INSPECTION INSTRUMENT OF A MAGNETIC SPECIMEN

Abstract

An inspection technique capable of observing a magnetic domain configuration which is formed on a magnetic specimen surface with a higher resolution and at a higher speed as never before. The inspection technique includes an SPLEEM observation unit including a spin polarized electron source, an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure, a stage on which the magnetic specimen is mounted, an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen; and cleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit, wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the reflected electron beam.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

These and other objects and advantages of this invention will become more fully apparent from the following detailed description taken with the accompanying drawings in which:

FIG. 1 is a diagram showing the outline configuration of an SPLEEM that conducts a magnetic domain observation;

FIG. 2 is a diagram for explaining the configuration of an embodiment of the present invention;

FIG. 3 is a diagram for explaining the configuration of another embodiment of the present invention;

FIG. 4 is a diagram for explaining the configuration of still another embodiment of the present invention;

FIG. 5 is a diagram for explaining the configuration of still another embodiment of the present invention;

FIG. 6 is a diagram for explaining an image data processing system according to an embodiment of the present invention;

FIG. 7 is a diagram for explaining an example of a flowchart of an SPLEEM inspection system according to the present invention since a specimen is set until an image is obtained;

FIG. 8 is a diagram for explaining another example of a flowchart of an SPLEEM inspection system according to the present invention since a specimen is set until an image is obtained;

FIG. 9A is a diagram for explaining an example of the definition of a parameter of a data obtaining format in the SPLEEM inspection system of the present invention;

FIG. 9B is a diagram for explaining an example (B) of the data obtaining format;

FIG. 10 is a diagram showing an example of a data analyzing method according to the present invention;

FIG. 11 is a diagram showing another example of a data analyzing method according to the present invention; and

FIG. 12 is a diagram for explaining an example of a flowchart of from the image obtainment till evaluation and analysis.

Claims

1. A magnetic specimen inspection instrument, comprising: an SPLEEM observation unit including: a spin polarized electron source; an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure; a stage on which the magnetic specimen is mounted; an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen; andcleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit,wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the reflected electron beam.

2. A magnetic specimen inspection instrument, comprising: an SPLEEM observation unit including: a spin polarized electron source; an irradiation optics that projects a spin polarized electron beam that is emitted from the spin polarized electron source to a magnetic specimen having a magnetic domain structure; a stage on which the magnetic specimen is mounted; an imaging optics that focuses and detects the electron beam that is reflected from the magnetic specimen;cleaning means for cleaning the surface of the magnetic specimen to transfer the magnetic specimen to the SPLEEM observation unit; andan image processing unit that analyzes the image data that is obtained from the imaging optics,wherein the magnetic domain structure of the magnetic specimen surface is inspected on the basis of the image data.

3. The magnetic specimen inspection instrument according to claim 1 or 2, wherein the cleaning means includes an ion milling mechanism that cleans the magnetic specimen surface; and a plasma ashing mechanism that removes organics of the magnetic specimen surface.

4. The magnetic specimen inspection instrument according to claim 3, further comprising: a first vacuum chamber that receives the SPLEEM observation unit therein;a second vacuum chamber that receives the ion milling mechanism therein; anda third vacuum chamber that receives the plasma ashing mechanism therein,wherein the first vacuum chamber, the second vacuum chamber, and the third vacuum chamber are connected to each other through gate values.

5. The magnetic specimen inspection instrument according to claim 4, further comprising: a fourth vacuum chamber for introduction of the magnetic specimen, Wherein the fourth vacuum chamber is connected to the third vacuum chamber through the gate value.

6. The magnetic specimen inspection instrument according to any one of claims 1 to 5, wherein the stage means conducts the rotary motion and the linear motion in the radial direction, or is activated in the lateral and vertical directions.

7. The magnetic specimen inspection instrument according to claim 1 or 2, wherein the cleaning means has an ion milling mechanism that cleans the magnetic specimen surface.

8. The magnetic specimen inspection instrument according to claim 7, further comprising: a first vacuum chamber that receives the SPLEEM observation unit therein; anda second vacuum chamber that receives the ion milling mechanism therein,wherein the first vacuum chamber and the second vacuum chamber are connected to each other through a gate value.

9. The magnetic specimen inspection instrument according to claim 8, further comprising: a fourth vacuum chamber for introduction of the magnetic specimen,wherein the fourth vacuum chamber is connected to the second vacuum chamber through a gate valve.

10. The magnetic specimen inspection instrument according to any one of claims 7 to 9, wherein the stage means conducts the rotary motion and the linear motion in the radial direction, or is actuated in the vertical and lateral directions.

11. The magnetic specimen inspection instrument according to claim 1 or 2, wherein the cleaning means includes an ion milling mechanism that cleans the magnetic specimen surface, and wherein the ion milling mechanism is located within the first vacuum chamber that receives the SPLEEM observation unit therein.

12. The magnetic specimen inspection instrument according to claim 11, further comprising a fourth vacuum chamber for introduction of the magnetic specimen, wherein the fourth vacuum chamber is connected to the first vacuum chamber through a gate valve.

13. The magnetic specimen inspection instrument according to claim 11 or 12, wherein the stage means conducts the rotary motion and the linear motion in the radial direction, or is actuated in the vertical and lateral directions.

14. The magnetic specimen inspection instrument according to claim 2, wherein the image processing unit subjects the magnetic domain image that is obtained by the SPLEEM observation unit to a Fourier transformation process in the tracking direction to inspect the magnetic domain structure.

15. The magnetic specimen inspection instrument according to claim 14, wherein the image processing unit subjects the obtained magnetic domain structure to a Fourier transformation in the tracking direction, and thereafter analyzes the amplitude of the frequency component of the recording bit that is formed on the magnetic disk surface to inspect the magnetic domain structure according to the magnitude of the amplitude and the broadening of the track in the widthwise direction.

16. The magnetic specimen inspection instrument according to claim 14, wherein the image processing unit subjects the obtained magnetic domain structure to a Fourier transformation in the circumferential direction, and thereafter analyzes the amplitude of the frequency component of the recording bit that is formed on the magnetic disk surface and inspect the magnitude of the amplitude of the respective frequency components to inspect the magnetic domain structure.