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H01J2237/2067
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2067
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Patents Grants
last 30 patents
Information
Patent Grant
Device with at least one adjustable sample holder and method of cha...
Patent number
11,476,080
Issue date
Oct 18, 2022
TESCAN Brno, s.r.o.
Pavel Dolezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of analyzing surface modification of a specimen in a charged...
Patent number
10,811,223
Issue date
Oct 20, 2020
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for using multimodal imaging to determine struc...
Patent number
10,707,052
Issue date
Jul 7, 2020
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced FIB-SEM systems for large-volume 3D imaging
Patent number
10,600,615
Issue date
Mar 24, 2020
Howard Hughes Medical Institute
C. Shan Xu
G01 - MEASURING TESTING
Information
Patent Grant
Systems and method for using multimodal imaging to determine struct...
Patent number
10,446,368
Issue date
Oct 15, 2019
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for acquiring image and ion beam apparatus
Patent number
10,276,343
Issue date
Apr 30, 2019
Tomokazu Kozakai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of modifying a sample surface layer from a microscopic sample
Patent number
10,105,734
Issue date
Oct 23, 2018
FEI Company
Tomas Vystavel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged particle beam apparatus
Patent number
9,318,303
Issue date
Apr 19, 2016
Hitachi High-Tech Science Corporation
Xin Man
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam microscope
Patent number
9,261,360
Issue date
Feb 16, 2016
Hitachi High-Technologies Corporation
Nobuhiro Okai
G01 - MEASURING TESTING
Information
Patent Grant
Producing images of a specimen
Patent number
8,957,371
Issue date
Feb 17, 2015
Carl Zeiss Microscopy GmbH
Elke Haustein
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and device for ion beam processing of surfaces
Patent number
8,790,498
Issue date
Jul 29, 2014
Roth & Rau AG
Joachim Mai
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of preparing a transmission electron microscope sample and a...
Patent number
8,191,168
Issue date
May 29, 2012
SII NanoTechnology Inc.
Xin Man
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Sample decontamination
Patent number
8,013,300
Issue date
Sep 6, 2011
Carl Zeiss NTS, LLC
Lewis A. Stern
G01 - MEASURING TESTING
Information
Patent Grant
MEMS nanoindenter
Patent number
7,654,159
Issue date
Feb 2, 2010
Nanofactory Instruments AB
Peter Enoksson
G01 - MEASURING TESTING
Information
Patent Grant
Systems configured to reduce distortion of a resist during a metrol...
Patent number
7,304,302
Issue date
Dec 4, 2007
KLA-Tencor Technologies Corp.
Peter Nunan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of stabilizing measurement of ArF resist in CD-SEM
Patent number
7,015,468
Issue date
Mar 21, 2006
KLA-Tencor Technologies Corporation
Amir Azordegan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device inspecting apparatus
Patent number
6,714,289
Issue date
Mar 30, 2004
Suruga Seiki Co., Ltd.
Koshi Haraguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focused particle beam systems and methods using a tilt column
Patent number
6,497,194
Issue date
Dec 24, 2002
FEI Company
Charles J. Libby
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process and device for ion thinning in a high resolution transmissi...
Patent number
6,218,663
Issue date
Apr 17, 2001
NMI Naturwissenschaftliches und Medizinisches
Wilfried Nisch
G01 - MEASURING TESTING
Information
Patent Grant
Focused particle beam systems and methods using a tilt column
Patent number
6,039,000
Issue date
Mar 21, 2000
Micrion Corporation
Charles J. Libby
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam preparation device for electron microscopy
Patent number
5,986,264
Issue date
Nov 16, 1999
Bal-Tec A.G.
Wolfgang Grunewald
G01 - MEASURING TESTING
Information
Patent Grant
Focused charged beam apparatus, and its processing and observation...
Patent number
5,525,806
Issue date
Jun 11, 1996
Seiko Instruments Inc.
Koji Iwasaki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Method and System for Sample Preparation
Publication number
20240426717
Publication date
Dec 26, 2024
FEI Company
Jakub Kuba
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF PROCESSING ION BEAM BASED ON OPTICAL MICROSCOPY IMAGING
Publication number
20240112880
Publication date
Apr 4, 2024
Institute of Biophysics, Chinese Academy of Sciences
Tao XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device with at Least One Adjustable Sample Holder and Method of Cha...
Publication number
20210384005
Publication date
Dec 9, 2021
TESCAN Brno, s.r.o.
Pavel Dolezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR USING MULTIMODAL IMAGING TO DETERMINE STRUC...
Publication number
20200020507
Publication date
Jan 16, 2020
Atomnaut Inc.
Peter V. LIDDICOAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR USING MULTIMODAL IMAGING TO DETERMINE STRUC...
Publication number
20190074160
Publication date
Mar 7, 2019
Atomnaut Inc.
Peter V. Liddicoat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF ANALYZING SURFACE MODIFICATION OF A SPECIMEN IN A CHARGED...
Publication number
20190051492
Publication date
Feb 14, 2019
FEI Company
Pavel Potocek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PREPARING AND ANALYZING AN OBJECT AS WELL AS PARTICLE BE...
Publication number
20150214004
Publication date
Jul 30, 2015
CARL ZEISS MICROSCOPY GMBH
Giuseppe Pavia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150060695
Publication date
Mar 5, 2015
HITACHI HIGH-TECH SCIENCE CORPORATION
Xin MAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PREPARING AND IMAGING A LAMELLA IN A PARTICLE-OPTICAL APP...
Publication number
20140007307
Publication date
Jan 2, 2014
Brian Roberts Routh
B82 - NANO-TECHNOLOGY
Information
Patent Application
SAMPLE OBSERVATION APPARATUS AND METHOD OF MARKING
Publication number
20130134308
Publication date
May 30, 2013
Hitachi High-Technologies Corporation
Fumiaki ENDO
G01 - MEASURING TESTING
Information
Patent Application
Charged Particle Beam Microscope
Publication number
20120327213
Publication date
Dec 27, 2012
Hitachi High-Technologies Corporation
Nobuhiro Okai
G01 - MEASURING TESTING
Information
Patent Application
Producing images of a specimen
Publication number
20110292385
Publication date
Dec 1, 2011
Elke Haustein
G01 - MEASURING TESTING
Information
Patent Application
SAMPLE DECONTAMINATION
Publication number
20090314939
Publication date
Dec 24, 2009
Carl Zeiss SMT Inc.
Lewis A. Stern
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF PREPARING A TRANSMISSION ELECTRON MICROSCOPE SAMPLE AND A...
Publication number
20090119807
Publication date
May 7, 2009
Xin Man
G01 - MEASURING TESTING
Information
Patent Application
Mems Nanoindenter
Publication number
20080276727
Publication date
Nov 13, 2008
NANOFACTORY INSTRUMENTS AB
Peter Enoksson
G01 - MEASURING TESTING
Information
Patent Application
Method and Device for Ion Beam Processing of Surfaces
Publication number
20080110745
Publication date
May 15, 2008
ROTH & RAU AG
Joachim Mai
B82 - NANO-TECHNOLOGY
Information
Patent Application
Charged particle beam system and its specimen holder
Publication number
20080093565
Publication date
Apr 24, 2008
Hitachi High-Technologies Corporation
Toshie Yaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN
Publication number
20070194230
Publication date
Aug 23, 2007
Teruo KOHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE INSPECTING APPARATUS
Publication number
20040016888
Publication date
Jan 29, 2004
SURUGA SEIKI CO., LTD.
Koshi Haraguchi
H01 - BASIC ELECTRIC ELEMENTS