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  • CPC
  • C23C14/50
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/50Substrate holders
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
    • Publication number 20240136162
    • Publication date Apr 25, 2024
    • LG Display Co., Ltd.
    • Young Gon KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS
    • Publication number 20240136156
    • Publication date Apr 25, 2024
    • Evatec AG
    • Stephan VOSER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    COATER CONDITIONING MODE
    • Publication number 20240124970
    • Publication date Apr 18, 2024
    • BÜHLER ALZENAU GMBH
    • Simon LIU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
    • Publication number 20240130210
    • Publication date Apr 18, 2024
    • Applied Materials, Inc.
    • Yeishin Tung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240120182
    • Publication date Apr 11, 2024
    • TOKYO ELECTRON LIMITED
    • Yusuke KIKUCHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20240117486
    • Publication date Apr 11, 2024
    • TOKYO ELECTRON LIMITED
    • Yasunobu SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20240120233
    • Publication date Apr 11, 2024
    • Ulvac, Inc.
    • Tetsushi Fujinaga
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LOADLOCK ASSEMBLY INCLUDING CHILLER UNIT
    • Publication number 20240110282
    • Publication date Apr 4, 2024
    • ASM IP HOLDING, B.V.
    • Hideki Yoshida
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTROSTATIC CHUCK HEATER AND MANUFACTURING METHOD THEREFOR
    • Publication number 20240112940
    • Publication date Apr 4, 2024
    • MICO CERAMICS LTD.
    • Jin Young CHOI
    • B28 - WORKING CEMENT, CLAY, OR STONE
  • Information Patent Application

    PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER
    • Publication number 20240102153
    • Publication date Mar 28, 2024
    • Fuhong ZHANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...
    • Publication number 20240102155
    • Publication date Mar 28, 2024
    • Solayer GmbH
    • Jens HERGENRÖTHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION DEVICE
    • Publication number 20240093347
    • Publication date Mar 21, 2024
    • SAMSUNG DISPLAY CO., LTD.
    • Jung Hyun AHN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber
    • Publication number 20240093355
    • Publication date Mar 21, 2024
    • Applied Materials, Inc.
    • Zhiyong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE ROTATING APPARATUS
    • Publication number 20240093358
    • Publication date Mar 21, 2024
    • SANTEC CORPORATION
    • Noboru UEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR PROCESSING TOOL
    • Publication number 20240084454
    • Publication date Mar 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Tsun LIU
    • B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
  • Information Patent Application

    MOLECULAR BEAM EPITAXY THIN FILM GROWTH APPARATUS
    • Publication number 20240084442
    • Publication date Mar 14, 2024
    • University of Ulsan Foundation for Industry Cooperation
    • Eun Jung PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    System and Method for Direct Patterning Using a Compensated Shadow...
    • Publication number 20240081136
    • Publication date Mar 7, 2024
    • EMAGIN CORPORATION
    • Ilyas I. KHAYRULLIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS
    • Publication number 20240068087
    • Publication date Feb 29, 2024
    • Beijing NAURA Microelectronics Equipment Co., Ltd.
    • Shubo WU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR IMPROVING RESISTANCE OF CERAMIC PTC THERMAL ELEMENT TO R...
    • Publication number 20240068088
    • Publication date Feb 29, 2024
    • JIANGSU NEW LINZHI ELECTRONIC TECHNOLOGY CO., LTD.
    • QIUYUN FU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition Apparatus and Methods for Sequential Coating
    • Publication number 20240068102
    • Publication date Feb 29, 2024
    • RTX Corporation
    • James W. Neal
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT APPARATUS AND SURFACE TREATMENT METHOD
    • Publication number 20240060171
    • Publication date Feb 22, 2024
    • SHIBAURA MACHINE CO., LTD.
    • Kazuhiro FUKADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
    • Publication number 20240060170
    • Publication date Feb 22, 2024
    • TOKYO ELECTRON LIMITED
    • MANABU HONMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20240060172
    • Publication date Feb 22, 2024
    • SAMSUNG DISPLAY CO., LTD.
    • Jun Hyeuk KO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUI...
    • Publication number 20240060182
    • Publication date Feb 22, 2024
    • SKY TECH INC.
    • JING-CHENG LIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...
    • Publication number 20240063051
    • Publication date Feb 22, 2024
    • Evatec AG
    • Florian Hagmann
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition Apparatus and Methods
    • Publication number 20240052476
    • Publication date Feb 15, 2024
    • RTX Corporation
    • Brian T. Hazel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS
    • Publication number 20240052477
    • Publication date Feb 15, 2024
    • Canon ANELVA Corporation
    • Masahiro ATSUMI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD OF PRODUCING MONOCRYSTALLINE LAYERS ON A SUBSTRATE
    • Publication number 20240052520
    • Publication date Feb 15, 2024
    • KISELKARBID I STOCKHOLM AB
    • Johan Peter EKMAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND DRIVING METHOD THEREOF
    • Publication number 20240039431
    • Publication date Feb 1, 2024
    • SAMSUNG DISPLAY CO., LTD.
    • Jun Hyeuk KO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DIAPHRAGM ASSEMBLY FOR DELIMITING THE COATING REGION OF A SPUTTER S...
    • Publication number 20240035142
    • Publication date Feb 1, 2024
    • Solayer GmbH
    • Dzmitry HRUNSKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...