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  • CPC
  • C23C14/50
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/50Substrate holders
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20240392430
    • Publication date Nov 28, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • B08 - CLEANING
  • Information Patent Application

    WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD
    • Publication number 20240395512
    • Publication date Nov 28, 2024
    • Disco Corporation
    • Kazuma SEKIYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR PROCESSING TOOL
    • Publication number 20240384416
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Tsun LIU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPER...
    • Publication number 20240379400
    • Publication date Nov 14, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Ting-Jung Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION
    • Publication number 20240376591
    • Publication date Nov 14, 2024
    • Applied Materials, Inc.
    • Sathiyamurthi GOVINDASAMY
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DYNAMIC SEAL SYSTEM FOR A VACUUM PROCESSING SYSTEM
    • Publication number 20240368752
    • Publication date Nov 7, 2024
    • Plasma-Therm NES LLC
    • Sarpangala Hariharakeshava Hegde
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS
    • Publication number 20240360543
    • Publication date Oct 31, 2024
    • TOKYO ELECTRON LIMITED
    • Masato SHINADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLANETARY ROTATION SYSTEM WITH LUNAR ROTATION
    • Publication number 20240337010
    • Publication date Oct 10, 2024
    • Vacuum Innovations LLC
    • James OLIVER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WI...
    • Publication number 20240337009
    • Publication date Oct 10, 2024
    • Virginia Commonwealth University
    • Santiago Vargas GIRALDO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VAPOR DEPOSITION DEVICE CAPABLE OF RECIPROCATING ROTATION AND LIFTING
    • Publication number 20240327987
    • Publication date Oct 3, 2024
    • BETONE TECHNOLOGY SHANGHAI, INC.
    • Weicong SONG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ISOLATED VOLUME SEALS AND METHOD OF FORMING AN ISOLATED VOLUME WITH...
    • Publication number 20240332046
    • Publication date Oct 3, 2024
    • Applied Materials, Inc.
    • Kirankumar Neelasandra SAVANDAIAH
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR A THERMAL EVAPORATION SYSTEM AND METHOD OF COATING A...
    • Publication number 20240318301
    • Publication date Sep 26, 2024
    • Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
    • Wolfgang Braun
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SURFACE TREATMENT APPARATUS
    • Publication number 20240318303
    • Publication date Sep 26, 2024
    • SHIBAURA MACHINE CO., LTD.
    • Kazuhiro FUKADA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20240321563
    • Publication date Sep 26, 2024
    • SHIBAURA MECHATRONICS CORPORATION
    • Shigeki MATSUNAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Brake Disk and Method of Making Same
    • Publication number 20240309921
    • Publication date Sep 19, 2024
    • Tech M3, Inc.
    • Nathan K. Meckel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM I...
    • Publication number 20240287668
    • Publication date Aug 29, 2024
    • Samsung Electronics Co., Ltd.
    • Se Jun PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
    • Publication number 20240279792
    • Publication date Aug 22, 2024
    • SCREEN Holdings Co., Ltd.
    • Hirofumi TONAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    EVAPORATION COATING APPARATUS
    • Publication number 20240271269
    • Publication date Aug 15, 2024
    • WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    • Ruiting HE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION APPARATUS AND DEPOSITION METHOD
    • Publication number 20240263298
    • Publication date Aug 8, 2024
    • InnoLux Corporation
    • Cheng-Wei LIU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MODULE FOR FLIPPING SUBSTRATES IN VACUUM
    • Publication number 20240263299
    • Publication date Aug 8, 2024
    • Applied Materials, Inc.
    • Karunakaran NATARAJ
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEVICE AND METHOD FOR PRODUCING THIN-FILM CATALYST
    • Publication number 20240261773
    • Publication date Aug 8, 2024
    • SUZHOU TAONE SINCERE NANOMATERIAL TECHNOLOGY CO., LTD.
    • Ruoqi QIAN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS FLOW ACCELERATOR TO PREVENT BUILDUP OF PROCESSING BYPRODUCT IN...
    • Publication number 20240258123
    • Publication date Aug 1, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Sheng-chun YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLADDING TUBES COATING APPARATUS
    • Publication number 20240254615
    • Publication date Aug 1, 2024
    • Korea Atomic Energy Research Institute
    • Hyun Gil KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING
    • Publication number 20240258087
    • Publication date Aug 1, 2024
    • INTEVAC, INC.
    • Samuel D. Harkness
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION
    • Publication number 20240247365
    • Publication date Jul 25, 2024
    • Applied Materials, Inc.
    • Harish V. PENMETHSA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER
    • Publication number 20240242947
    • Publication date Jul 18, 2024
    • Applied Materials, Inc.
    • David GUNTHER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD SYSTEM AND COLLIMATOR
    • Publication number 20240240306
    • Publication date Jul 18, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Lin Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CERAMIC SUSCEPTOR
    • Publication number 20240243002
    • Publication date Jul 18, 2024
    • NGK Insulators, Ltd.
    • Shingo AMANO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME
    • Publication number 20240234109
    • Publication date Jul 11, 2024
    • LG Display Co., Ltd.
    • Young Gon KIM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Programmable Electrostatic Chuck to Enhance Aluminum Film Morphology
    • Publication number 20240222093
    • Publication date Jul 4, 2024
    • Applied Materials, Inc.
    • Yaoying ZHONG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...