Storage means

Industry

CPC
H01L21/67769

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67769Storage means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping using deep neural-networks
- Patent number 12,131,454
- Issue date Oct 29, 2024
- Onto Innovation, Inc.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate storage apparatus and substrate processing system
- Patent number 12,125,729
- Issue date Oct 22, 2024
- Kioxia Corporation
- Kohei Watabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system
- Patent number 12,117,485
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Article accommodation facility
- Patent number 12,112,966
- Issue date Oct 8, 2024
- Daifuku Co., Ltd.
- Kazuya Omori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,087,560
- Issue date Sep 10, 2024
- Semes Co., Ltd.
- Dukhyun Son
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing system for processing substrates with an elect...
- Patent number 12,051,602
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing a substrate detection process
- Patent number 12,020,963
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Min-Cheng Wu
- G01 - MEASURING TESTING
Information Patent Grant
Vertical batch furnace assembly with detector to detect cassette
- Patent number 12,009,241
- Issue date Jun 11, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system and determination method
- Patent number 12,002,695
- Issue date Jun 4, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage shelf
- Patent number 11,990,356
- Issue date May 21, 2024
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection system
- Patent number 11,982,594
- Issue date May 14, 2024
- Daifuku Co., Ltd.
- Kazuya Omori
- G01 - MEASURING TESTING
Information Patent Grant
Automatic handling buffer for bare stocker
- Patent number 11,978,652
- Issue date May 7, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system
- Patent number 11,942,347
- Issue date Mar 26, 2024
- Murata Machinery, Ltd.
- Eiji Wada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storing container
- Patent number 11,887,875
- Issue date Jan 30, 2024
- Miraial Co., Ltd.
- Yuya Narita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system including shelf moving module
- Patent number 11,881,422
- Issue date Jan 23, 2024
- Samsung Electronics Co., Ltd.
- Hujong Lee
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Method of storing workpiece using workpiece storage system
- Patent number 11,848,221
- Issue date Dec 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tzu-Chi Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage apparatus, transporting device and transporting method for...
- Patent number 11,830,750
- Issue date Nov 28, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tianzhu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer stocker
- Patent number 11,823,934
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Yasushi Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for improving transfer efficiency of an automat...
- Patent number 11,804,394
- Issue date Oct 31, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Transport apparatus and control method
- Patent number 11,791,188
- Issue date Oct 17, 2023
- HIRATA CORPORATION
- Hirofumi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for particle abatement in a wafer processing tool
- Patent number 11,772,136
- Issue date Oct 3, 2023
- Eryn Smith
- B08 - CLEANING
Information Patent Grant
Storage apparatus for storing cassettes for substrates and processi...
- Patent number 11,769,682
- Issue date Sep 26, 2023
- ASM IP Holding B.V.
- Adriaan Garssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system
- Patent number 11,762,012
- Issue date Sep 19, 2023
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for processing substrate
- Patent number 11,756,817
- Issue date Sep 12, 2023
- Semes Co., Ltd.
- Dukhyun Son
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE DEVICE WITH PARTICLE-ATTRACTION OBJECT
- Publication number 20240347360
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Cheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING CARRIERS
- Publication number 20240327136
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- Minkyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INTERFACE, CARRIER TRANSFER SYSTEM INCLUDING THE SAME, A...
- Publication number 20240332053
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- HOCHAN LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFA...
- Publication number 20240321611
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Hiroyuki MITSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEAN ROOM
- Publication number 20240321617
- Publication date Sep 26, 2024
- Shin-Etsu Handotai Co., Ltd.
- Seiji SATOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PROCESSING APPARATUS
- Publication number 20240312814
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Min-Cheng WU
- G01 - MEASURING TESTING
Information Patent Application
STOCKER AND STOCKER SYSTEM
- Publication number 20240300738
- Publication date Sep 12, 2024
- SEMES CO., LTD.
- Sang Min YOON
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
STORAGE APPARATUS FOR SEMICONDUCTOR DEVICES AND STORAGE SYSTEM INCL...
- Publication number 20240297060
- Publication date Sep 5, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20240297058
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Chen Pin HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266193
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE BUFFER FOR AUTOMATED MATERIAL HANDLING SYSTEM
- Publication number 20240258146
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY SYSTEM AND METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240222120
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Xianhui ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
- Publication number 20240203771
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT UNIT, LINE STORAGE UNIT, AND TRANSPORT SYSTEM INCLUDING THE...
- Publication number 20240194511
- Publication date Jun 13, 2024
- SEMES CO., LTD.
- Do Hyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER SYSTEM, PROCESSING SYSTEM, AND TRANSFER METHOD
- Publication number 20240178044
- Publication date May 30, 2024
- TOKYO ELECTRON LIMITED
- Kento TOKAIRIN
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PAYLOAD TRANSPORTATION SYSTEM
- Publication number 20240021456
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chieh Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER INSPECTION SYSTEM
- Publication number 20240019487
- Publication date Jan 18, 2024
- TOKYO ELECTRON LIMITED
- Junichi Hagihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM
- Publication number 20240014061
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE SYSTEM
- Publication number 20240014062
- Publication date Jan 11, 2024
- KIOXIA Corporation
- Tatsuro HITOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE AND TRANSPORT SYSTEM AND METHOD OF OPERATION OF WAFER...
- Publication number 20240006215
- Publication date Jan 4, 2024
- SAMSUNG ELECTRONICS CO., LTD.
- Sang Hyuk PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT CARRIER FOR SEMICONDUCTOR MANUFACTURING AND COMPONENT TRA...
- Publication number 20230411196
- Publication date Dec 21, 2023
- SEMES CO., LTD.
- Jae Won SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
Methods and Systems for Improving Transfer Efficiency of an Automat...
- Publication number 20230369088
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Yen-Fu SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Contactless Conveyor Device
- Publication number 20230360943
- Publication date Nov 9, 2023
- ROBERT BOSCH GmbH
- Stefan Teusch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE CARRYING DEVICE
- Publication number 20230317489
- Publication date Oct 5, 2023
- DLY TECHNOLOGIES INC.
- Shih Feng PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230307277
- Publication date Sep 28, 2023
- SCREEN Holdings Co., Ltd.
- Takahiro YAMAGUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...
- Publication number 20230268213
- Publication date Aug 24, 2023
- TOKYO ELECTRON LIMITED
- Takafumi Tsuchiya
- H01 - BASIC ELECTRIC ELEMENTS

