Sputtering

Industry

CPC
C23C14/34

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/34Sputtering

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for reducing tungsten resistivity
- Patent number 11,655,534
- Issue date May 23, 2023
- Applied Materials, Inc.
- Wenting Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield for a substrate processing chamber
- Patent number 11,658,016
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic-inorganic hybrid membrane
- Patent number 11,655,347
- Issue date May 23, 2023
- HYOMEN KAIMEN KOBO CORPORATION
- Yasunori Taga
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Composite electrode material chemistry
- Patent number 11,659,778
- Issue date May 23, 2023
- Micron Technology, Inc.
- Pengyuan Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film comprising titanium oxide, and method of producing thin f...
- Patent number 11,651,790
- Issue date May 16, 2023
- JX Nippon Mining & Metals Corporation
- Hideo Takami
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Optical filter
- Patent number 11,650,361
- Issue date May 16, 2023
- Viavi Solutions Inc.
- Scott Rowlands
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD coatings with a HEA ceramic matrix with controlled precipitate...
- Patent number 11,649,541
- Issue date May 16, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Siva Phani Kumar Yalamanchili
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target structure of physical vapor deposition
- Patent number 11,649,543
- Issue date May 16, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Yuan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of low-temperature plasma generation, method of an electrica...
- Patent number 11,651,937
- Issue date May 16, 2023
- FYZIKALINI USTAV AV CR, V.V.I.
- ZdenZden{hacek over (e)}k Hubicka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ta-C based coatings with improved hardness
- Patent number 11,643,733
- Issue date May 9, 2023
- NANOFILM TECHNOLOGIES INTERNATIONAL LIMITED
- Xu Shi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High performance tool coating for press hardening of coated and unc...
- Patent number 11,643,717
- Issue date May 9, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Ali Khatibi
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Flexible photovoltaic apparatus with multi-layered substrate
- Patent number 11,641,001
- Issue date May 2, 2023
- FLISOM AG
- Julian Christoph Perrenoud
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decorative member
- Patent number 11,639,045
- Issue date May 2, 2023
- LG Chem, Ltd.
- Yong Chan Kim
- B32 - LAYERED PRODUCTS
Information Patent Grant
Physical vapor deposition system and processes
- Patent number 11,639,544
- Issue date May 2, 2023
- Applied Materials, Inc.
- Sanjay Bhat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter electrode material for electrochromic devices
- Patent number 11,635,665
- Issue date Apr 25, 2023
- View, Inc.
- Anshu A. Pradhan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing film for decoration element
- Patent number 11,634,821
- Issue date Apr 25, 2023
- LG Chem, Ltd.
- Pilsung Jo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-corrosion conductive film and pulse bias alternation-based mag...
- Patent number 11,634,808
- Issue date Apr 25, 2023
- Shanghai Jiaotong University
- Peiyun Yi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and deposition method using the same
- Patent number 11,637,001
- Issue date Apr 25, 2023
- Samsung Display Co., Ltd.
- Kwan Yong Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
- Patent number 11,637,015
- Issue date Apr 25, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Longitudinal sensor bias structures and method of formation thereof
- Patent number 11,631,535
- Issue date Apr 18, 2023
- Western Digital Technologies, Inc.
- Masaya Nishioka
- G11 - INFORMATION STORAGE
Information Patent Grant
Convertible magnetics for rotary cathode
- Patent number 11,629,399
- Issue date Apr 18, 2023
- Vapor Technologies, Inc.
- Sterling Walker Myers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask assembly, apparatus, and method of manufacturing display device
- Patent number 11,629,397
- Issue date Apr 18, 2023
- Samsung Display Co., Ltd.
- Hongkyun Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask having plating layers and method of manufacturing the same
- Patent number 11,629,421
- Issue date Apr 18, 2023
- LG Display Co., Ltd.
- Hyunjun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coatings of non-planar substrates and methods for the production th...
- Patent number 11,630,244
- Issue date Apr 18, 2023
- Corning Incorporated
- Robert Alan Bellman
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Sputtering target and method of producing the same
- Patent number 11,629,400
- Issue date Apr 18, 2023
- Ulvac, Inc.
- Akira Nakamura
- B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information Patent Grant
Sputtering equipment and operation method thereof
- Patent number 11,626,272
- Issue date Apr 11, 2023
- Au Optronics Corporation
- Chun-Yueh Hou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wear resistant braking systems
- Patent number 11,624,416
- Issue date Apr 11, 2023
- Tech M3, Inc.
- Peter Filip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Biosensor electrodes prepared by physical vapor deposition
- Patent number 11,624,723
- Issue date Apr 11, 2023
- Eastman Chemical Company
- Spencer Erich Hochstetler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing transparent conductive film
- Patent number 11,624,109
- Issue date Apr 11, 2023
- LG Chem, Ltd.
- Dongmyung Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Antireflective member and method of manufacture therefor
- Patent number 11,624,858
- Issue date Apr 11, 2023
