Substrate holders or susceptors

Industry

CPC
C30B31/14

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CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

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C30B31/14Substrate holders or susceptors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for producing SiC epitaxial wafer and method for producin...
- Patent number 10,494,737
- Issue date Dec 3, 2019
- Showa Denko K.K.
- Jun Norimatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus
- Patent number 10,208,401
- Issue date Feb 19, 2019
- Samsung Electronics Co., Ltd.
- Keum Seok Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rapid conductive cooling using a secondary process plane
- Patent number 9,209,049
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Khurshed Sorabji
- C30 - CRYSTAL GROWTH
Information Patent Grant
Rapid conductive cooling using a secondary process plane
- Patent number 8,658,947
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Khurshed Sorabji
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and jig for holding silicon wafer
- Patent number 8,419,001
- Issue date Apr 16, 2013
- Sumco Corporation
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Grant
Self aligning non contact shadow ring process kit
- Patent number 8,342,119
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid conductive cooling using a secondary process plane
- Patent number 8,227,729
- Issue date Jul 24, 2012
- Applied Materials, Inc.
- Khurshed Sorabji
- C30 - CRYSTAL GROWTH
Information Patent Grant
Silocon wafer supporting method, heat treatment jig and heat-treate...
- Patent number 8,067,820
- Issue date Nov 29, 2011
- Sumco Corporation
- Takayuki Kihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Silicon wafer and process for the heat treatment of a silicon wafer
- Patent number 7,828,893
- Issue date Nov 9, 2010
- Siltronic AG
- Timo Mueller
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Rapid conductive cooling using a secondary process plane
- Patent number 7,812,286
- Issue date Oct 12, 2010
- Applied Materials, Inc.
- Khurshed Sorabji
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate holder for a vapour deposition system
- Patent number 7,790,004
- Issue date Sep 7, 2010
- JDS Uniphase Corporation
- Richard I. Seddon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holder made from quartz glass for the processing of semiconductor w...
- Patent number 7,749,930
- Issue date Jul 6, 2010
- Heraeus Quarzglas GmbH & Co. KG
- Juergen Weber
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Detachable edge ring for thermal processing support towers
- Patent number 7,736,436
- Issue date Jun 15, 2010
- Integrated Materials, Incorporated
- Tom L. Cadwell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon shelf towers
- Patent number 7,713,355
- Issue date May 11, 2010
- Integrated Materials, Incorporated
- Ranaan Zehavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor system
- Patent number 7,615,121
- Issue date Nov 10, 2009
- E.T.C. Epitaxial Technology Center SRL
- Giacomo Nicolao Maccalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purification method of jig for semiconductor heat treatment
- Patent number 7,601,227
- Issue date Oct 13, 2009
- Sumco Corporation
- Tatsumi Kusaba
- C30 - CRYSTAL GROWTH
Information Patent Grant
High purity silicon carbide wafer boats
- Patent number 7,501,370
- Issue date Mar 10, 2009
- Saint-Gobain Ceramics & Plastics, Inc.
- Yeshwanth Narendar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor system
- Patent number 7,488,922
- Issue date Feb 10, 2009
- E.T.C. Epitaxial Technology Center SRL
- Giacomo Nicolao Maccalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor
- Patent number 7,393,418
- Issue date Jul 1, 2008
- Covalent Materials Corporation
- Masanari Yokogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Support system for a treatment apparatus
- Patent number 7,387,687
- Issue date Jun 17, 2008
- E.T.C. Epitaxial Technology Center SRL
- Natale Speciale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid conductive cooling using a secondary process plane
- Patent number 7,378,618
- Issue date May 27, 2008
- Applied Materials, Inc.
- Khurshed Sorabji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated semiconductor wafer, and process and apparatus for producing...
- Patent number 7,285,483
- Issue date Oct 23, 2007
- Silitronic AG
- Reinhard Schauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer supporter
- Patent number 7,237,606
- Issue date Jul 3, 2007
- Tokyo Electron Limited
- Mitsuhiro Yuasa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrier for growing GaN wafers
- Patent number 7,235,139
- Issue date Jun 26, 2007
- Veeco Instruments Inc.
- Vadim Boguslavskiy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conductor treating single-wafer type treating device and method for...
- Patent number 7,235,137
- Issue date Jun 26, 2007
- Tokyo Electron Limited
- Hirofumi Kitayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon single crystal wafer process apparatus, silicon single crys...
- Patent number 7,214,271
- Issue date May 8, 2007
- Shin-Etsu Handotai Co., Ltd.
- Ryuji Kono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating chamber and method of heating a wafer
- Patent number 7,211,769
- Issue date May 1, 2007
- Samsung Electronics Co., Ltd.
- Byung-Hee Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer boat for a vertical furnace
- Patent number 7,033,168
- Issue date Apr 25, 2006
- MEMC Electronic Materials, Inc.
- Puneet Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz glass body having improved resistance against plasma corrosi...
- Patent number 6,887,576
- Issue date May 3, 2005
- Herseus Quarzglas GmbH & Co. KG
- Tatsuhiro Sato