Storage means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Side storage pods, equipment front end modules, and methods for pro...

Substrate mapping using deep neural-networks

Substrate storage apparatus and substrate processing system

Wafer inspection system

Article accommodation facility

Apparatus and method for treating substrate

Substrate processing system for processing substrates with an elect...

Method of performing a substrate detection process

Vertical batch furnace assembly with detector to detect cassette

Transport system and determination method

Storage shelf

Inspection system

Automatic handling buffer for bare stocker

Substrate treating apparatus

Storage system

Processing arrangement and method for adjusting gas flow

Substrate storing container

Storage system including shelf moving module

Method of storing workpiece using workpiece storage system

Reticle transportation container

Storage apparatus, transporting device and transporting method for...

Wafer stocker

Indexable side storage pod apparatus, heated side storage pod appar...

Methods and systems for improving transfer efficiency of an automat...

Side storage pods, electronic device processing systems, and method...

Transport apparatus and control method

System and method for particle abatement in a wafer processing tool

Storage apparatus for storing cassettes for substrates and processi...

Wafer inspection system

Apparatus and method for processing substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

WAFER STORAGE DEVICE WITH PARTICLE-ATTRACTION OBJECT

APPARATUS FOR TRANSFERRING CARRIERS

ROTATIONAL INTERFACE, CARRIER TRANSFER SYSTEM INCLUDING THE SAME, A...

CONTROL APPARATUS, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFA...

CLEAN ROOM

METHOD OF OPERATING A PROCESSING APPARATUS

STOCKER AND STOCKER SYSTEM

STORAGE APPARATUS FOR SEMICONDUCTOR DEVICES AND STORAGE SYSTEM INCL...

VACUUM PROCESSING APPARATUS

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

STORAGE BUFFER FOR AUTOMATED MATERIAL HANDLING SYSTEM

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

FACTORY SYSTEM AND METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW

SUPPORT UNIT, LINE STORAGE UNIT, AND TRANSPORT SYSTEM INCLUDING THE...

TRANSFER SYSTEM, PROCESSING SYSTEM, AND TRANSFER METHOD

PAYLOAD TRANSPORTATION SYSTEM

WAFER INSPECTION SYSTEM

CASSETTE HOUSING, PROBER, SERVER RACK, AND STORAGE SYSTEM

STORAGE SYSTEM

WAFER STORAGE AND TRANSPORT SYSTEM AND METHOD OF OPERATION OF WAFER...

COMPONENT CARRIER FOR SEMICONDUCTOR MANUFACTURING AND COMPONENT TRA...

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

Methods and Systems for Improving Transfer Efficiency of an Automat...

Contactless Conveyor Device

ADJUSTABLE CARRYING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND RECOR...