- Shin-Etsu Chemical Co., Ltd.
- Yuji Yamane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DECORATIVE MEMBER AND MANUFACTURING METHOD THEREFOR
- Publication number 20230161089
- Publication date May 25, 2023
- LG CHEM, LTD.
- Pilsung Jo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-LUBRICATING FILM OVER WIDE TEMPERATURE RANGES IN VACUUM AND PR...
- Publication number 20230160052
- Publication date May 25, 2023
- Lanzhou Institute of Chemical Physics, CAS
- Xiaohong LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20230160067
- Publication date May 25, 2023
- Starfire Industires, LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNET SYSTEM, SPUTTERING DEVICE AND METHOD
- Publication number 20230154732
- Publication date May 18, 2023
- VON ARDENNE Asset GmbH & Co. KG
- Klaus SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATED FILM, STRUCTURE INCLUDING LAMINATED FILM, SEMICONDUCTOR E...
- Publication number 20230143194
- Publication date May 11, 2023
- TOSOH CORPORATION
- Yuya SUEMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHROMIC CATHODE MATERIALS
- Publication number 20230148443
- Publication date May 11, 2023
- VIEW, INC.
- Robert T. Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NANOCOMPOSITE SOLAR ABSORBER WITH ENCAPSULATED METAL NANOPARTICLES
- Publication number 20230144255
- Publication date May 11, 2023
- Khalifa University of Science and Technology
- Tiejun ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Customized Thin Film Optical Element Fabrication System and Method
- Publication number 20230146946
- Publication date May 11, 2023
- Halliburton Energy Services, Inc.
- Christopher Michael JONES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PISTON CRANK AGITATION MECHANISM FOR PHYSICAL VAPOR DEPOSITION CONF...
- Publication number 20230143154
- Publication date May 11, 2023
- The Board of Trustees of the University of Alabama
- Jonathan Lake Priedeman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...
- Publication number 20230143320
- Publication date May 11, 2023
- Honeywell International Inc.
- Jaeyeon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAZOR BLADE AND MANUFACTURING METHOD THEREOF
- Publication number 20230138439
- Publication date May 4, 2023
- DORCO CO., LTD
- Min Joo PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20230135735
- Publication date May 4, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering System with a Plurality of Cathode Assemblies
- Publication number 20230133160
- Publication date May 4, 2023
- Alluxa, Inc.
- Michael A. Scobey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETICALLY TRANSPARENT METALLIC-LUSTER MEMBER AND METHOD F...
- Publication number 20230137503
- Publication date May 4, 2023
- NITTO DENKO CORPORATION
- Xiaolei CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TICN Having Reduced Growth Defects by Means of HIPIMS
- Publication number 20230135238
- Publication date May 4, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATHODE UNIT FOR MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTT...
- Publication number 20230138552
- Publication date May 4, 2023
- Ulvac, Inc.
- Koji Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NONMAGNETIC MATERIAL-DISPERSED FE-PT BASED SPUTTERING TARGET
- Publication number 20230125486
- Publication date Apr 27, 2023
- JX NIPPON MINING & METALS CORPORATION
- Atsushi Sato
- B22 - CASTING POWDER METALLURGY
Information Patent Application
OPTICAL LAMINATE, ARTICLE AND METHOD OF MANUFACTURING OPTICAL LAMINATE
- Publication number 20230127573
- Publication date Apr 27, 2023
- Dexerials Corporation
- Tomoaki Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM
- Publication number 20230126996
- Publication date Apr 27, 2023
- AGC Inc.
- Hiroshi ARUGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering Target Product And Method For Producing Recycled Sputter...
- Publication number 20230132362
- Publication date Apr 27, 2023
- JX Nippon Mining & Metals Corporation
- Kengo Kaminaga
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GOLD SPUTTERING TARGET
- Publication number 20230126513
- Publication date Apr 27, 2023
- Tanaka Kikinzoku Kogyo K.K.
- Tetsuya KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Temperature Control in a Substrate Processing Chamber
- Publication number 20230128611
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED-DC POWER GENERATOR AND METHOD OF AUTOMATICALLY ADJUSTING ARC...
- Publication number 20230126427
- Publication date Apr 27, 2023
- Delta Electronics, Inc.
- Wei-Hsun LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230130106
- Publication date Apr 27, 2023
- Sireesh ADIMADHYAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GOLD SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME
- Publication number 20230120540
- Publication date Apr 20, 2023
- Tanaka Kikinzoku Kogyo K.K.
- Tetsuya KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230122956
- Publication date Apr 20, 2023
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANTIMICROBIAL PLASTIC FILM AND WINDING COATING METHOD THEREOF
- Publication number 20230117294
- Publication date Apr 20, 2023
- Shuihe CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CR-SI SINTERED BODY, SPUTTERING TARGET, AND METHOD FOR PRODUCING TH...
- Publication number 20230121940
- Publication date Apr 20, 2023
- TOSOH CORPORATION
- Hiroyuki HARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME
- Publication number 20230122519
- Publication date Apr 20, 2023
- Rohm Co., Ltd.
- Toshio NAGATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH CAPACITY CATHODES FOR ALL-SOLID-STATE THIN-FILM BATTERIES
- Publication number 20230121670
- Publication date Apr 20, 2023
- NANOEAR CORPORATION, INC.
- Fei HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for reducing tungsten resistivity