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Electromagnetically levitated substrate support
- Patent number 6,800,833
- Issue date Oct 5, 2004
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20180266017
- Publication date Sep 20, 2018
- Samsung Electronics Co., Ltd.
- KEUM SEOK PARK
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170260630
- Publication date Sep 14, 2017
- Sumitomo Chemical Company, Limited
- Hajime FUJIKURA
- C30 - CRYSTAL GROWTH
Information Patent Application
RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE
- Publication number 20140199786
- Publication date Jul 17, 2014
- Applied Materials, Inc.
- Khurshed SORABJI
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND JIG FOR HOLDING SILICON WAFER
- Publication number 20130140752
- Publication date Jun 6, 2013
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE
- Publication number 20120270166
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- KHURSHED SORABJI
- C30 - CRYSTAL GROWTH
Information Patent Application
RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE
- Publication number 20110008740
- Publication date Jan 13, 2011
- Khurshed Sorabji
- C30 - CRYSTAL GROWTH
Information Patent Application
SILOCON WAFER SUPPORTING METHOD, HEAT TREATMENT JIG AND HEAT-TREATE...
- Publication number 20100200962
- Publication date Aug 12, 2010
- Takayuki Kihara
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and jig for holding silicon wafer
- Publication number 20100025909
- Publication date Feb 4, 2010
- Toshiaki Ono
- C30 - CRYSTAL GROWTH
Information Patent Application
RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE
- Publication number 20080141556
- Publication date Jun 19, 2008
- APPLIED MATERIALS, INC.
- KHURSHED SORABJI
- C30 - CRYSTAL GROWTH
Information Patent Application
RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE
- Publication number 20080142497
- Publication date Jun 19, 2008
- APPLIED MATERIALS, INC.
- KHURSHED SORABJI
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PRO...
- Publication number 20080124470
- Publication date May 29, 2008
- ASM INTERNATIONAL N.V.
- Jannes Remco van den Berg
- C30 - CRYSTAL GROWTH
Information Patent Application
SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT
- Publication number 20080072823
- Publication date Mar 27, 2008
- Joseph Yudovsky
- C30 - CRYSTAL GROWTH
Information Patent Application
Holder Made From Quartz Glass for the Processing of Semiconductor W...
- Publication number 20080066497
- Publication date Mar 20, 2008
- Heraeus Quarzglas GmbH & Co., KG
- Juergen Weber
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor
- Publication number 20070186858
- Publication date Aug 16, 2007
- Toyo Tanso Co., Ltd.
- Tunenobu Kimoto
- C30 - CRYSTAL GROWTH
Information Patent Application
High purification method of jig for semiconductor heat treatment
- Publication number 20070028945
- Publication date Feb 8, 2007
- SUMCO CORPORATION
- Tatsumi Kusaba
- C30 - CRYSTAL GROWTH
Information Patent Application
Detachable edge ring for thermal processing support towers
- Publication number 20070006803
- Publication date Jan 11, 2007
- Tom L. Cadwell
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon shelf towers
- Publication number 20060249080
- Publication date Nov 9, 2006
- Ranaan Zehavi
- C30 - CRYSTAL GROWTH
Information Patent Application
WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME
- Publication number 20060249079
- Publication date Nov 9, 2006
- Ping-Hua Yao
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon wafer and process for the heat treatment of a silicon wafer
- Publication number 20060213424
- Publication date Sep 28, 2006
- Timo Mueller
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor system
- Publication number 20060118048
- Publication date Jun 8, 2006
- Giacomo Nicolao Maccalli
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor system
- Publication number 20060081187
- Publication date Apr 20, 2006
- Giacomo Nicolao Maccalli
- C30 - CRYSTAL GROWTH
Information Patent Application
Coated semiconductor wafer, and process and apparatus for producing...
- Publication number 20060079089
- Publication date Apr 13, 2006
- Siltronic AG
- Reinhard Schauer
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor
- Publication number 20060065196
- Publication date Mar 30, 2006
- TOSHIBA CERAMICS CO., LTD.
- Masanari Yokogawa
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor with surface roughness for high temperature substrate pro...
- Publication number 20060060145
- Publication date Mar 23, 2006
- Jannes Remco Van Den Berg
- C30 - CRYSTAL GROWTH
Information Patent Application
Support system for a treatment apparatus
- Publication number 20060054091
- Publication date Mar 16, 2006
- Natale Speciale
- C30 - CRYSTAL GROWTH
Information Patent Application
Substrate holder for a vapour deposition system
- Publication number 20060049044
- Publication date Mar 9, 2006
- JDS Uniphase Corporation
- Richard I. Seddon
- C30 - CRYSTAL GROWTH
Information Patent Application
High purity silicon carbide articles and methods
- Publication number 20050148455
- Publication date Jul 7, 2005
- Saint-Gobain Ceramics & Plastics, Inc.
- Yeshwanth Narendar
- C30 - CRYSTAL GROWTH
Information Patent Application
Wafer carrier for growing GaN wafers
- Publication number 20050126496
- Publication date Jun 16, 2005
- Vadim Boguslavskiy
- C30 - CRYSTAL GROWTH
Information Patent Application
Susceptor and deposition apparatus including the same
- Publication number 20050016470
- Publication date Jan 27, 2005
- Tae-Soo Kang
- C30 - CRYSTAL GROWTH
Information Patent Application
Electromagnetic rotation of platter
- Publication number 20050000452
- Publication date Jan 6, 2005
- Olof Claes Erik Kordina
- C30 - CRYSTAL GROWTH

