZIMUTH...
Publication number
20210364420
Publication date
Nov 25, 2021
Samsung Electronics Co., Ltd.
Jaehwang JUNG
G01 - MEASURING TESTING
Information
Patent Application
SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP HOLE GEOMETRY METROLOGY
Publication number
20210293727
Publication date
Sep 23, 2021
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
Le Wang
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MEASURING DIELECTRIC TENSOR OF MATERIAL
Publication number
20210262922
Publication date
Aug 26, 2021
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
Honggang GU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WAFER INSPECTION DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR D...
Publication number
20210247328
Publication date
Aug 12, 2021
Samsung Electronics Co., Ltd.
Kihak NAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL METROLOGY TOOL EQUIPPED WITH MODULATED ILLUMINATION SOURCES
Publication number
20210223166
Publication date
Jul 22, 2021
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Application
NORMAL INCIDENCE ELLIPSOMETER AND METHOD FOR MEASURING OPTICAL PROP...
Publication number
20210181090
Publication date
Jun 17, 2021
Korea Research Institute of Standards and Science
Yong Jai Cho
G01 - MEASURING TESTING
Information
Patent Application
SUBSTRATE INSPECTION DEVICE
Publication number
20210140899
Publication date
May 13, 2021
Samsung Electronics Co., Ltd.
Jangik PARK
G01 - MEASURING TESTING
Information
Patent Application
BEAMSPLITTER BASED ELLIPSOMETER FOCUSING SYSTEM
Publication number
20210096062
Publication date
Apr 1, 2021
ONTO INNOVATION INC.
John F. Lesoine
G01 - MEASURING TESTING
Information
Patent Application
INSTANTANEOUS ELLIPSOMETER OR SCATTEROMETER AND ASSOCIATED MEASURIN...
Publication number
20210010928
Publication date
Jan 14, 2021
HORIBA FRANCE SAS
Olivier ACHER
G02 - OPTICS
Information
Patent Application
ROTATING-COMPENSATOR ELLIPSOMETER
Publication number
20200371019
Publication date
Nov 26, 2020
SEMILAB Zrt.
László MAKAI
G01 - MEASURING TESTING
Information
Patent Application
Variable Aperture Mask
Publication number
20200271569
Publication date
Aug 27, 2020
KLA Corporation
Barry Blasenheim
G01 - MEASURING TESTING