Shield for a substrate processing chamber

Organic-inorganic hybrid membrane

Composite electrode material chemistry

Thin film comprising titanium oxide, and method of producing thin f...

Optical filter

PVD coatings with a HEA ceramic matrix with controlled precipitate...

Target structure of physical vapor deposition

Method of low-temperature plasma generation, method of an electrica...

ta-C based coatings with improved hardness

High performance tool coating for press hardening of coated and unc...

Flexible photovoltaic apparatus with multi-layered substrate

Decorative member

Physical vapor deposition system and processes

Counter electrode material for electrochromic devices

Method for manufacturing film for decoration element

Anti-corrosion conductive film and pulse bias alternation-based mag...

Deposition apparatus and deposition method using the same

Method for manufacturing sputtering target, method for forming oxid...

Longitudinal sensor bias structures and method of formation thereof

Convertible magnetics for rotary cathode

Mask assembly, apparatus, and method of manufacturing display device

Mask having plating layers and method of manufacturing the same

Coatings of non-planar substrates and methods for the production th...

Sputtering target and method of producing the same

Sputtering equipment and operation method thereof

Wear resistant braking systems

Biosensor electrodes prepared by physical vapor deposition

Method for manufacturing transparent conductive film

Antireflective member and method of manufacture therefor

Patents Applicationslast 30 patents

DECORATIVE MEMBER AND MANUFACTURING METHOD THEREFOR

SELF-LUBRICATING FILM OVER WIDE TEMPERATURE RANGES IN VACUUM AND PR...

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT

MAGNET SYSTEM, SPUTTERING DEVICE AND METHOD

LAMINATED FILM, STRUCTURE INCLUDING LAMINATED FILM, SEMICONDUCTOR E...

ELECTROCHROMIC CATHODE MATERIALS

NANOCOMPOSITE SOLAR ABSORBER WITH ENCAPSULATED METAL NANOPARTICLES

Customized Thin Film Optical Element Fabrication System and Method

PISTON CRANK AGITATION MECHANISM FOR PHYSICAL VAPOR DEPOSITION CONF...

SPUTTER TRAP HAVING A THIN HIGH PURITY COATING LAYER AND METHOD OF...

RAZOR BLADE AND MANUFACTURING METHOD THEREOF

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

Sputtering System with a Plurality of Cathode Assemblies

ELECTROMAGNETICALLY TRANSPARENT METALLIC-LUSTER MEMBER AND METHOD F...

TICN Having Reduced Growth Defects by Means of HIPIMS

CATHODE UNIT FOR MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTT...

NONMAGNETIC MATERIAL-DISPERSED FE-PT BASED SPUTTERING TARGET

OPTICAL LAMINATE, ARTICLE AND METHOD OF MANUFACTURING OPTICAL LAMINATE

FILM

Sputtering Target Product And Method For Producing Recycled Sputter...

GOLD SPUTTERING TARGET

Apparatus for Temperature Control in a Substrate Processing Chamber

PULSED-DC POWER GENERATOR AND METHOD OF AUTOMATICALLY ADJUSTING ARC...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

GOLD SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

ANTIMICROBIAL PLASTIC FILM AND WINDING COATING METHOD THEREOF

CR-SI SINTERED BODY, SPUTTERING TARGET, AND METHOD FOR PRODUCING TH...

SEMICONDUCTOR DEVICE AND METHOD FOR PRODUCING SAME

HIGH CAPACITY CATHODES FOR ALL-SOLID-STATE THIN-FILM BATTERIES