Substrate holders or susceptors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus for producing SiC epitaxial wafer and method for producin...

Substrate treating apparatus

Rapid conductive cooling using a secondary process plane

Rapid conductive cooling using a secondary process plane

Method and jig for holding silicon wafer

Self aligning non contact shadow ring process kit

Rapid conductive cooling using a secondary process plane

Silocon wafer supporting method, heat treatment jig and heat-treate...

Silicon wafer and process for the heat treatment of a silicon wafer

Rapid conductive cooling using a secondary process plane

Substrate holder for a vapour deposition system

Holder made from quartz glass for the processing of semiconductor w...

Detachable edge ring for thermal processing support towers

Silicon shelf towers

Susceptor system

High purification method of jig for semiconductor heat treatment

High purity silicon carbide wafer boats

Susceptor system

Susceptor

Support system for a treatment apparatus

Rapid conductive cooling using a secondary process plane

Coated semiconductor wafer, and process and apparatus for producing...

Wafer supporter

Wafer carrier for growing GaN wafers

Conductor treating single-wafer type treating device and method for...

Silicon single crystal wafer process apparatus, silicon single crys...

Heating chamber and method of heating a wafer

Semiconductor wafer boat for a vertical furnace

Quartz glass body having improved resistance against plasma corrosi...

Electromagnetically levitated substrate support

Patents Applicationslast 30 patents

SUBSTRATE TREATING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE

METHOD AND JIG FOR HOLDING SILICON WAFER

RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE

RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE

SILOCON WAFER SUPPORTING METHOD, HEAT TREATMENT JIG AND HEAT-TREATE...

Method and jig for holding silicon wafer

RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE

RAPID CONDUCTIVE COOLING USING A SECONDARY PROCESS PLANE

SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PRO...

SELF ALIGNING NON CONTACT SHADOW RING PROCESS KIT

Holder Made From Quartz Glass for the Processing of Semiconductor W...

Susceptor

High purification method of jig for semiconductor heat treatment

Detachable edge ring for thermal processing support towers

Silicon shelf towers

WAFER HEATER AND WAFER CHUCK INCLUDING THE SAME

Silicon wafer and process for the heat treatment of a silicon wafer

Susceptor system

Susceptor system

Coated semiconductor wafer, and process and apparatus for producing...

Susceptor

Susceptor with surface roughness for high temperature substrate pro...

Support system for a treatment apparatus

Substrate holder for a vapour deposition system

High purity silicon carbide articles and methods

Wafer carrier for growing GaN wafers

Susceptor and deposition apparatus including the same

Electromagnetic rotation of platter